Fly-eye lens, ray machine and projector
By setting micromirror groups of different sizes in the compound eye lens and arranging them in a staggered manner, the interference fringe problem caused by the micromirror units was solved, and higher quality image projection and light energy utilization were achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-09
- Publication Date
- 2026-04-03
AI Technical Summary
Existing compound eye lenses, due to the identical size of the micromirror units, cause obvious interference fringes in the laser beam, affecting the quality of the projected image.
The compound eye lens is designed so that the projected size of the micromirror units in adjacent micromirror groups is different in the first direction. By setting a staggered arrangement, the periodicity of the interference fringes is disrupted, thereby causing the interference fringes between different micromirror groups to be spatially misaligned and reducing the superposition effect.
It effectively mitigates the appearance of overall interference fringes, improves the quality of projected images and light energy utilization, and enhances the user experience.
Smart Images
Figure CN224081838U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical lens technology, and in particular to a compound eye lens, an optical engine including the compound eye lens, and a projector including the optical engine. Background Technology
[0002] The optical mechanism of a typical laser projector usually uses a compound eye lens to homogenize the laser beam. A typical compound eye lens consists of multiple micromirror units arranged in an array, all of the same size. However, due to the strong coherence of the laser beam, the small size of each micromirror unit causes diffraction as it passes through a single beam. The superposition of multiple diffracted beams forms interference fringes, ultimately resulting in a striped pattern in the projected image, affecting the display quality. Utility Model Content
[0003] This application discloses a compound eye lens, an optical engine, and a projector that can alleviate the streaks formed by the compound eye lens.
[0004] In a first aspect, this application relates to a compound eye lens, comprising:
[0005] Base;
[0006] Multiple micromirror units are formed on the surface of the substrate;
[0007] The plurality of micromirror units form at least two micromirror groups, and the micromirror units in the same micromirror group have the same size of projection in the first direction; the micromirror units in two adjacent micromirror groups have different sizes of projection in the first direction.
[0008] The compound eye lens provided in this application provides multiple micromirror groups, including at least two types of micromirror units of different sizes. This causes misalignment between adjacent micromirror units of different sizes in two adjacent micromirror groups, resulting in inconsistent spacing between the two types of interference fringes formed when light passes through two adjacent micromirror groups. In other words, when the two types of interference fringes are superimposed, their respective peaks and troughs will be misaligned, thereby mitigating the overall interference fringe effect.
[0009] In one embodiment, the projection of the micromirror unit in the first direction is a rectangle, and the long side of the rectangle formed by the projection of each micromirror unit in the first direction is parallel to the second direction, and the short side is parallel to the third direction.
[0010] In one embodiment, the plurality of micromirror units in each of the micromirror groups are arranged in at least one column in the second direction.
[0011] In one embodiment, the plurality of micromirror units in each of the micromirror groups are arranged in at least one column in the third direction.
[0012] In one embodiment, the maximum working angle of the micromirror unit in the second direction is 5-7°, and the maximum working angle of the micromirror unit in the third direction is 3-4°.
[0013] In one embodiment, the micromirror unit has a size of 0.5-2.0 mm in the second direction.
[0014] In one embodiment, the ratio of the dimensions of the projections of the micromirror units in two adjacent micromirror groups in the first direction is between 0.8 and 1.
[0015] In one embodiment, the thickness of the portion of the substrate corresponding to each micromirror unit in the first direction is positively correlated with the size of the projection of the corresponding micromirror unit in the first direction.
[0016] In one embodiment, a plurality of micromirror units are respectively formed on two opposing surfaces of the substrate in the first direction, and the projection of one micromirror unit on one surface and the projection of the micromirror unit on the other surface in the first direction coincide.
[0017] In one embodiment, the substrate includes a first substrate and a second substrate arranged in parallel, and a plurality of micromirror units are respectively formed on a side surface of the first substrate perpendicular to the first direction and on a side surface of the second substrate perpendicular to the first direction; the projection of each micromirror unit formed on the first substrate and a micromirror unit formed on the second substrate in the first direction coincides.
