Adsorption type pipe membrane chemical filter screen device

Abstract

The utility model relates to an adsorption type pipe membrane chemical filter screen device, which is mainly used for treating micromolecular pollutants (AMC) in the air, and adopts the combined design of a frame body and at least one group of membrane blocks, the group of membrane blocks are arranged in the frame body, and the group of membrane blocks are formed by arranging at least more than two membrane blocks; a flow channel is arranged between the sheet membrane blocks, each sheet membrane block is composed of a plurality of tubular membrane adsorption materials, the tubular membrane adsorption materials are provided with porous channels, the porous channels are communicated with the flow channel, airflow of micromolecular pollutants (AMC) in the air can enter the porous channels of the tubular membrane adsorption materials through the flow channel, and the flow channel is communicated with the tubular membrane adsorption materials. And the liquid flows along the porous channel direction of the tubular membrane adsorption material, so that the adsorption capacity of the chemical filter screen is improved, the performance efficiency, the pressure loss and the service life can be considered, and meanwhile, the requirement specification of a nanometer processing factory of the advanced semiconductor industry is met.

Description

Technical Field

[0001] This utility model relates to an adsorption-type tubular membrane chemical filter device, particularly one that balances performance efficiency, pressure loss, and service life while meeting the specifications required by advanced semiconductor industry nanoprocess plants, and is suitable for clean rooms, dust-free rooms, or similar indoor spaces in the semiconductor, optoelectronic, or chemical-related industries. Background Technology

[0002] As semiconductor manufacturing processes become increasingly precise, reaching 7nm, 5nm, and 3nm, and with increasingly smaller wire diameters, the cleanliness requirements for cleanrooms in the yellow light area are becoming more stringent. In addition to particulate contaminants, the cleanliness of gaseous contaminants is also crucial, especially organic micro-contaminants in AMC (Airborne Molecular Contamination). How to effectively control these contaminants at the ppb level to achieve the effect of purifying indoor air and reducing product defect rates can no longer rely on traditional filters such as HEPA or ULPA.

[0003] Semiconductor fabs (fabs) are complex, integrated process structures requiring cleanroom air circulation and control. For management and energy efficiency, most of the air conditioning within the fab is recirculated; however, this leads to an increasing amount of airborne molecular contaminants generated internally. These contaminants originate from chemicals, materials, equipment, and human personnel. Approximately 20% of the fresh air from outside the fab carries potential environmental airborne molecular contaminants. For decades, cleanrooms have focused on small particle control, but modern microelectronics requires stringent control of gaseous, airborne molecular contaminants (AMCs) as they impact products, processes, and equipment. Without AMC chemical filters, advanced semiconductor processes cannot achieve high yields in manufacturing wafers with linewidths below 14nm.

[0004] The problems with commercially available AMC chemical filters currently include: 1. They use granular adsorbent material, primarily composed of activated carbon, zeolite, or alumina particles. Most applications use disposable materials, resulting in excessive waste after saturation. 2. Some adsorbent in these granular materials is regenerated, but it becomes ineffective after about 2-3 regenerations, or its performance significantly decreases after each regeneration, requiring replenishment. 3. The activated carbon in these granular adsorbents is applied in a stacked manner within the filter media panel. The adsorbent particles are perpendicular to the airflow direction, causing a large pressure drop (i.e., increased air conditioning power consumption) and high air resistance. This affects the filtration performance capacity of the fan. Generally, chemical filters must control the pressure drop to 80-120 Pa to fit the fan filter unit (FFU), which significantly limits the filling height and amount of granular adsorbent. 4. These granular adsorbents are also prone to weathering into dust and deposition. Therefore, after the airflow passes through a chemical filter, a HEPA or ULPA filter needs to be installed to avoid dust particles from damaging the performance of the tool equipment. For example, if EUV contains particles, it will affect the absorption or refraction of light, resulting in defects in the chip performance.

