Compensation mechanism and voice coil motor

Abstract

The utility model belongs to the technical field of semiconductor manufacturing, and provides a compensation mechanism and a voice coil motor. The compensation mechanism comprises a first magnet, a middle back iron and a second magnet which are sequentially and coaxially arranged in the z direction, the magnetizing direction of the first magnet and the magnetizing direction of the second magnet are the z direction, the first magnet and the second magnet generate magnetic levitation force on the middle back iron, and the gravity of the vertical micropositioner and the opposite acting force of the reed can be compensated through the magnetic levitation force. The middle back iron is provided with a first structure part and a second structure part which are arranged in a nested mode, the second structure part is arranged on the outer side of the first structure part in a sleeving mode, and the thickness of the junction of the first structure part and the second structure part is larger than that of the center area of the first structure part. Therefore, the voice coil motor provided with the compensation mechanism can have the characteristic of constant rigidity in a larger stroke range. The voice coil motor comprises the first coil and the compensation mechanism, and the relative position of the first coil and the middle back iron is kept unchanged.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a compensation mechanism and a voice coil motor. Background Technology

[0002] In the field of semiconductor manufacturing and inspection, the workpiece stage not only needs to facilitate device transfer with the semiconductor transport system but also needs to achieve precise positioning of the semiconductor devices it carries. Among these components, the vertical micro-stage, a key part of the workpiece stage, is responsible for achieving precise positioning of semiconductor devices (such as silicon wafers) along three axes: vertical, x-axis, and y-axis. With the continuous development of semiconductor manufacturing and inspection technologies, the requirements for production efficiency and positioning accuracy during semiconductor device processing are increasing, placing higher demands on the motion precision control of the vertical micro-stage.

[0003] Vertical micro-motion stages typically employ a three-point or four-point actuator layout. To ensure vertical output performance, reeds are used as guiding elements for vertical motion and decoupling elements for pitch and yaw. To improve the control accuracy of the vertical micro-motion stage, in the workpiece stage with the above-mentioned structure, the actuator not only needs to provide driving force for the motion process but also needs to compensate for the gravity of the vertical micro-motion stage and the reaction force of the reeds.

[0004] Currently, the vertical motion of a vertical micro-motion stage typically employs a combination of a gravity compensation device and a voice coil motor to improve its control accuracy. The gravity compensation device uses principles such as air levitation or magnetic levitation to compensate for the gravity of the vertical drive load of the micro-motion stage with constant gravity compensation. The voice coil motor, as the vertical actuator, provides the reed's counterforce and the driving force for the vertical motion of the micro-motion stage. Within different vertical stroke ranges, the reed's elastic force and displacement exhibit a linear relationship. However, when the stroke range is large, the linearity between the voice coil motor's output thrust and displacement becomes poor, reducing the compensation accuracy of the voice coil motor for the reed's counterforce and resulting in poor control accuracy for the vertical micro-motion stage equipped with the voice coil motor. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of this application is to provide a compensation mechanism and a voice coil motor that can compensate for the gravity of the vertical micro stage and the reverse force of the reed, and provide the pushing and pulling force for the vertical movement of the vertical micro stage, so as to solve the problem that the control accuracy of the vertical micro stage equipped with the voice coil motor is poor when the stroke of the voice coil motor is large in the prior art.

[0006] To achieve the above and other related objectives, this application provides a compensation mechanism, including a first magnet, an intermediate back iron, and a second magnet arranged coaxially along the z-direction. The relative positions of the first magnet and the second magnet remain unchanged, and the intermediate back iron is capable of relative movement between the first magnet and the second magnet along the z-direction.

[0007] The intermediate back iron has a first structural part and a second structural part nested together, with the second structural part sleeved on the outside of the first structural part;

[0008] Wherein, the thickness at the junction of the first structural portion and the second structural portion is greater than the thickness of the central region of the first structural portion, and the magnetization direction of the first magnet and the second magnet is the z-direction.

[0009] Optionally, the first structural portion is an annular structure, and the first structural portion of the annular structure has a first through hole.

[0010] Optionally, the first structural portion has a first inclined surface on the side facing the first through hole. The first inclined surface is radially inclined along the first structural portion and faces the first magnet, so that the thickness of the first structural portion gradually increases radially from the inside to the outside.

[0011] Optionally, the first structural portion has a second inclined surface on the side facing the first through hole. The second inclined surface is radially inclined along the first structural portion and faces the second magnet, so that the thickness of the first structural portion gradually increases radially from the inside to the outside.

[0012] Optionally, the first structural portion has an upper inner ring and a lower inner ring symmetrically arranged along the z-direction on the side facing the first through hole. Both the upper inner ring and the lower inner ring are inclined radially along the first structural portion so that the thickness of the first structural portion gradually increases radially from the inside to the outside.

[0013] Optionally, the first structural portion is provided with a first groove in the form of a gyroscope on the side near the first magnet, and the radial dimension of the first groove gradually increases from the bottom of the groove to the opening of the groove.

[0014] Optionally, the first structural portion is provided with a second groove in the form of a gyroscope on the side near the second magnet, and the radial dimension of the second groove gradually increases from the bottom of the groove to the opening of the groove.

