Calibration device and coating equipment

Abstract

The utility model discloses a calibration device and coating equipment. The calibration device comprises a lifting assembly, the lifting assembly comprises a first driving part and a first lifting air cylinder, and the first driving part is connected with the first lifting air cylinder so that the first lifting air cylinder can stretch out and draw back in the Z-axis direction; the standard assembly is connected with the first lifting air cylinder, the calibration assembly comprises a T-shaped calibration block, and the T-shaped calibration block reciprocates in the Z-axis direction; and the first sensor is arranged below the T-shaped calibration block and is used for detecting the position of the T-shaped calibration block. According to the calibration device and the coating equipment, through the synergistic effect of the lifting assembly, the T-shaped calibration block and the first sensor, automatic zero calibration is assisted, the manual operation time is remarkably shortened, and the equipment utilization rate is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of coating equipment calibration, and in particular to a calibration device and coating equipment. Background Technology

[0002] In the field of coating equipment technology, zero-point calibration of the coating head is a crucial step in ensuring coating accuracy and consistency. Currently, zero-point calibration of the coating head primarily relies on manual operation. The specific process involves the operator repeatedly adjusting the position of the calibration block and manually controlling the contact state between the coating head and the calibration block to ultimately complete the zero-point calibration. However, this manual calibration method has the following drawbacks:

[0003] Each calibration requires manual adjustment of the coating head and calibration block position multiple times, with each calibration taking about 15-30 minutes, resulting in a significant reduction in the effective operating time of the equipment. This problem is particularly prominent in high-precision coating scenarios with frequent calibration requirements, such as perovskite solar cells and optical film coating.

[0004] When manually placing the calibration block, positional repeatability is difficult to guarantee, easily resulting in a positioning deviation of approximately 5μm, which directly affects the zero-point calibration accuracy of the coating head. Furthermore, current technology struggles to provide real-time feedback on micron-level displacement changes, leading to insufficient stability of calibration results and failing to meet the stringent requirements of precision coating processes.

[0005] During calibration, operators need to hold the calibration block in contact with the coating head or adsorption platform. Slight carelessness may lead to mechanical damage such as sensor collision or scratches on the reference platform due to operational errors, increasing equipment maintenance costs and downtime risks.

[0006] Although some automated calibration attempts have been made in existing technologies, they are complex in structure, expensive, and have not completely solved problems such as insufficient positioning accuracy of calibration blocks and poor environmental adaptability.

[0007] To solve at least one of the above-mentioned technical problems, this utility model proposes a calibration device and a coating equipment. Utility Model Content

[0008] The purpose of this invention is to provide a calibration device and coating equipment. Through the coordinated action of the lifting component, the T-shaped calibration block and the first sensor, it assists in automated zero-point calibration, significantly reduces manual operation time and improves equipment uptime.

[0009] The objective of this utility model is achieved through the following technical solution:

[0010] On the one hand, this utility model provides a calibration device, the calibration device comprising:

[0011] A lifting assembly, comprising a first driving component and a first lifting cylinder, wherein the first driving component is connected to the first lifting cylinder, causing the first lifting cylinder to extend and retract along the Z-axis direction;

[0012] A standard component is connected to the first lifting cylinder, and a calibration component includes a T-shaped calibration block that reciprocates along the Z-axis.

[0013] A first sensor is disposed below the T-shaped calibration block and is used to detect the position of the T-shaped calibration block.

[0014] The beneficial effects of the above solution are as follows: This utility model, through the integrated layout of the lifting assembly, standard assembly, and first sensor, eliminates the need for additional equipment space, making it particularly suitable for precision applications such as perovskite battery coating in slot coating machines. Furthermore, the synergistic effect of the lifting assembly, T-shaped calibration block, and first sensor assists in automated zero-point calibration, significantly reducing manual operation time and improving equipment uptime.

[0015] Furthermore, the standard component also includes:

[0016] The positioning plate has a first groove that matches the T-shaped calibration block. The first groove accommodates the T-shaped calibration block. The bottom of the first groove has a first through hole that exposes the positioning boss portion of the T-shaped calibration block.

[0017] An elastic floating plate is provided, with one side connected to the cylinder body of the first lifting cylinder and the other side connected to part of the positioning plate and part of the T-shaped calibration block.

[0018] The beneficial effects of the above solution are: This utility model ensures accurate positioning of the calibration block and provides elastic compensation by matching the first groove of the positioning plate with the T-shaped calibration block, combined with an elastic floating plate. Furthermore, the positioning boss is exposed through the first through hole to improve repeatability.

[0019] Furthermore, the standard component also includes:

[0020] An elastic buffer medium is disposed between the elastic floating plate and the T-shaped calibration block.