[0005] Therefore, in view of the above-mentioned shortcomings, the creator hopes to propose an adsorption-type tubular membrane chemical filter device that is different from the traditional AMC chemical filter, so that users can easily operate and assemble it. This is the creator's motivation for developing this device, which is to provide convenience to users through careful research, design and assembly. Utility Model Content

[0006] The main objective of this invention is to provide an adsorption-type tubular membrane chemical filter device, primarily used to treat airborne particulate pollutants (AMCs). It employs a design combining a frame and at least one set of membrane blocks. The membrane blocks are housed within the frame and consist of at least two membrane blocks arranged together, with a flow channel between each block. Each membrane block is composed of multiple tubular membrane adsorbents, each with porous channels that communicate with the flow channel. This allows the airflow of AMCs to enter the porous channels of the tubular membrane adsorbents and flow along these channels, thereby increasing the adsorption capacity of the chemical filter. This design balances performance efficiency, pressure loss, and service life, while also meeting the specifications required by advanced semiconductor nanofabrication plants, thus enhancing overall practicality.

[0007] Another objective of this invention is to provide an adsorption-type tubular membrane chemical filter device, wherein the tubular membrane adsorbent material is made of at least one polymer and at least one powdered adsorbent, the pore channel diameter of the tubular membrane adsorbent material is 0.5mm~1.5mm, the length of the tubular membrane adsorbent material is more than 50 times the pore channel diameter, and the surface area of ​​the tubular membrane adsorbent material is greater than 500 m². 2 / m 3 The tubular membrane adsorbent material and the pore channel are any shape, such as circular, elliptical, triangular, quadrilateral, pentagonal, hexagonal, or polygonal. Multiple micron-sized pores are formed on the membrane wall of the pore channel. For most gas molecules, the diameter is about 0.1~1nm. These pores are large enough to form a large number of micron-sized pores, resulting in a large surface area that allows gas molecules to diffuse freely within them, resulting in fast mass transfer. Furthermore, the tubular membrane adsorbent material can withstand high temperatures of 150~220℃. Therefore, the tubular membrane adsorbent material can be used for high-temperature desorption and is reusable, which is in line with the spirit of environmental protection and reuse, thereby increasing the overall usability.

[0008] Another objective of this utility model is to provide an adsorption-type tubular membrane chemical filter device. The frame has a first side, a second side, a third side, and a fourth side. The upper edge and the lower edge of the first side each extend a protrusion, and the protrusions extending from the upper edge and the lower edge of the first side abut against the corresponding membrane block to form a first side flow channel. Furthermore, the protrusions extending from the upper edge and the protrusions extending from the lower edge of the first side each have an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape. Furthermore, each of the upper and lower edges of the second side extends a protrusion, which abuts against the corresponding membrane block to form a second side flow channel. Each of the protrusions extending from the upper and lower edges of the second side has at least one circular, at least one elliptical, at least one triangular, at least one quadrilateral, or at least one polygonal opening. The third and fourth sides of the frame are connected to the baffle, allowing airflow of airborne particulate pollutants (AMCs) to enter the porous channels of the tubular membrane adsorbent material along the flow channel, and then flow towards the first and second side flow channels respectively, rather than directly through the radial direction of the membrane wall thickness of the tubular membrane adsorbent material. The surface velocity (in the concept of empty tower velocity) of the airflow surface perpendicular to the airflow direction is less than 0.5 m / s, resulting in an air pressure difference of <100 Pa for each membrane block, thereby increasing overall flowability.

[0009] To further understand the features, characteristics, and technical contents of this utility model, please refer to the following detailed description and accompanying drawings. The drawings are provided for reference and illustration only and are not intended to limit this utility model. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure consisting of two membrane blocks arranged together.

[0011] Figure 2 This is an enlarged schematic diagram of the tubular membrane adsorption material inside the sheet membrane block;

[0012] Figure 3 This is a schematic diagram of the structure consisting of three membrane blocks arranged together.

[0013] Figure 4 This is a schematic diagram of the structure of four membrane blocks and the direction of airflow.

[0014] Figure 5 This is a schematic diagram of the structure where four membrane blocks are combined with a frame.

[0015] Explanation of reference numerals in the attached figures:

[0016] 10. Frame

[0017] 11. First side

[0018] 111. Protrusion

[0019] 112. First side flow channel

[0020] 12. Second side

[0021] 121. Protrusion

[0022] 122. Second side flow channel

[0023] 13. The third side

[0024] 14. Fourth side

[0025] 20. Membrane Block

[0026] 21. Sheet / Piece

[0027] 22. Sheet / Piece

[0028] 23. Flow channel

[0029] 30. Tubular membrane adsorption material

[0030] 31. Hole Channel

[0031] 40. Adhesive

[0032] 50. Baffle

[0033] 60. Membrane Block

[0034] 61. The first membrane block

[0035] 62. The second membrane piece

[0036] 63. The third membrane piece

[0037] 64. First Midstream Channel

[0038] 65. Second Midstream Channel

[0039] 71. First middle baffle

[0040] 72. Second middle baffle

[0041] 80. Membrane Block

[0042] 81. The first membrane block

[0043] 82. The second membrane piece

[0044] 83. The third membrane piece

[0045] 84. The fourth membrane piece

[0046] 85. First Midstream Channel

[0047] 86. Second Midstream Channel

[0048] 87. The Third Midstream Channel

[0049] 91. First middle baffle

[0050] 92. Second middle baffle

[0051] 93. Third middle baffle Detailed Implementation

[0052] Please refer to Figures 1 to 5, which are schematic diagrams of embodiments of the present invention. The preferred embodiment of the adsorption-type tubular membrane chemical filter device of the present invention is used in clean rooms, dust-free rooms or similar indoor spaces in the semiconductor industry, optoelectronic industry or chemical-related industries, and can take into account performance efficiency, pressure loss and service life, while meeting the requirements of advanced semiconductor industry nanoscale process plants.

[0053] The adsorption-type tubular membrane chemical filter device of this utility model mainly includes a frame 10 and at least one set of membrane blocks 20 (e.g., Figures 1 to 5As shown), it is used to treat airborne particulate pollutants (AMCs), which include volatile organic compounds (VOCs), alkaline gases (BASEs), acidic gases (ACIDs), etc. Especially in high-tech (such as semiconductor) manufacturing plants, in order to manage and save energy, the air in the air conditioning in the plant is recycled. The plant will generate particulate pollutants (AMCs) from production equipment (machines), production materials (wafers), chemical raw materials, operators, etc. In addition to the particulate pollutants (AMCs) generated inside the plant, the plant will also contain fresh air supplied from outside the plant, which also contains potential particulate pollutants (AMCs) from the ambient air.

[0054] The main feature of this invention is that at least one set of membrane blocks 20 is provided inside the frame 10. This set of membrane blocks 20 is composed of at least two or more membrane blocks 21 and 22 arranged together (e.g., Figure 1 As shown), the frame 10 is made of metal (such as iron, stainless steel, etc.), and the membrane blocks 21 and 22 are composed of multiple tubular membrane adsorbents 30, with at least one adhesive 40 (such as...) between the multiple tubular membrane adsorbents 30 in each membrane block 21 and 22. Figure 2 As shown), the adhesive 40 is any one or a combination of inorganic and organic adhesives, wherein the inorganic material used in the inorganic adhesive is iron oxide, copper oxide, barium titanate, lead titanate, aluminum oxide, silicon dioxide, silica aerogel, bentonite (e.g., potassium bentonite, sodium bentonite, calcium bentonite, and aluminum bentonite), kaolin (e.g., Al2O3·2SiO2·2H2O), hyposite (e.g., 20% Al2O3·70% SiO2·0.8% Fe2O3·2.3% K2O·1.6% Na2O), calcium silicate (e.g., Ca3SiO5, Ca3Si2O7, and CaSiO3), or magnesium silicate (e.g., Mg3Si4O). 10At least one of the following groups: (OH)2), sodium silicate (e.g., Na2SiO3 and its hydrate), anhydrous sodium sulfate, zirconium silicate (e.g., ZrSiO4), opaque zirconium (e.g., 53.89% SiO2·4.46% Al2O3·12.93% ZrO2·9.42% CaO·2.03% MgO·12.96% ZnO·3.73% K2O·0.58% Na2O), and silicon carbide. Furthermore, the organic materials used in this organic adhesive are primarily at least one of the following groups: silicone, resin, water glass, polymer materials, and epoxy resin. The multiple tubular membrane adsorbent materials 30 can be joined together by the adhesive 40, and the tubular membrane adsorbent material 30 can be any shape, such as circular, elliptical, triangular, quadrilateral, pentagonal, hexagonal or polygonal. When the multiple tubular membrane adsorbent materials 30 are arranged and joined together, they can be tightly joined together by the adhesive 40, so as to achieve the effect of convenient assembly.

