Washing dust removal adsorption system for plasma tail gas treatment

Abstract

The utility model discloses a washing dust removal adsorption system for plasma tail gas treatment, which comprises a water tank and a washing cavity which are sequentially communicated along a tail gas circulation path, and is characterized in that the water tank is divided into three areas including a front-section water inlet area, a middle-section dust settling area and a rear-section water return area through double partition plates; four water washing areas are arranged in the water washing cavity in a stacked mode, each water washing area is provided with a water spraying unit and an adsorption filler layer, the adsorption filler layer is provided with an ultrasonic generator, and the water spraying units, the adsorption filler layers and the ultrasonic generators form an ultrasonic linkage water mist adsorption structure. According to the utility model, the dust capture efficiency and the fluorine ion adsorption capacity are remarkably improved through the partitioned water tank design and the four ultrasonic linkage washing regions.

Description

Technical Field

[0001] This utility model belongs to the field of exhaust gas water washing treatment technology, and in particular relates to a water washing dust removal and adsorption system for plasma exhaust gas treatment. Background Technology

[0002] Plasma exhaust gas treatment equipment is widely used in high-end manufacturing industries such as semiconductors and photovoltaics to decompose flammable and toxic gases (such as PFCs, SiH4, etc.) and remove dust. Traditional plasma exhaust gas washing systems use a single-zone water tank structure, which mixes clean water and wastewater, leading to water quality deterioration and requiring frequent maintenance. Moreover, the single-layer spray coverage is insufficient, resulting in low dust capture efficiency, short lifespan of adsorbent materials, and poor fluoride ion removal. Summary of the Invention

[0003] Purpose of the invention: In order to overcome the shortcomings of the existing technology, this utility model provides a water washing dust removal and adsorption system for plasma exhaust gas treatment. Through the partitioned water tank design and four ultrasonic linkage water washing zones, the dust capture efficiency and fluoride ion adsorption capacity are significantly improved.

[0004] Technical Solution: To achieve the above objectives, this utility model provides a water-washing dust removal and adsorption system for plasma exhaust gas treatment, comprising a water tank and a water washing chamber, which are sequentially connected along the exhaust gas flow path. The water tank is divided into three areas by double partitions: a front water inlet area, a middle dust settling area, and a rear water return area. The water washing chamber contains four stacked water washing zones, each equipped with a water spray unit and an adsorption packing layer. The adsorption packing layer is equipped with an ultrasonic generator. The water spray unit, the adsorption packing layer, and the ultrasonic generator constitute an ultrasonic-linked water mist adsorption structure.

[0005] Furthermore, the middle section dust settling zone is located in the center of the water tank and is equipped with an automatic sewage pump. The bottom of the partition is provided with a flow port. The front water inlet zone and the rear water return zone are respectively connected to the bottom of the middle section dust settling zone through their respective flow ports.

[0006] Furthermore, the height of the partition is two-thirds of the total height of the water tank, and an anti-backflow baffle is provided at the bottom of the partition corresponding to the flow port through an elastic connector. The flip-opening and closing path of the anti-backflow baffle is located in the middle section dust settling zone, so as to realize the unidirectional flow of sewage and dust from the front water inlet area to the middle section dust settling zone and from the rear water return area to the middle section dust settling zone.

[0007] Furthermore, the adsorption packing layer is filled with fluoride ion adsorption Raschig rings, and its surface is coated with a nano-alumina coating to enhance the fluoride ion adsorption efficiency.

[0008] Furthermore, the frequency of the ultrasonic generator is adjustable, and a fluoride ion concentration sensor is provided on the adsorption packing layer.

[0009] Furthermore, among the four water spray units corresponding to the four water washing zones, three of the water spray units spray upwards, and the uppermost water spray unit sprays downwards.

[0010] Furthermore, the water spraying unit is a spray head with an adjustable nozzle angle.

