Purging device and perovskite wire evaporator

Abstract

The utility model discloses a purging device and a perovskite line evaporator, the purging device comprises: a first purging assembly, the first purging assembly comprises a first purging pipe, both ends of the first purging pipe are connected with a feeding port, and the first purging pipe is provided with a plurality of first purging holes; the second purging assembly comprises a second purging pipe, the two ends of the second purging pipe are connected with a feeding port of the perovskite line evaporation machine, and a plurality of second purging holes are formed in the second purging pipe; the first purging hole and the second purging hole face away from the feeding cavity, and the absolute value of the included angle between the vertical normal vector of the first purging hole and the second purging hole and the plane of the feeding base plate is (0 degree, 90 degrees). According to the utility model, the substrate which is about to enter the feeding chamber is blown from the two sides of the feeding port, so that the substrate can be effectively and comprehensively cleaned in the feeding process, impurities such as dust and particles on the surface of the substrate are removed, and the cleanliness of evaporation and the product quality are improved.

Description

Technical Field

[0001] This utility model relates to the technical field of purging in line evaporation machines, and in particular to a purging device and a perovskite line evaporation machine. Background Technology

[0002] In the production process of perovskite solar cells, automated logistics lines and loading / unloading machines are responsible for the efficient and accurate flow of perovskite solar devices between various processes. However, during this flow, the devices are inevitably exposed to the external environment, which may result in contamination from dust, particles, and other impurities.

[0003] Perovskite solar cells consist of multiple layers of films formed using various processes, as well as laser technology. The quality of these layers has a crucial impact on the photoelectric conversion efficiency of perovskite solar cells. Among these, vacuum evaporation, a physical vapor deposition technique, is directly affected by the cleanliness of the substrate. During vacuum evaporation, the cleanliness of the substrate directly affects the adhesion and uniformity of the film. Insufficient substrate cleanliness can lead to defects in the film, such as pinholes and cracks, thus affecting the efficiency of the perovskite solar cell.

[0004] Compared to experimental lines, automated perovskite solar cell production lines place greater emphasis on efficiency and cost control. In experimental lines, technicians can use nitrogen guns and other equipment to clean the film surface before the vapor deposition process to ensure substrate cleanliness. However, in automated lines, due to production cycle time and cost control limitations, it's impossible to equip each process with separate cleaning equipment. Adding separate equipment for substrate cleaning would not only increase line length and costs but could also impact production cycle time.

[0005] Furthermore, automated production lines typically have specific production cycles, and the vapor deposition process requires a vacuum environment. If substrates with insufficient cleanliness enter the vapor deposition chamber, it will increase the vacuuming time, thus affecting the production cycle. This not only reduces production efficiency but may also increase production costs.

[0006] Therefore, ensuring the cleanliness of the substrates in the automated perovskite solar cell production line while maintaining production efficiency and controlling costs has become an urgent problem to be solved. Utility Model Content

[0007] To solve at least one of the above-mentioned technical problems, this utility model provides a purging device and a perovskite wire evaporation machine, which is used to purge the substrate about to enter the feeding chamber from both sides of the feeding port, ensuring that the substrate can be effectively and thoroughly cleaned during the feeding process to remove dust, particles and other impurities from the substrate surface, thereby improving the cleanliness of evaporation and product quality.

[0008] The objective of this utility model is achieved through the following technical solution:

[0009] On the one hand, this utility model provides a purging device for a perovskite wire evaporation machine, the perovskite wire evaporation machine including a feeding chamber for feeding substrate, the feeding chamber having a feeding port;

[0010] The purging device is connected to an external air supply device, and the purging device includes:

[0011] A first purging assembly, comprising a first purging pipe, both ends of which are connected to the feed port, and a plurality of first purging holes are provided on the first purging pipe;

[0012] A second purging component is disposed opposite to the first purging component. The second purging component includes a second purging pipe, both ends of which are connected to the feed port. The second purging pipe has a plurality of second purging holes.

[0013] The orientation of both the first and second purge holes is away from the loading chamber, and the absolute value of the angle between the vertical normal vectors of the first and second purge holes and the loading substrate plane is (0°, 90°).