[0055] Furthermore, the multiple tubular membrane adsorbent material 30 in the membrane blocks 21 and 22 is made by combining at least one polymer (not shown) with at least one powdered adsorbent (not shown), wherein the polymer is at least one of the following groups: polysulfone (PSF), polyethersulfone (PESF), polyvinylidene fluoride (PVDF), polyphenylsulfone (PPSU), polyacrylonitrile, cellulose acetate, cellulose diacetate, polyimide (PI), polyetherimide, polyamide, polyvinyl alcohol, polylactic acid, polyglycolic acid, poly(lactic-co-glycolic acid), polycaprolactone, polyvinylpyrrolidone, ethylene vinyl alcohol, polydimethylsiloxane, polytetrafluoroethylene, and cellulose acetate (CA). The powdered adsorbent is any one of zeolite powder, activated carbon powder, or resin powder, with a powder size ranging from 1µm to 20µm. The mixture of the polymer and the powdered adsorbent is dissolved in a solvent and then prepared using a phase transfer method, a wet process. Furthermore, the tubular membrane adsorbent material 30, by weight (wt%), contains at least 50 wt% of the powdered adsorbent. This results in a 20-30 times increase in service life. In advanced semiconductor manufacturing plants, for the adsorption of ppb-level volatile organic compounds (VOCs), currently commercially available chemical filters require replacement every 1-2 weeks to ensure wafer yield, which is a short replacement cycle. However, the design of the tubular membrane adsorbent material 30 and powdered adsorbent ratio allows for a higher adsorbent load with acceptable pressure loss, and a service life of 20-40 weeks or more, representing a significant improvement in replacement cycle efficiency and practicality.

[0056] Furthermore, the tubular membrane adsorbent material 30 is provided with porous channels 31 (such as...). Figure 2 As shown in the figure, the porous channel 31 extends from one end of the tubular membrane adsorbent 30 to the other end to form a channel, and the porous channel 31 is uniformly distributed on the tubular membrane adsorbent 30. The diameter of the porous channel 31 is 0.5 mm to 1.5 mm, and the length of the tubular membrane adsorbent 30 is more than 50 times the diameter of the porous channel 31. The surface area of ​​the tubular membrane adsorbent 30 is greater than 500 m². 2 / m 3Furthermore, the pore channel 31 can be any shape, such as circular, elliptical, triangular, quadrilateral, pentagonal, hexagonal, or polygonal, and multiple micron-sized pores (not shown in the figure) are formed on the membrane wall of the pore channel 31. For most gas molecules, the diameter is about 0.1~1nm. These pores are large enough to form a large number of micron-sized pores, so the surface area is also large, allowing gas molecules to diffuse freely within them, resulting in fast mass transfer. Moreover, the tubular membrane adsorbent material 30 can withstand high temperatures of 150~220℃. Therefore, the tubular membrane adsorbent material 30 can be used for high-temperature desorption and is reusable, which is in line with the spirit of environmental protection and reuse, thereby increasing the overall usability.

[0057] When the present invention provides at least one set of membrane blocks 20 within the frame 10, and the set of membrane blocks 20 is composed of at least two or more membrane blocks 21, 22 arranged together (e.g.) Figure 1 As shown), a flow channel 23 is provided between the membrane block 21 and the membrane block 22. The flow channel 23 is connected to the porous channel 31 of the tubular membrane adsorption material 30. A baffle 50 is provided on one side of the flow channel 23, which is either the top or the bottom side. It is mainly designed to match the airflow direction. The baffle 50 is made of metal (such as iron, stainless steel, etc.) or other materials (such as wood, plastic, etc.), which is not limited to the content of this utility model.

[0058] Additionally, the frame 10 has a first side 11, a second side 12, a third side 13, and a fourth side 14 (e.g., Figure 1 As shown), the upper and lower edges of the first side 11 each extend a protrusion 111, allowing the first side 11 of the frame 10 to have a space within the extended protrusion 111. The protrusions 111 extending from the upper and lower edges of the first side 11 abut against the corresponding sheet film 21 to form a first side flow channel 112. Furthermore, each of the protrusions 111 extending from the upper and lower edges of the first side 11 (not shown) has at least one opening of any one of the following shapes: circular, elliptical, triangular, quadrilateral, or polygonal (not shown). Moreover, the upper and lower edges of the second side 12 each extend a protrusion 121 (e.g., ...). Figure 1 As shown), the second side 12 of the frame 10 has a space in the extended protrusion 121, and the protrusions 121 extending from the upper edge and the lower edge of the second side 12 abut against the corresponding sheet block 22 to form a second side flow channel 122. The protrusions 121 extending from the upper edge of the second side 12 and the protrusions extending from the lower edge of the second side 12 (not shown) are each provided with at least one opening of any one of the following shapes: circular, elliptical, triangular, quadrilateral, or polygonal (not shown).

