Glass substrate photoresist coating device

Abstract

The utility model discloses a glass substrate photoresist coating device which comprises a main body mechanism and a drying mechanism, sliding rails are used for installing a movable platform and limiting the movement of the movable platform, the movable platform comprises a U-shaped plate embedded between the opposite sliding rails and a first conveying belt installed on the inner wall of the U-shaped plate, and the first conveying belt is used for conveying photoresist on the main body mechanism. The U-shaped plate is used for installing the first conveying belt and driving the first conveying belt to move, the orientation of the first conveying belt is perpendicular to the orientation of the feeding grid conveying belt and the orientation of the discharging grid conveying belt, the glass substrate can be received from the feeding grid conveying belt, or the sprayed glass substrate can be conveyed to the discharging grid conveying belt. The driving part is used for driving the moving platform to stretch and move and comprises a threaded rod rotationally installed on one side of the sliding rail and a motor fixed to the sliding rail, a shaft of the motor is fixedly connected with the end of the threaded rod, and the glass substrate photoresist coating device has the advantages of automatic feeding and discharging and high practicability.

Description

Technical Field

[0001] This utility model relates to the technical field of photoresist spraying equipment, specifically a photoresist coating device for glass substrates. Background Technology

[0002] Photoresist is one of the key materials for micro-patterning in microelectronics technology. In particular, the development of large-scale and very large-scale integrated circuits in recent years has greatly promoted the research, development and application of photoresist. The printing industry is another important field of photoresist application. Photoresist is an organic compound whose solubility in the developing solution changes after being exposed to ultraviolet light. The photoresist used in silicon wafer manufacturing is applied to the surface of a glass substrate in liquid form and then dried into a film.

[0003] The existing glass substrate photoresist coating equipment has the following drawbacks during use: it requires manual placement of the glass substrate into the coating equipment, and the glass substrate must be removed after the photoresist coating is completed. This results in low efficiency, and the long-term handling of the substrate places high demands on the physical strength of the workers. Therefore, there is room for improvement. Utility Model Content

[0004] This utility model aims to solve one of the technical problems existing in the prior art or related technologies.

[0005] Therefore, the technical solution adopted by this utility model is as follows: a glass substrate photoresist coating device, comprising: a main body and a drying mechanism, wherein the main body includes a box, a spraying device installed on the inner wall of the box, a slide rail symmetrically fixed at the bottom of the box, a moving platform slidably arranged on the slide rail, a driving component installed on one side of the slide rail, a feeding grid conveyor belt fixed on one side of the box, and a discharging grid conveyor belt fixed on the other side of the box.

[0006] The drying mechanism includes a housing fixed at the bottom end of the discharge grid conveyor belt, blowers symmetrically installed at the bottom end of the housing and extending into the inner cavity of the housing, multiple electric heating tubes fixed in an array on the inner wall of the housing, a first top shell fixed at the top end of the feed grid conveyor belt, inclined plates fixed in an array on the inner wall of the first top shell, a second top shell fixed at the top end of the discharge grid conveyor belt, a connecting pipe connecting the first top shell and the second top shell, and a filter installed in the middle of the inner cavity of the connecting pipe.

[0007] In a preferred embodiment, the present invention can be further configured such that the mobile platform includes a U-shaped plate fitted between opposing slide rails and a first conveyor belt mounted on the inner wall of the U-shaped plate, wherein the orientation of the first conveyor belt is perpendicular to the orientation of the feed grid conveyor belt and the discharge grid conveyor belt.

[0008] In a preferred embodiment, the present invention can be further configured as follows: the driving component includes a threaded rod rotatably mounted on one side of the slide rail and a motor fixed on the slide rail with its shaft fixedly connected to the end of the threaded rod; threaded sleeves are fixed on both sides of the U-shaped plate; the threaded rod passes through the threaded sleeves, and the two mesh with each other.

[0009] In a preferred embodiment, the present invention can be further configured such that the blower includes a tube installed at the bottom of the housing and extending into the inner cavity of the housing, and a high-speed fan fixed to the inner wall of the tube.