[0014] The beneficial effects of the above solution are as follows: The blowing device of this utility model, through the first and second blowing components, blows the substrate about to enter the loading chamber from both sides of the loading port, ensuring that the substrate can be effectively and thoroughly cleaned during the loading process to remove dust, particles, and other impurities from the substrate surface, thereby improving the cleanliness of the vapor deposition and the product quality. Furthermore, the angle between the vertical normal vectors of the first and second blowing holes and the plane of the loading substrate can be adjusted within the range of (0°, 90°), allowing the blowing airflow to be flexibly adjusted according to the specific size, shape, and blowing requirements of the substrate, ensuring optimal blowing effect. Furthermore, by simultaneously setting blowing components on both sides of the loading port, this utility model achieves double-sided blowing of the substrate, greatly improving blowing efficiency. At the same time, setting multiple blowing holes makes the airflow distribution more uniform, further enhancing the cleaning effect.

[0015] Furthermore, the absolute value of the angle between the vertical normal vectors of the first and second purge holes and the loading substrate plane is [30°, 45°].

[0016] The beneficial effects of the above solution are as follows: By adjusting the angle of the blow hole, this utility model can ensure that the blow airflow can evenly and effectively cover the substrate surface, remove the tiny particles attached to the substrate, and avoid causing unnecessary damage to the substrate.

[0017] Furthermore, the purging device also includes:

[0018] The mounting frame is connected to the feeding port and includes a first longitudinal beam, a first cross beam, a second longitudinal beam, and a second cross beam connected in sequence.

[0019] The beneficial effects of the above solution are as follows: The mounting bracket of this utility model provides a stable support structure for the purging assembly, ensuring that it can be firmly installed at the feed inlet of the feeding chamber. Furthermore, the mounting bracket facilitates the maintenance and replacement of the purging device.

[0020] Furthermore, the purging device also includes:

[0021] A detection component, mounted on the first crossbeam, is used to detect the feeding substrate. The detection component includes:

[0022] A first sensor and a second sensor, wherein the first sensor is installed on one side of the first crossbeam and the second sensor is installed on the other side of the first crossbeam.

[0023] The beneficial effects of the above solution are as follows: By installing a detection component on the feeding beam, this utility model can monitor the arrival and status of the substrate in real time, ensuring that the substrate can be purged in a timely manner and improving the purging effect.

[0024] Furthermore, the first purge pipe extends outward at both ends to form a first mounting pipe and a second mounting pipe, respectively. The first mounting pipe is rotatably connected to the first longitudinal beam, and the second mounting pipe is rotatably connected to the second longitudinal beam.

[0025] The second purge pipe extends outward from both ends to form a third mounting pipe and a fourth mounting pipe, respectively. The third mounting pipe is rotatably connected to the first longitudinal beam, and the fourth mounting pipe is rotatably connected to the second longitudinal beam.

[0026] The beneficial effects of the above solution are as follows: The first and second purge tubes of this utility model are rotatably connected to the mounting bracket, and the angle of the purge hole can be adjusted as needed to adapt to substrates of different sizes or different purge requirements.

[0027] Furthermore, the purging device also includes:

[0028] A connecting pipe, one end of which is connected to the first mounting pipe, the second mounting pipe, the third mounting pipe and the fourth mounting pipe, and the other end of which is used to connect to an external gas supply device;

[0029] A valve is provided on the connecting pipe.

[0030] The beneficial effects of the above solution are as follows: The connecting pipe of this utility model is used to connect the external air supply device to the purging assembly, ensuring a stable supply of purging airflow. Furthermore, the valve facilitates the control of the opening and closing of the purging airflow and the adjustment of the airflow magnitude, thereby achieving precise control of the purging process.

[0031] Furthermore, the mounting bracket is provided with an air pipe interface for the connecting pipe to pass through.

[0032] The beneficial effects of the above solution are as follows: This utility model has an air pipe interface on the mounting frame, which facilitates the connection of the connecting pipe through and fixation, thereby ensuring a stable and reliable connection between the purging device and the air supply device, while improving the cleanliness of the purging device.

[0033] Furthermore, the purging device also includes:

[0034] A driving component, which drives and connects the first blowing component and the second blowing component, is used to adjust the angle between the vertical normal vectors of the first blowing hole and the second blowing hole and the plane of the loading substrate.