[0059] Furthermore, the third side 13 and the fourth side 14 of the frame 10 are connected to the baffle 50 (e.g. Figure 1 As shown in the figure, the connection method can be any of the following: welding, bonding, riveting, nailing, snapping, or integral molding, and is not limited to the content of this utility model. The airflow of airborne particulate pollutants (AMCs) can enter the porous channel 31 of the tubular membrane adsorbent material 30 along the flow channel 23, and then flow towards the first side flow channel 112 and the second side flow channel 122 respectively (refer to Figure 4), rather than directly passing through the radial direction of the membrane wall thickness of the tubular membrane adsorbent material 30. The surface velocity of the air passage surface perpendicular to the airflow direction (the surface velocity in the concept of empty tower velocity is less than 0.5 m / s) results in an air pressure difference of <100 Pa for each membrane block 21, 22, thereby increasing the overall flowability.

[0060] In a second embodiment of this utility model, the frame 10 is provided with at least one set of membrane blocks 60, and the set of membrane blocks 60 is composed of three sheet membrane blocks arranged together, which are respectively configured as a first sheet membrane block 61, a second sheet membrane block 62 and a third sheet membrane block 63 (e.g. Figure 3 As shown in the diagram, a first flow channel 64 is provided between the first membrane block 61 and the second membrane block 62. The first flow channel 64 communicates with the porous channel 31 of the tubular membrane adsorbent material 30, and a first baffle 71 is provided on one side of the first flow channel 64, which can be either the top or the bottom. In this embodiment, the first baffle 71 is set to the bottom, mainly to match the airflow direction. In addition, a second flow channel 65 is provided between the second membrane block 62 and the third membrane block 63. The second intermediate flow channel 65 communicates with the porous channel 31 of the tubular membrane adsorption material 30, and a second intermediate baffle 72 is provided on one side of the second intermediate flow channel 65, which can be either the top or the bottom. In this embodiment, the second intermediate baffle 72 is set on the top, mainly to match the airflow direction. The first intermediate baffle 71 and the second intermediate baffle 72 are made of metal (such as iron, stainless steel, etc.) or other materials (such as wood, plastic materials, etc.), which are not limited to the content of this utility model.

[0061] Additionally, the frame 10 has a first side 11, a second side 12, a third side 13, and a fourth side 14 (e.g., Figure 3As shown), the upper and lower edges of the first side 11 each extend a protrusion 111, allowing the first side 11 of the frame 10 to have a space within the extended protrusion 111. The protrusions 111 extending from the upper and lower edges of the first side 11 abut against the first membrane block 61 to form a first side flow channel 112. Furthermore, each of the protrusions 111 extending from the upper edge and the protrusions extending from the lower edge of the first side 11 (not shown) has at least one opening of any one of the following shapes: circular, elliptical, triangular, quadrilateral, or polygonal (not shown). Moreover, the upper and lower edges of the second side 12 each extend a protrusion 121 (e.g., ...). Figure 3 As shown), the second side 12 of the frame 10 has a space in the extended protrusion 121, and the protrusions 121 extending from the upper edge and the lower edge of the second side 12 abut against the third membrane block 63 to form a second side flow channel 122. The protrusions 121 extending from the upper edge of the second side 12 and the protrusions extending from the lower edge of the second side (not shown) are each provided with an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape or at least one polygonal shape (not shown).

[0062] Furthermore, the third side 13 and the fourth side 14 of the frame 10 are connected to the first middle baffle 71 and the second middle baffle 72 (e.g. Figure 3 (As shown), the connection method can be any one of welding, bonding, riveting, nailing, or snap-fitting, or it can be integrally formed, and is not limited to the content of this utility model. This allows the airflow of airborne particulate pollutants (AMCs) to enter the porous channel 31 of the tubular membrane adsorbent material 30 along the first flow channel 64 and the second flow channel 65, and then flow towards the first side flow channel 112 and the second side flow channel 122 respectively (see reference). Figure 4 As shown), instead of directly passing through the radial direction of the membrane wall thickness of the tubular membrane adsorbent 30, the surface velocity of the ventilation surface perpendicular to the airflow direction (the surface velocity in the concept of air tower velocity is less than 0.5 m / s) causes the air pressure difference of the first membrane block 61, the second membrane block 62, and the third membrane block 63 to be <100 Pa, thereby increasing the overall flowability.