[0021] The beneficial effects of the above solution are: the present invention absorbs the impact force when the calibration block falls by means of an elastic buffer medium, preventing the T-shaped calibration block from vibrating or deforming when it comes into contact with the outside world, thus ensuring the stability and reliability of the calibration process.

[0022] Furthermore, a second through hole is provided on the elastic floating plate, and a third through hole corresponding to the second through hole is provided on the positioning plate;

[0023] The standard components also include:

[0024] A guide bushing is disposed within the second through hole and the third through hole;

[0025] A guide shaft passes through the guide bushing and connects the elastic floating plate and the positioning plate.

[0026] The beneficial effects of the above solution are: by cooperating with the guide bushing and the guide shaft, this utility model constrains the movement path of the elastic floating plate and the positioning plate, ensuring that the calibration block moves linearly along the Z-axis, avoiding offset or tilting, and improving the repeatability accuracy of the calibration action.

[0027] Furthermore, the T-shaped calibration block is a marble calibration block;

[0028] The first sensor is a magnetically coupled displacement sensor.

[0029] The advantages of the above solution are: This invention utilizes marble, which has an extremely low coefficient of thermal expansion, so the effect of ambient temperature fluctuations on the deformation of the calibration block is negligible, ensuring long-term stability. Furthermore, the magnetically coupled displacement sensor has high sensitivity, capable of real-time feedback of micron-level displacement changes, with a calibration accuracy of ±0.001mm.

[0030] Furthermore, the first driving component includes a servo motor.

[0031] The beneficial effects of the above solution are: This utility model uses a servo motor to drive the lifting cylinder, thereby achieving precise control of the Z-axis lifting speed and position, dynamically adapting to minute deformations, and improving the adaptability of the calibration process.

[0032] On the other hand, this utility model provides a coating device, including at least one set of the aforementioned calibration devices.

[0033] The beneficial effects of the above solution are: this utility model reduces equipment downtime and improves the overall efficiency of the production line by integrating a calibration device into the coating equipment. Furthermore, the coordinated operation of multiple calibration devices makes it suitable for complex coating processes.

[0034] Furthermore, the coating equipment also includes:

[0035] Gantry frame, the gantry frame being connected to the first drive unit;

[0036] A coating head, which is mounted on the gantry frame;

[0037] An adsorption platform is disposed below the coating head and is used to place the substrate.

[0038] The beneficial effects of the above solution are: This utility model integrates the coating head and calibration device through a gantry frame, optimizing the equipment space layout. Furthermore, the adsorption platform fixes the substrate position, ensuring consistent spacing between the coating head and the substrate, thus improving coating uniformity.

[0039] Furthermore, the gantry crane includes:

[0040] A crossbeam, used to mount the coating head;

[0041] A first support is provided with a Z-axis slide rail, which is slidably connected to the crossbeam.

[0042] Z-axis drive unit, which is connected to the crossbeam, drives the coating head to reciprocate along the Z-axis;

[0043] The second bracket is provided with an X-axis slide rail, which is slidably connected to the first bracket.

[0044] An X-axis drive unit is connected to the first bracket and drives the first bracket to reciprocate along the X-axis.

[0045] The beneficial effects of the above solution are: This utility model achieves high-precision multi-directional movement of the coating head by using servo motor drive in conjunction with X-axis and Z-axis slide rails.

[0046] Furthermore, the first lifting cylinder is mounted on the crossbeam;

[0047] The first sensor is mounted on the adsorption platform.

[0048] The advantages of the above solution are: by placing the first lifting cylinder and the first sensor separately on the crossbeam and the adsorption platform, this invention avoids mechanical interference during the movement of the coating head, ensuring independent and efficient calibration operations. Furthermore, the first sensor directly detects the contact state of the adsorption platform, further shortening the calibration path and improving response speed.

[0049] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0050] This invention integrates the lifting assembly, standard components, and the first sensor, eliminating the need for additional equipment space. It is particularly suitable for precision applications such as perovskite solar cell coating in slotted coating machines. Furthermore, the synergistic effect of the lifting assembly, T-shaped calibration block, and the first sensor facilitates automated zero-point calibration, significantly reducing manual operation time and improving equipment uptime. Attached Figure Description

[0051] Figure 1 This is a schematic diagram of the coating equipment according to an embodiment of the present invention.

[0052] Figure 2 This is a schematic diagram of a calibration device according to an embodiment of the present invention.

[0053] Figure 3 This is a partial structural diagram of the calibration device according to an embodiment of the present invention.