[0010] In a preferred embodiment, the present invention can be further configured such that the filter element includes a frame fixed to the inner wall of the connecting pipe, filter screens symmetrically installed on both sides of the frame, and activated carbon particles filled in the inner cavity of the frame.

[0011] By adopting the above technical solution, the beneficial effects achieved by this utility model are as follows:

[0012] 1. In this utility model, slide rails are symmetrically arranged at the bottom of the housing, and a moving platform is slidably fitted on the slide rails. The moving platform is telescopically moved by a drive component. At the same time, a feeding grid conveyor belt and a discharging grid conveyor belt are respectively arranged on both sides of the housing and placed on both sides of the moving platform. During operation, the drive component drives the moving platform to extend out of the housing, and the feeding grid conveyor belt is used to feed the glass substrate into the moving platform. The drive component drives the moving platform to retract into the housing, which facilitates the spraying device to spray photoresist onto the glass substrate on the moving platform. After spraying, the moving platform extends again and sends the sprayed glass substrate onto the discharging grid conveyor belt, realizing automatic feeding and discharging in the process of spraying photoresist onto the glass substrate. The whole process is automated, which effectively improves the efficiency of photoresist spraying on the glass substrate.

[0013] 2. In this utility model, a housing is installed at the bottom of the discharge grid conveyor belt, and blowers are symmetrically arranged inside the housing. Simultaneously, electric heating tubes are arranged in an array on the inner wall of the housing. Furthermore, a second top shell is installed at the top of the discharge grid conveyor belt, and a first top shell is installed at the top of the feed grid conveyor belt. The two are connected by a connecting pipe, and a filter is installed on the inner wall of the connecting pipe. With the above arrangement, after the glass substrate is coated, it passes through the discharge grid conveyor belt. The blowers are activated, accelerating the air upwards so that it is heated by the electric heating tubes. The hot air passes through the discharge grid conveyor belt to heat the glass clamp, drying the photoresist on the glass substrate. Then, the airflow is sent into the first top shell through the connecting pipe and sprayed obliquely under the action of the inclined plate, which can blow away dust from the surface of the glass substrate on the feed grid conveyor belt, ensuring the cleanliness of the glass substrate surface. This allows for cleaning the glass substrate surface before coating and drying the photoresist after coating, further increasing its practicality. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the main structure of the present utility model;

[0016] Figure 3 This is a cross-sectional schematic diagram of the main structure of this utility model;

[0017] Figure 4 This is an exploded structural diagram of the main body of this utility model;

[0018] Figure 5 This is a cross-sectional schematic diagram of the drying mechanism of this utility model.

[0019] Figure label:

[0020] 100. Main structure; 110. Housing; 120. Spraying device; 130. Slide rail; 140. Moving platform; 141. U-shaped plate; 1411. Threaded sleeve; 142. First conveyor belt; 150. Driving component; 151. Threaded rod; 152. Motor; 160. Feeding mesh conveyor belt; 170. Discharge mesh conveyor belt;

[0021] 200. Drying mechanism; 210. Shell; 220. Blower; 221. Tube; 222. High-speed fan; 230. Heating element; 240. First top shell; 250. Inclined plate; 260. Second top shell; 270. Connecting pipe; 280. Filter element; 281. Frame; 282. Filter screen; 283. Activated carbon granules. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be noted that, unless otherwise specified, the embodiments and features of the present utility model can be combined with each other.

[0023] Some embodiments of this utility model are described below with reference to the accompanying drawings.

[0024] Example 1:

[0025] Combination Figure 1-5 As shown, this embodiment provides a glass substrate photoresist coating apparatus, including: a main body 100 and a drying mechanism 200.

[0026] The main structure 100 includes a housing 110, a spraying device 120 installed on the inner wall of the housing 110, a slide rail 130 symmetrically fixed at the bottom of the housing 110, a moving platform 140 slidably arranged on the slide rail 130, a drive component 150 installed on one side of the slide rail 130, a feed grid conveyor belt 160 fixed on one side of the housing 110, and a discharge grid conveyor belt 170 fixed on the other side of the housing 110.