[0063] In a third embodiment of this utility model, the frame 10 is provided with at least one set of membrane blocks 80, and the set of membrane blocks 80 is composed of four sheet membrane blocks arranged in a specific configuration, namely a first sheet membrane block 81, a second sheet membrane block 82, a third sheet membrane block 83, and a fourth sheet membrane block 84 (e.g., Figure 4 and Figure 5As shown), a first flow channel 85 is provided between the first membrane block 81 and the second membrane block 82. The first flow channel 85 communicates with the porous channel 31 of the tubular membrane adsorbent material 30, and a first baffle 91 is provided on one side of the first flow channel 85, one side being either the top or the bottom. In this embodiment, the first baffle 91 is set to the bottom, mainly to match the airflow direction. A second flow channel 92 is provided between the second membrane block 82 and the third membrane block 83. The second flow channel 92 communicates with the porous channel 31 of the tubular membrane adsorbent material 30, and a second baffle 92 is provided on one side of the second flow channel 92. One side is either top or bottom. In this embodiment, the second middle baffle 92 is set to the top, mainly to match the airflow direction. Furthermore, a third middle flow channel 87 is provided between the third membrane block 83 and the fourth membrane block 84. A third middle baffle 93 is provided on one side of the third middle flow channel 87, and one side is either top or bottom. In this embodiment, the third middle baffle 93 is set to the bottom, mainly to match the airflow direction. The first middle baffle 91, the second middle baffle 92, and the third middle baffle 93 are made of metal (such as iron, stainless steel, etc.) or other materials (such as wood, plastic materials, etc.), which are not limited to the content of this utility model.

[0064] Additionally, the frame 10 has a first side 11, a second side 12, a third side 13, and a fourth side 14 (e.g., Figure 4 and Figure 5 As shown), the upper and lower edges of the first side 11 each extend a protrusion 111, allowing the first side 11 of the frame 10 to have a space within the extended protrusion 111. The protrusions 111 extending from the upper and lower edges of the first side 11 abut against the first membrane block 81 to form a first side flow channel 112. Furthermore, each of the protrusions 111 extending from the upper edge and the protrusions extending from the lower edge of the first side 11 (not shown) has at least one opening (not shown) of any one of the following shapes: circular, elliptical, triangular, quadrilateral, or polygonal. Moreover, the upper and lower edges of the second side 12 each extend a protrusion 121 (e.g., ...). Figure 4 and Figure 5 As shown), the second side 12 of the frame 10 has a space in the extended protrusion 121, and the protrusions 121 extending from the upper edge and the lower edge of the second side 12 abut against the fourth membrane block 84 to form a second side flow channel 122. The protrusions 121 extending from the upper edge of the second side 12 and the protrusions extending from the lower edge of the second side (not shown) are each provided with an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape or at least one polygonal shape (not shown).

[0065] Furthermore, the third side 13 and the fourth side 14 of the frame 10 are connected to the first middle baffle 91, the second middle baffle 92 and the third middle baffle 93 (e.g. Figure 4 and Figure 5 As shown), the connection method can be any one of welding, bonding, riveting, nailing, or snap-fitting, or it can be integrally formed, and is not limited to the content of this utility model. This allows the airflow of airborne particulate pollutants (AMCs) to enter the porous channel 31 of the tubular membrane adsorbent material 30 along the first central flow channel 85, the second central flow channel 86, and the third central flow channel 87, and then flow towards the first side flow channel 112 and the second side flow channel 122 respectively (e.g., Figure 4 As shown), instead of directly passing through the radial direction of the membrane wall thickness of the tubular membrane adsorbent 30, the surface velocity of the ventilation surface perpendicular to the airflow direction (the surface velocity in the concept of air tower velocity is less than 0.5 m / s) causes the air pressure difference of the first membrane block 81, the second membrane block 82, the third membrane block 83 and the fourth membrane block 84 to be <100 Pa, thereby increasing the overall flowability.