[0054] In the figure: 100, calibration device; 11, lifting assembly; 111, first lifting cylinder; 112, first driving component; 12, standard assembly; 121, T-shaped calibration block; 1211, positioning boss part; 122, positioning plate; 1221, first through hole; 123, elastic floating plate; 124, elastic buffer medium; 125, guide bushing; 126, guide shaft; 200, coating equipment; 21, gantry frame; 211, crossbeam; 212, first support; 213, second support; 22, coating head; 23, adsorption platform; 3, first sensor. Detailed Implementation

[0055] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0056] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0057] The calibration device 100 of this invention is applicable to coating equipment 200. The coating equipment 200 of this invention is suitable for applications requiring stringent coating uniformity, such as perovskite batteries, lithium battery electrodes, and optical films. By integrating the calibration device 100 with a multi-axis motion system, the coating equipment 200 of this invention achieves efficient calibration of the coating head 22 position.

[0058] The coating equipment 200 of this invention includes at least one set of calibration devices 100. Furthermore, the coating equipment 200 of this invention also includes: a gantry frame 21, a coating head 22, and an adsorption platform 23.

[0059] In application, the coating head 22 is mounted on the gantry 21, and the adsorption platform 23 is located below the coating head 22 for placing the substrate.

[0060] In practical applications, the surface of the adsorption platform 23 is distributed with matrix-style vacuum adsorption holes. A negative pressure is generated by an external vacuum pump to tightly fix the substrate, such as a flexible film or metal foil, to prevent the substrate from shifting or warping during the coating process.

[0061] The gantry frame 21 of this utility model includes: a crossbeam 211, a first support 212, a Z-axis drive component, a second support 213, and an X-axis drive component. Further, the gantry frame 21 of this utility model may also include: a third support and a Y-axis drive component.

[0062] In application, the crossbeam 211 is used to mount the coating head 22. Furthermore, the first bracket 212 is equipped with a Z-axis slide rail, which slidably connects to the crossbeam 211. A Z-axis drive unit is connected to the crossbeam 211, driving the coating head 22 to reciprocate along the Z-axis. Additionally, the second bracket 213 is equipped with an X-axis slide rail, which slidably connects to the first bracket 212. An X-axis drive unit is connected to the first bracket 212, driving the first bracket 212 to reciprocate along the X-axis. In practical applications, the crossbeam 211 serves as the core load-bearing component. The crossbeam 211 has a mounting interface for the coating head 22 and a mounting base for the calibration device 100. Internally, it integrates a servo motor cable and air ducts, ensuring the neatness and ease of maintenance of the coating equipment 200. The Z-axis slide rail uses a linear guide with a repeatability accuracy of ±1μm, is mounted on the vertical surface of the first bracket 212, and is connected to the crossbeam 211 via a slider, ensuring the smooth movement of the coating head 22 along the Z-axis. The Z-axis drive unit, driven by a servo motor and a ball screw, is directly connected to the crossbeam 211 via a coupling, allowing the coating head 22 to precisely rise and fall at a variable speed of 0.1-100 mm / s, adapting to different substrate thicknesses and coating process requirements. The X-axis slide rails are arranged parallel to the horizontal plane of the second support 213, employing a symmetrical double-rail configuration. Connected to the first support 212 via a slider, this ensures the rigidity and torsional resistance of the coating head 22 during lateral movement. The X-axis drive unit, driven by a servo motor and a synchronous belt or rack and pinion mechanism, moves the first support 212 and the coating head 22 along the X-axis at a constant speed or constant acceleration.

[0063] In actual implementation, the third bracket is equipped with a Y-axis slide rail, which is slidably connected to the second bracket 213. The Y-axis drive component of the second bracket 213 drives the second bracket to reciprocate along the Y-axis.

[0064] The calibration device 100 of this utility model includes: a lifting assembly 11, a standard assembly 12, and a first sensor 3.

[0065] In application, the standard component 12 of this utility model is connected to the first lifting cylinder 111, and the first sensor 3 is set below the standard component 12 to detect the position of the standard component 12.

[0066] In practical applications, the first sensor 3 is a magnetically coupled displacement sensor, which is installed on the adsorption platform 23.

[0067] The lifting assembly 11 of this utility model includes a first driving member 112 and a first lifting cylinder 111. The first driving member 112 is connected to the first lifting cylinder 111, causing the first lifting cylinder 111 to extend and retract along the Z-axis direction, thereby driving the standard assembly 12 to reciprocate along the Z-axis direction.

[0068] In application, the gantry 21 is connected to a first drive unit 112, which includes a first servo motor. The first servo motor drives the cylinder head of a first lifting cylinder 111, which is mounted on a crossbeam 211. Preferably, the cylinder body of the first lifting cylinder 111 is mounted on the crossbeam 211. Furthermore, the first drive unit 112 can be reused as a Z-axis drive unit.

