Rotary carrying mechanism for flower basket

Abstract

The utility model discloses a flower basket rotating and carrying mechanism, and belongs to the technical field of silicon wafer processing. The flower basket rotating and carrying mechanism comprises a first rack, a Z-axis linear module, an X-axis linear module, a rotating device and a clamping device. The Z-axis linear module is connected with the X-axis linear module; the first rack comprises a vertical plate and a bottom plate connected with the vertical plate; the vertical plate is connected with the Z-axis linear module, and the Z-axis linear module is used for driving the first rack to move up and down along the Z-axis linear module; the rotating device is connected with the lower end of the baseplate; the clamping device is arranged at the bottom end of the rotating device and used for clamping the flower basket. Due to the fact that the X-axis linear module and the Z-axis linear module are additionally arranged, the occupied area of the carrying equipment is reduced, the price of the X-axis linear module and the price of the Z-axis linear module are lower than the price of a mechanical arm, and therefore the production cost can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer processing technology, and in particular to a flower basket rotating and transporting mechanism. Background Technology

[0002] Silicon wafers, also known as silicon discs or simply wafers, are an indispensable basic material in modern semiconductor manufacturing. These thin, transparent discs are made from high-purity silicon, and their manufacturing process involves extracting silicon from nature and then purifying it using precise purification and crystal growth techniques. The quality of silicon wafers directly affects the performance of the final electronic products, including computing speed, energy consumption, and durability. In terms of applications, silicon wafers are widely used in the manufacture of integrated circuits, which are the core components of modern electronic devices such as computers, smartphones, tablets, and various smart wearable devices. Beyond the electronics industry, silicon wafers are also used in the manufacture of solar panels, converting sunlight into electricity and driving the development of renewable energy. The manufacture and use of silicon wafers demonstrate humanity's profound understanding and innovative application of natural materials, and are a crucial cornerstone of modern technological development.

[0003] Silicon wafer production involves numerous movement steps, such as transferring wafers from one workstation to another. To improve transfer efficiency, multiple wafers are pre-loaded into wafer baskets and then transferred as a whole using devices like robotic arms. Currently, robotic arms are widely used for this transfer, but they are space-consuming and expensive. In scenarios with limited budgets, using robotic arms for transfer is not cost-effective. Therefore, it is necessary to develop an alternative, lower-cost wafer basket transfer device. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a flower basket rotation and handling mechanism. This mechanism includes an X-axis linear module, a Z-axis linear module, a rotating device, and a clamping device, which reduces the footprint of the handling equipment. Furthermore, the X-axis linear module and the Z-axis linear module are cheaper than those of a robotic arm, thereby reducing production costs.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] The flower basket rotating and transporting mechanism includes: an X-axis linear module; a Z-axis linear module connected to the X-axis linear module; a first frame including a vertical plate and a base plate connected to the vertical plate; the vertical plate is connected to the Z-axis linear module, which drives the first frame to move up and down along the Z-axis linear module; a rotating device connected to the lower end of the base plate; and a clamping device disposed at the bottom end of the rotating device for clamping the flower basket. In use, the Z-axis linear module drives the first frame to move towards the top of the flower basket. When the bottom end of the clamping device contacts the top of the flower basket, the clamping device clamps the flower basket, and the rotating device drives the flower basket to rotate. Furthermore, under the action of the Z-axis linear module and the X-axis linear module, the function of transporting the flower basket is achieved.

[0007] Furthermore, it also includes a second frame, through which the Z-axis linear module is connected to the X-axis linear module, so that the X-axis linear module can drive the Z-axis linear module to move left and right.

[0008] Further, the clamping device includes: a mounting plate connected to the bottom end of the rotating device; a sliding assembly including a first slide rail and a second slide rail disposed at the bottom end of the mounting plate, the first slide rail and the second slide rail being parallel and extending along the X-axis direction; wherein a first slider and a second slider are respectively disposed at both ends of the length direction of the first slide rail; a third slider and a fourth slider are respectively disposed at both ends of the length direction of the second slide rail; and a clamping assembly disposed on the first slider, the second slider, the third slider, and the fourth slider.