[0035] The beneficial effects of the above solution are as follows: This utility model can achieve automated control of the purging process by driving the first purging component and the second purging component to adjust the angle of the purging hole through the driving component, thereby improving production efficiency and ease of operation.

[0036] Furthermore, the first purging assembly includes a first purging nozzle, which is disposed on the first purging hole;

[0037] The second purging assembly includes a second purging nozzle, which is disposed on the second purging hole.

[0038] The beneficial effects of the above solution are as follows: By setting a blowing nozzle on the first and second blowing holes, the direction and intensity of the blowing airflow can be further optimized, ensuring a more uniform and effective blowing effect.

[0039] On the other hand, this utility model provides a perovskite wire evaporation machine, comprising:

[0040] A loading chamber for loading substrates;

[0041] The aforementioned purging device is located at the feed inlet of the feeding chamber and is connected to an external nitrogen supply device.

[0042] The beneficial effects of the above solution are: This utility model can improve the cleanliness and efficiency of the vapor deposition process, thereby improving the vapor deposition quality and reducing production costs. At the same time, it can enhance the automation level and ease of operation of the vapor deposition machine.

[0043] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0044] This invention's blowing device, through a first and a second blowing assembly, blows the substrate about to enter the loading chamber from both sides of the loading port, ensuring effective and comprehensive cleaning of the substrate during loading to remove dust, particles, and other impurities from the substrate surface, thereby improving the cleanliness of the vapor deposition process and product quality. Furthermore, the angle between the vertical normal vectors of the first and second blowing holes and the plane of the loading substrate can be adjusted within the range of (0°, 90°), allowing the blowing airflow to be flexibly adjusted according to the specific size, shape, and blowing requirements of the substrate, ensuring optimal blowing effect. Moreover, by simultaneously setting blowing assemblies on both sides of the loading port, this invention achieves double-sided blowing of the substrate, greatly improving blowing efficiency. At the same time, the multiple blowing holes ensure more uniform airflow distribution, further enhancing the cleaning effect. Attached Figure Description

[0045] Figure 1 This is a schematic diagram of the purging device according to an embodiment of the present invention.

[0046] Figure 2 This is another structural schematic diagram of the purging device according to an embodiment of the present utility model.

[0047] In the diagram: 11. First purging assembly; 1111. First mounting tube; 1112. Second mounting tube; 112. First purging tube; 113. First purging nozzle; 114. First purging hole; 12. Second purging assembly; 1211. Third mounting tube; 1212. Fourth mounting tube; 122. Second purging tube; 123. Second purging nozzle; 124. Second purging hole; 2. Air pipe interface; 3. Detection assembly; 31. First sensor; 32. Second sensor; 4. Mounting bracket; 5. Feeding chamber. Detailed Implementation

[0048] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0049] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0050] In automated perovskite solar cell production lines, the cleanliness of the substrate has a significant impact on film formation quality and overall production efficiency. This invention relates to a purging device for a perovskite line evaporation machine. The perovskite line evaporation machine includes a loading chamber 5 for loading substrates. The loading chamber 5 has a loading port for allowing the substrate to enter.

[0051] The purging device of this utility model is a nitrogen purging device, which is connected to an external gas supply device, and the gas supply device is a nitrogen gas supply device.

[0052] To clean the substrate surface and remove any dust, particles, or other contaminants, the cleaning device of this invention includes a first cleaning assembly 11 and a second cleaning assembly 12 arranged opposite to each other. Furthermore, to provide a stable support structure for the cleaning assemblies and ensure their secure installation at the loading port of the loading chamber 5, the cleaning device also includes a mounting bracket 4. Furthermore, to monitor the substrate's position and status in real time, ensuring timely cleaning and improving the cleaning effect, the cleaning device also includes a detection assembly 3. Furthermore, to ensure a stable supply of cleaning airflow and to adjust the airflow size for precise control of the cleaning process, the cleaning device also includes a connecting pipe and a valve. Furthermore, to adjust the angle of the cleaning holes of the first cleaning assembly 11 and the second cleaning assembly 12, the cleaning device also includes a drive assembly.

