Dry pressing die for pressing electrostatic chuck ceramic plate

Abstract

The utility model discloses a dry pressing die for pressing a ceramic plate of an electrostatic chuck, which belongs to the technical field of dry pressing dies and comprises a lower die component, a middle die component and an upper die component, the upper die component is arranged above the lower die component, the middle die component is arranged between the lower die component and the upper die component, and the middle die component is arranged on the lower die component. The middle die assembly comprises a cylindrical and hollow middle die body and an embedded inner sleeve, the middle die body comprises an outer through hole, the embedded inner sleeve and the outer through hole are installed in a matched mode, the embedded inner sleeve comprises an inner through hole, the lower die assembly comprises a cylindrical lower die body, and the upper die assembly comprises a cylindrical upper die body. The outer side wall of the lower die body and the outer side wall of the upper die body are both aligned with the inner side wall of the inner through hole, the diameter of the lower die body is equal to that of the upper die body, and the diameter of the inner through hole is smaller than or equal to that of the lower die body. By arranging the middle die body and the embedded inner sleeve, pressing of electrostatic chuck ceramic green bodies of two sizes is met.

Description

Technical Field

[0001] This utility model relates to the field of dry pressing mold technology, and in particular to a dry pressing mold for pressing ceramic discs in electrostatic chucks. Background Technology

[0002] Dry pressing technology involves loading powder into a mold and compressing it under force to form a green body. A mold typically includes an upper mold (upper punch), a lower mold (lower punch), and a middle mold (cavity). When pressing 8-inch or 12-inch ceramic green bodies for electrostatic chucks, it is necessary to frequently change the molds on the press. The middle mold is usually very thick and heavy, making it inconvenient to replace and to use a single set of equipment to press ceramic green bodies of different sizes. Therefore, a dry pressing mold is needed for pressing ceramic green bodies for electrostatic chucks. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a dry pressing mold for pressing ceramic discs in electrostatic chucks, so as to solve the problems mentioned in the background art, improve the preparation time for pressing green sheets of different sizes, improve efficiency, and meet the pressing needs of green sheets of different sizes.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0005] A dry pressing mold for pressing ceramic discs in electrostatic chucks includes a lower mold assembly, a middle mold assembly, and an upper mold assembly. The upper mold assembly is disposed above the lower mold assembly, and the middle mold assembly is disposed between the lower mold assembly and the upper mold assembly. The middle mold includes a cylindrical and hollow middle mold body and an inner sleeve. The middle mold body includes an outer through hole, and the inner sleeve is fitted with the outer through hole. The inner sleeve includes an inner through hole. The lower mold assembly includes a cylindrical lower mold body, and the upper mold assembly includes a cylindrical upper mold body. The outer sidewalls of both the lower mold body and the upper mold body are aligned with the inner sidewall of the inner through hole. The diameter of the lower mold body is equal to the diameter of the upper mold body, and the diameter of the inner through hole is less than or equal to the diameter of the lower mold body.

[0006] Preferably, the upper side wall of the middle mold body is provided with a step, and the outer side wall of the inner sleeve is provided with a protrusion that cooperates with the step. The protrusion and the step are connected by a number of first bolts.

[0007] Preferably, the lower mold assembly further includes a lower mold sleeve, which is sleeved on the lower mold body.

[0008] Preferably, the outer diameter of the lower mold sleeve is less than or equal to the diameter of the outer through hole.

[0009] Preferably, the upper mold assembly further includes an upper mold sleeve, which has a groove and is fitted onto the bottom of the upper mold body. The upper mold sleeve and the upper mold body are connected by a plurality of second bolts.

[0010] Preferably, the outer diameter of the upper mold sleeve is less than or equal to the diameter of the outer through hole.

[0011] The above technical solution has the following beneficial effects:

[0012] By setting the middle mold body and the inner sleeve, when using the middle mold body, one size of electrostatic chuck ceramic green sheet can be pressed. When it is necessary to press another size of electrostatic chuck ceramic green sheet, the inner sleeve is installed to meet the pressing of the other size of electrostatic chuck ceramic green sheet.