[0018] Secondly, this application also relates to an optical engine, comprising:
[0019] The light source module is used to emit light from the light source;
[0020] A beam shaping module for guiding and homogenizing the light source, the beam shaping module including the aforementioned compound eye lens; and
[0021] A light modulation chip is used to receive and modulate the light source light homogenized by the beam shaping module.
[0022] The optical engine provided in this application embodiment, by setting the compound eye lens in the above embodiment, allows the light source to illuminate the compound eye lens and form interference fringes through different micromirror groups. The interference fringes between different micromirror groups at least partially cancel each other out, thereby alleviating the overall interference fringes and improving the overall image effect.
[0023] In one embodiment, the projection of the micromirror unit in the first direction is a rectangle, and the aspect ratio of the rectangle differs from that of the optical modulation chip by no more than 10%.
[0024] The optomechanism provided in this application embodiment sets the aspect ratio of the projection of the micromirror unit in the first direction to be similar to that of the light modulation chip, so that the aspect ratio of the light spot formed after the light passes through the compound eye lens and is shaped by the second beam shaping module is similar to that of the light modulation chip, thereby improving the utilization rate of the light source.
[0025] In one embodiment, the difference in light energy received by multiple micromirror groups of different sizes illuminated by the light source does not exceed 10%.
[0026] The optomechanism provided in this application embodiment, by setting the difference in light energy received by multiple micromirror groups irradiated by the light source to not exceed 10%, can make the light energy of the interference fringes formed by each micromirror group similar, thereby improving the effect of mutual cancellation between multiple interference fringes and further enhancing the effect of mitigating interference fringes.
[0027] In one embodiment, the beam shaping module further includes a first beam shaping module and a second beam shaping module, wherein the first beam shaping module is disposed on the light-emitting side of the light source module; the second beam shaping module is disposed on the side of the first beam shaping module away from the light source module in the optical path of the light source; and the compound eye lens is disposed between the first beam shaping module and the second beam shaping module.
[0028] In one embodiment, another compound eye lens as described above is further disposed between the light source module and the first beam shaping module.
[0029] Thirdly, this application also relates to a projector comprising: the aforementioned optical engine. Attached Figure Description
[0030] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0031] Figure 1 This is a schematic diagram of the structure of a compound eye lens in the prior art.
[0032] Figure 2 This is a schematic diagram of the compound eye lens in one embodiment provided in this application.
[0033] Figure 3 This is a schematic diagram of the compound eye lens in another embodiment provided in this application.
[0034] Figure 4 yes Figure 2 A schematic diagram of the frontal structure of the lenticule in the middle compound eye.
[0035] Figure 5 This is a schematic diagram of the frontal structure of the compound eye lens in another embodiment provided in this application.
[0036] Figure 6 yes Figure 4 A partially enlarged schematic diagram.
[0037] Figure 7 yes Figure 4 A schematic diagram of the lateral structure of the medial compound eye lens.
[0038] Figure 8 This is a schematic diagram of the structure of the micromirror unit in one embodiment provided in this application.
[0039] Figure 9 This is a schematic diagram of the structure of an optomechanism in one embodiment provided in this application.
[0040] Figure 10 This is a schematic diagram of the compound eye lens and light spot in one embodiment provided in this application.
[0041] Explanation of main component symbols
[0042] Compound eye lenses 100, 200, 900
[0043] Base 30
[0044] First base 31
[0045] Second base 33
[0046] Micromirror units 10, 101, 103, 105, 910
[0047] Microscope groups 11, 12, 13, 14, 15, 16
[0048] Lengths a1 and a3
[0049] Widths b1 and b3
[0050] Thicknesses c1, c3, c5
[0051] Working angles α, β
[0052] Optical axis o
[0053] Optical Engine 300
[0054] Light source module 310
[0055] Beam Shaping Module 330
[0056] First beam shaping module 331
[0057] Second beam shaping module 333
[0058] Compound eye lens 335
[0059] Depolarizer 340
[0060] 360° beam splitter prism
[0061] Optical modulation chip 370
[0062] Lens 390
[0063] Light spot L
[0064] First direction X
[0065] Second direction Y
[0066] Third direction Z
[0067] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation
[0068] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0069] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this article are for illustrative purposes only.