[0015] Optionally, the first structural portion is provided with a third groove and a fourth groove, both of which are gyroscopic structures and are spaced apart from each other and symmetrically arranged on opposite sides of the first structural portion along the z-direction;

[0016] In the direction from the bottom of the third groove to the opening of the third groove, the radial dimension of the third groove gradually increases, and in the direction from the bottom of the fourth groove to the opening of the fourth groove, the radial dimension of the fourth groove gradually increases.

[0017] This application also provides a voice coil motor, including a first coil and any of the compensation mechanisms in the foregoing embodiments, wherein the relative position of the first coil and the intermediate back iron in the compensation mechanism remains unchanged.

[0018] Optionally, the voice coil motor further includes a first back iron, a second back iron, and a third back iron;

[0019] The first back iron is provided with a second through hole, which penetrates the first back iron along the z direction. The first magnet, the second magnet, the intermediate back iron and the first coil are all located in the second through hole. The second back iron is connected to the side of the first magnet away from the intermediate back iron, and the third back iron is connected to the side of the second magnet away from the intermediate back iron.

[0020] As described above, compared with the prior art, the compensation mechanism and voice coil motor provided in this application have at least the following beneficial effects:

[0021] In the compensation mechanism of this application, the first magnet and the second magnet generate magnetic levitation force on the intermediate back iron. The magnetic levitation force can compensate for the gravity of the vertical micro-motion stage and the reverse force of the reed. The intermediate back iron is provided with a first structural part. The thickness at the junction of the first structural part and the second structural part is greater than the thickness of the central area of ​​the first structural part. This can increase the linear range of the magnetic levitation force and displacement. This allows the voice coil motor with the compensation mechanism to exert the same magnitude and opposite direction of the force on the vertical micro-motion stage by the voice coil motor and the reed within a larger stroke range. That is, the vertical resultant force of the two acting on the vertical micro-motion stage tends to be a zero stiffness curve. This increases the stroke range of the voice coil motor with the compensation mechanism and improves the compensation accuracy for the reverse force of the reed.

[0022] The voice coil motor of this application includes the aforementioned compensation mechanism, and therefore also has the aforementioned beneficial effects. Furthermore, the voice coil motor also includes a first coil, which cuts the magnetic field generated by the first and second magnets, thereby generating a Lorentz force. This Lorentz force enables the driving action of the vertical micro-motion stage. The vertical resultant force of the magnetic levitation force and the Lorentz force of the voice coil motor varies linearly with displacement within the large stroke range of the vertical micro-motion stage, giving the voice coil motor constant stiffness characteristics. This effectively improves the heating problem of the voice coil motor and enhances the positioning accuracy of the vertical micro-motion stage. The voice coil motor of this application achieves constant stiffness gravity compensation function using only the first magnet, the second magnet, and the intermediate back iron, and, combined with the first coil, achieves constant stiffness vertical driving function. It has a simple structure, occupies little space, and improves the overall integration of the equipment. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 The diagram shown is a structural schematic of a compensation mechanism provided in an embodiment of this application.

[0025] Figure 2 The diagram shown is a structural schematic of a voice coil motor provided in an embodiment of this application.

[0026] Figure 3 The diagram shown is a structural schematic of a voice coil motor with a first through hole provided in Embodiment 1 of this application.

[0027] Figures 4 to 6 The diagrams shown are schematic diagrams of three different voice coil motors with a first inclined surface provided in Embodiment 1 of this application.

[0028] Figures 7 to 9 The diagrams shown are schematic diagrams of three different voice coil motors with a second inclined surface provided in Embodiment 1 of this application.

[0029] Figure 10 The diagram shown is a structural schematic of a voice coil motor having an upper inner ring side and a lower inner ring side, as provided in Embodiment 1 of this application.

[0030] Figure 11 The diagram shown is a structural schematic of a voice coil motor with a first groove, provided in Embodiment 2 of this application.

[0031] Figure 12The diagram shown is a structural schematic of a voice coil motor with a second groove, provided in Embodiment 2 of this application.

[0032] Figure 13 The diagram shown is a structural schematic of a voice coil motor with a third groove and a fourth groove, provided in Embodiment 2 of this application.

[0033] Figure 14 The diagram shown is a structural schematic of a voice coil motor with a first coil provided in Embodiment 3 of this application.

[0034] Figures 15 to 19 The diagrams shown are schematic diagrams of five different voice coil motors provided in Embodiment 4 of this application.

[0035] Figure 20 Displayed as Figure 16 The graph shows the vertical resultant force versus displacement for a voice coil motor with a first through hole of different radial dimensions.

[0036] Figure 21 Displayed as Figure 19 The graphs shown depict the vertical resultant force versus displacement of the voice coil motor when the third and fourth grooves have different cone angles.

[0037] Figure 22 Displayed as Figure 18 The graph shows the vertical resultant force versus displacement of the voice coil motor.

[0038] Figure 23 Displayed as Figure 17 The graph shows the vertical resultant force versus displacement of the voice coil motor.

[0039] Figure 24 Displayed as Figure 19 The graph shows the vertical resultant force versus displacement of the voice coil motor.

