Automatic cleaning mechanism for DBR baffle

Abstract

The utility model provides an automatic cleaning mechanism for a DBR (Distributed Bragg Reflector) baffle, which comprises a baffle, an attachment net is arranged at the front part of the baffle, a grip is arranged at the rear side of the baffle, a cleaning mechanism is arranged at the outer side of the grip, the cleaning mechanism comprises a vibration assembly and a cleaning assembly, the vibration assembly comprises a speed reducing motor, and the cleaning assembly comprises a speed reducing motor. The gear motor is fixedly connected to the outer side of the grip, an output shaft of the gear motor is fixedly connected with a rotating piece, and the outer side of the rotating piece is fixedly connected with a supporting cylinder. According to the cleaning device, the cleaning mechanism and the baffle are used in cooperation, the gear motor drives the rotating piece to rotate, the beating piece slides on the fixing block and then extrudes the compression spring, when the beating piece is separated from the fixing block, the beating piece can impact the supporting ring and drive the baffle to vibrate, and meanwhile the gear motor drives the cleaning brush to rotate; and coating sputtering objects on the baffle and the attached net are cleaned, so that the cleaning efficiency is improved, and the working intensity of workers is reduced.

Description

Technical Field

[0001] This utility model relates to the field of DBR baffle cleaning, and in particular to an automatic cleaning mechanism for DBR baffles. Background Technology

[0002] In many high-tech fields such as semiconductor manufacturing and optical coating, DBR (Distributed Bragg Reflector) baffles play a key role. DBR baffles are mainly used to precisely block and shield sputtered particles during the coating sputtering process, thereby effectively preventing sputtered materials from depositing in non-target areas, greatly protecting other components of the equipment from contamination, and also playing an important role in the uniformity and directionality control of the coating.

[0003] Existing DBR baffles rely on manual operation, requiring the use of wire brushes for cleaning and tapping to remove coating sputterings. However, this increases the workload for workers, and manual cleaning may damage the baffles due to improper operation, affecting their service life and performance. Therefore, an automatic cleaning mechanism for DBR baffles is proposed to solve the above problems. Utility Model Content

[0004] Therefore, the purpose of this utility model is to provide an automatic cleaning mechanism for DBR baffles, which can effectively solve the shortcomings of the prior art.

[0005] An automatic cleaning mechanism for a DBR baffle includes a baffle, an attachment net at the front of the baffle, a handle at the rear of the baffle, and a cleaning mechanism on the outer side of the handle. The cleaning mechanism includes a vibration component and a cleaning component. The vibration component includes a geared motor, which is fixedly connected to the outer side of the handle. A rotating component is fixedly connected to the output shaft of the geared motor. A support cylinder is fixedly connected to the outer side of the rotating component. A striking component is slidably connected to the inner wall of the front part of the support cylinder. The striking component and the support cylinder are elastically connected by a compression spring. A support ring is fixedly connected to the rear of the baffle, and a fixing block is fixedly connected to the rear of the support ring.

[0006] Furthermore, the cleaning assembly includes a rotating shaft, which is fixedly connected to the front of the rotating component, and the rotating shaft is rotatably connected through the inner wall of the baffle. A cleaning brush is fixedly connected to the outer wall of the rotating shaft.

[0007] Furthermore, a protective component is provided on the front side of the cleaning brush. The protective component includes a limiting member, which is slidably connected to the inner wall of the cleaning brush. The limiting member and the cleaning brush are elastically connected by a return spring. A protective plate is inserted into the inner wall of the front part of the cleaning brush. A slot is opened at the rear part of the protective plate, and the limiting member is inserted into the inner wall of the slot.

[0008] Furthermore, multiple sets of the limiting member and the reset spring are provided, and the multiple sets of the limiting member and the reset spring are arranged in a circular array with the center point of the cleaning brush as the central axis.

[0009] Furthermore, the limiting member is configured with an arc surface near the center point of the cleaning brush.

[0010] Furthermore, multiple sets of fixing blocks are provided, and the same side of the multiple sets of fixing blocks is set as an inclined surface.

