3D coplanarity detection and plate placing equipment for special-shaped structural member

Abstract

The utility model relates to a 3D coplanarity detection and wobble plate device for a special-shaped structural member. The 3D coplanarity detection and wobble plate device comprises a workbench, and an upper material belt and a lower material belt which are arranged on the upper surface of the workbench side by side in the left-right direction. The feeding end of the feeding belt is provided with a material supply assembly and a first material taking assembly used for transferring workpieces on the material supply assembly to the feeding belt. A detection platform is arranged between the discharging end of the feeding belt and the feeding end of the discharging belt, a second material taking assembly for transferring workpieces in the left-right direction is arranged on the rear side of the detection platform, a first detection station is arranged on the detection platform, and a 3D laser camera is upwards arranged below the detection platform and corresponds to the first detection station; a discharging assembly for taking down the workpieces is arranged at the discharging end of the discharging belt. The 3D coplanarity detection and tray arrangement equipment provided by the utility model can automatically complete feeding, coplanarity detection and discharging and tray arrangement of workpieces, does not need excessive manual intervention, is convenient for enterprises to control the labor cost, and has better practicability.

Description

Technical Field

[0001] This utility model relates to the field of automatic assembly technology, and in particular to a 3D coplanarity detection and tray arrangement device for irregularly shaped structural parts. Background Technology

[0002] With the development of science and technology, the requirements for the types and quality of structural components in automated assembly technology are becoming increasingly stringent. Some irregularly shaped structural components often require coplanarity testing to ensure high manufacturing precision. For example, for an irregularly shaped structural component with a serrated bottom surface, the traditional coplanarity testing method often involves manual operation. The irregularly shaped structural component is placed in a fixture for optical coupling testing, and then workers remove the qualified coplanarity structural component from the fixture cavity and place it on a tray. This method requires a large amount of labor and is not conducive to the company's control over production costs. Therefore, a 3D coplanarity testing and tray placement device that can solve the above problems is proposed. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies by providing a 3D coplanarity detection and tray-setting device for irregularly shaped structural components. This 3D coplanarity detection and tray-setting device can effectively solve the aforementioned problems.

[0004] To achieve the above requirements, the technical solution adopted by this utility model to solve its technical problem is as follows:

[0005] A 3D coplanarity inspection and tray-loading device for irregularly shaped structural parts is provided, including a worktable, and a feeding belt and a discharging belt arranged side by side on the upper surface of the worktable in a left-right direction; the feeding end of the feeding belt is provided with a feeding component and a first picking component that transfers the workpiece on the feeding component to the feeding belt; an inspection platform is provided between the discharging end of the feeding belt and the feeding end of the discharging belt, a second picking component that transfers the workpiece in a left-right direction is provided on the rear side of the inspection platform, a first inspection station is provided on the inspection platform, and a 3D laser camera is provided below the inspection platform corresponding to the first inspection station and facing upward; the discharging end of the discharging belt is provided with a discharging component that removes the workpiece.

[0006] The present invention discloses a 3D coplanarity inspection and tray placement device for irregularly shaped structural parts. The inspection platform is arranged along a left-right direction, and from left to right, it has a second inspection station, a first inspection station, a third inspection station, and a waste removal station for placing workpieces. A top camera is fixed above the second inspection station, and a bottom camera is located below the third inspection station, facing the third inspection station. The inspection platform has through holes for exposing the workpieces at the first and third inspection stations. A waste removal cylinder is horizontally positioned forward on the inspection platform, with its movable end facing the workpiece on the waste removal station. A guide groove for the workpiece to slide down is located at the front end of the inspection platform corresponding to the waste removal station.

[0007] The present invention discloses a 3D coplanarity detection and tray-stacking device for irregularly shaped structural parts, wherein the first material handling component is an n-shaped trajectory cam manipulator; the movable end of the n-shaped trajectory cam manipulator is provided with a fixed rod along the left and right direction, and the fixed rod is provided with a first suction nozzle facing the detection platform. There are at least five first suction nozzles, which are respectively set at the unloading end of the feeding belt, the second detection station, the first detection station, the third detection station and the waste discharge station.

[0008] The present invention discloses a 3D coplanarity detection and tray arrangement device for irregularly shaped structural parts, wherein the feeding end of the feeding belt and the feeding end of the unloading belt are equipped with detection sensors for detecting whether the workpiece is in place, and the detection sensors are electrically connected to the drive motors of the feeding belt and the unloading belt, respectively; the unloading end of the feeding belt and the unloading end of the unloading sheet are equipped with detection devices for detecting whether the workpiece is in place.