[0040] Illustration of reference numerals in the attached diagram:

[0041] 10. First component; 111. First magnet; 112. Second magnet; 113. Third magnet; 121. First back iron; 1211. Second through hole; 122. Second back iron; 123. Third back iron; 124. Fourth back iron; 20. Second component; 211. Intermediate back iron; 2111. First structural part; 2011. First through hole; 2012. First inclined surface; 2013. Second inclined surface; 2014. Upper side of inner ring; 2015. Lower side of inner ring; 2021. First groove; 2022. Second groove; 2023. Third groove; 2024. Fourth groove; 2112. Second structural part; 221. First coil. Detailed Implementation

[0042] To make the technical objectives, technical solutions, and technical effects of this application clearer, the technical solutions in this application will be clearly and completely described below in conjunction with embodiments. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0043] Therefore, the following detailed description of embodiments of this application is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0044] In the description of this application, it should be noted that the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with an implementation or example, which are included in at least one implementation or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same implementation or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more implementations or examples.

[0045] Reference Figure 1 This embodiment provides a compensation mechanism, including a first magnet 111, an intermediate back iron 211, and a second magnet 112. With the axis of the intermediate back iron 211 as the z-direction, the first magnet 111, the intermediate back iron 211, and the second magnet 112 are coaxially arranged sequentially along the z-direction. The relative positions of the first magnet 111 and the second magnet 112 remain unchanged, while the intermediate back iron 211 can move relative to the first magnet 111 and the second magnet 112 along the z-direction. Specifically, the movement of the intermediate back iron 211 along the z-direction can be controlled, or the movement of the first magnet 111 and the second magnet 112 can be controlled along the z-direction, so that the intermediate back iron 211 can move relative to the first magnet 111 and the second magnet 112.

[0046] The intermediate back iron 211 has a first structural portion 2111 and a second structural portion 2112, which are nested together, with the second structural portion 2112 fitted over the outside of the first structural portion 2111. The thickness at the junction of the first structural portion 2111 and the second structural portion 2112 is greater than the thickness of the central region of the first structural portion 2111. The magnetization direction of both the first magnet 111 and the second magnet 112 is the z-direction.

[0047] The first magnet 111 and the second magnet 112 generate a magnetic levitation force on the intermediate back iron 211. This magnetic levitation force can compensate for the gravity of the vertical micro-motion stage and the reverse force of the reed. The intermediate back iron 211 is provided with a first structural part 2111. The thickness at the junction of the first structural part 2111 and the second structural part 2112 is greater than the thickness of the central region of the first structural part 2111. This increases the linear range of the magnetic levitation force and displacement, and increases the stroke range of the voice coil motor with the compensation mechanism. This allows the voice coil motor and the reed to exert the same magnitude but opposite direction of force on the vertical micro-motion stage within a larger stroke range. In other words, the vertical resultant force of the two acting together on the vertical micro-motion stage tends to be a zero stiffness curve, thus improving the compensation effect on the reverse force of the reed.

[0048] This embodiment also provides a voice coil motor, see reference. Figure 2 The first coil 221 and any of the compensation mechanisms in this application are included, and the relative positions of the first coil 221 and the intermediate back iron 211 in the compensation mechanism remain unchanged.

[0049] The first coil 221 cuts the magnetic field generated by the first magnet 111 and the second magnet 112, thereby generating a Lorentz force. This Lorentz force drives the vertical micro-motion stage. The intermediate back iron 211 of the compensation mechanism has a first structural part 2111, which makes the vertical resultant force of the magnetic levitation force of the voice coil motor and the Lorentz force linearly related to the displacement over a larger stroke range of the vertical micro-motion stage. Therefore, the voice coil motor has constant stiffness characteristics within its stroke range. By adjusting the equivalent stiffness of the voice coil motor, the voice coil motor and the reed can be made more stable. The forces applied to the vertical micro-motion stage are equal in magnitude and opposite in direction. That is, the vertical resultant force acting on the vertical micro-motion stage by both forces tends to be a zero stiffness curve, which effectively improves the heating problem of the voice coil motor and improves the positioning accuracy of the vertical micro-motion stage. In addition, the voice coil motor of this application realizes the function of constant stiffness gravity compensation only through the first magnet 111, the second magnet 112 and the intermediate back iron 211, and can realize the function of constant stiffness vertical drive by combining with the first coil 221. The structure is simple, occupies little space, and improves the overall integration of the equipment.

[0050] To provide a more detailed explanation of the compensation mechanism and voice coil motor of this application, the technical solution of this application will be described below in conjunction with specific embodiments. It should be noted that, unless otherwise specified, the technical features and solutions in the following embodiments can be combined with each other.

[0051] Example 1

[0052] Reference Figure 1 This embodiment provides a compensation mechanism, including a first magnet 111, an intermediate back iron 211, and a second magnet 112.

[0053] In this embodiment, the first magnet 111, the intermediate back iron 211, and the second magnet 112 are coaxially arranged sequentially along the z-direction, and the intermediate back iron 211 is spaced apart from the first magnet 111 and the second magnet 112. The axial direction of the intermediate back iron 211 is the z-direction. The relative positions of the first magnet 111 and the second magnet 112 remain unchanged, and the intermediate back iron 211 can move relative to the first magnet 111 and the second magnet 112 along the z-direction. Specifically, the movement of the intermediate back iron 211 along the z-direction can be controlled, or the movement of the first magnet 111 and the second magnet 112 can be controlled along the z-direction, so that the intermediate back iron 211 can move relative to the first magnet 111 and the second magnet 112.

