Universal dust-free pipe black spot detector

Abstract

The utility model discloses a universal dust-free pipe black spot detector which comprises a machine body, the machine body comprises a rack, a plurality of machine shells are installed on the rack, an industrial personal computer is installed on one machine shell, a supporting frame is arranged in the machine body, the supporting frame is composed of a plurality of supporting steel bars, and the supporting steel bars are connected with the industrial personal computer. A workbench is arranged on the supporting frame, a detection box is installed on the workbench, the detection box is composed of at least six fixing plates with hollow centers, the fixing plates are movably connected with coaxial light source plates, and a detection position door is arranged on the coaxial light source plate close to one face of the industrial personal computer. A first track plate and a second track plate are fixedly connected to the two sides of the detection position door, a detection camera is arranged on the opposite side of each coaxial light source plate, a mounting plate is arranged below the detection camera, and the mounting plate is mounted on the supporting frame.

Description

Technical Field

[0001] This utility model relates to the field of quality inspection technology, specifically a general-purpose dust-free tube black spot detection machine. Background Technology

[0002] In the semiconductor manufacturing industry, cleanroom tubes serve as crucial connecting carriers. If black spots are present on their surface, it could potentially lead to a series of catastrophic problems. These black spots could be tiny particulate impurities, localized defects in the material, or other contaminants. Once black spot impurities are introduced into the cleanroom tube, they will contaminate the ultra-clean environment of semiconductor production and increase the probability of other products becoming contaminated.

[0003] Traditional black spot detection methods mainly rely on manual visual inspection. However, manually observing each cleanroom tube to find black spots is extremely slow, which restricts production efficiency. Different inspectors have significant subjective differences in their judgment criteria for black spots, resulting in a lack of consistency in the quality judgment of cleanroom tubes. As the inspection time increases, the inspectors' attention and sensitivity decrease, making it easy to miss black spots. In addition, human vision is limited, making it difficult to detect extremely small black spots.

[0004] Therefore, it is necessary to design a general-purpose dust-free tube black spot detection machine that can accurately screen and quickly identify black spots. Utility Model Content

[0005] The purpose of this invention is to provide a universal dust-free tube black spot detection machine to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution: It includes a machine body, which includes a frame. Several housings are mounted on the frame, and an industrial control computer is mounted on one of the housings. A support frame is provided inside the machine body, consisting of several supporting steel bars. A workbench is provided on the support frame, and a detection box is mounted on the workbench. The detection box consists of at least six centrally hollowed-out fixing plates. Coaxial light source plates are movably connected to the fixing plates. A detection door is provided on the coaxial light source plate closest to the industrial control computer. A first track plate and a second track plate are fixedly connected to both sides of the detection door. A detection camera is provided on one side of each coaxial light source plate. A mounting plate is provided below the detection camera and is mounted on the support frame. This utility model features precision, efficiency, and intelligent stability.

[0007] According to the above technical solution, a linear module is fixedly connected to the side of the detection position door near the first track plate, and the linear module is movably connected to a support steel bar near the side of the first track plate.

[0008] According to the above technical solution, the first track plate is fixedly connected to the first guide rail, the second track plate is fixedly connected to the second guide rail, and the first guide rail and the second guide rail are movably connected to the support steel bars on both sides of the detection position door.

[0009] According to the above technical solution, a number of the supporting steel bars are provided with sliding grooves, and the linear module, the first guide rail and the second guide rail are provided with sliders. The sliding grooves and sliders are a mating connection structure.

[0010] According to the above technical solution, both the frame and the housing are made of stainless steel.

[0011] According to the above technical solution, an ion fan is installed inside the body.

[0012] According to the above technical solution, a grating sensor is provided on the detection gate.

[0013] According to the above technical solution, the bottom of the fuselage is provided with at least four adjustable support feet.

[0014] According to the above technical solution, a start button is provided on the casing below the industrial control computer, an emergency stop button is provided on one side of the start button, and a main power switch is provided on the other side of the emergency stop button.