[0066] Finally, when the aforementioned membrane block 20 is composed of at least two membrane blocks 21 and 22, when the aforementioned membrane block 60 is composed of three membrane blocks (first membrane block 61, second membrane block 62, and third membrane block 63), or when the aforementioned membrane block 80 is composed of four membrane blocks (first membrane block 81, second membrane block 82, third membrane block 83, and fourth membrane block 84), the protrusion 111 extending from the upper edge of the first side 11 and the protrusion (not shown) extending from the lower edge of the first side 11 are each provided with an opening of at least one circular shape, at least one elliptical shape, at least one triangular shape, at least one quadrilateral shape, or at least one polygonal shape (not shown). Furthermore, the protrusions 121 extending from the upper edge of the second side 12 and the protrusions extending from the lower edge of the second side 12 (not shown) each have at least one opening (not shown) of any one of the following shapes: circular, elliptical, triangular, quadrilateral, or polygonal. This allows airflow of airborne particulate pollutants (AMCs) to enter the porous channel 31 of the tubular membrane adsorbent material 30 along the flow channel 23, the first intermediate flow channel 64 and the second intermediate flow channel 65, the first intermediate flow channel 85 and the second intermediate flow channel 86 and the third intermediate flow channel 87, and then flow towards the first side flow channel 112 and the second side flow channel 122 respectively (see reference). Figure 4 As shown), it can flow out through the opening (not shown in the figure).

[0067] Therefore, this utility model is mainly used to treat airborne particulate pollutants (AMCs), and through a combination design of a frame 10 and at least one set of membrane blocks 20, the set of membrane blocks 20 is disposed within the frame 10, and the set of membrane blocks 20 is composed of at least two or more membrane blocks 21, 22 arranged (e.g. Figure 1 As shown), a flow channel 23 is provided between the membrane block 21 and the membrane block 22, and each membrane block 21, 22 is composed of multiple tubular membrane adsorbent materials 30, and the tubular membrane adsorbent material 30 is provided with porous channels 31 (such as...). Figure 2 As shown, the porous channel 31 communicates with the flow channel 23, allowing the airflow of airborne micro-molecular pollutants (AMCs) to enter the porous channel 31 of the tubular membrane adsorbent material 30 through the flow channel 23 and flow along the direction of the porous channel 31 of the tubular membrane adsorbent material 30. This improves the adsorption capacity of the chemical filter and balances performance efficiency, pressure loss, and service life. It also meets the requirements of advanced semiconductor industry nano-process plants, thereby increasing the overall practicality.

[0068] The above detailed description should make it clear to those skilled in the art that this utility model can indeed achieve the aforementioned objectives and has met the requirements of the Patent Law. Therefore, a utility model patent application is filed.

[0069] The above are merely preferred embodiments of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the utility model specification should still fall within the scope of this utility model.

Claims

1. An adsorption-type tubular membrane chemical filter device for treating micro-molecular pollutants in the air, characterized in that, The application relates to a frame and a plurality of membrane blocks arranged in the frame. The frame further comprises a first edge, a second edge, a third edge and a fourth edge, the upper edge and the lower edge of the first edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the first edge abut the membrane blocks to form a first edge flow channel. The upper edge and the lower edge of the second edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the second edge abut the membrane blocks to form a second edge flow channel. The third edge and the fourth edge of the frame further connect with the baffle.

2. The adsorptive tubular membrane chemical filter device according to claim 1, wherein When the membrane blocks are further arranged as three, the first membrane block, the second membrane block and the third membrane block, a first middle flow channel is arranged between the first membrane block and the second membrane block, one side of the first middle flow channel is provided with a first middle baffle, a second middle flow channel is arranged between the second membrane block and the third membrane block, one side of the second middle flow channel is provided with a second middle baffle.

3. The adsorptive tubular membrane chemical filter device according to claim 2, wherein, The frame further comprises a first edge, a second edge, a third edge and a fourth edge, the upper edge and the lower edge of the first edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the first edge abut the membrane blocks to form a first edge flow channel.

4. The adsorptive tubular membrane chemical filter device according to claim 2, wherein, The upper edge and the lower edge of the second edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the second edge abut the membrane blocks to form a second edge flow channel.

5. The adsorptive tubular membrane chemical filter device according to claim 1, wherein, The third edge and the fourth edge of the frame further connect with the baffle.