[0011] Furthermore, the front part of the striking element is configured as an arc surface.

[0012] Furthermore, multiple sets of the support cylinder, the striking element, and the compression spring are provided, and the support cylinder, the striking element, and the compression spring are evenly arranged on the outer side of the rotating member.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: Through the combined use of the cleaning mechanism and the baffle, the reduction motor drives the rotating part to rotate, causing the striking part to slide on the fixed block and then compress the compression spring. When the striking part is separated from the fixed block, it will hit the support ring, causing the baffle to vibrate. At the same time, the reduction motor drives the cleaning brush to rotate, cleaning the coating sputtering on the baffle and the attachment net, improving cleaning efficiency and reducing the labor intensity of workers. Through the combined use of the protective component and the cleaning brush, when working on the baffle, the protective plate protects the cleaning brush, preventing coating sputtering from adhering to the cleaning brush. When cleaning is required, the protective plate is pulled to disengage the slot from the limiting part, thereby quickly removing the protective plate for easy cleaning. Attached Figure Description

[0014] Baffle This is a front-view three-dimensional structural diagram of the overall device in this utility model;

[0015] Support ring This is a rear-view three-dimensional structural diagram of the overall device in this utility model;

[0016] Attached net This is a three-dimensional structural diagram of the cleaning mechanism in this utility model.

[0017] Fixed block This is a three-dimensional structural diagram of the limiting component and the reset spring in this utility model;

[0018] Grip This is a three-dimensional structural diagram of the striking component and compression spring in this utility model.

[0019] Explanation of key component symbols:

[0020] Rotating shaft 1 Speed reduction motor 46 Cleaning brush 2 Rotating piece 47 Limiting piece 3 Support cylinder 51 Return spring 41 Striking piece 52 Guard plate 42 Compression spring 61 Clamping groove 43 Figure 1 62 Figure 2 44 Figure 5 63 Figure 2 45 Figure 3 64 Detailed Implementation

[0021] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0022] It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "first," "second," and similar expressions used herein are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0024] Please see Figure 5 , Figure 3 and Figure 1 An automatic cleaning mechanism for a DBR baffle in this embodiment includes a baffle 1, which acts as a shield to block sputtered particles during the coating sputtering process. An attachment mesh 2 is provided at the front of the baffle 1 to capture and attach the coating sputtered material, preventing its diffusion. A handle 3 is provided at the rear of the baffle 1 for easy gripping by the operator. A cleaning mechanism is provided on the outside of the handle 3. The cleaning mechanism includes a vibration component and a cleaning component. The vibration component includes a geared motor 41, which is fixedly connected to the outside of the handle 3 to provide power to the entire vibration component. This technology provides... The existing technology will not be described in detail. The output shaft of the geared motor 41 is fixedly connected to a rotating component 42. As the rotating component 42 rotates, the support cylinder 43 rotates. The support cylinder 43 is fixedly connected to the outside of the rotating component 42, providing a sliding track for the striking component 44, making the movement of the striking component 44 more stable. The striking component 44 is slidably connected to the inner wall of the front part of the support cylinder 43. Driven by the rotating component 42, the striking component 44 slides on the fixed block 47 to compress the spring 45. After detaching from the fixed block 47, it strikes the support ring 46, causing the baffle 1 to vibrate, which helps to clean the coating sputtering.

[0025] Please see Figure 3 , Figure 4 and ​The striking element 44 and the support cylinder 43 are elastically connected by a compression spring 45. The striking element 44 stores energy when it is squeezed, and after release, it pushes the striking element 44 to strike the support ring 46, which enhances the vibration effect and improves the cleaning efficiency. The support ring 46 is fixedly connected to the rear side of the baffle 1, which provides an installation position for the fixing block 47 and bears the impact force of the striking element 44, transmitting the vibration to the baffle 1 to achieve vibration cleaning of the baffle 1. At the same time, it can prevent the baffle 1 from deforming. The fixing block 47 is fixedly connected to the rear of the support ring 46. Multiple sets of fixing blocks 47 are provided. The same side of the multiple sets of fixing blocks 47 is set as an inclined surface to guide the striking element 44 to slide and squeeze the compression spring 45, control the movement trajectory and impact force of the striking element 44, and make the baffle 1 obtain stable vibration.