[0053] refer to Figure 1 The mounting frame 4 of this utility model is connected to the feeding port. Specifically, the mounting frame 4 includes a first longitudinal beam, a first transverse beam, a second longitudinal beam, and a second transverse beam connected in sequence.

[0054] In application, the mounting bracket 4 is installed on the periphery of the outer surface of the feed port. Furthermore, the feed port is rectangular, and the dimensions of the mounting bracket 4 are the same as or slightly larger than the feed port. In practical applications, the first crossbeam is parallel to the second crossbeam and parallel to the substrate entering the feed port; the second longitudinal beam is parallel to the first longitudinal beam and perpendicular to the first and second crossbeams.

[0055] The detection component 3 of this invention is installed on the first crossbeam and is used to detect the feeding substrate. It can monitor the substrate's arrival and status in real time, ensuring timely cleaning of the substrate and improving the cleaning effect. Specifically, the detection component 3 includes: a first sensor 31 and a second sensor 32.

[0056] In application, the first sensor 31 is installed on one side of the first crossbeam to detect the positioning of one side of the substrate. The second sensor 32 is installed on the other side of the first crossbeam, working in conjunction with the first sensor 31 to detect the positioning of the other side of the substrate, ensuring that the substrate is completely and correctly placed in the predetermined position. Specifically, when the substrate is conveyed under the first crossbeam, the first sensor 31 and the second sensor 32 monitor both sides of the substrate respectively. Only when both sensors detect the substrate simultaneously is it confirmed that the substrate is correctly positioned. This not only improves the accuracy of detection but also effectively prevents subsequent operational errors caused by substrate misalignment or incomplete positioning, thus providing a certain degree of foolproof protection.

[0057] In practical applications, when the first sensor 31 and the second sensor 32 simultaneously detect the substrate, the nitrogen purging assembly is activated. Nitrogen gas is blown across the substrate surface in the form of a high-speed airflow, effectively removing dust, particles, and other contaminants adhering to the substrate. This ensures that the substrate surface is highly clean before entering the loading chamber, maintaining the cleanliness of the internal environment of the coating chamber, reducing coating defects caused by contaminants, and shortening the vacuuming time of the coating chamber. Because a clean substrate reduces the accumulation of contaminants in the coating chamber, overall production efficiency and product quality are improved. The valve of this invention is located on the connecting pipe. One end of the connecting pipe has a branch structure, which can be connected to the first mounting pipe 1111, the second mounting pipe 1112, the third mounting pipe 1211, and the fourth mounting pipe 1212, respectively. The other end of the connecting pipe is used to connect to an external nitrogen supply device, allowing a single nitrogen supply device to simultaneously supply nitrogen to the first purging assembly 11 and the second purging assembly 12. In addition, the connecting pipe is used to connect the external supply device to the purging assembly to ensure a stable supply of purging airflow.

[0058] In application, the mounting bracket 4 has an air pipe interface 2 for the connecting pipe to pass through and be secured. Through the air pipe interface 2 on the mounting bracket 4, the connecting pipe can be securely passed through and secured, ensuring that there are no leaks or loose connections during the transfer of nitrogen from the gas supply device to the purging assembly. Furthermore, securing the connecting pipe through the air pipe interface 2 on the mounting bracket 4 makes the entire purging device neater and more organized, facilitating maintenance and operation.

[0059] In practical applications, valves are installed on the connecting pipe to control the opening and closing of the purging airflow and to regulate the airflow magnitude, thereby achieving precise control of the purging process. Specifically, the position and type of valve (such as manual valve, solenoid valve, etc.) can be selected according to actual needs to achieve precise airflow control.

[0060] The first purging assembly 11 of this utility model includes a first purging pipe 112, with loading ports connected to both ends. The first purging pipe 112 has multiple first purging holes 114, which are used to spray cleaning gases such as nitrogen onto the upper surface of the substrate. Furthermore, the orientation of the first purging holes 114 is away from the loading chamber 5 to prevent foreign objects on the substrate from being blown into the loading chamber 5. Specifically, the absolute value of the angle between the vertical normal vector of the first purging hole 114 and the plane of the loading substrate is (0°, 90°). Preferably, the absolute value of the angle between the vertical normal vector of the first purging hole 114 and the plane of the loading substrate is [30°, 45°], ensuring that the purging airflow impacts the upper surface of the substrate at the optimal angle, improving the purging effect. The vertical normal vector of the first purging hole 114 is the direction in which the airflow is blown out of the first purging hole 114.