[0070] It should be noted that the concepts of "first" and "second" mentioned in this application are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.
[0071] Laser projectors, using lasers as their light source, often suffer from issues such as speckle, interference fringes, and diffraction fringes that affect image quality. To address these issues, diffusers are typically used to suppress speckle, and homogenizing elements such as compound lenses or beam homogenizers are employed to homogenize the laser beam, thereby reducing its spatial and temporal coherence. Please refer to [link to relevant documentation]. Figure 1 The compound eye lens 900 is achieved by setting multiple micromirror units 910 of the same size and arranged in an array. Each micromirror unit 910 is used to project a portion of the light beam out, and multiple light beams are superimposed on the other side of the compound eye lens 900, thereby achieving the effect of uniform light.
[0072] However, due to the small size of the micromirror unit 910, it will cause a diffraction effect on the light beam. When two micromirror units 910 of the same size are arranged side by side, the coherence of the two diffracted beams reaches its maximum, which in turn causes the two beams to form interference fringes. The beams emitted from multiple micromirror units 910 of the same size and arranged in an array superimpose with each other, making the interference fringes more obvious.
[0073] When the light incident on the compound eye lens 900 is monochromatic, the beam passing through the lens forms alternating bright and dark interference fringes. Since the spacing between the interference fringes is positively correlated with the wavelength of the light, when the light incident on the compound eye lens 900 is a combination of multiple colors, the beam passing through the lens forms colored fringes formed by the superposition of interference fringes of multiple colors. Therefore, when the compound eye lens 900 is used in a projector, the projected image will contain interference fringes, affecting image quality.
[0074] Please see Figure 2 This application provides a compound eye lens 100, including a substrate 30 and a plurality of micromirror units 10 formed on the surface of the substrate 30. The plurality of micromirror units form at least two micromirror groups. The micromirror units 10 in the same micromirror group have the same size of projection in the first direction X. The micromirror units 10 in two adjacent micromirror groups have different sizes of projection in the first direction X.
[0075] Specifically, multiple micromirror units 10 are formed on two opposing surfaces of the substrate 30 perpendicular to the first direction X. The multiple micromirror units 10 on the two surfaces correspond to each other in pairs. That is, the projection of one micromirror unit 10 on any one surface and the corresponding micromirror unit 10 on the other surface in the first direction X coincides, so that light rays incident on one micromirror unit 10 from one side of the compound eye lens 100 can exit from another micromirror unit 10 disposed opposite to the other side of the compound eye lens 100.
[0076] In another embodiment, please refer to Figure 3The substrate 30 includes a first substrate 31 and a second substrate 33 arranged in parallel. A plurality of micromirror units 10 are respectively formed on a side surface of the first substrate 31 perpendicular to the first direction X, and on a side surface of the second substrate 33 perpendicular to the first direction X. The projection of each micromirror unit 10 formed on the first substrate 31 and the micromirror unit 10 formed on the second substrate 33 in the first direction X coincides. Specifically, the plurality of micromirror units 10 are respectively formed on the first substrate 31 and the second substrate 33. The plurality of micromirror units 10 formed on the first substrate 31 are located on the surface of the first substrate 31 away from the second substrate 33, and the plurality of units formed on the second substrate 33 are located on the surface of the second substrate 33 away from the first substrate 31. In other embodiments, the micromirror units 10 may also be formed on the surface of the first substrate 31 near the second substrate 33, and on the surface of the second substrate 33 near the first substrate 31; this application does not limit this. The first substrate 31 and the second substrate 33 can be adjacent to each other or spaced apart. The relative positions of the first substrate 31 and the second substrate 33 are fixed, so that any micromirror unit 10 on the first substrate 31 can correspond to a micromirror unit 10 on the second substrate 33. The space between the first substrate 31 and the second substrate 33 can be filled with air, adhesive or other transparent medium, which is not limited in this application.