[0009] Furthermore, the clamping assembly further includes: a first cylinder disposed at the bottom end of the mounting plate; a first connector connected to the working end of the first cylinder; a first clamping plate connected to the bottom end of the first connector, with both ends of the first clamping plate connected to the first slider and the third slider, respectively; a second cylinder disposed at the bottom end of the mounting plate, and the second cylinder opposite to the first cylinder; a second connector connected to the working end of the second cylinder; a second clamping plate connected to the bottom end of the second connector, with both ends of the second clamping plate connected to the second slider and the fourth slider, respectively; in use, the first cylinder moves synchronously with the first connector and the first clamping plate to abut one side of the flower basket; the second cylinder moves synchronously with the second connector and the second clamping plate to abut the other side of the flower basket.

[0010] Further, the first connecting member includes: a first connector; a first connecting plate, the bottom end of the first connecting plate being connected to the first clamping plate, and one end of the first connecting plate being connected to the working end of the first cylinder through the first connector; the second connecting member includes: a second connector; a second connecting plate, the bottom end of the second connecting plate being connected to the second clamping plate, and one end of the second connecting plate being connected to the working end of the second cylinder through the second connector.

[0011] Furthermore, the conveying mechanism also includes a positioning device, one end of the cylindrical part of the positioning device being connected to the bottom end of the mounting plate.

[0012] Furthermore, the positioning device further includes: a first protrusion disposed at the bottom end of the mounting plate, and the first protrusion being located on one side of the cylindrical portion; and a second protrusion disposed at the bottom end of the mounting plate, and the second protrusion being located on the other side of the cylindrical portion.

[0013] Furthermore, the conveying mechanism also includes a hydraulic damper, which is disposed at the corner of the bottom end of the mounting plate.

[0014] Furthermore, the rotating device includes: a motor mounted on the base plate of the first frame, with the working end of the motor passing through the base plate; and a driving member, one side of which is connected to the working end of the motor, and the other side of which is connected to the top of the mounting plate.

[0015] Furthermore, the first clamping plate has a first inclined block on the side away from the first connector; the second clamping plate has a second inclined block on the side away from the second connector.

[0016] The beneficial effects of this utility model are:

[0017] The flower basket rotating and transporting mechanism provided by this utility model includes a Z-axis linear module, an X-axis linear module, a first frame, a rotating device, and a clamping device. The addition of the X-axis and Z-axis linear modules reduces the footprint of the transporting equipment, and the X-axis and Z-axis linear modules are cheaper than robotic arms, thereby reducing production costs. Attached Figure Description

[0018] Figure 1 This is a perspective view of the present utility model;

[0019] Figure 2 This utility model Figure 1 A 3D image of a hidden flower basket;

[0020] Figure 3 This utility model Figure 2 Another perspective;

[0021] Figure 4 This utility model Figure 3 Bottom view of the mounting plate;

[0022] Figure 5 This utility model Figure 4 Looking up at the hidden first and second clamps Figure 1 ;

[0023] Figure 6 This utility model Figure 4 Looking up at the hidden first and second clamps Figure 2 ;

[0024] Figure 7 This utility model Figure 1 Another perspective.

[0025] Figure label:

[0026] 1. First frame; 11. Vertical plate; 12. Base plate;

[0027] 2. Z-axis linear module;

[0028] 3. Rotating device; 31. Motor; 32. Driving component;

[0029] 4. Clamping device; 41. Mounting plate; 42. Sliding assembly; 421. First slide rail; 422. Second slide rail; 423. First slider; 424. Second slider; 425. Third slider; 426. Fourth slider; 43. Clamping assembly; 431. First cylinder; 432. First clamping plate; 4321. First inclined block; 433. Second cylinder; 434. Second clamping plate; 4341. Second inclined block; 435. First connector; 4351. First joint; 4352. First connecting plate; 436. Second connector; 4361. Second joint; 4362. Second connecting plate;