[0054] In an optional embodiment, the first magnet 111, the intermediate back iron 211, and the second magnet 112 can be gyro structures. The first magnet 111 and the second magnet 112 can be, for example, frustum-shaped structures. The materials used to make the first magnet 111 and the second magnet 112 can include rare earth materials with high magnetic energy product. Optionally, the first magnet 111 and the second magnet 112 can be permanent magnets made of materials such as aluminum, nickel, and cobalt (e.g., neodymium iron boron permanent magnets, samarium cobalt permanent magnets, etc.). The intermediate back iron 211 can be made of high magnetic permeability materials or other suitable materials.

[0055] The intermediate back iron 211 has a first structural portion 2111 and a second structural portion 2112, which are nested together, with the second structural portion 2112 fitted over the outside of the first structural portion 2111. The thickness at the junction of the first structural portion 2111 and the second structural portion 2112 is greater than the thickness of the central region of the first structural portion 2111. The magnetization direction of both the first magnet 111 and the second magnet 112 is the z-direction.

[0056] In an optional embodiment, the first structural portion 2111 is a gyroscopic structure, coaxially arranged with the intermediate back iron 211 and located in the middle region of the intermediate back iron 211. The second structural portion 2112 radially surrounds the outer side of the first structural portion 2111. The first structural portion 2111 can be formed by opening holes, slots, or other suitable methods in the frustum-shaped intermediate back iron 211. The second structural portion 2112 can be a cylindrical annular structure, surrounding the outer side of the first structural portion 2111. The first structural portion 2111 and the second structural portion 2112 can be an integral structure or a discrete structure fixedly connected to each other. Further, the first magnet 111 and the second magnet 112 are symmetrically arranged about the intermediate back iron 211.

[0057] The first magnet 111 and the second magnet 112 generate a magnetic levitation force on the intermediate back iron 211. This magnetic levitation force can compensate for the gravity of the vertical micro-motion stage and the reverse force of the reed. The intermediate back iron 211 is provided with a first structural part 2111. The thickness at the junction of the first structural part 2111 and the second structural part 2112 is greater than the thickness of the central region of the first structural part 2111. This increases the linear range of the magnetic levitation force and displacement, thereby improving the stroke range of the voice coil motor with the compensation mechanism. This allows the voice coil motor with the compensation mechanism to exert the same magnitude but opposite direction of the force on the vertical micro-motion stage by the voice coil motor and the reed within a larger stroke range, thus improving the compensation accuracy for the gravity of the vertical micro-motion stage and the reverse force of the reed.

[0058] In this embodiment, refer to Figure 3 The first structural part 2111 can be a ring structure, and the ring structure has a first through hole 2011 inside, which is coaxially arranged with the first structural part 2111. By setting the first through hole 2011, the linearity of the magnetic levitation force and displacement of the compensation mechanism can be improved, and the linear range of the magnetic levitation force and displacement can be increased.

[0059] In an optional embodiment, refer to Figure 4 and Figure 6 The first structural portion 2111 has a first inclined surface 2012 on the side facing the first through hole 2011. The first inclined surface 2012 is inclined radially along the first structural portion 2111 and faces the first magnet 111, so that the thickness of the first structural portion 2111 gradually increases from the inside to the outside along its radial direction.

[0060] Furthermore, the first inclined surface 2012 is a gyroscopic structure, and the axis of the gyroscopic structure of the first inclined surface 2012 is the axis of the first structural part 2111. The generatrix of the gyroscopic structure of the first inclined surface 2012 can be an inclined straight line or a curve (e.g., an arc). The thickness of the side of the first structural part 2111 near the first through hole 2011 can be zero or greater than zero. That is, the inner surface of the first structural part 2111 can include only the first inclined surface 2012, or it can include the first inclined surface 2012 and a vertical surface. When the first magnet 111 and the second magnet are symmetrically arranged about the intermediate back iron 211, the position of the intermediate back iron 211 at this time is taken as the zero point position. When the intermediate back iron 211 moves closer to the first magnet 111 from the zero point position, it is a negative offset after the zero point. By setting the first through hole 2011 and the first inclined surface 2012, the linear range of magnetic levitation force and displacement when the zero point is offset negatively can be increased, and the stroke range of the voice coil motor with compensation mechanism when the zero point is offset negatively can be improved.

[0061] In an optional embodiment, refer to Figures 7 to 9The first structural portion 2111 has a second inclined surface 2013 on the side facing the first through hole 2011. The second inclined surface 2013 is inclined radially along the first structural portion 2111 and faces the second magnet, so that the thickness of the first structural portion 2111 gradually increases from the inside to the outside along its radial direction.

[0062] Furthermore, the second inclined surface 2013 is a gyroscopic structure, and the axis of the gyroscopic structure of the second inclined surface 2013 is the axis of the first structural part 2111. The generatrix of the gyroscopic structure of the second inclined surface 2013 can be an inclined straight line or a curve (e.g., an arc). The thickness of the first structural part 2111 on the side near the first through hole 2011 can be zero or greater than zero, that is, the inner surface of the first structural part 2111 can include only the second inclined surface 2013, or it can include the second inclined surface 2013 and a vertical surface. When the first magnet 111 and the second magnet 112 are symmetrically arranged about the intermediate back iron 211, the position of the intermediate back iron 211 at this time is taken as the zero point position. When the intermediate back iron 211 moves closer to the second magnet 112 from the zero point position, it is a positive offset before the zero point. By setting the first through hole 2011 and the second inclined surface 2013, the linear range of magnetic levitation force and displacement when the zero point is positively offset can be increased, and the stroke range of the voice coil motor with compensation mechanism when the zero point is positively offset can be improved.