[0061] Furthermore, the second purging assembly 12 of this invention includes a second purging pipe 122, with loading ports connected to both ends. The second purging pipe 122 has multiple second purging holes 124, which are used to spray cleaning gases such as nitrogen onto the lower surface of the substrate. Further, the orientation of the second purging holes 124 is away from the loading chamber 5 to prevent foreign objects on the substrate from being blown into the loading chamber 5. Specifically, the absolute value of the angle between the vertical normal vector of the second purging hole 124 and the plane of the loading substrate is (0°, 90°). Preferably, the absolute value of the angle between the vertical normal vector of the second purging hole 124 and the plane of the loading substrate is [30°, 45°], ensuring that the purging airflow impacts the lower surface of the substrate at the optimal angle, improving the purging effect. The vertical normal vector of the second purging hole 124 is the direction in which the airflow is blown out from the second purging hole 124.

[0062] In application, the first purge pipe 112 extends outward from both ends to form a first mounting pipe 1111 and a second mounting pipe 1112, respectively. The first mounting pipe 1111 is rotatably connected to the first longitudinal beam, and the second mounting pipe 1112 is rotatably connected to the second longitudinal beam, so as to realize the flexible adjustment of the first purge assembly 11. The second purge pipe 122 extends outward from both ends to form a third mounting pipe 1211 and a fourth mounting pipe 1212, respectively. The third mounting pipe 1211 is rotatably connected to the first longitudinal beam, and the fourth mounting pipe 1212 is rotatably connected to the second longitudinal beam, so as to realize the flexible adjustment of the second purge assembly 12.

[0063] In practical applications, the drive assembly is connected to the first blowing assembly 11 to adjust the angle between the vertical normal vector of the first blowing hole 114 and the plane of the loading substrate; the drive assembly is also connected to the second blowing assembly 12 to adjust the angle between the vertical normal vector of the second blowing hole 124 and the plane of the loading substrate. The drive assembly can be a servo motor, reducer, transmission mechanism, etc. Specifically, when the substrate is detected entering the loading chamber 5 through the loading port, the first blowing assembly 11 and the second blowing assembly 12 are activated, along with the drive assembly, setting the absolute value of the angle between the vertical normal vector of the blowing hole and the plane of the loading substrate to 30°. At this time, cleaning gases such as nitrogen are ejected through the first blowing hole 114 and the second blowing hole 124, cleaning the upper and lower surfaces of the substrate and ensuring that the blowing airflow fully covers the substrate surface, achieving comprehensive cleaning. When two-thirds of the substrate is detected to have entered the loading chamber 5 through the loading port, the drive assembly is activated to set the absolute value of the angle between the vertical normal vector of the blowing hole and the plane of the loading substrate to 45°, thereby reducing the blowing range and achieving effective blowing. Furthermore, those skilled in the art can flexibly adjust the blowing angles of the first blowing hole 114 and the second blowing hole 124 according to substrates of different sizes and shapes, as well as different cleaning requirements.

[0064] refer to Figure 2 The first blowing assembly 11 of this invention includes a plurality of first blowing nozzles 113, which are disposed on first blowing holes 114, and each first blowing nozzle 113 corresponds to a first blowing hole 114 to further optimize the direction and intensity of the blowing airflow, ensuring that the airflow impacts the upper surface of the substrate at the optimal angle and speed, thereby improving the cleaning effect. Furthermore, the second blowing assembly 12 includes a plurality of second blowing nozzles 123, which are disposed on second blowing holes 124, and each second blowing nozzle 123 corresponds to a second blowing hole 124 to further optimize the direction and intensity of the blowing airflow, ensuring that the airflow impacts the lower surface of the substrate at the optimal angle and speed, thereby improving the cleaning effect.

[0065] In application, the first blowing nozzle 113 and the second blowing nozzle 123 work together to ensure that the airflow maintains a certain direction and speed after leaving the blowing hole, preventing the airflow from spreading or weakening, so that the blowing airflow can fully cover the substrate surface and effectively remove stains and impurities.