[0069] In practical applications, the first driving component 112 uses a first servo motor with a resolution of 0.1μm. It is rigidly connected to a ball screw via a coupling, converting rotary motion into linear motion to drive the first lifting cylinder 111 to extend and retract along the Z-axis. Furthermore, the first servo motor and the cylinder head of the first lifting cylinder 111 are fixedly connected via a flange to ensure backlash-free power transmission. At the same time, a linear guide rail is configured as a guide support to eliminate lateral offset and improve lifting stability.

[0070] In actual implementation, the stroke range of the first lifting cylinder 111 is 10-200mm, and it has a built-in magnetically coupled displacement sensor to monitor the piston position in real time with a resolution of ±0.5μm. In addition, the cylinder body of the first lifting cylinder 111 is made of aerospace aluminum alloy with a hard anodized surface treatment, which combines lightweight and high rigidity, and is suitable for high-speed reciprocating motion.

[0071] The standard component 12 of this utility model includes a T-shaped calibration block 121. Further, the standard component 12 may also include a positioning plate 122 and an elastic floating plate 123. Further, the standard component 12 may also include an elastic buffer medium 124. Even further, the standard component 12 may also include a guide bushing 125 and a guide shaft 126.

[0072] The positioning plate 122 of this utility model has a first groove that matches the T-shaped calibration block 121. The first groove accommodates the T-shaped calibration block 121. The bottom of the first groove has a first through hole 1221, which exposes the positioning boss portion 1211 of the T-shaped calibration block 121.

[0073] In application, the first groove on the positioning plate 122 matches the cross-section of the T-shaped calibration block 121, and the lateral displacement of the calibration block is limited by the interference fit. The T-shaped calibration block 121 is made of granite and is formed by CNC grinding, with a flat positioning boss on the bottom surface. The first through hole 1221 is located at the bottom of the groove, with a diameter slightly larger than the positioning boss and a gap of less than 3mm, which can ensure that the positioning plate 122 can achieve position angle floating compensation. In addition, the first through hole 1221 exposes the positioning boss part 1211 and allows it to directly contact the adsorption platform 23 or the first sensor 3, avoiding tilting errors caused by uneven bottom surface of the groove.

[0074] One side of the elastic floating plate 123 of this invention is connected to the cylinder body of the first lifting cylinder 111, and the other side of the elastic floating plate 123 is connected to a portion of the positioning plate 122 and a portion of the T-shaped calibration block 121. An elastic buffer medium 124 is disposed between the elastic floating plate 123 and the T-shaped calibration block 121. Furthermore, the elastic floating plate 123 has a second through hole, and the positioning plate 122 has a third through hole corresponding to the second through hole. A guide bushing 125 is disposed within the second and third through holes, and a guide shaft 126 passes through the guide bushing 125, connecting the elastic floating plate 123 and the positioning plate 122. Additionally, both ends of the guide shaft 126 are fixed to the positioning plate 122 or the elastic floating plate 123 by threads or snap rings.

[0075] In application, the elastic floating plate 123 is made of 65Mn spring steel with a thickness of 3mm and a yield strength of 785MPa. Its four corners are connected to the positioning plate 122 via four guide shafts 126, allowing the calibration block to float elastically within a range of ±0.2mm in the Z-axis direction, absorbing the impact energy at the moment of contact. Furthermore, the elastic floating plate 123 is connected to the cylinder body of the first lifting cylinder 111 via a flange to ensure rigidity of power transmission, while simultaneously compensating for minor unevenness of the mounting surface through elastic deformation.

[0076] The elastic buffer medium 124 has a buffer stroke of 5 mm or more, which can prevent excessive impact force when the marble positioning plate 122 and the adsorption platform 23 are attached when the first lifting cylinder 111 descends. The elastic buffer force acts on the positioning plate 122, making it effectively and tightly attached to the adsorption platform 23. Furthermore, the elastic buffer medium 124 can be a polyurethane gasket with a hardness of Shore A70 and a thickness of 2 mm, sandwiched between the elastic floating plate 123 and the T-shaped calibration block 121. Its nonlinear elastic characteristics can effectively attenuate high-frequency vibrations such as mechanical impacts during cylinder emergency stops, reducing the fluctuation of the reading of the first sensor 3 to within ±0.1 μm.