[0063] In an optional embodiment, refer to Figure 10 The first structural portion 2111 has an inner ring upper side surface 2014 and an inner ring lower side surface 2015 distributed on the side facing the first through hole 2011. The inner ring upper side surface 2014 and the inner ring lower side surface 2015 are symmetrically arranged vertically along the z-direction. The inner ring upper side surface 2014 and the inner ring lower side surface 2015 are both inclined radially along the first structural portion 2111 so that the thickness of the first structural portion 2111 gradually increases from the inside to the outside along its radial direction.

[0064] Furthermore, both the upper inner ring surface 2014 and the lower inner ring surface 2015 are gyroscopic structures. The upper inner ring surface 2014 is located on the side of the intermediate back iron 211 near the first magnet 111 and is radially inclined from the inside out so that it faces the first magnet 111. The lower inner ring surface 2015 is located on the side of the intermediate back iron 211 near the second magnet 112 and is radially inclined from the inside out so that it faces the second magnet. The axis of the gyroscopic structure of the upper inner ring surface 2014 and the lower inner ring surface 2015 is the axis of the first structural part 2111. The generatrices of the gyroscopic structure of the upper inner ring surface 2014 and the lower inner ring surface 2015 can be inclined straight lines or curves. The thickness of the first structural portion 2111 near the first through hole 2011 can be zero or greater than zero. Specifically, the inner surface of the first structural portion 2111 can include only the upper inner ring surface 2014 and the lower inner ring surface 2015, or it can include the upper inner ring surface 2014, the lower inner ring surface 2015, and a vertical surface. By providing the first through hole 2011, the upper inner ring surface 2014, and the lower inner ring surface 2015, the linear range of the magnetic levitation force and displacement near the zero point position of the compensation mechanism can be increased, thereby improving the stroke range of the voice coil motor equipped with the compensation mechanism.

[0065] Example 2

[0066] This embodiment provides a compensation mechanism, which also includes a first magnet 111, an intermediate back iron 211 and a second magnet. The similarities with Embodiment 1 will not be repeated. The difference is that in this embodiment, the intermediate back iron 211 is provided with a first groove 2021, or a second groove 2022, or a third groove 2023 and a fourth groove 2024.

[0067] In this embodiment, the first structural portion 2111 may be provided with a first groove 2021 on the side near the first magnet 111; or the first structural portion 2111 may be provided with a second groove 2022 on the side near the second magnet 112; or the first structural portion 2111 may be provided with a third groove 2023 and a fourth groove 2024 spaced apart from each other on opposite sides along the z direction.

[0068] In an optional embodiment, refer to Figure 11 The first structural part 2111 is provided with a first groove 2021 of a gyratory structure on the side near the first magnet 111. The radial dimension of the first groove 2021 gradually increases from the bottom of the groove to the opening of the groove. The radial dimension of the first groove 2021 is the diameter of the radial cross section of the circle of the first groove 2021.

[0069] The axis of the first groove 2021 gyratory structure is the axis of the first structural part 2111. The generatrix of the first groove 2021 gyratory structure can be an inclined straight line, a curve, or other suitable structure, so that the radial dimension of the first groove 2021 gradually increases from its bottom to the opening. Optionally, the first groove 2021 is a conical structure or a bowl-shaped structure. In this embodiment, when the first magnet 111 and the second magnet 112 are symmetrically arranged about the intermediate back iron 211, the position of the intermediate back iron 211 at this time is taken as the zero point position. When the intermediate back iron 211 moves closer to the first magnet 111 from the zero point position, the displacement moves from the zero point to the negative direction. When the intermediate back iron 211 moves closer to the second magnet 112 from the zero point position, the displacement moves from the zero point to the positive direction. By setting the first groove 2021, the linear range of magnetic levitation force and displacement from the zero point to the negative direction can be increased, and the travel range of the voice coil motor with compensation mechanism from the zero point to the negative direction can be improved.

[0070] In an optional embodiment, refer to Figure 12 The first structural part 2111 is provided with a second groove 2022 of gyro structure on the side near the second magnet 112. The radial dimension of the second groove 2022 gradually increases from the bottom of the groove to the opening of the groove. The radial dimension of the second groove 2022 is the diameter of the radial cross section of the circle of the second groove 2022.

[0071] The axis of the second groove 2022 gyratory structure is the axis of the first structural part 2111. The generatrix of the second groove 2022 gyratory structure can be an inclined straight line, a curve, or other suitable structure, so that the radial dimension of the second groove 2022 gradually increases from its bottom to the opening. Optionally, the second groove 2022 is a conical structure or a bowl-shaped structure. By setting the second groove 2022, the linear range of magnetic levitation force and displacement from zero to positive direction can be increased, and the stroke range of the voice coil motor with compensation mechanism from zero to positive direction can be improved.

[0072] Furthermore, the second structural portion 2112 is a cylindrical ring structure that surrounds the outer periphery of the first structural portion 2111, and the depths of the first groove 2021 and the second groove 2022 are both less than the thickness of the second structural portion 2112.