[0015] Compared with the prior art, the beneficial effects achieved by this utility model are:

[0016] (1) By setting up a coaxial light source plate and a detection camera, the cubic coaxial light source plate emits uniform and stable light into the detection box through the hollow area in the center of the fixed plate, thereby avoiding the interference of shadows and reflections on the detection results, highlighting the black spots of the clean tube itself and its white background, making the detailed features of the clean tube surface clearly presented, realizing no dead angle illumination. At the same time, the detection camera on the opposite side, with its high resolution and high frame rate characteristics, can quickly and accurately capture the image information of the clean tube surface. For extremely small black spots, the detection camera can also quickly image, and then transmit the image data to the system for analysis and processing. The system feeds back the results and images to the industrial control computer, thereby replacing manual labor and greatly improving the accuracy and efficiency of detection.

[0017] (2) By setting up an ion fan, the static electricity inside the machine body can be effectively neutralized, reducing the phenomenon of static electricity adsorption of dust, providing a cleaner environment for the testing of dust-free tubes, and helping to improve the accuracy of the test results.

[0018] (3) By setting up a grating sensor, the status of the detection position door and the surrounding environment can be monitored in real time, preventing personnel from getting their hands caught or foreign objects from entering the detection area, thus improving the safety and reliability of the equipment. Attached Figure Description

[0019] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0020] Figure 1 This is a schematic diagram of the appearance structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the internal structure of this utility model;

[0022] Figure 3 yes Figure 2 Enlarged view of point A in the middle;

[0023] Figure 4 This is a schematic diagram of the detection structure of this utility model;

[0024] In the diagram: 1. Machine body; 11. Frame; 12. Housing; 121. Start button; 122. Emergency stop button; 123. Main power switch; 13. Industrial computer; 14. Supporting steel bars; 15. Workbench; 16. Adjustable support feet;

[0025] 2. Testing box; 21. Fixing plate; 211. Coaxial light source plate;

[0026] 3. Detection position door; 31. First track plate; 311. First guide rail; 32. Second track plate; 321. Second guide rail; 33. Linear module;

[0027] 4. Camera inspection; 41. Mounting plate. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present invention, the solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0029] Please see Figure 1-4The present invention provides a technical solution: a general-purpose dust-free tube black spot detection machine, including a body 1, the body 1 including a frame 11, a plurality of housings 12 are installed on the frame 11, an industrial control computer 13 is installed on one of the housings 12, a support frame is provided inside the body 1, the support frame is composed of a plurality of supporting steel bars 14, a workbench 15 is provided on the support frame, a detection box 2 is installed on the workbench 15, the detection box 2 is composed of at least six fixed plates 21 with hollow centers, a coaxial light source plate 211 is movably connected to the fixed plate 21, a detection door 3 is provided on the coaxial light source plate 211 near the industrial control computer 13, a first track plate 31 and a second track plate 32 are fixedly connected to both sides of the detection door 3, a detection camera 4 is provided on one side of each coaxial light source plate 211, a mounting plate 41 is provided below the detection camera 4, and the mounting plate 41 is installed on the support frame 14;

[0030] Through this technical solution, the rack 11 provides a stable framework, while the housing 12 mounted on the rack 11 not only protects the internal components but also provides a relatively enclosed working environment for the equipment, reducing interference from external dust and impurities. Operators can set parameters and view test results through the industrial control computer 13. The support frame and workbench 15 provide a stable installation platform for the test box 2, ensuring the stability of the test process. The central hollow area on the test box 2 corresponds to and overlaps with the light source area of ​​the coaxial light source plate 211, completely transmitting the light source into the box to achieve the best illumination effect. At the same time, the detection camera 4 on the opposite side, with its high resolution and high frame rate, can quickly and accurately capture image information of the surface of the clean tube. Even for extremely small black spots, the detection camera 4 can quickly image them. Then, the image data is transmitted to the system for analysis and processing. The system feeds back the results and images to the industrial control computer 13, thereby replacing manual labor and greatly improving the accuracy and efficiency of the test.