[0077] Please refer to the following: Figure 2 and Figure 4 The compound eye lens 100 provided in this embodiment includes a substrate 30 and a plurality of micromirror units 10. The plurality of micromirror units 10 are arranged in an array on two surfaces of the substrate 30 perpendicular to the first direction X, and form micromirror groups 11, 13, and 15 arranged sequentially. The projection size of each micromirror unit 101 in micromirror group 11 in the first direction X is the same. The projection size of each micromirror unit 103 in micromirror group 13 in the first direction X is the same. The projection size of each micromirror unit 105 in micromirror group 15 in the first direction X is the same. The projection size of the micromirror unit 101 in micromirror group 11 and the micromirror unit 103 in micromirror group 13 in the first direction X is different. The projection size of the micromirror unit 103 in micromirror group 13 and the micromirror unit 105 in micromirror group 15 in the first direction X is different.
[0078] In this embodiment, the projection dimensions of micromirror unit 101 in micromirror group 11 and micromirror unit 105 in micromirror group 15 in the first direction X are different. In other embodiments, the projection dimensions of micromirror unit 101 and micromirror unit 105 in the first direction X may be the same, and this application does not limit this.
[0079] The projection of each micromirror unit 10 onto the first direction X is a rectangle. The long side of the rectangle formed by the projection of each micromirror unit 10 onto the first direction X is parallel to the second direction Y, and the short side is parallel to the third direction Z. Specifically, multiple micromirror units 10 of the same or different sizes all have rectangular projections onto the first direction X, and the arrangement direction of the rectangles formed by the projections is consistent, so that the compound eye lens 100 has a consistent effect on the uniform light distribution of the beam.
[0080] In this embodiment, the multiple micromirror units 10 in a micromirror group are arranged in at least one column in the third direction Z. Specifically, the multiple micromirror units 101 in micromirror group 11 are arranged in three parallel columns in the third direction Z, the multiple micromirror units 103 in micromirror group 13 are arranged in three parallel columns in the third direction Z, and the multiple micromirror units 105 in micromirror group 15 are arranged in three parallel columns in the third direction Z. Because the sizes of the micromirror units 101, 103, and 105 are different, they are staggered in the third direction Z. When a light beam illuminates the compound eye lens 100, since the spacing of the interference fringes is inversely proportional to the size of the micromirror unit 10, the spacing of the interference fringes formed on different micromirror groups is different. The peaks and troughs of the interference fringes formed by micromirror groups 11, 13, and 15 are spatially misaligned, thereby mitigating the overall interference fringes of the compound eye lens 100. In other embodiments, the micromirror units 10 in micromirror groups 11, 13, and 15 may also be arranged in a single row; this application does not impose any limitation on this arrangement.
[0081] In another embodiment, please refer to Figure 5 In addition, the multiple micromirror units 10 in a micromirror group can be arranged in at least one column in the second direction Y. Specifically, multiple micromirror units 101 are arranged in a row parallel to each other in the second direction Y to form micromirror group 12, multiple micromirror units 103 are arranged in a row parallel to each other in the second direction Y to form micromirror group 14, and multiple micromirror units 105 are arranged in a row parallel to each other in the second direction Y to form micromirror group 16. Micromirror groups 12, 14, and 16 are arranged sequentially in the third direction Z, so that the multiple micromirror units 10 are misaligned in the third direction Z. This causes the peaks and troughs of the interference fringes formed by micromirror groups 12, 14, and 16 to be spatially misaligned, thereby mitigating the interference fringes of the compound eye lens 100 as a whole. In other embodiments, the multiple micromirror units 10 in micromirror groups 12, 14, and 16 can also be arranged in multiple columns, which is not limited in this application.