[0073] In an optional embodiment, refer to Figure 13The first structural portion 2111 is provided with a third groove 2023 and a fourth groove 2024. Both the third groove 2023 and the fourth groove 2024 are rotary structures, and are symmetrically arranged at intervals along the z-direction on opposite sides of the first structural portion 2111. From the bottom to the opening of the third groove 2023, the radial dimension of the third groove 2023 gradually increases, and from the bottom to the opening of the fourth groove 2024, the radial dimension of the fourth groove 2024 gradually increases. Optionally, the third groove 2023 is located on the side of the first structural portion 2111 closer to the first magnet 111, and the fourth groove 2024 is located on the side of the first structural portion 2111 closer to the second magnet 112. The radial dimension of the third groove 2023 is the diameter of the radial cross-section of its circle, and the radial dimension of the fourth groove 2024 is the diameter of the radial cross-section of its circle.

[0074] The axes of the gyratory structures of the third groove 2023 and the fourth groove 2024 are both axes of the first structural part 2111. The generatrices of the gyratory structures of the third groove 2023 and the fourth groove 2024 can be inclined straight lines, curves, or other suitable structures, so that the radial dimension of the third groove 2023 gradually increases from its bottom to its opening, and the radial dimension of the fourth groove 2024 gradually increases from its bottom to its opening. Optionally, the third groove 2023 and the fourth groove 2024 can be conical or bowl-shaped structures. By setting the third groove 2023 and the fourth groove 2024, the linear range of the magnetic levitation force and displacement near the zero position of the compensation mechanism can be increased, and the stroke range of the voice coil motor equipped with the compensation mechanism can be improved.

[0075] Example 3

[0076] This embodiment provides a voice coil motor, referring to... Figure 2 It includes the first coil 221 and any of the compensation mechanisms in this application, wherein the relative position between the first coil 221 and the intermediate back iron 211 in the compensation mechanism remains unchanged.

[0077] In this embodiment, the first magnet 111 and the second magnet 112 of the compensation mechanism constitute the first component 10, and the first coil 221 and the intermediate back iron 211 constitute the second component 20. The first component 10 and the second component 20 can move relative to each other in the z-direction. A magnetic levitation force is generated between the first component 10 and the second component 20. The reed is set between the mover in the voice coil motor and the external load. The magnetic levitation force can compensate for the gravity of the vertical micro-motion stage and the reverse force of the reed. The first coil 221 cuts the magnetic field generated by the first magnet 111 and the second magnet 112, thereby generating a Lorentz force. The Lorentz force can drive the vertical micro-motion stage. The compensation mechanism has a first structural part 2111 in the middle back iron 211, which makes the vertical resultant force of the magnetic levitation force and the Lorentz force of the voice coil motor linearly related to the displacement within a larger stroke range of the vertical micro-motion stage. Therefore, the voice coil motor has constant stiffness characteristics within a larger stroke range. By adjusting the equivalent stiffness of the voice coil motor, the forces applied to the vertical micro-motion stage by the voice coil motor and the reed can be made equal in magnitude and opposite in direction. That is, the vertical resultant force of the two acting together on the vertical micro-motion stage tends to be a zero stiffness curve, which effectively improves the heat generation problem of the voice coil motor and improves the positioning accuracy of the vertical micro-motion stage.

[0078] In an optional embodiment, the first component 10 further includes a connector that is connected to the first coil 221 and the intermediate back iron 211 in the compensation mechanism, so that the relative position of the first coil 221 and the intermediate back iron 211 remains unchanged; further, the first coil 221 is arranged around the outside of the intermediate back iron 211.

[0079] In an optional embodiment, refer to Figure 14 The first component 10 also includes a first back iron 121, a second back iron 122, and a third back iron 123, used to improve the magnetic field distribution within the voice coil motor and enhance motor performance. The first back iron 121 has a second through hole 1211 that extends through it along the z-direction. The first magnet 111, the second magnet, the intermediate back iron 211, and the first coil 221 are all located within the second through hole 1211. Optionally, the first back iron 121 can be a cylindrical structure, with the second through hole 1211, the first back iron 121, and the intermediate back iron 211 coaxially arranged. The second back iron 122 is located on the side of the first magnet 111 away from the intermediate back iron 211 and is connected to the first magnet 111. Optionally, the second back iron 122 is fixedly connected to the first magnet 111. The third back iron 123 is located on the side of the second magnet 112 away from the intermediate back iron 211 and is connected to the second magnet 112; optionally, the third back iron 123 is fixedly connected to the second magnet 112. The second back iron 122 can be fixedly connected to the first magnet 111 and the third back iron 123 can be fixedly connected to the second magnet 112 by adhesive bonding or other suitable means.

[0080] Furthermore, the second back iron 122 can also be connected to the first back iron 121; the second back iron 122 can be fixedly connected to the side wall of the second through hole 1211 by adhesive bonding or other suitable means, so that the second back iron 122 and the first back iron 121 are connected; or the second back iron 122 and the first back iron 121 can also adopt an integral structure.

[0081] Example 4

[0082] This embodiment provides a voice coil motor, and the similarities with Embodiment 3 will not be repeated. The difference is that the voice coil motor in this embodiment also includes a third magnet 113.

