Single crystal furnace bottom thermal field piece clamping tool

Abstract

The utility model discloses a single crystal furnace bottom thermal field piece clamping tool, which relates to the technical field of single crystal silicon and comprises an outer rod, a movable rod is slidably connected in an inner cavity of the outer rod, a limiting device for limiting the movable rod to move for a certain length is arranged at one end of the outer rod, a first fixing sleeve is fixedly connected to the bottom end of the movable rod, and a second fixing sleeve is fixedly connected to the bottom end of the movable rod. Three U-shaped pieces are arranged along the circumference of the outer wall of the first fixing sleeve in an array mode, clamping arms are rotationally connected to the interiors of the three U-shaped pieces, a fixing device used for fixing the center positions of the clamping arms is fixedly connected to the bottom end of the outer rod, and clamps capable of stretching out and drawing back along inner cavities of the clamping arms are arranged in the inner cavities of the clamping arms. By means of the tool, the thermal field piece with waste heat can be clamped, the clamped thermal field piece can be separated from a high-temperature furnace conveniently, the thermal field piece does not need to be manually picked up, the situation that workers are scalded by high temperature is avoided, and meanwhile the tool is simple in structure, low in manufacturing cost and convenient for later maintenance of users.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon technology, and in particular to a clamping tool for the hot zone components of a monocrystalline furnace bottom. Background Technology

[0002] As is well known, single-crystal silicon is a non-toxic elemental semiconductor material that is relatively easy to fabricate into large-diameter, dislocation-free, and low-defect single crystals. Its superior crystal mechanical properties and ease of industrialization will ensure its continued status as a primary semiconductor material.

[0003] In existing monocrystalline silicon growth processes, approximately 10 hours after the furnace is shut down, the furnace remains at a high temperature. This poses a significant risk of burns, especially when handling the low-power, long-life gas hoods and baffles located inside the furnace bottom insulation blanket. Waiting for the thermal zone temperature to drop wastes considerable time. Furthermore, during the disassembly and assembly of the thermal zone, components or tools may accidentally fall into confined, deep spaces, requiring manual retrieval. This is particularly problematic when disassembling components from furnaces with integrated insulation cylinders, triple-heater furnaces, or dual-heater furnaces, where the high temperature of the components, the weight of the insulation cylinder, and limited remaining space make manual retrieval extremely inconvenient. Therefore, a suitable fixture for handling the thermal zone components at the bottom of a monocrystalline furnace is urgently needed. Utility Model Content

[0004] The purpose of this utility model is to provide a fixture for handling the hot zone components at the bottom of a single crystal furnace, in order to solve the problem mentioned in the background art that the hot zone components at the bottom of the furnace can only be handled manually during the production of single crystal silicon materials, which can easily cause burns to workers due to the high temperature at the bottom of the furnace.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a clamping fixture for a hot zone component at the bottom of a single crystal furnace, comprising an outer rod, a movable rod slidably connected to the inner cavity of the outer rod, a limiting device for restricting the movement length of the movable rod at one end of the outer rod, a fixed sleeve fixedly connected to the bottom end of the movable rod, three U-shaped pieces arranged circumferentially along the outer wall of the fixed sleeve, each of the three U-shaped pieces having a clamping arm rotatably connected inside, a fixing device for fixing the center position of the clamping arm fixedly connected to the bottom end of the outer rod, a clamping clamp retractable along the inner cavity of the clamping arm in the inner cavity of the clamping arm, the three clamping clamps being used to jointly clamp the hot zone component, and a spring being provided between the fixed sleeve and the bottom end of the outer rod.

[0006] Preferably, the limiting device includes a limiting rod fixed to the top of the movable rod, and a limiting groove is formed on the outer wall of the outer rod, and the limiting rod slides within the limiting groove.

[0007] Preferably, the fixing device includes a fixing sleeve two fixed to the outer wall of the bottom of the outer rod, and three connecting plates are fixedly connected along the outer wall of the fixing sleeve two. The three connecting plates correspond one-to-one with three U-shaped pieces in the vertical direction. Two double connecting plates are rotatably connected to both sides of the connecting plates. The bottom ends of the two double connecting plates are rotatably connected to the center position of the clamping arm through a pin.

[0008] Preferably, the outer wall of the clamp is provided with an extendable and retractable insert, and the outer wall of the clamp arm is provided with an insertion hole adapted to the insert, the insert extending into the insertion hole.

[0009] Preferably, a second spring is fixedly connected to the inner cavity of the clamp, and a limiting plate is fixedly connected to one end of the second spring. The limiting plate is fixedly connected to the bottom end of the insertion block.