[0009] The present invention discloses a 3D coplanarity detection and tray arrangement device for irregularly shaped structural parts. The detection device includes a first conductive plate and a second conductive plate electrically connected to the output and input terminals of an external power supply, respectively. The unloading end of the feeding belt and the unloading end of the unloading belt are each provided with a fixed station along their length direction. The first conductive plate and the second conductive plate are arranged side by side on the fixed station. When the workpiece is in place, one end of the workpiece is located on the first conductive plate and the second conductive plate.

[0010] The present invention discloses a 3D coplanarity detection and tray arrangement device for irregularly shaped structural parts, wherein the unloading component is a four-axis robot; the unloading component has a vertically downward-facing picking cylinder, and the movable end of the picking cylinder is fixedly connected to a second suction nozzle.

[0011] The present invention discloses a 3D coplanarity detection and tray placement device for irregularly shaped structural parts. The device includes an empty tray stacking area on the worktable, located in front of the unloading component; an empty tray receiving groove on the worktable corresponding to the empty tray stacking area, containing a lifting component for lifting the empty trays; and two tray-separating cylinders on the worktable facing the empty tray stacking area, arranged opposite each other on both sides of the area. The movable end of each cylinder has a pressure plate horizontally facing the empty tray.

[0012] The present invention discloses a 3D coplanarity detection and tray arrangement device for irregularly shaped structural parts, wherein the feeding component includes a feeding tray and a vibrator fixed at the lower end of the feeding tray; a flexible vibrating plate is provided at the front end below the feeding tray; an outer cover is provided on the worktable, and a first material picking component is provided on the inner wall of the upper side of the outer cover corresponding to the flexible vibrating plate.

[0013] The present invention discloses a 3D coplanarity detection and tray placement device for irregularly shaped structural parts, wherein the first material handling component is a six-legged robot, and an installation plate for mounting the six-legged robot is provided on the inner wall of the upper side of the outer cover, and a panoramic CCD vision camera is provided on the installation plate facing the placement area.

[0014] The present invention relates to a 3D coplanarity detection and tray placement device for irregularly shaped structural parts, wherein the outer cover is provided with an opening for exposing the feeding tray, and the outer side wall of the outer cover is also provided with a display for displaying the working status of the 3D coplanarity detection and tray placement device.

[0015] The beneficial effects of this utility model are as follows:

[0016] During operation, the worker feeds the workpiece into the feeding assembly. The first picking assembly, located at the top of the feeding assembly, moves the workpiece from the feeding assembly to the loading end of the feeding belt. The feeding belt then transports the workpiece to the unloading end of the feeding belt. The second picking assembly, located between the unloading end of the feeding belt and the loading end of the unloading belt, moves the workpiece to the inspection station on the inspection platform. This allows the 3D laser camera below the inspection platform to perform coplanarity inspection on the bottom surface of the workpiece from the bottom. After inspection, the workpiece is moved by the second picking assembly to the loading end of the unloading belt. The unloading belt then moves the workpiece to the unloading end of the unloading belt, where it is removed by the unloading assembly and placed on a tray. This invention avoids the manual feeding, unloading, and tray placement work required in traditional workpiece coplanarity inspection, reducing manual intervention and helping companies control production costs.

[0017] Meanwhile, in this invention, the feeding belt, detection platform, and unloading belt form a U-shaped structure, resulting in a short workpiece transportation process. This not only improves the overall structural compactness but also enhances workpiece transportation efficiency, demonstrating good practicality. Furthermore, this invention utilizes a 3D laser camera to detect the coplanarity of the workpiece, enabling high-speed and high-precision detection of the coplanarity of the workpiece bottom. This improves detection efficiency while effectively ensuring workpiece quality, further enhancing its practicality. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the utility model will be further described below in conjunction with the accompanying drawings and embodiments. The drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a structural diagram of a device for 3D coplanarity detection and tray arrangement of irregularly shaped structural parts according to this utility model.

[0020] Figure 2This is a structural diagram of the detection platform in a 3D coplanarity detection and tray-stacking device for irregularly shaped structural parts according to this utility model.