[0013] By setting a lower mold sleeve and an upper mold sleeve, in conjunction with the middle mold body and the inner sleeve, the pressing of ceramic green sheets of two sizes by electrostatic chuck can be achieved. Attached Figure Description

[0014] Figure 1 This is a cross-sectional structural schematic diagram of a dry pressing mold for pressing ceramic discs in electrostatic chucks according to the present invention.

[0015] Figure 2 This is a cross-sectional structural diagram of the mold body in this utility model;

[0016] Figure 3 This is a cross-sectional view of the inner sleeve of this utility model. Detailed Implementation

[0017] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that these descriptions are for the purpose of aiding understanding of this utility model, but do not constitute a limitation thereof. Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0018] refer to Figures 1-3 A dry pressing mold for pressing ceramic discs in electrostatic chucks includes a lower mold assembly, a middle mold assembly, and an upper mold assembly. The upper mold assembly is positioned above the lower mold assembly, and the middle mold assembly is positioned between the lower mold assembly and the upper mold assembly. The middle mold includes a cylindrical and hollow middle mold body 4 and an inner sleeve 3. The middle mold body 4 includes an outer through hole 13, and the inner sleeve 3 is fitted with the outer through hole 13. The inner sleeve 3 includes an inner through hole 12. The lower mold assembly includes a cylindrical lower mold body 1, and the upper mold assembly includes a cylindrical upper mold body 8. The outer sidewalls of the lower mold body 1 and the upper mold body 8 are aligned with the inner sidewall of the inner through hole 12. The diameter of the lower mold body 1 is equal to the diameter of the upper mold body 8, and the diameter of the inner through hole 12 is less than or equal to the diameter of the lower mold body 1.

[0019] In use, for the ceramic green sheet of the electrostatic chuck, 8-inch and 12-inch sizes are common. The outer through hole 13 of the middle mold body 4 can be used to press a ceramic green sheet of one size, such as a 12-inch ceramic green sheet. At this time, the corresponding upper mold assembly and lower mold assembly can be set to press the 12-inch ceramic green sheet. If it is necessary to press another ceramic green sheet of a size smaller than 12 inches, the inner sleeve 3 is installed on the middle mold body 4. The inner sleeve 3 includes an inner through hole 12. The diameter of the pressed ceramic green sheet is equal to the inner through hole 12. For example, for the corresponding 8-inch ceramic green sheet, by setting the middle mold body 4 and the inner sleeve 3, the pressing of two kinds of ceramic green sheets of the electrostatic chuck can be satisfied.

[0020] The upper side wall of the middle mold body 4 is provided with a step 5, and the outer side wall of the inner sleeve 3 is provided with a protrusion 7 that cooperates with the step 5. The protrusion 7 and the step 5 are connected by several first bolts 6. The step 5 cooperates with the protrusion 7, and the support of the inner sleeve 3 is completed by the step 5 supporting the protrusion 7. The middle mold body 4 and the inner sleeve 3 can be fixed by the first bolts 6. Specifically, the step 5 is provided with a threaded hole. The first bolt 6 passes through the through hole on the protrusion 7 and is connected to the threaded hole on the step 5, thus completing the connection between the middle mold body 4 and the inner sleeve 3.

[0021] The lower mold assembly also includes a lower mold sleeve 2, which is fitted onto the lower mold body 1. The lower mold sleeve 2 is also cylindrical, with a groove at the bottom that fits onto the top of the lower mold body 1. The connection can be completed without any other connecting parts. By setting the lower mold sleeve 2, the size of the lower mold body 1 can be changed to accommodate the pressing of ceramic green sheets from electrostatic chucks of different sizes.

[0022] The outer diameter of the lower mold sleeve 2 is less than or equal to the diameter of the outer through hole 13, which facilitates the lower mold sleeve 2 to enter the interior of the outer through hole 13 to press the electrostatic chuck ceramic green sheet of the corresponding size;

[0023] The upper mold assembly also includes an upper mold sleeve 9, which has a groove 10. The groove 10 is fitted onto the bottom of the upper mold body 8. The upper mold sleeve 9 and the upper mold body 8 are connected by several second bolts 11. By connecting the upper mold sleeve 9, the size of the upper mold body 8 is changed, that is, the size of the upper mold body 8 is increased to accommodate the pressing of larger-sized electrostatic chuck ceramic green sheets. The upper mold sleeve 9 is engaged with the bottom of the upper mold body 8 through the groove 10. After engagement, it is fixed by the second bolts 11. If necessary, a limiting groove can be set so that the mounting hole can be aligned when the upper mold sleeve 9 engages with the upper mold body 8 along the limiting groove, which facilitates the installation and fixing of the second bolts 11.