[0083] In this embodiment, refer to Figure 15 The first magnet 111, the intermediate back iron 211, the second magnet 112, and the third magnet 113 are arranged coaxially along the z-direction. The first coil 221 is located on the side of the second magnet 112 away from the intermediate back iron 211 and is sleeved on the outside of the third magnet 113. The first magnet 111, the second magnet 112, and the third magnet 113 constitute the first component 10, and the intermediate back iron 211 and the first coil 221 constitute the second component 20. Magnetic levitation and Lorentz force are generated between the first component 10 and the second component 20. The magnetic levitation force can compensate for the gravity of the vertical micro-motion stage and the reverse force of the reed. The Lorentz force can achieve the driving effect and precise positioning of the vertical micro-motion stage. Furthermore, the second magnet 112 generates a downward attraction force on the intermediate back iron 211, and the third magnet 113 can adjust the magnitude of the downward attraction force on the intermediate back iron 211, thereby realizing the control of the vertical output force of the voice coil motor.

[0084] In an optional embodiment, refer to Figures 16 to 19 The first component 10 also includes a fourth back iron 124, which is located on the side of the third magnet 113 away from the second magnet 112 and is connected to the third magnet 113. It is used to improve the magnetic field distribution in the voice coil motor and the direction of the Lorentz force on the first coil 221, thereby improving the motor performance. The fourth back iron 124 and the third magnet 113 can be fixedly connected by adhesive or other suitable means.

[0085] In an optional embodiment, refer to Figure 16 The voice coil motor has a first through hole 2011 in the middle back iron 211. Figure 20 It shows Figure 16The curves shown represent the vertical resultant force versus displacement of voice coil motors with first through-holes 2011 of different radial dimensions. In this application, the vertical resultant force is the resultant force of magnetic levitation force and Lorentz force along the z-direction. When the first magnet 111 and the second magnet 112 are symmetrically arranged about the intermediate back iron 211, the position of the intermediate back iron 211 is the zero point position. When the intermediate back iron 211 moves closer to the second magnet 112 from the zero point position, the displacement direction is positive; when the intermediate back iron 211 moves closer to the first magnet 111 from the zero point position, the displacement direction is negative. Figure 20 In the diagram, the radial dimensions of the first through hole 2011 of the voice coil motor corresponding to the long dashed line, short dashed line, and solid line gradually increase. It can be seen that increasing the radial dimension of the first through hole 2011 helps to improve the linearity of the vertical resultant force and displacement curve of the voice coil motor within its stroke range, and reduces the equivalent stiffness and output thrust of the voice coil motor.

[0086] In an optional embodiment, refer to Figure 19 The voice coil motor's central back iron 211 has a third groove 2023 and a fourth groove 2024 on opposite sides along the z-direction. Both the third groove 2023 and the fourth groove 2024 of the voice coil motor are conical structures. Figure 21 It shows Figure 19 The curves shown represent the vertical resultant force versus displacement of voice coil motors with different cone angles in the third groove 2023 and the fourth groove 2024. Figure 21 In the diagram, the cone angles of the third groove 2023 and the fourth groove 2024 of the voice coil motor, corresponding to the short dashed line, the long dashed line, and the solid line, gradually decrease, while the depths of the third groove 2023 and the fourth groove 2024 gradually increase, and the radial dimensions of the first structural part 2111 are equal. It can be seen that when the radial dimension of the first structural part 2111 remains constant, reducing the cone angles of the third groove 2023 and the fourth groove 2024 helps improve the linearity of the vertical resultant force versus displacement curve within the voice coil motor's stroke range, and reduces the equivalent stiffness and output thrust of the voice coil motor.

[0087] In an optional embodiment, refer to Figure 18 The voice coil motor has a first groove 2021 on the side of the middle back iron 211 near the first magnet 111. The first groove 2021 has a conical structure. Figure 22 It shows Figure 18 The curves shown represent the vertical resultant force versus displacement of the voice coil motor. Figure 22In the diagram, the short dashed line represents the curve of the upward attraction force and displacement generated by the first magnet 111 on the middle back iron 211, the long dashed line represents the curve of the downward attraction force and displacement generated by the second magnet 112 on the middle back iron 211, and the solid line represents the curve of the vertical resultant attraction force and displacement of the upward and downward attraction forces on the middle back iron 211. Within the large stroke range of -2.5mm to 0mm, the vertical resultant attraction force and displacement approach a linear relationship, which increases the stroke range of the voice coil motor from zero to negative direction and makes the vertical resultant force of the voice coil motor have a linear relationship with the displacement within the large stroke range from zero to negative direction. That is, the voice coil motor has constant stiffness characteristics within the large stroke range from zero to negative direction.

[0088] In an optional embodiment, refer to Figure 17 The voice coil motor has a second groove 2022 on the side of the middle back iron 211 near the second magnet 112. The second groove 2022 has a conical structure. Figure 23 It shows Figure 17 The curves shown represent the vertical resultant force versus displacement of the voice coil motor. Figure 23 In the diagram, the short dashed line represents the curve of the upward attraction force and displacement generated by the first magnet 111 on the middle back iron 211, the long dashed line represents the curve of the downward attraction force and displacement generated by the second magnet 112 on the middle back iron 211, and the solid line represents the curve of the vertical resultant attraction force and displacement of the upward and downward attraction forces on the middle back iron 211. Within the large stroke range of 0mm to 2.5mm, the vertical resultant attraction force and displacement approach a linear relationship, which increases the stroke range of the voice coil motor from zero to positive and makes the vertical resultant force of the voice coil motor have a linear relationship with the displacement within the large stroke range from zero to positive. That is, the voice coil motor has constant stiffness characteristics within the large stroke range from zero to positive.