[0021] Figure 3 This is a structural diagram of the feeding belt in a 3D coplanarity detection and tray-stacking device for irregularly shaped structural parts according to this utility model.

[0022] Figure 4 This is a structural diagram of the unloading component in a 3D coplanarity detection and tray-stacking device for irregularly shaped structural parts according to this utility model.

[0023] Figure 5 yes Figure 4 Enlarged view of point A

[0024] Figure 6 This is a structural diagram of the hollow tray stacking area in a 3D coplanarity detection and tray arrangement device for irregularly shaped structural parts according to this utility model.

[0025] Figure 7 yes Figure 6 Enlarged view of point B.

[0026] Figure 8 This is a structural diagram of the feeding component and the first material handling component in a 3D coplanarity detection and tray arrangement device for irregularly shaped structural parts according to this utility model.

[0027] Figure 9 This is an overall structural diagram of a 3D coplanarity detection and tray-mounting device for irregularly shaped structural parts according to this utility model.

[0028] In the diagram: 1. Workbench; 10. Feeding belt; 11. Unloading belt; 12. Inspection platform; 13. Second inspection station; 14. First inspection station; 15. Third inspection station; 16. Waste discharge station; 17. Top camera; 18. Through hole; 19. Waste discharge cylinder; 110. Guide groove; 111. Second material handling assembly; 112. Fixing rod; 113. First suction nozzle; 114. 3D laser camera; 115. Inspection sensor; 116. First conductive plate; 117. Second conductive plate; 118. Fixing station; 119. Mounting frame; 120. Mounting block; 2. Feeding assembly; 20. Feeding tray; 21. Vibrator; 22. Flexible vibrating plate; 3. First material handling assembly; 4. Empty tray receiving slot; 40. Empty tray stacking area; 41. Full tray stacking area; 42. Full tray receiving slot. 5. Feeding assembly; 50. Picking cylinder; 51. Second suction nozzle; 52. Lifting assembly; 53. Dividing cylinder; 54. Pressure plate; 55. Base; 56. Swing arm; 57. Picking head; 6. Outer cover; 60. Mounting plate; 61. Panoramic CCD vision camera; 62. Opening; 63. Display. Detailed Implementation

[0029] The terms "first," "second," "third," and "fourth," etc., used in the specification, claims, and drawings of this invention are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0030] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0031] "Multiple" refers to two or more. "And / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. The character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, a clear and complete description will be provided below in conjunction with the technical solutions in the embodiments of this utility model. Obviously, the described embodiments are some, but not all, embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0033] A preferred embodiment of this utility model provides a 3D coplanarity detection and tray arrangement device for irregularly shaped structural components, such as... Figures 1-9 As shown, the system includes a workbench 1, and a feeding belt 10 and a discharging belt 11 arranged side by side on the upper surface of the workbench 1 in a left-right direction. The feeding end of the feeding belt 10 is provided with a feeding component 2 and a first picking component 3 that transfers the workpieces on the feeding component 2 to the feeding belt 10. A detection platform 12 is provided between the discharging end of the feeding belt 10 and the feeding end of the discharging belt 11. A second picking component 111 that transfers the workpieces in a left-right direction is provided on the rear side of the detection platform 12. A first detection station 14 is provided on the detection platform 12. A 3D laser camera 114 is provided below the detection platform 12, facing upwards corresponding to the first detection station 14. The 3D laser camera 114 is used to detect whether the coplanarity of the bottom surface of the workpiece meets the production standard. The discharging end of the discharging belt 11 is provided with a discharging component 5 that removes the workpiece.

[0034] In this embodiment, the inspection platform 12 is arranged along the left-right direction. From left to right, the inspection platform 12 is provided with a second inspection station 13, a first inspection station 14, a third inspection station 15, and a waste removal station 16, each for placing workpieces. A top camera 17 is fixedly installed above the second inspection station 13. A mounting bracket 119 is vertically installed at the front end of the inspection platform 12. The top camera is fixedly mounted on the top of the mounting bracket 119 and faces the second inspection station 13. The top camera 17 is used to inspect whether the top appearance and dimensions of the workpiece meet production standards. The third inspection station 15 faces the third inspection station 16. Station 15 is equipped with a bottom camera, which is used to detect whether the top appearance and size of the workpiece meet the production standards. The inspection platform 12 is provided with through holes 18 for the workpieces on the first inspection station 14 and the third inspection station 15 to be exposed. A waste discharge cylinder 19 is provided horizontally forward on the inspection platform 12, with the movable end of the waste discharge cylinder 19 facing the workpiece on the waste discharge workpiece. The front end of the inspection platform 12 is provided with a guide groove 110 for the workpiece to slide down corresponding to the waste discharge station 16. The guide groove 110 is inclined forward and downward, and a storage box for holding waste workpieces can be placed on the worktable 1 at the end corresponding to the guide groove 110.