[0082] In other embodiments, the multiple micromirror units 10 may also be arranged irregularly in the second direction Y and the third direction Z. This application does not limit this arrangement. As long as the overall periodicity of the compound eye lens 100 can be disrupted, the effect of mitigating interference fringes can be achieved.
[0083] Please see Figure 6 The micromirror unit 10 has a dimension of 0.5-2.0 mm in the second direction Y. Specifically, the length a1 of the rectangle formed by the projection of the micromirror unit 10 in the first direction X can be 0.5-2.0 mm. For example, the length a1 can be any length between 0.5-0.6 mm, 0.6-0.8 mm, 0.8-1.0 mm, 1.0-1.2 mm, 1.2-1.4 mm, 1.4-1.6 mm, 1.6-1.8 mm, and 1.8-2.0 mm, and this application does not impose any restrictions on it.
[0084] The ratio of the projected dimensions of micromirror units 10 in two adjacent micromirror groups in the first direction X is between 0.8 and 1. Specifically, the ratio of the projected dimensions of the smaller micromirror unit 10 and the larger micromirror unit 10 in the first direction X in two adjacent micromirror groups is between 0.8 and 1. Taking micromirror units 101 and 103 as examples, the ratio between the length a3 of micromirror unit 103 and the length a1 of micromirror unit 101 is between 0.8 and 1, and can be 0.8, 0.85, 0.9, 0.95, or any other arbitrary value.
[0085] In this embodiment of the application, by setting the ratio of the size of the projection of the micromirror unit 10 in two adjacent micromirror groups in the first direction X to be between 0.8 and 1, the spacing between the interference fringes formed by the two adjacent micromirror groups can be gradually transitioned, reducing the probability of overlapping peaks or troughs of the interference fringes.
[0086] Please see Figure 7 The thickness of the portion of the substrate 30 corresponding to each micromirror unit 10 in the first direction X is positively correlated with the size of the projection of the corresponding micromirror unit 10 in the first direction X. The smaller the size of the micromirror unit 10 in the first direction X, the smaller the thickness of the corresponding portion of the substrate 30 in the first direction X. For example, the projected sizes of micromirror units 101, 103, and 105 in the first direction X decrease sequentially, and the thicknesses c1, c3, and c5 of the substrate 30 in the first direction X also decrease sequentially.
[0087] By adjusting the thickness of the substrate 30 in the first direction X, micromirror units 10 of different sizes can have the same working angle for light, thereby ensuring the consistency of the overall working angle of the compound eye lens 100.
[0088] In this embodiment, the arrangement of multiple micromirror units 10 of different sizes is symmetrical in the first direction X, that is, the substrate 30 is symmetrical in the first direction X. In other embodiments, the substrate 30 may also be configured to be flush at one end, so that the multiple micromirror units 10 of different sizes are flush on one side surface of the substrate 30, and this application does not limit this.
[0089] Please see Figure 8 The maximum working angle α of the micromirror unit 10 in the second direction Y is 5-7°, and the maximum working angle β of the micromirror unit 10 in the third direction Z is 3-4°. Specifically, the maximum working angle refers to the maximum angle at which the micromirror unit 10 can homogenize the incident light. The range of the working angle determines the range of homogenization of the incident light by the micromirror unit 10, and also affects the divergence angle of the light emitted from the micromirror unit 10. The working angle α is the angle between the light incident on the micromirror unit 10 perpendicular to the third direction Z and the optical axis o of the micromirror unit 10. The working angle β is the angle between the light incident on the micromirror unit 10 perpendicular to the first direction X and the optical axis o of the micromirror unit 10.
[0090] The compound eye lens 100 provided in this application embodiment forms at least two micromirror groups by setting multiple micromirror units 10 on the compound eye lens 100. The projection size of the micromirror units 10 between two adjacent micromirror groups in the first direction X is different, so that the spacing of the interference fringes formed after the light passes through the two adjacent micromirror groups is different. This causes the peaks and troughs of the two interference fringes to be misaligned in space, thereby achieving the effect of buffering the superimposed interference fringes.