[0077] It is worth noting that the calibration device 100 and coating equipment 200 of this utility model are used as follows:

[0078] Step 1: Place the substrate on the adsorption platform 23, install at least one first lifting cylinder 111 on the crossbeam 211 of the gantry 21, connect the standard component 12 to the output end of the first lifting cylinder 111, provide a first sensor 3 below the standard block, and install the first sensor 3 on the side of the adsorption platform 23.

[0079] Step 2: Move the gantry 21 down along the Z-axis so that the vertical distance between the bottom surface of the standard block and the top surface of the probe of the first sensor 3 is the first preset value.

[0080] Step 3: Activate the first lifting cylinder 111 to move the standard block down along the Z-axis and make contact with the base plate.

[0081] Step 4: Raise the probe of the first sensor 3 and connect it to the standard block, so that the initial measurement value of the amplifier of the first sensor 3 is zeroed.

[0082] Step 5: Lower the probe of the first sensor 3 to the initial position; move the cylinder head of the first lifting cylinder 111 to the initial position.

[0083] Step 6: Move the gantry 21 along the XOY plane so that the central axis of the coating head 22 is coaxial with the probe axis of the first sensor 3;

[0084] Step 7: Move the gantry 21 along the Z-axis so that the vertical distance between the coating head 22 and the first sensor 3 is the third preset value.

[0085] Step 8: Raise the probe of the first sensor 3 to the upper limit of its range.

[0086] Step 9: Move the coating head 22 down along the Z-axis and make the coating head 22 abut against the top surface of the probe of the first sensor 3.

[0087] Step 10: Establish a mapping relationship between the Z-axis encoder reading of the coating head 22 and the full-scale measurement value of the first sensor 3 to perform zero-point calibration of the position of the coating head 22. Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A calibration device, characterized in that, include: The lifting assembly (11) includes a first driving member (112) and a first lifting cylinder (111). The first driving member (112) is connected to the first lifting cylinder (111) so that the first lifting cylinder (111) extends and retracts along the Z-axis. A standard component (12) is connected to the first lifting cylinder (111), and the calibration component includes a T-shaped calibration block (121) that reciprocates along the Z-axis. The first sensor (3) is disposed below the T-shaped calibration block (121) and is used to detect the position of the T-shaped calibration block (121).

2. The calibration device according to claim 1, characterized in that, The standard component (12) also includes: The positioning plate (122) has a first groove that matches the T-shaped calibration block (121). The first groove accommodates the T-shaped calibration block (121). The bottom of the first groove has a first through hole (1221). The first through hole (1221) exposes the positioning boss portion (1211) of the T-shaped calibration block (121). An elastic floating plate (123) is provided, with one side of the elastic floating plate (123) connected to the cylinder body of the first lifting cylinder (111), and the other side of the elastic floating plate (123) connected to part of the positioning plate (122) and part of the T-shaped calibration block (121).

3. The calibration device according to claim 2, characterized in that, The standard component (12) also includes: An elastic buffer medium (124) is disposed between the elastic floating plate (123) and the T-shaped calibration block (121).

4. The calibration device according to claim 2, characterized in that, The elastic floating plate (123) has a second through hole, and the positioning plate (122) has a third through hole corresponding to the second through hole; The standard component (12) also includes: A guide bushing (125) is disposed in the second through hole and the third through hole; A guide shaft (126) passes through the guide bushing (125) and connects the elastic floating plate (123) and the positioning plate (122).

5. The calibration device according to claim 1, characterized in that, The T-shaped calibration block (121) is a marble calibration block; The first sensor (3) is a magnetically coupled displacement sensor.

6. The calibration apparatus according to claim 1, characterized in that, The first driving element (112) includes a servo motor.

7. A coating apparatus, characterized in that, include: At least one set of calibration devices as described in any one of claims 1 to 6.

8. The coating equipment according to claim 7, characterized in that, Also includes: Gantry (21), the gantry (21) being connected to the first drive member (112); A coating head (22) is mounted on the gantry (21); An adsorption platform (23) is disposed below the coating head (22) and is used to place the substrate.

9. The coating equipment according to claim 8, characterized in that, The gantry (21) includes: A crossbeam (211) is used to mount the coating head (22); The first bracket (212) is provided with a Z-axis slide rail, which is slidably connected to the crossbeam (211). Z-axis drive unit, which is connected to the crossbeam (211) and drives the coating head (22) to reciprocate along the Z-axis; The second bracket (213) is provided with an X-axis slide rail, which is slidably connected to the first bracket (212). An X-axis drive unit is connected to the first bracket (212) and drives the first bracket (212) to reciprocate along the X-axis.

10. The coating equipment according to claim 9, characterized in that, The first lifting cylinder (111) is mounted on the crossbeam (211); The first sensor (3) is mounted on the adsorption platform (23).

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