[0035] In this embodiment, the first material handling component 3 is an n-shaped trajectory cam robot; the n-shaped trajectory cam robot can use existing technology; the movable end of the n-shaped trajectory cam robot is provided with a fixing rod 112 along the left and right direction, the fixing rod 112 is located behind the detection platform 12, and a U-shaped mounting block 120 is provided on the fixing rod 112 facing the detection platform 12, the opening 62 of the mounting block 120 is set forward, and the first suction nozzle 113 is inserted vertically through the mounting block 120. At least five inspection nozzles 113, corresponding to the unloading end of the feeding belt 10, the second inspection station 13, the first inspection station 14, the third inspection station 15, and the waste discharge station 16, are located directly above these locations. During operation, the first suction nozzle 113 corresponding to the unloading end of the feeding belt 10 picks up the workpiece from the unloading end of the feeding belt 10, and then the n-shaped trajectory cam robot drives the fixed rod. Activity 112 follows an n-shaped trajectory. After completing one trajectory movement, all five first suction nozzles 113 move to the right. At this point, the first suction nozzle 113 corresponding to the unloading end of the feeding belt 10 is positioned on the second inspection station 13. The first suction nozzle 113 corresponding to the unloading end of the feeding belt 10 stops adsorbing the workpiece, completing the transfer of the workpiece from the unloading end of the feeding belt 10 to the second inspection station 13. Subsequently, the n-shaped trajectory cam robot returns to its original position. The first suction nozzle 113 corresponding to the unloading end adsorbs the workpiece on the loading belt 10, and the second suction nozzle 51 corresponding to the second inspection station 13 adsorbs the workpiece on the second inspection station 13. The workpiece is then transferred to the first inspection station 14 and the second inspection station 13 by the cam robot. This process is repeated to realize the transfer of the workpiece from the unloading end of the loading belt 10, the second inspection station 13, the first inspection station 14, the third inspection station 15, the waste discharge station 16, and the loading end of the unloading belt 11.

[0036] In this embodiment, both the feeding end of the feeding belt 10 and the feeding end of the unloading belt 11 are equipped with detection sensors 115 for detecting whether the workpiece is in place. The detection sensors 115 are through-beam photoelectric sensors and are arranged opposite each other on the left and right sides of the feeding end of the feeding belt 10 and the unloading sheet. The detection sensors 115 are electrically connected to the drive motors of the feeding belt 10 and the unloading belt 11, respectively. When the workpiece is located between the transmitting end and the receiving end of the through-beam photoelectric sensor, the workpiece blocks the receiving end from receiving the transmitting end, which means that the workpiece is in place. At this time, the drive motor drives the feeding belt 10 and the unloading sheet for transportation. Both the unloading end of the feeding belt 10 and the unloading end of the unloading sheet are equipped with detection devices for detecting whether the workpiece is in place.

[0037] In this embodiment, the detection device includes a first conductive plate 116 and a second conductive plate 117 electrically connected to the output and input terminals of an external power supply with a voltage of 24 volts, respectively. The unloading ends of the feeding belt 10 and the unloading ends of the feeding belt 11 are each provided with a fixed station 118 along their length direction. The first conductive plate 116 and the second conductive plate 117 are arranged side by side on the fixed station 118. When the workpiece is not in place, the voltage on the first conductive plate 116 is 24 volts and the voltage on the second conductive plate 117 is 0 volts. When the workpiece is in place, one end of the workpiece is located on the first conductive plate 116 and the second conductive plate 117 to realize the circuit connection, indicating that the workpiece is in place. At this time, the n-shaped trajectory cam robot will transfer the workpiece.