[0010] Preferably, a handle is fixedly connected to the top of the outer rod, the handle is located above the limiting rod, and a fixing plate is fixedly connected between the handle and the outer rod.

[0011] Preferably, one side of the clamp has serrations, and the bottom of the clamp has a chamfer.

[0012] The technical effects and advantages of this utility model are as follows: This utility model can clamp hot components with residual heat, making it easy to remove them from the high-temperature furnace without the need for manual handling, thus avoiding burns to workers. In addition, the tooling has a simple structure, low manufacturing cost, and is easy for users to maintain and repair. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0014] Figure 2 This is a partial three-dimensional structural diagram of the present invention.

[0015] Figure 3 This is a frontal cross-sectional view of the clamp of this utility model.

[0016] Figure 4 This is a front view schematic diagram of the outer rod structure of this utility model.

[0017] In the diagram: 1. Outer rod; 11. Limiting groove; 2. Movable rod; 3. Fixed sleeve one; 31. U-shaped piece; 4. Clamping arm; 41. Clamping clamp; 42. Insertion hole; 43. Insertion block; 44. Limiting plate; 45. Spring two; 5. Fixed sleeve two; 51. Connecting plate; 52. Double connecting plate; 6. Spring one; 7. Limiting rod; 8. Handle; 9. Fixed plate; 10. Heating element. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] This utility model provides, for example Figure 1-4 The above describes a clamping fixture for a hot zone component at the bottom of a single crystal furnace. It includes an outer rod 1, a movable rod 2 slidably connected to the inner cavity of the outer rod 1, a limiting device at one end of the outer rod 1 to restrict the movement length of the movable rod 2, a fixed sleeve 3 fixedly connected to the bottom end of the movable rod 2, three U-shaped pieces 31 arranged circumferentially along the outer wall of the fixed sleeve 3, and clamping arms 4 rotatably connected inside each of the three U-shaped pieces 31. A fixing device for fixing the center position of the clamping arms 4 is fixedly connected to the bottom end of the outer rod 1. A clamping clamp 41 that can extend and retract along the inner cavity of the clamping arm 4 is provided in the inner cavity of the clamping arm 4. The three clamping clamps 41 are used to clamp the hot zone component 10 together. A spring 6 is provided between the fixed sleeve 3 and the bottom end of the outer rod 1.

[0020] When using the tool, when removing the hot zone to the bottom of the furnace, the operator holds the upper end of the outer rod 1 with one hand and the middle end of the outer rod 1 with the other hand, aligns the lower end of the tool with the hot zone component 10 to be clamped, and moves the tool downward. When the clamp 41 exceeds the hot zone component 10 to be clamped, the operator compresses the limit rod 7 with one hand and holds it down. The power is transmitted to the spring 6 through the movable rod 2. The spring 6 is compressed by the force, and the lower end of the movable rod 2 moves upward. At this time, the fixed sleeve 3 moves upward, and the fixed sleeve 3 moves the clamping arm 4 upward. Since the center position of the clamping arm 4 is fixed by the fixing device, the clamping arm 4 retracts, thereby clamping the hot zone component 10 with the clamp 41. After the hot zone component 10 is clamped, the tool is lifted, the hot zone component 10 is placed in the required position, the handle 8 is released, the spring 6 returns to its original position, the clamp 41 expands outward, and the hot zone component 10 is released.

[0021] This tooling can be used to clamp the hot zone component 10 with residual heat, making it easier for the hot zone component 10 to be removed from the high-temperature furnace, avoiding manual handling and burns. At the same time, the tooling has a simple structure, low manufacturing cost, and is easy for users to maintain and care for later.

[0022] like Figure 1 and Figure 4 As shown, the limiting device includes a limiting rod 7 fixed at the top of the movable rod 2, and a limiting groove 11 is opened on the outer wall of the outer rod 1, and the limiting rod 7 slides in the limiting groove 11.

[0023] The cooperation between the limiting groove 11 and the limiting rod 7 prevents the movable rod 2 from moving too far, thus avoiding excessive stretching of the spring 6 and loss of its rebound effect.

[0024] like Figure 2 As shown, the fixing device includes a fixing sleeve 2 5 fixed to the bottom outer wall of the outer rod 1. Three connecting plates 51 are fixedly connected along the outer wall of the fixing sleeve 2 5. The three connecting plates 51 correspond one-to-one with the three U-shaped pieces 31 in the vertical direction. Two double connecting plates 52 are rotatably connected to both sides of the connecting plates 51. The bottom ends of the two double connecting plates 52 are rotatably connected to the center position of the clamping arm 4 through a pin. By fixing the clamping arm 4 with the double connecting plates 52, the clamping arm 4 can perform the action of gripping and releasing.