[0089] In an optional embodiment, refer to Figure 19 The voice coil motor's central back iron 211 has a third groove 2023 and a fourth groove 2024 on opposite sides along the z-direction. Both the third groove 2023 and the fourth groove 2024 are conical structures. Figure 24 It shows Figure 19 The curves shown represent the vertical resultant force versus displacement of the voice coil motor. Figure 24 In the diagram, the short dashed line at the top represents the curve of the upward attraction force and displacement generated by the first magnet 111 on the middle back iron 211, the long dashed line at the bottom represents the curve of the downward attraction force and displacement generated by the second magnet 112 on the middle back iron 211, and the solid line in the middle represents the curve of the vertical resultant attraction force and displacement of the upward and downward attraction forces on the middle back iron 211. Within the large stroke range of -2mm to 2mm, the vertical resultant attraction force and displacement approach a linear relationship, which enables the vertical resultant force to have a linear relationship with the displacement within the large stroke range around the zero point position. This increases the vertical stroke range of the voice coil motor and gives the voice coil motor a constant stiffness characteristic within the large stroke range.

[0090] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify, alter, or combine the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this application should still be covered by the claims of this application.

Claims

1. A compensating mechanism, characterized by, The magnetron comprises a first magnet (111), an intermediate back iron (211) and a second magnet (112) coaxially arranged in sequence along a z direction, the relative position of the first magnet (111) and the second magnet (112) remains unchanged, and the intermediate back iron (211) can move relatively along the z direction between the first magnet (111) and the second magnet (112); The intermediate back iron (211) has a first structural part (2111) and a second structural part (2112) arranged in a nested manner, and the second structural part (2112) is arranged outside the first structural part (2111). The thickness of the junction of the first structural part (2111) and the second structural part (2112) is greater than the thickness of the central region of the first structural part (2111), and the magnetization direction of the first magnet (111) and the second magnet (112) is the z direction.

2. The compensation mechanism of claim 1, wherein, The first structural part (2111) is in the form of a ring structure, and the first structural part (2111) has a first through hole (2011) therein.

3. The compensation mechanism of claim 2, wherein, The first structural part (2111) has a first inclined surface (2012) on the side facing the first through hole (2011), the first inclined surface (2012) is inclined along the radial direction of the first structural part (2111) and faces the first magnet (111), so that the thickness of the first structural part (2111) gradually increases from the inside to the outside along the radial direction thereof.

4. The compensation mechanism of claim 2, wherein, The first structural part (2111) has a second inclined surface (2013) on the side facing the first through hole (2011), the second inclined surface (2013) is inclined along the radial direction of the first structural part (2111) and faces the second magnet (112), so that the thickness of the first structural part (2111) gradually increases from the inside to the outside along the radial direction thereof.

5. The compensation mechanism of claim 2, wherein, The first structural part (2111) has an inner ring upper side (2014) and an inner ring lower side (2015) arranged symmetrically along the z direction on the side facing the first through hole (2011), the inner ring upper side (2014) and the inner ring lower side (2015) are inclined along the radial direction of the first structural part (2111), so that the thickness of the first structural part (2111) gradually increases from the inside to the outside along the radial direction thereof.

6. The compensation mechanism of claim 1, wherein, The first structural part (2111) has a first groove (2021) in the form of a convolute structure on the side close to the first magnet (111), and the radial dimension of the first groove (2021) gradually increases from the groove bottom to the groove opening of the first groove (2021).

7. The compensation mechanism of claim 1, wherein, The first structural part (2111) has a second groove (2022) in the form of a convolute structure on the side close to the second magnet (112), and the radial dimension of the second groove (2022) gradually increases from the groove bottom to the groove opening of the second groove (2022).

8. The compensation mechanism of claim 1, wherein, The third groove (2023) and the fourth groove (2024) are both convolute structures, and are symmetrically arranged on opposite sides of the first structure part (2111) and spaced from each other along the z direction; The radial dimension of the third groove (2023) gradually increases from the bottom of the third groove (2023) to the opening of the third groove (2023), and the radial dimension of the fourth groove (2024) gradually increases from the bottom of the fourth groove (2024) to the opening of the fourth groove (2024).

9. A voice coil motor characterized by, The first coil (221) and the compensation mechanism of any one of claims 1 to 8 are included, and the relative position of the first coil (221) and the intermediate back iron (211) in the compensation mechanism remains unchanged.

10. The voice coil motor of claim 9, wherein, Further comprising a first back iron (121), a second back iron (122) and a third back iron (123); The first back iron (121) is provided with a second through hole (1211) penetrating through the first back iron (121) along the z direction, and the first magnet (111), the second magnet (112), the intermediate back iron (211) and the first coil (221) are located in the second through hole (1211); the second back iron (122) is connected to the side of the first magnet (111) away from the intermediate back iron (211), and the third back iron (123) is connected to the side of the second magnet (112) away from the intermediate back iron (211).

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