[0038] In this embodiment, the unloading component 5 is a four-axis robot. The four-axis robot includes a base 55 fixed on the workbench 1, a swing arm 56, and a picking head 57. One end of the swing arm 56 is located on the upper surface of the base 55, and the other end is horizontally positioned to the left above the unloading belt 11. The left end of the swing arm 56 moves in a circle with its right end as the center and itself as the radius. The picking end of the picking head 57 of the unloading component 5 is vertically downward equipped with a picking cylinder 50. The movable end of the picking cylinder 50 is fixedly connected to a second suction nozzle 51. The four-axis robot uses the second suction nozzle 51 to pick up the workpiece on the unloading belt 11, and the swing arm 56 rotates forward to transfer the workpiece to an empty tray on the empty tray stack. Preferably, there are four picking cylinders 50, and the line connecting the four picking cylinders 50 forms a square.

[0039] In this embodiment, the workbench 1 is provided with an empty tray stacking area 40 for stacking empty trays, and the empty tray stacking area 40 is located in front of the unloading component 5; the workbench 1 is provided with an empty tray receiving groove 4 corresponding to the empty tray stacking area 40, one end of the empty tray receiving groove 4 penetrates the outer wall of the workbench so that the operator can load the empty trays into the empty tray stacking area 40; the empty tray receiving groove 4 is provided with a lifting component 52 for lifting the empty trays, the lifting component 52 is a lifting cylinder vertically mounted on the side wall of the receiving cavity, and a fixing plate horizontally mounted on the lifting cylinder, and the empty tray stacking area 40 is located above the fixing plate; the four-axis robot is provided with a full tray stacking area 41 on the side away from the empty tray stacking area 40, and the four-axis robot... The suction cups on the robot are also responsible for adsorbing and transporting the full trays filled with workpieces to the full tray stacking area 41; the workbench 1 is provided with a full tray receiving groove 42 corresponding to the full tray stacking area 41; the workbench 1 is provided with a tray-separating cylinder 53 facing the empty tray stacking area 40. There are two tray-separating cylinders 53, which are arranged opposite each other on both sides of the empty tray stacking area 40. The movable end of the tray-separating cylinder 53 is provided with a pressure plate 54 horizontally facing the empty tray. When the four-axis robot picks up the empty tray after it has been placed, the tray-separating cylinder 53 drives the pressure plate 54 to extend between the empty tray after it has been placed and the next empty tray to press and hold the next empty tray, so that the four-axis robot can pick up the empty tray after it has been placed.

[0040] In this embodiment, the feeding component 2 includes a feeding tray 20 and a vibrator 21 fixed at the lower end of the feeding tray 20; a flexible vibrating plate 22 is provided at the front end below the feeding tray 20; an outer cover 6 is provided on the workbench 1, and the first picking component 3 is located on the inner wall of the upper side of the outer cover 6 corresponding to the flexible vibrating plate 22; after the worker puts the workpiece into the feeding tray 20, the vibrator 21 at the lower end of the feeding tray 20 will vibrate, causing the workpiece on the feeding tray 20 to fall into the flexible vibrating plate 22. The flexible vibrator 21 in the flexible vibrating plate 22 vibrates, causing the workpiece to present different orientations, which makes it convenient for the first picking component 3 to pick up the workpiece in the correct orientation.

[0041] In this embodiment, the first material handling component 3 is a six-legged robot. The inner wall of the upper side of the outer cover 6 is provided with a mounting plate 60 for mounting the six-legged robot. A panoramic CCD vision camera is provided on the mounting plate 60 facing the placement area. The CCD vision camera takes pictures of the workpieces on the flexible vibrating plate 22, detects the workpieces with the correct orientation, and moves them to the feeding belt 10.

[0042] In this embodiment, the outer cover 6 is provided with an opening 62 that exposes the feeding tray 20, making it convenient for workers to guide the workpiece into the feeding tray 20. The outer wall of the outer cover 6 is also provided with a display 63 that displays the working status of the 3D coplanarity detection and tray placement equipment.

[0043] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A 3D coplanarity detection and tray-mounting device for irregularly shaped structural components, characterized in that, The device comprises a workbench, an upper feeding belt and a lower feeding belt arranged side by side on the upper surface of the workbench in the left-right direction, a feeding assembly arranged at the upper feeding end of the upper feeding belt, a first material taking assembly arranged at the feeding assembly for moving the workpiece on the feeding assembly to the upper feeding belt, a detection platform arranged between the lower feeding end of the upper feeding belt and the upper feeding end of the lower feeding belt, a second material taking assembly arranged at the rear side of the detection platform for moving the workpiece in the left-right direction, a first detection station arranged on the detection platform, a 3D laser camera arranged below the detection platform and facing upward corresponding to the first detection station, and a lower feeding assembly arranged at the lower feeding end of the lower feeding belt for taking down the workpiece.