[0025] like Figure 2 As shown, the outer wall of the clamp 41 is provided with an extendable and retractable insert 43, and the outer wall of the clamp arm 4 is provided with an insertion hole 42 that is adapted to the insert 43, and the insert 43 extends into the insertion hole 42.

[0026] Because the limiting device restricts the opening angle of the clamping arm 4, the opening angle of the clamp 41 is limited. By inserting the plug 43 into different plug holes 42, the clamp 41 can extend and retract along the inner cavity of the clamping arm 4, thereby adjusting the size of the opening of the clamp 41. This allows for a certain angle adjustment when clamping different hot zone components 10, increasing practicality.

[0027] like Figure 3 As shown, a second spring 45 is fixedly connected in the inner cavity of the clamp 41. One end of the second spring 45 is fixedly connected to a limiting plate 44, and the limiting plate 44 is fixedly connected to the bottom end of the insert block 43.

[0028] like Figure 1 As shown, a handle 8 is fixedly connected to the top of the outer rod 1. The handle 8 is located above the limiting rod 7, and a fixing plate 9 is fixedly connected between the handle 8 and the outer rod 1.

[0029] like Figure 2 As shown, one side of the clamp 41 is provided with serrations, and the bottom of the clamp 41 is provided with a chamfer. By providing serrations, the friction between the clamp 41 and the heat field component 10 is increased. At the same time, the chamfer at the bottom of the clamp 41 is convenient to support the bottom of the heat field component 10 when the clamp 41 is gripping, so as to prevent the heat field component 10 from falling off when gripping.

[0030] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A clamping fixture for a hot zone component at the bottom of a single crystal furnace, comprising an outer rod (1), characterized in that: A movable rod (2) is slidably connected in the inner cavity of the outer rod (1). One end of the outer rod (1) is provided with a limiting device to restrict the movement length of the movable rod (2). A fixed sleeve (3) is fixedly connected to the bottom end of the movable rod (2). Three U-shaped pieces (31) are arranged in a circumferential array along the outer wall of the fixed sleeve (3). A clamping arm (4) is rotatably connected inside each of the three U-shaped pieces (31). A fixing device for fixing the center position of the clamping arm (4) is fixedly connected to the bottom end of the outer rod (1). A clamp (41) that can extend and retract along the inner cavity of the clamping arm (4) is provided in the inner cavity of the clamping arm (4). The three clamps (41) are used to jointly clamp the thermal field component (10). A spring (6) is provided between the fixed sleeve (3) and the bottom end of the outer rod (1).

2. The fixture for clamping the bottom hot zone components of a single crystal furnace according to claim 1, characterized in that: The limiting device includes a limiting rod (7) fixed at the top of the movable rod (2), and a limiting groove (11) is opened on the outer wall of the outer rod (1). The limiting rod (7) slides in the limiting groove (11).

3. The fixture for clamping the bottom hot zone components of a single crystal furnace according to claim 1, characterized in that: The fixing device includes a fixing sleeve 2 (5) fixed to the bottom outer wall of the outer rod (1). Three connecting plates (51) are fixedly connected along the outer wall of the fixing sleeve 2 (5). The three connecting plates (51) correspond one-to-one with the three U-shaped pieces (31) in the vertical direction. Two double connecting plates (52) are rotatably connected to both sides of the connecting plate (51). The bottom ends of the two double connecting plates (52) are rotatably connected to the center position of the clamping arm (4) through a pin.

4. The fixture for clamping the bottom hot zone components of a single crystal furnace according to claim 1, characterized in that: The outer wall of the clamp (41) is provided with an extendable and retractable insert (43), and the outer wall of the clamp arm (4) is provided with an insertion hole (42) that is adapted to the insert (43), and the insert (43) extends into the insertion hole (42).

5. The fixture for clamping the bottom hot zone components of a single crystal furnace according to claim 4, characterized in that: A second spring (45) is fixedly connected to the inner cavity of the clamp (41). One end of the second spring (45) is fixedly connected to a limiting plate (44), and the limiting plate (44) is fixedly connected to the bottom end of the insert block (43).

6. The fixture for clamping the bottom hot zone components of a single crystal furnace according to claim 1, characterized in that: A handle (8) is fixedly connected to the top of the outer rod (1). The handle (8) is located above the limiting rod (7). A fixing plate (9) is fixedly connected between the handle (8) and the outer rod (1).

7. The fixture for clamping the bottom hot zone components of a single crystal furnace according to claim 1, characterized in that: One side of the clamp (41) is provided with serrations, and the bottom of the clamp (41) is provided with chamfers.

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