[0024] The outer diameter of the upper mold sleeve 9 is less than or equal to the diameter of the outer through hole 13, which facilitates the upper mold sleeve 9 to enter the outer through hole 13 and press the corresponding size of the electrostatic chuck ceramic green sheet.

[0025] In this application, if it is necessary to press a smaller size (such as 8 inches) of electrostatic chuck ceramic green sheet, an inner sleeve 3 is installed in the middle mold body 4, and the pressing can be completed in conjunction with the lower mold body 1 and the upper mold body 8. If it is necessary to press a larger size (such as 12 inches) of electrostatic chuck ceramic green sheet, it is not necessary to install the inner sleeve 3. Instead, a lower mold sleeve 2 is installed on the lower mold body 1, and an upper mold sleeve 9 is installed on the upper mold body 8 to complete the pressing.

[0026] By setting the middle mold body 4 and the inner sleeve 3, when using the middle mold body 4, one size of electrostatic chuck ceramic green sheet can be pressed. When it is necessary to press another size of electrostatic chuck ceramic green sheet, the inner sleeve 3 is installed to meet the pressing of another size of electrostatic chuck ceramic green sheet.

[0027] By setting the lower mold sleeve 2 and the upper mold sleeve 9, together with the middle mold body 4 and the inner sleeve 3, the pressing of ceramic green sheets of two sizes of electrostatic chuck can be achieved.

[0028] The embodiments of this utility model have been described in detail above with reference to the accompanying drawings, but this utility model is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of this utility model, and these variations still fall within the protection scope of this utility model.

Claims

1. A dry press mold for electrostatic chuck ceramic disc pressing, characterized by, The mold assembly comprises a lower mold assembly, a middle mold assembly and an upper mold assembly, the upper mold assembly is arranged above the lower mold assembly, the middle mold assembly is arranged between the lower mold assembly and the upper mold assembly, the middle mold assembly comprises a cylindrical and hollow middle mold body (4) and an embedded inner sleeve (3), the middle mold body (4) comprises an outer through hole (13), the embedded inner sleeve (3) is installed in cooperation with the outer through hole (13), the embedded inner sleeve (3) comprises an inner through hole (12), the lower mold assembly comprises a cylindrical lower mold body (1), the upper mold assembly comprises a cylindrical upper mold body (8), the outer side wall of the lower mold body (1) and the upper mold body (8) is aligned with the inner side wall of the inner through hole (12), the diameter of the lower mold body (1) is equal to the diameter of the upper mold body (8), and the diameter of the inner through hole (12) is less than or equal to the diameter of the lower mold body (1).

2. A dry press die for use in the press forming of ceramic plates for electrostatic chucks according to claim 1, characterized by The upper side wall of the middle mold body (4) is provided with a step (5), the outer side wall of the embedded inner sleeve (3) is provided with a protrusion (7) matched with the step (5), and the protrusion (7) and the step (5) are connected through a plurality of first bolts (6).

3. A dry press die for electrostatic chuck ceramic disc pressing according to claim 2, wherein, The lower mold assembly further comprises a lower mold sleeve (2), and the lower mold sleeve (2) is sleeved on the lower mold body (1).

4. A dry press die for use in the press forming of ceramic plates for electrostatic chucks according to claim 3, characterized in that, The outer diameter of the lower mold sleeve (2) is less than or equal to the diameter of the outer through hole (13).

5. A dry press die for use in the press forming of ceramic plates for electrostatic chucks according to claim 4, characterized in that, The upper mold assembly further comprises an upper mold sleeve (9), the upper mold sleeve (9) is provided with a groove (10), the groove (10) is sleeved on the bottom of the upper mold body (8), and the upper mold sleeve (9) and the upper mold body (8) are connected through a plurality of second bolts (11).

6. A dry press die for electrostatic chuck ceramic disc pressing according to claim 5, wherein, The outer diameter of the upper mold sleeve (9) is less than or equal to the diameter of the outer through hole (13).

Images