[0026] Please see ​ The cleaning component includes a rotating shaft 51, which is fixedly connected to the front of the rotating part 42. The rotating shaft 51 is rotatably connected to the inner wall of the baffle 1. The rotating shaft 51 transmits the rotation of the rotating part 42 to the cleaning brush 52, so that the cleaning brush 52 can rotate to clean the splashes on the baffle 1 and the attachment net 2. The cleaning brush 52 is fixedly connected to the outer wall of the rotating shaft 51. The cleaning brush 52 is a steel wire brush. When rotating, it directly contacts the baffle 1 and the attachment net 2. The brush bristles rub against the splashes to remove the attached coating splashes. It is a direct cleaning component. The front of the striking part 44 is set with an arc surface to reduce friction with the fixed block 47 and make the impact on the support ring 46 more stable. Multiple sets of support cylinder 43, striking part 44 and compression spring 45 are provided. The support cylinder 43, striking part 44 and compression spring 45 are evenly arranged on the outside of the rotating part 42 to ensure the uniformity of the vibration effect.

[0027] Please see ​ , ​ and ​A protective component is provided on the front side of the cleaning brush 52. The protective component includes a limiting member 61, which is slidably connected to the inner wall of the cleaning brush 52 and cooperates with the slot 64 on the protective plate 63 to fix the position of the protective plate 63 and prevent it from falling off. At the same time, when the protective plate 63 is pulled, the limiting member 61 disengages from the slot 64 under the action of the return spring 62, making it easy to remove the protective plate 63 for cleaning. The limiting member 61 and the cleaning brush 52 are elastically connected by the return spring 62, which provides elastic force to the limiting member 61 to keep it in the insertion state of the slot 64 of the protective plate 63, ensuring the installation stability of the protective plate 63. The protective plate 63 is inserted into the inner wall of the front part of the cleaning brush 52 during operation. To prevent coating sputterings from adhering to the cleaning brush 52, the cleaning frequency of the cleaning brush 52 is reduced, and its service life is extended. At the same time, it can be quickly removed during cleaning for easy cleaning and maintenance. The protective plate 63 has a slot 64 at the rear, and the limiting member 61 is inserted into the inner wall of the slot 64. Multiple sets of limiting members 61 and return springs 62 are provided. The multiple sets of limiting members 61 and return springs 62 are arranged in a circumferential array with the center point of the cleaning brush 52 as the central axis, which can increase the stability when inserting the protective plate 63. The limiting member 61 is set with an arc surface near the center point of the cleaning brush 52. The arc surface allows the limiting member 61 to slide on the inner wall of the slot 64, thereby facilitating the disassembly of the protective plate 63.

[0028] Working principle: When in use, the geared motor 41 is started, and its output shaft drives the rotating part 42 to rotate. The rotating part 42 drives the support cylinder 43 to rotate. The striking part 44 inside the support cylinder 43 contacts the fixed block 47 during rotation. Since one side of the fixed block 47 is inclined, the striking part 44 will squeeze the compression spring 45 when sliding. As the rotating part 42 continues to rotate, the striking part 44 disengages from the fixed block 47, and the compression spring 45 releases the stored energy, pushing the striking part 44 to strike the support ring 46, transmitting the vibration to the baffle 1, causing the baffle 1 to vibrate, which helps to loosen the coating sputtered material attached to the baffle 1 and the attachment mesh 2.

[0029] While the geared motor 41 drives the rotating part 42 to rotate, the rotating shaft 51 fixed at the front of the rotating part 42 also rotates, driving the cleaning brush 52 to rotate as well. The rotating cleaning brush 52 directly contacts the baffle 1 and the attachment net 2. Through the friction between the bristles and the sputtered material, the loose coating sputtered material is cleaned off from the surface of the baffle 1 and the attachment net 2, which improves cleaning efficiency and reduces the workload of workers.