[0031] Furthermore, a linear module 33 is fixedly connected to the side of the detection gate 3 near the first track plate 31, and the linear module 33 is movably connected to the support steel bar 14 near the side of the first track plate 31.

[0032] Through this technical solution, the linear module 33 provides a stable and precise power source for the movement of the detection gate 3. The linear module 33 can move in a straight line along the supporting steel bar, thereby driving the detection gate 3 connected to it to achieve smooth and stable opening and closing actions.

[0033] Furthermore, the first track plate 31 is fixedly connected to the first guide rail 311, the second track plate 32 is fixedly connected to the second guide rail 321, and the first guide rail 311 and the second guide rail 321 are movably connected to the support steel bars 14 on both sides of the detection position door 3;

[0034] With this technical solution, the first guide rail 311 is fixedly connected to the first track plate 31, and the second guide rail 321 is fixedly connected to the second track plate 32. Both of them are movably connected to the support steel bars 14 on both sides of the detection door 3, which can strictly limit the movement trajectory of the detection door 3. This makes the detection door 3 move up and down only along the straight line direction specified by the guide rail, avoiding the detection door 3 from deviating or shaking during the movement.

[0035] Furthermore, several support steel bars 14 are provided with grooves, and linear modules 33, first guide rail 311 and second guide rail 321 are provided with sliders, and the grooves and sliders are connected in a mating manner.

[0036] With this technical solution, the sliding of the slider in the groove is a low-friction motion. This design allows the linear module 33, the first guide rail 311 and the second guide rail 321 to move smoothly along the support steel bar 14, thereby driving the detection door 3 to achieve smooth opening and closing actions, avoiding problems such as jamming and wear caused by excessive friction, and ensuring the smoothness of the movement process of the detection door 3.

[0037] Furthermore, both the frame 11 and the housing 12 are made of stainless steel;

[0038] Through this technical solution, stainless steel exhibits excellent corrosion resistance, resisting the erosion of chemicals and oxidation by humid air. At the same time, stainless steel has high strength and hardness and does not easily attract dust and impurities.

[0039] Furthermore, an ion fan is installed inside the body 1;

[0040] This technical solution effectively neutralizes static electricity inside the casing 1, reduces the phenomenon of static electricity attracting dust, provides a cleaner environment for the testing of dust-free tubes, and helps improve the accuracy of test results.

[0041] Furthermore, a grating sensor is installed on the detection gate 3;

[0042] Through this technical solution, the grating sensor can monitor the area around the detection door 3 in real time. When a person's limb or a foreign object accidentally enters the danger zone near the detection door 3, the grating sensor will quickly detect the change in light obstruction and immediately send a signal back to the system. After receiving the information, the system will take appropriate measures in time to stop the movement of the detection door 3, thereby avoiding injury to the person.

[0043] Furthermore, the bottom of the fuselage 1 is provided with at least four adjustable support feet 16;

[0044] With this technical solution, the adjustable support feet 16 can be flexibly adjusted according to the undulations of the ground. By rotating the feet, their height can be changed, so that the fuselage 1 can remain level even on uneven ground.

[0045] Furthermore, a start button 121 is provided on the casing 12 below the industrial computer 13, an emergency stop button 122 is provided on one side of the start button 121, and a main power switch 123 is provided on one side of the emergency stop button 122.

[0046] Through this technical solution, the start button 121 controls the closing of the detection position door 3, and the emergency stop button 122 ensures the safety of equipment and personnel. In the event of a sudden abnormal situation, the operator can immediately press the emergency stop button 122 to instantly cut off the power source of the equipment. The main power switch 123 can control the overall power supply of the testing machine. When the testing work is completed or the equipment needs to be shut down for a long time for maintenance, the operator can turn off the main power switch 123 to completely cut off the power supply of the equipment. This not only avoids energy waste when the equipment is in standby mode, but also reduces the risk of electrical failures that may be caused by prolonged power supply.