[0011] Beneficial effects: This utility model significantly improves dust capture efficiency and fluoride ion adsorption capacity through partitioned water tank design and four ultrasonic linkage water washing zones. The stacked water washing zones extend the contact time between exhaust gas and water mist, improving dust capture efficiency. The ultrasonic generator produces high-frequency vibrations, which can break the surface tension of water mist, increase the contact area between water mist and dust and fluoride ions, and improve adsorption efficiency. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0013] Figure 2 This is a schematic diagram of the adsorption packing layer. Detailed Implementation

[0014] The present invention will be further described below with reference to the accompanying drawings.

[0015] like Figure 1 and Figure 2 As shown, a water-washing dust removal and adsorption system for plasma exhaust gas treatment includes a water tank 1 and a water washing chamber 2, which are sequentially connected along the exhaust gas flow path. The water tank 1 is divided into three areas by a double partition 3: a front water inlet area 4, a middle dust settling area 5, and a rear water return area 6. The water washing chamber 2 has four stacked water washing zones 7, each equipped with a water spray unit 8 and an adsorption packing layer 9. The adsorption packing layer 9 is equipped with an ultrasonic generator 10. The water spray unit 8, the adsorption packing layer 9, and the ultrasonic generator 10 constitute an ultrasonic-linked water mist adsorption structure. This invention significantly improves dust capture efficiency and fluoride ion adsorption capacity through the partitioned water tank design and four ultrasonic-linked water washing zones. The stacked water washing zones 7 extend the contact time between the exhaust gas and the water mist, improving dust capture efficiency. The ultrasonic generator 10 generates high-frequency vibrations, which can disrupt the surface tension of the water mist, increase the contact area between the water mist and dust and fluoride ions, and improve adsorption efficiency.

[0016] The intermediate dust settling zone 5 is located in the center of the water tank 1 and is equipped with an automatic sewage pump 11. The automatic sewage pump 11 is activated periodically to discharge sewage according to the amount of dust accumulation. The bottom of the partition 3 is provided with a flow port 30. The front water inlet zone 4 and the rear water return zone 6 are respectively connected to the bottom of the intermediate dust settling zone 5 through their respective flow ports 30. This not only maintains the dynamic water balance of the front water inlet zone 4, the intermediate dust settling zone 5 and the rear water return zone 6, but also, when the automatic sewage pump 11 is activated to discharge sewage after the dust has settled in each zone, it can suck the small amount of dust generated at the bottom of the front water inlet zone 4 and the rear water return zone 6 into the intermediate dust settling zone 5 and then discharge it, thereby improving the sewage discharge efficiency.

[0017] The height of the partition 3 is two-thirds of the total height of the water tank. A backflow preventer 13 is installed at the bottom of the partition 3 corresponding to the flow port 30 via an elastic connector 12. The opening and closing path of the backflow preventer 13 is within the middle dust settling zone 5, allowing for unidirectional flow of wastewater and dust from the front inlet zone 4 to the middle dust settling zone 5 and from the rear return zone 6 to the middle dust settling zone 5. During sewage discharge, the backflow preventer 13 ensures that water carrying dust flows unidirectionally from the front inlet zone 4 to the middle settling zone 5 and from the rear return zone 6 to the middle settling zone 5, preventing dust settling in the middle settling zone 5 from flowing into the front inlet zone 4 and the rear return zone 6. The anti-backflow baffle 13 is rotatably connected to the upper end of the flow port 30 via a rotating shaft. One end of the elastic connector 12 is connected to the anti-backflow baffle 13, and the other end is connected to the bottom of the water tank 1. The elastic connector 12 can adapt to the impact of water flow and prevent the anti-backflow baffle 13 from jamming and causing failure to open or close. The elastic connector 12 can be a helical spring.

[0018] The adsorption packing layer 9 is filled with fluoride ion adsorption Raschig rings 14, and its surface is coated with a nano-alumina coating to enhance the adsorption efficiency of fluoride ions. The high specific surface area of ​​the fluoride ion adsorption Raschig rings 14 provides ample adsorption sites, and the nano-alumina coating enhances the selective adsorption of fluoride ions through chemical bonding. Moreover, the coating is resistant to acid and alkali corrosion, extending the life of the packing.