[0066] On the other hand, in order to improve the cleanliness and efficiency of the vapor deposition process, thereby improving the vapor deposition quality and reducing production costs, and to enhance the automation and ease of operation of the vapor deposition machine, the perovskite wire vapor deposition machine of this utility model includes: a loading chamber 5 and the aforementioned purging device. Specifically, the loading chamber 5 is used for loading the substrate; the purging device is located at the loading port of the loading chamber 5 and is connected to an external nitrogen supply device.

[0067] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A purging device, characterized in that, The application relates to a perovskite line evaporation machine, which comprises a feeding cavity (5) for feeding a substrate, and a feeding opening is formed in the feeding cavity (5); The blowing device is connected with an external gas supply device, and the blowing device comprises: A first blowing assembly (11) comprising a first blowing pipe (112), both ends of the first blowing pipe (112) are connected with the feeding opening, and a plurality of first blowing holes (114) are formed in the first blowing pipe (112); A second blowing assembly (12) arranged opposite to the first blowing assembly (11), the second blowing assembly (12) comprises a second blowing pipe (122), both ends of the second blowing pipe (122) are connected with the feeding opening, and a plurality of second blowing holes (124) are formed in the second blowing pipe (122); The first blowing holes (114) and the second blowing holes (124) are arranged in a direction away from the feeding cavity (5), and the absolute value of the included angle between the normal vector of the first blowing holes (114) and the second blowing holes (124) and the plane of the feeding substrate is (0 DEG, 90 DEG).

2. The purging device of claim 1, wherein, The absolute value of the included angle between the normal vector of the first blowing holes (114) and the second blowing holes (124) and the plane of the feeding substrate is [30 DEG, 45 DEG].

3. The purging device of claim 1, wherein, The blowing device further comprises: A mounting frame (4) connected with the feeding opening, the mounting frame (4) comprises a first longitudinal beam, a first cross beam, a second longitudinal beam and a second cross beam connected in sequence.

4. The purging device of claim 3, wherein, The blowing device further comprises: A detection assembly (3) mounted on the first cross beam and used for detecting the feeding substrate, the detection assembly (3) comprises: A first sensor (31) and a second sensor (32), the first sensor (31) is mounted on one side of the first cross beam, and the second sensor (32) is mounted on the other side of the first cross beam.

5. The purging device of claim 3, wherein, Both ends of the first blowing pipe (112) are respectively extended outward into a first mounting pipe (1111) and a second mounting pipe (1112), the first mounting pipe (1111) is rotationally connected with the first longitudinal beam, and the second mounting pipe (1112) is rotationally connected with the second longitudinal beam. Both ends of the second blowing pipe (122) are respectively extended outward into a third mounting pipe (1211) and a fourth mounting pipe (1212), the third mounting pipe (1211) is rotationally connected with the first longitudinal beam, and the fourth mounting pipe (1212) is rotationally connected with the second longitudinal beam.

6. The purge apparatus of claim 5, wherein, The blowing device further comprises: A connecting pipe, one end of the connecting pipe is connected with the first mounting pipe (1111), the second mounting pipe (1112), the third mounting pipe (1211) and the fourth mounting pipe (1212), and the other end of the connecting pipe is used for connecting with the external gas supply device; A valve arranged on the connecting pipe.

7. A purge apparatus according to claim 6, characterised in that, A gas pipe interface (2) is formed in the mounting frame (4) and used for allowing the connecting pipe to penetrate.

8. The purging device of claim 1, wherein, The blowing device further comprises: A driving assembly is arranged to drive the first and second purge assemblies (11, 12) to adjust the included angle between the normal vectors of the first and second purge holes (114, 124) and the plane of the substrate.

9. The purging device of claim 1, wherein, The first purge assembly (11) comprises a first purge nozzle (113) arranged on the first purge hole (114). The second purge assembly (12) comprises a second purge nozzle (123) arranged on the second purge hole (124).

10. A perovskite wire vapor deposition machine characterized by, The application further provides a substrate loading system comprising: a substrate loading chamber (5) for loading a substrate; the purge device according to any one of claims 1-9 is arranged at a loading port of the substrate loading chamber (5) and is connected to an external nitrogen gas supply device.

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