6. The adsorptive tubular membrane chemical filter device according to claim 5, wherein When the membrane blocks are further arranged as three, the first membrane block, the second membrane block and the third membrane block, a first middle flow channel is arranged between the first membrane block and the second membrane block, one side of the first middle flow channel is provided with a first middle baffle, a second middle flow channel is arranged between the second membrane block and the third membrane block, one side of the second middle flow channel is provided with a second middle baffle.

7. The adsorptive tubular membrane chemical filter device according to claim 6, wherein The frame further comprises a first edge, a second edge, a third edge and a fourth edge, the upper edge and the lower edge of the first edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the first edge abut the membrane blocks to form a first edge flow channel.

8. The adsorptive tubular membrane chemical filter device according to claim 6, wherein The upper edge and the lower edge of the second edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the second edge abut the membrane blocks to form a second edge flow channel.

9. The adsorptive tubular membrane chemical filter device according to claim 1, wherein The third edge and the fourth edge of the frame further connect with the baffle.

10. The adsorptive tubular membrane chemical filter device according to claim 9, wherein, When the membrane blocks are further arranged as three, the first membrane block, the second membrane block and the third membrane block, a first middle flow channel is arranged between the first membrane block and the second membrane block, one side of the first middle flow channel is provided with a first middle baffle, a second middle flow channel is arranged between the second membrane block and the third membrane block, one side of the second middle flow channel is provided with a second middle baffle.

11. The adsorptive tubular membrane chemical filter device according to claim 10, wherein, The frame further comprises a first edge, a second edge, a third edge and a fourth edge, the upper edge and the lower edge of the first edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the first edge abut the membrane blocks to form a first edge flow channel.

12. The adsorptive tubular membrane chemical filter device of claim 10, wherein, The upper edge and the lower edge of the second edge each extend a protrusion, the protrusions of the upper edge and the lower edge of the second edge abut the membrane blocks to form a second edge flow channel. The third edge and the fourth edge of the frame further connect with the baffle.

13. The adsorptive tubular membrane chemical filter device according to claim 2, 6 or 10, wherein The upper edge extending protrusion of the first side and the lower edge extending protrusion of the first side are further each provided with at least one polygonal opening, the polygonal shape including a circle, an ellipse, a triangle, or a quadrilateral.

14. The adsorptive tubular membrane chemical filter device according to claim 3, 7 or 11, wherein, The upper edge extending protrusion of the second side and the lower edge extending protrusion of the second side are further each provided with at least one polygonal opening, the polygonal shape including a circle, an ellipse, a triangle, or a quadrilateral.

15. The adsorptive tubular membrane chemical filter device of claim 1, wherein, The sheet membrane block is further provided with at least one adhesive between the plurality of tubular membrane adsorbents, the adhesive being any one of an inorganic adhesive or an organic adhesive, or a combination thereof.

16. The adsorptive tubular membrane chemical filter device of claim 1, wherein, The tubular membrane adsorbent is further made of at least one high molecular polymer combined with at least one powder adsorbent.

17. The adsorptive tubular membrane chemical filter device of claim 16, wherein, The powder adsorbent is further any one of a zeolite powder, an activated carbon powder, or a resin powder, the powder of the powder adsorbent being any one of 1 um to 20 um, the powder adsorbent having a proportion of 50 wt% or more.

18. The adsorptive tubular membrane chemical filter device of claim 1, wherein, The porous channel of the tubular membrane adsorbent is further provided with a pore channel diameter of 0.5 mm to 1.5 mm.

19. The adsorptive tubular membrane chemical filter device of claim 18, wherein, The tubular membrane adsorbent is further provided with a length of 50 times or more of the pore channel diameter.

20. The adsorptive tubular membrane chemical filter device of claim 1, wherein, The tubular membrane adsorbent further has a surface area of greater than 500 m 2 / m 3 .

21. The adsorptive tubular membrane chemical filter device of claim 1, wherein, The tubular membrane adsorbent is further provided with a polygonal shape, the polygonal shape including a circle, an ellipse, a triangle, a quadrilateral, a pentagon, or a hexagon.

22. The adsorptive tubular membrane chemical filter device of claim 1, wherein, The pore channel is further provided with a polygonal shape and a plurality of micron level holes on the membrane wall of the pore channel, the polygonal shape including a circle, an ellipse, a triangle, a quadrilateral, a pentagon, or a hexagon.

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