[0047] Working principle: When the equipment is started, the ion fan begins to run to neutralize the static electricity inside the machine body 1, providing a clean environment for testing. The operator places the cleanroom tube to be tested into the testing chamber 2. The grating sensor monitors the surrounding environment in real time. Then, by triggering the start button 121, the linear module 33 drives the testing door 3 to close downwards. After the testing door 3 is closed, the system controls the coaxial light source plates 211 on the top, bottom, left, and right sides to flash sequentially. Each time a light source on a side flashes, the corresponding testing camera 4 takes an image. The images are uploaded to the system for analysis and processing. The system then feeds back the results to the display screen to determine whether the cleanroom tube is a good product. Finally, the testing door 3 automatically rises, and the operator removes the cleanroom tube that has been tested.

[0048] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation or specific orientation structure and operation, and therefore should not be construed as a limitation of this utility model; the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In addition, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0049] In the description of this utility model, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this utility model, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, those skilled in the art can combine different embodiments or examples and features of different embodiments or examples described in this utility model without contradiction.

[0050] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A general-purpose dust-free tube black point detection machine comprising a machine body (1), characterized in that: The fuselage (1) includes a rack (11), a plurality of housings (12) are mounted on the rack (11), an industrial computer (13) is mounted on one of the housings (12), a support frame is arranged in the fuselage (1), the support frame is composed of a plurality of support steel bars (14), a workbench (15) is arranged on the support frame, a detection box (2) is mounted on the workbench (15), the detection box (2) is composed of at least six center-hollow fixing plates (21), coaxial light source plates (211) are movably connected to the fixing plates (21), a detection position door (3) is arranged on the coaxial light source plate (211) close to the industrial computer (13), the detection position door (3) is fixedly connected with first and second track plates (31, 32) on both sides, a detection camera (4) is arranged on the side opposite to each coaxial light source plate (211), and a mounting plate (41) is arranged below the detection camera (4) and mounted on the support frame.

2. A universal dust-free tube black spot detection machine according to claim 1, characterized in that: The detection position door (3) is fixedly connected with a linear module (33) on the side close to the first track plate (31), and the linear module (33) is movably connected to the support steel bar (14) close to the first track plate (31).

3. The universal dust-free tube black spot detection machine according to claim 1, characterized in that: The first track plate (31) is fixedly connected with a first guide rail (311), the second track plate (32) is fixedly connected with a second guide rail (321), and the first and second guide rails (311, 321) are movably connected to the support steel bars (14) on both sides of the detection position door (3).

4. The universal dust-free tube black spot detection machine according to claim 2, characterized in that: A plurality of sliding grooves are arranged on the support steel bars (14), and sliding blocks are arranged on the linear module (33), the first guide rail (311) and the second guide rail (321), and the sliding grooves and the sliding blocks are in a matched connection structure.

5. The universal dust-free tube black spot detection machine according to claim 1, characterized in that: The rack (11) and the housings (12) are made of stainless steel.

6. A universal dust-free tube black spot detection machine according to claim 1, characterized in that: An ion fan is arranged in the fuselage (1).

7. The universal dust-free tube black spot detection machine according to claim 1, characterized in that: A grating sensor is arranged on the detection position door (3).

8. The universal dust-free tube black spot detection machine according to claim 1, characterized in that: At least four adjustable support feet (16) are arranged at the bottom of the fuselage (1).

9. The universal dust-free tube black spot detection machine according to claim 1, characterized in that: A start button (121) is arranged on the housing (12) below the industrial computer (13), an emergency stop button (122) is arranged on one side of the start button (121), and a main power switch (123) is arranged on one side of the emergency stop button (122).

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