[0091] Please see Figure 9 This application also provides an optical engine 300, including a light source module 310, a beam shaping module 330, a depolarizer 340, a beam splitter 360, a light modulation chip 370, and a lens 390. The light source module 310 emits light from the source, and the beam shaping module 330 guides and homogenizes the light source. The beam shaping module 330 includes the compound eye lens 100 described in the previous embodiment. The light modulation chip 370 receives and modulates the light source homogenized by the beam shaping module 330, thereby converting the light source into image light. The depolarizer 340 is disposed between the light source module 310 and the beam shaping module 330. The beam splitter 360 receives the light source emitted from the beam shaping module 330 and guides it to the light modulation chip 370. The beam splitter 360 also guides the image light to the lens 390, which projects the image light onto a projection medium to form an image.
[0092] Specifically, the beam shaping module 330 includes a first beam shaping module 331, a second beam shaping module 333, and a compound eye lens 100. The first beam shaping module 331 is disposed on the light-emitting side of the light source module 310, and the second beam shaping module 333 is disposed on the side of the first beam shaping module 331 away from the light source module 310 in the optical path of the light source. The compound eye lens 100 is disposed between the first beam shaping module 331 and the second beam shaping module 333.
[0093] In this embodiment, a compound eye lens 100 is also disposed between the depolarizer 340 and the first beam shaping module 330. Both compound eye lenses 100 are used to mitigate interference fringes generated after the light source passes through. In other embodiments, a conventional compound eye lens 320 can also be disposed between the depolarizer 340 and the first beam shaping module 330, that is, each micromirror unit 10 on the compound eye lens 320 has the same size and is arranged in an array. This application does not impose a specific limitation on the number of compound eye lenses 100 in the optomechanical system 300, as long as they can mitigate interference fringes, they are within the scope of this application.
[0094] In this embodiment, please refer to again Figure 5 The aspect ratio of the rectangle projected by the micromirror unit 10 in the first direction X is no more than 10% different from the aspect ratio of the optical modulation chip 370. Specifically, the aspect ratio of the micromirror unit 10 determines the aspect ratio of the light spot projected onto the optical modulation chip 370. By setting the aspect ratio of the rectangle projected by the micromirror unit 10 in the first direction X to be similar to that of the optical modulation chip 370, the aspect ratio of the light spot projected onto the optical modulation chip 370 after modulation by the second beam shaping module 350 is similar to that of the optical modulation chip 370. This allows the light from the light source to illuminate the optical modulation chip 370 as much as possible, thereby improving the light efficiency of the optical engine 300.
[0095] Please see Figure 10The difference in light energy received by multiple micromirror groups of different sizes in the micromirror unit 10 illuminated by the light source does not exceed 10%. Specifically, when the light source illuminates the compound eye lens 100, the difference in light energy between the portion of light received by micromirror group 11, the portion of light received by micromirror group 13, and the portion of light received by micromirror group 15 does not exceed 10%. This makes the light energy of the interference fringes of the light emitted from each micromirror group similar, so that after the peaks and troughs of the multiple interference fringes are superimposed and canceled out, the light energy distribution of the resulting light is uniform. For example, when the light spot L is hexagonal and the illuminance distribution of the light spot L is uniform, the number and arrangement of the micromirror units 10 in the micromirror groups 11, 13 and 15 can be set so that the area difference of the light spot L corresponding to the micromirror groups 11, 13 and 15 does not exceed 10%, thereby ensuring that the light energy difference between the light energy of the portion of the light source light received by the micromirror group 11, the portion of the light source light received by the micromirror group 13 and the portion of the light source light received by the micromirror group 15 does not exceed 10%.
[0096] The light modulation chip 370 can be a transmissive liquid crystal display (LCD), a reflective liquid crystal on silicon (LCOS), or a digital micromirror device (DMD). This application does not impose any restrictions on this.