[0019] The frequency of the ultrasonic generator 10 is adjustable, and a fluoride ion concentration sensor 15 is provided on the adsorption packing layer 9. The fluoride ion concentration sensor 15 monitors the adsorption status in real time and feeds it back to the ultrasonic generator 10, thereby adjusting the frequency to optimize the water mist particle size and adapt to different fluoride ion loads. Moreover, high-frequency ultrasonic waves at frequencies greater than 50kHz can break the water mist into micron-sized particles, thereby enhancing the reaction rate at the adsorption interface and realizing dynamic adjustment and precise control of fluoride ion adsorption.

[0020] In the four water spraying units 8 corresponding to the four water washing zones 7, three of the water spraying units 8 spray upwards, and the uppermost water spraying unit 8 sprays downwards. The upward spraying intercepts rising dust, while the downward spraying has a certain suppressive effect on the airflow, forming a "water curtain barrier". Thus, the residence time of the exhaust gas is extended through the superposition of spraying, and the particulate matter is fully wetted and settled.

[0021] The water spray unit 8 is a spray head with an adjustable nozzle angle, ranging from 30° to 90°, to adapt to different dust concentrations or airflow velocities.

[0022] a) When the dust load is high, increase the spray angle to 60°-90° to enhance the coverage area;

[0023] b) At low loads, reduce the angle to 30°-45° to decrease water consumption.

[0024] The spray pressure can be adjusted synchronously within the range of 0.2-0.6 MPa to balance dust removal efficiency and energy consumption.

[0025] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A water washing dust removal adsorption system for plasma tail gas treatment, comprising a water tank (1) and a water washing cavity (2) which are sequentially communicated along a tail gas flow path, characterized in that: The water tank (1) is divided into three areas including front water inlet area (4), middle dust settling area (5) and rear water return area (6) by double partition (3); the water washing cavity (2) is provided with four water washing areas (7) arranged in layers, each water washing area (7) is provided with water spraying unit (8) and adsorption filler layer (9), the adsorption filler layer (9) is provided with ultrasonic generator (10), the water spraying unit (8), the adsorption filler layer (9) and the ultrasonic generator (10) constitute the ultrasonic linkage water mist adsorption structure.

2. A water scrubbing dust adsorption system for plasma exhaust treatment according to claim 1, characterized in that: The middle dust settling area (5) is located at the central position of the water tank (1) and is provided with an automatic blowdown pump (11), the bottom of the partition (3) is provided with a flow-through port (30), the front water inlet area (4) and the rear water return area (6) are communicated with the middle dust settling area (5) through the respective corresponding flow-through ports (30).

3. A water scrubbing dust adsorption system for treating exhaust gas of a plasma according to claim 1, characterized in that: The height of the partition (3) is two-thirds of the total height of the water tank, the bottom of the partition (3) is provided with an anti-backflow baffle (13) corresponding to the flow-through port (30) through an elastic connecting piece (12), the anti-backflow baffle (13) is opened and closed by turning over in the middle dust settling area (5), so as to realize the one-way flow of sewage and dust from the front water inlet area (4) to the middle dust settling area (5) and from the rear water return area (6) to the middle dust settling area (5).

4. A water scrubbing dust adsorption system for treating exhaust gas of a plasma according to claim 1, characterized in that: The adsorption filler layer (9) is filled with fluorine ion adsorption Raschig ring (14), and the surface is coated with nano alumina coating for enhancing the fluorine ion adsorption efficiency.

5. A water scrubbing dust adsorption system for treating exhaust gas of a plasma according to claim 4, characterized in that: The frequency of the ultrasonic generator (10) is adjustable, and the adsorption filler layer (9) is provided with a fluorine ion concentration sensor (15).

6. A water scrubbing dust adsorption system for plasma exhaust treatment according to claim 1, characterized in that: Among the four water spraying units (8) corresponding to the four water washing areas (7), three water spraying units (8) spray upward, and the uppermost water spraying unit (8) sprays downward.

7. A water scrubbing dust adsorption system for plasma exhaust treatment according to claim 6, characterized in that: The water spraying unit (8) is a spray head with adjustable spray angle.

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