[0027] The housing 110 is used to form a closed environment to prevent dust and impurities from falling on the surface of the glass substrate during spraying. The spraying device 120 is used to spray photoresist onto the surface of the glass substrate.

[0028] The slide rail 130 is used to mount the moving platform 140 and limit the movement of the moving platform 140. The moving platform 140 includes a U-shaped plate 141 fitted between the slide rails 130 and a first conveyor belt 142 mounted on the inner wall of the U-shaped plate 141. The U-shaped plate 141 is used to mount the first conveyor belt 142 and drive the first conveyor belt 142 to move. The orientation of the first conveyor belt 142 is perpendicular to the orientation of the feed grid conveyor belt 160 and the discharge grid conveyor belt 170. It can receive glass substrates from the feed grid conveyor belt 160 or send the coated glass substrates into the discharge grid conveyor belt 170.

[0029] The drive unit 150 is used to drive the mobile platform 140 to telescopically move. It includes a threaded rod 151 rotatably mounted on one side of the slide rail 130 and a motor 152 fixed on the slide rail 130 with its shaft fixedly connected to the end of the threaded rod 151. Threaded sleeves 1411 are fixed on both sides of the U-shaped plate 141. The threaded rod 151 passes through the threaded sleeves 1411 and the two mesh with each other. When the motor 152 starts, it drives the threaded rod 151 to rotate. The rotation of the threaded rod 151 drives the threaded sleeves 1411 to move. The movement of the threaded sleeves 1411 drives the mobile platform 140 to telescopically move as a whole.

[0030] The feed grid conveyor belt 160 is used to transport the glass substrate that needs to be coated with photoresist, and the discharge grid conveyor belt 170 is used to send out the coated glass substrate.

[0031] The drying mechanism 200 is used to dry the photoresist on the surface of the glass substrate. It includes a housing 210 fixed to the bottom end of the discharge grid conveyor belt 170, blowers 220 symmetrically installed at the bottom end of the housing 210 and extending into the inner cavity of the housing 210, a plurality of electric heating tubes 230 fixed in an array on the inner wall of the housing 210, a first top shell 240 fixed to the top end of the feed grid conveyor belt 160, inclined plates 250 fixed in an array on the inner wall of the first top shell 240, a second top shell 260 fixed to the top end of the discharge grid conveyor belt 170, a connecting pipe 270 connecting the first top shell 240 and the second top shell 260, and a filter installed in the middle of the inner cavity of the connecting pipe 270.

[0032] The blower 220 includes a tube 221 installed at the bottom of the housing 210 and extending into the inner cavity of the housing 210, and a high-speed fan 222 fixed on the inner wall of the tube 221. The tube 221 is used to install the high-speed fan 222, which is used to draw in outside air and accelerate it towards the discharge mesh conveyor belt 170. In addition, filter paper is fixed at the bottom of the tube 221 to filter dust and impurities in the air.

[0033] The heating element 230 is used to heat the air to form hot air. At the same time, the hot air flows from bottom to top through the discharge grid conveyor belt 170 to heat the glass substrate. The heated glass substrate dries the photoresist on its surface. This setting can avoid the situation where hot air blows directly onto the photoresist, causing the photoresist to wrinkle and affecting the effect.

[0034] The first top shell 240 is fixed on the feed grid conveyor belt 160, and the second top shell 260 is fixed on the discharge grid conveyor belt 170. The connecting pipe 270 connects the inner cavities of the two. With the above arrangement, the airflow blown upward by the blower 220 is sent into the inner cavity of the first top shell 240 through the connecting pipe 270, and then blown obliquely towards the surface of the glass substrate under the action of the inclined plate 250, which can remove dust and impurities from the surface of the glass substrate.

[0035] The inclined plate 250 is used to guide the airflow, causing it to be blown at an angle toward the glass substrate.

[0036] The filter element 280 is used to filter the airflow passing through the connecting pipe 270. It includes a frame 281 fixed on the inner wall of the connecting pipe 270, a filter screen 282 symmetrically installed on both sides of the frame 281, and activated carbon particles 283 filled in the inner cavity of the frame 281. The filter screen 282 and activated carbon particles 283 can effectively filter out impurities generated during the drying of photoresist in the airflow.