[0097] The optical engine 300 provided in this application embodiment, by employing the compound eye lens 100 in the above embodiment, can effectively alleviate interference fringes, which is beneficial to improving image quality and thus enhancing the user experience.
[0098] This application also provides a projector, which includes the optical engine 300 described in the above embodiments. The projector provided in this application, by employing the compound eye lens 100 described in the above embodiments, can effectively reduce interference fringes in the projected image, thereby improving image quality and enhancing the user experience.
[0099] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.
Claims
1. A compound eye lens, characterized in that, include: Base; Multiple micromirror units are formed on the surface of the substrate; The plurality of micromirror units form at least two micromirror groups, and the micromirror units in the same micromirror group have the same size of projection in the first direction; the micromirror units in two adjacent micromirror groups have different sizes of projection in the first direction. The ratio of the size of the projection of the micromirror unit in two adjacent micromirror groups in the first direction is between 0.8 and 1, so that the spacing of the interference fringes formed after the laser beam passes through the two adjacent micromirror groups is different, thereby causing the peaks and troughs of the interference fringes formed by the two adjacent micromirror groups to be spatially misaligned.
2. The compound eye lens according to claim 1, characterized in that, The projection of the micromirror unit in the first direction is a rectangle, and the long side of the rectangle formed by the projection of each micromirror unit in the first direction is parallel to the second direction, and the short side is parallel to the third direction.
3. The compound eye lens according to claim 2, characterized in that, In each of the micromirror groups, the plurality of micromirror units are arranged in at least one column in the third direction.
4. The compound eye lens according to claim 2, characterized in that, The plurality of micromirror units in each of the micromirror groups are arranged in at least one column in the second direction.
5. The compound eye lens according to claim 2, characterized in that, The maximum working angle of the micromirror unit in the second direction is 5-7°, and the maximum working angle of the micromirror unit in the third direction is 3-4°.
6. The compound eye lens according to claim 2, characterized in that, The micromirror unit has a size of 0.5-2.0 mm in the second direction.
7. The compound eye lens according to claim 1, characterized in that, The thickness of the portion of the substrate corresponding to each micromirror unit in the first direction is positively correlated with the size of the projection of the corresponding micromirror unit in the first direction.
8. The compound eye lens according to claim 1, characterized in that, Multiple micromirror units are respectively formed on two opposing surfaces of the substrate in the first direction, and the projection of one micromirror unit on one surface and the projection of the micromirror unit on the other surface in the first direction coincide.
9. The compound eye lens according to claim 1, characterized in that, The substrate includes a first substrate and a second substrate arranged in parallel. A plurality of micromirror units are respectively formed on a side surface of the first substrate perpendicular to the first direction and on a side surface of the second substrate perpendicular to the first direction. The projection of each micromirror unit formed on the first substrate and a micromirror unit formed on the second substrate in the first direction coincides.
10. An optical engine, characterized in that, include: The light source module is used to emit light from the light source; A beam shaping module for guiding and homogenizing the light source, the beam shaping module comprising a compound eye lens as described in any one of claims 1-9; as well as A light modulation chip is used to receive and modulate the light source light homogenized by the beam shaping module.
11. The optical engine according to claim 10, characterized in that, The projection of the micromirror unit in the first direction is a rectangle, and the aspect ratio of the rectangle differs from that of the optical modulation chip by no more than 10%.
12. The optical engine according to claim 10, characterized in that, The difference in light energy received by multiple micromirror groups of different sizes illuminated by the light source does not exceed 10%.
13. The optical engine according to claim 10, characterized in that, The beam shaping module further includes a first beam shaping module and a second beam shaping module. The first beam shaping module is disposed on the light-emitting side of the light source module. The second beam shaping module is disposed on the side of the light path of the light source module away from the light source module. The compound eye lens is disposed between the first beam shaping module and the second beam shaping module.
14. The optical engine according to claim 13, characterized in that, Another compound eye lens as described in any one of claims 1-9 is also provided between the light source module and the first beam shaping module.
15. A projector, characterized in that, include: The optical engine as described in any one of claims 10-14.