2. The 3D coplanarity inspection and wafer mapping apparatus of claim 1, wherein, The detection platform is arranged in the left-right direction, and the detection platform is sequentially provided with a second detection station, a first detection station, a third detection station and a waste discharge station from left to right for placing the workpiece; a top camera is fixedly arranged above the second detection station, a bottom camera is arranged below the third detection station and facing the third detection station, and a through hole is arranged on the detection platform for exposing the workpiece on the first detection station and the third detection station; a waste discharge cylinder is horizontally arranged forward on the detection platform, the movable end of the waste discharge cylinder is arranged towards the workpiece on the waste discharge station, and a guide groove is arranged at the front end of the detection platform corresponding to the waste discharge station for sliding the workpiece.

3. The 3D coplanarity inspection and wafer mapping apparatus of claim 1, wherein, The first material taking assembly is an n-shaped track cam mechanical hand, and the movable end of the n-shaped track cam mechanical hand is provided with a fixed rod in the left-right direction, a first suction nozzle is arranged on the fixed rod and facing the detection platform, and the first suction nozzle has at least five and is arranged corresponding to the lower feeding end of the upper feeding belt, the second detection station, the first detection station, the third detection station and the waste discharge station respectively.

4. The 3D coplanarity inspection and wafer mapping apparatus of claim 1, wherein, The upper feeding end of the upper feeding belt and the upper feeding end of the lower feeding belt are provided with detection sensors for detecting whether the workpiece is in place, and the detection sensors are electrically connected with the driving motor of the upper feeding belt and the driving motor of the lower feeding belt respectively; the lower feeding end of the upper feeding belt and the lower feeding end of the lower feeding belt are provided with detection devices for detecting whether the workpiece is in place.

5. The 3D coplanarity inspection and wafer mapping apparatus of claim 4, wherein, The detection device comprises a first conductive sheet and a second conductive sheet electrically connected with the output end and the input end of an external power supply respectively; the lower feeding end of the upper feeding belt and the lower feeding end of the lower feeding belt are provided with a fixed station along the length direction thereof, and the first conductive sheet and the second conductive sheet are arranged side by side on the fixed station in the left-right direction; when the workpiece is in place, one end of the workpiece is located on the first conductive sheet and the second conductive sheet.

6. The 3D coplanarity inspection and wafer mapping apparatus of claim 1, wherein, The lower feeding assembly is a four-axis robot, and a taking cylinder is vertically arranged downward at the taking end of the lower feeding assembly, and the movable end of the taking cylinder is fixedly connected with a second suction nozzle.

7. The 3D coplanarity inspection and wafer mapping apparatus of claim 6, wherein, An empty tray stacking area for stacking empty trays is arranged on the workbench, and the empty tray stacking area is located at the front side of the lower feeding assembly; an empty tray containing groove corresponding to the empty tray stacking area is arranged on the workbench, and a jacking assembly for jacking the empty tray is arranged in the empty tray containing groove; a tray separating cylinder is arranged on the workbench and facing the empty tray stacking area, the tray separating cylinder has two and is arranged on the two sides of the empty tray stacking area in front of and behind each other, and a pressure plate is horizontally arranged at the movable end of the tray separating cylinder and facing the empty tray.

8. The 3D coplanarity inspection and wafer mapping apparatus of claim 1, wherein, The feeding assembly comprises a feeding tray and a vibrator fixed to the lower end of the feeding tray; the front end below the feeding tray is provided with a flexible vibration disc; the upper cover of the workbench is provided with an outer cover, and the first material taking assembly is arranged on the inner wall of the upper side of the outer cover corresponding to the flexible vibration disc.

9. The 3D coplanarity inspection and wafer mapping apparatus of claim 8, wherein, The first material taking assembly is a six-legged manipulator, and the inner wall of the upper side of the outer cover is provided with a mounting plate for mounting the six-legged manipulator; the mounting plate is provided with a panoramic CCD vision camera towards the placement area.

10. The 3D coplanarity inspection and wafer mapping apparatus of claim 8, wherein, The outer cover is provided with an opening for exposing the feeding tray, and the outer side wall of the outer cover is further provided with a display for displaying the working state of the 3D coplanarity detection and tray arranging equipment.

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