[0037] The working principle and usage process of this utility model are as follows: During use, the motor 152 starts, driving the threaded rod 151 to rotate. The rotation of the threaded rod 151 causes the threaded sleeve 1411 to move, and the movement of the threaded sleeve 1411 causes the moving platform 140 to extend outward. At this time, the feeding mesh conveyor belt 160 feeds the glass substrate onto the moving platform 140. The driving component 150 drives the moving platform 140 to retract into the inner cavity of the housing 110. The spraying device 120 sprays photoresist onto the glass substrate on the moving platform 140. After spraying is completed, the driving component 150 drives the moving platform 140 to extend. At this time, the first conveyor belt 14... 2. Upon startup, the coated glass substrate is fed onto the discharge grid conveyor belt 170. As the glass substrate passes through the discharge grid conveyor belt 170, the high-speed fan 222 starts, accelerating the air upwards so that it is heated by the electric heating tube 230. The hot air passes through the discharge grid conveyor belt 170 to heat the glass clamp and dry the photoresist on the glass substrate. Afterwards, the airflow is sent into the first top shell 240 through the connecting pipe 270 and sprayed out obliquely under the action of the inclined plate 250, which can blow away the dust on the surface of the glass substrate on the feed grid conveyor belt 160, ensuring the cleanliness of the glass substrate surface.

[0038] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A glass substrate photoresist coating apparatus, comprising: The main body mechanism (100) and the drying mechanism (200) are characterized in that the main body mechanism (100) comprises a box body (110), a spraying device (120) mounted on the inner wall of the box body (110), symmetrical slide rails (130) fixed at the bottom end of the box body (110), a moving platform (140) slidingly arranged on the slide rails (130), a driving member (150) mounted on one side of the slide rails (130), an inlet grid conveyor belt (160) fixed on one side of the box body (110), and an outlet grid conveyor belt (170) fixed on the other side of the box body (110); The drying mechanism (200) comprises a shell (210) fixed at the bottom end of the outlet grid conveyor belt (170), symmetrical air blowing members (220) mounted at the bottom end of the shell (210) and extending into the inner cavity of the shell (210), a plurality of electric heating pipes (230) fixed in an array on the inner wall of the shell (210), a first top shell (240) fixed at the top end of the inlet grid conveyor belt (160), inclined plates (250) fixed in an array on the inner wall of the first top shell (240), a second top shell (260) fixed at the top end of the outlet grid conveyor belt (170), a communication pipe (270) connecting the first top shell (240) and the second top shell (260), and a filter member (280) mounted in the middle of the inner cavity of the communication pipe (270).

2. The glass substrate photoresist coating apparatus of claim 1, wherein The moving platform (140) comprises a U-shaped plate (141) embedded between the slide rails (130) and a first conveyor belt (142) mounted on the inner wall of the U-shaped plate (141), and the direction of the first conveyor belt (142) is perpendicular to the directions of the inlet grid conveyor belt (160) and the outlet grid conveyor belt (170).

3. The glass substrate photoresist coating apparatus of claim 2, wherein The driving member (150) comprises a threaded rod (151) rotatably mounted on one side of the slide rails (130) and a motor (152) fixed on the slide rails (130) and having an axis fixedly connected with the end of the threaded rod (151), and threaded sleeves (1411) are fixed on both sides of the U-shaped plate (141), the threaded rod (151) passes through the threaded sleeves (1411) and is engaged with them.

4. The glass substrate photoresist coating apparatus of claim 1, wherein The air blowing member (220) comprises a pipe body (221) mounted at the bottom end of the shell (210) and extending into the inner cavity of the shell (210), and a high-speed fan (222) fixed on the inner wall of the pipe body (221).

5. The glass substrate photoresist coating apparatus of claim 1, wherein The filter member (280) comprises a frame (281) fixed on the inner wall of the communication pipe (270), filter screens (282) symmetrically mounted on both sides of the frame (281), and activated carbon particles (283) filled in the inner cavity of the frame (281).

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