[0030] The protective plate 63 is inserted into the front of the cleaning brush 52 to prevent coating sputterings from adhering to the cleaning brush 52, reduce the cleaning frequency of the cleaning brush 52, and extend its service life. When the protective plate 63 needs to be cleaned, the protective plate 63 is pulled, and the groove 64 at the rear of the protective plate 63 squeezes the limiting member 61, thereby squeezing the return spring 62, so that the limiting member 61 is disengaged from the groove 64, making it easy to quickly remove the protective plate 63 for cleaning.

[0031] In summary, the automatic cleaning mechanism for the DBR baffle in the above embodiments of this utility model, through the combined use of the cleaning mechanism and the baffle, the geared motor drives the rotating part to rotate, causing the striking part to slide on the fixed block, and then compressing the compression spring. When the striking part disengages from the fixed block, it will impact the support ring, causing the baffle to vibrate. At the same time, the geared motor drives the cleaning brush to rotate, cleaning the coating sputtering on the baffle and the attachment net, improving cleaning efficiency and reducing the workload of workers. Through the combined use of the protective component and the cleaning brush, when working on the baffle, the protective plate protects the cleaning brush, preventing coating sputtering from adhering to the cleaning brush. When cleaning is required, the protective plate is pulled to disengage the slot from the limiting component, thereby quickly removing the protective plate for easy cleaning.

[0032] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0033] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. An automatic cleaning mechanism for a DBR baffle, characterized by, The utility model provides a cleaning device for window, including baffle, the front of baffle is provided with attached net, the rear side of baffle is provided with handle, the outside of handle is provided with cleaning mechanism, the cleaning mechanism includes vibration subassembly and cleaning subassembly, the vibration subassembly includes speed reducer motor, speed reducer motor fixed connection is connected in the outside of handle, the output shaft of speed reducer motor is fixedly connected with rotating part, the outside fixed connection of rotating part has support cylinder, the front inner wall sliding connection of support cylinder has beating piece, beating piece and support cylinder are elastically connected through compression spring, the rear side fixed connection of baffle has support ring, the rear fixed connection of support ring has fixed block.

2. The DBR baffle plate automatic cleaning mechanism according to claim 1, characterized by, The cleaning subassembly includes a rotating shaft, the rotating shaft is fixedly connected to the front of the rotating part, the rotating shaft is rotatably connected to the inner wall of the baffle, and the outer wall of the rotating shaft is fixedly connected with a cleaning brush.

3. The DBR baffle plate automatic cleaning mechanism according to claim 2, characterized in that, The cleaning brush is provided with a protection assembly on the front side, the protection assembly includes a limiting piece, the limiting piece is slidingly connected to the inner wall of the cleaning brush, the limiting piece is elastically connected to the cleaning brush through a return spring, a protection plate is inserted into the inner wall of the front of the cleaning brush, a clamping groove is formed in the rear of the protection plate, and the limiting piece is inserted into the inner wall of the clamping groove.

4. The DBR baffle plate automatic cleaning mechanism according to claim 3, characterized by, The limiting piece and the return spring are provided with multiple groups, and multiple groups of the limiting piece and the return spring are distributed in a circular array around the center point of the cleaning brush as the center axis.

5. The DBR baffle plate automatic cleaning mechanism according to claim 4, characterized by, The limiting piece is provided with a circular arc surface near the center point of the cleaning brush.

6. The DBR baffle plate automatic cleaning mechanism according to claim 1, wherein The fixed block is provided with multiple groups, and the same side of multiple groups of the fixed block is provided with an inclined surface.

7. The DBR baffle plate automatic cleaning mechanism according to claim 1, wherein The front of the beating piece is provided with a circular arc surface.

8. The DBR baffle plate with an automatic cleaning mechanism according to claim 1, wherein, The support cylinder, the beating piece and the compression spring are provided with multiple groups, and the support cylinder, the beating piece and the compression spring are evenly arranged on the outside of the rotating part.

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