[0030] 5. Positioning device; 51. Cylindrical part; 52. First convex part; 53. Second convex part;

[0031] 6. Hydraulic damper;

[0032] 7. Flower basket;

[0033] 8. X-axis linear module;

[0034] 9. Second rack. Detailed Implementation

[0035] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0036] As attached Figure 1 The present invention discloses a flower basket rotating and transporting mechanism comprising a Z-axis linear module 2, a first frame 1, a rotating device 3, a clamping device 4, and an X-axis linear module 8. One side of the Z-axis linear module 2 in the width direction is connected to one side of the X-axis linear module 8 in the length direction via a second frame 9, allowing the Z-axis linear module 2 to move left and right under the drive of the X-axis linear module 8. The Z-axis linear module 2 is connected to the first frame 1, enabling the Z-axis linear module 2 to drive the first frame 1 to move up and down. The first frame 1 is connected to the rotating device 3, allowing the first frame 1 to move up and down along with the rotating device 3. The rotating device 3 is connected to the clamping device 4, a design that allows the rotating device 3 to drive the clamping device 4 to rotate. In use, the clamping device 4 clamps the flower basket 7, preventing the flower basket 7 from wobbling in a suspended state, and then rotates under the action of the rotating device 3. In this embodiment, the addition of the X-axis linear module 8 and the Z-axis linear module 2 reduces the footprint of the handling equipment. Furthermore, the X-axis linear module 8 and the Z-axis linear module 1 are cheaper than the robotic arm, thereby reducing production costs.

[0037] As attached Figure 2 The first frame 1 is L-shaped. Specifically, the first frame 1 includes a vertical plate 11 and a base plate 12. The vertical plate 11 is generally rectangular, and one side of its length direction is slidably connected to one side of the Z-axis linear module 2 along its length direction, allowing the Z-axis linear module 2 to drive the first frame 1 to move up and down. The connection between the vertical plate 11 and the base plate 12 is a right-angle structure. This design enhances the torque of the first frame 1; at the same time, this right-angle structure makes the first frame 1 less prone to deformation, thereby extending the service life of the flower basket rotating and transporting mechanism. The base plate 12 is generally rectangular, and a through hole is opened in the middle of one side of the base plate 12 along its length direction, making it easy for the first frame 1 to connect with the rotating device 3. Furthermore, two connecting ribs are provided on the upper surface of the base plate 12. These two connecting ribs are located on both sides of the through hole in the base plate 12, and both connecting ribs are triangular in shape. This design can enhance the torque of the first frame 1, thereby improving the stability of the overall structure. A hole is also provided in the middle of the connecting rib. The purpose of this design is to reduce the weight of the overall structure.

[0038] As attached Figure 3The rotating device 3 includes a motor 31 and a drive component 32. The motor 31 is mounted on the base plate 12 of the first frame 1, and its working end passes through a through hole in the base plate 12, providing power to the rotating device 3. One side of the drive component 32 is connected to the working end of the motor 31, and the other side of the drive component 32 is connected to the top of the clamping device 4. The area of ​​the drive component 32 is smaller than the area of ​​the base plate 12, making it less susceptible to damage. The motor 31 transmits the rotational power to the clamping device 4 through the drive component 32.

[0039] As attached Figure 3 The clamping device 4 includes a mounting plate 41, a sliding assembly 42, and a clamping assembly 43. The mounting plate 41 is rectangular, and its top end is connected to the driving member 32. Under the action of the rotating device 3, the mounting plate 41 can rotate. (See attached diagram) Figure 5 The sliding assembly 42 is disposed along the length of the bottom end of the mounting plate 41. The sliding assembly 42 includes a first slide rail 421 and a second slide rail 422. The first and second slide rails 421 are parallel and extend along the X-axis. A first slider 423 and a second slider 424 are respectively disposed at both ends of the first slide rail 421 along its length, both of which are rectangular. A third slider 425 and a fourth slider 426 are respectively disposed at both ends of the second slide rail 422 along its length, both of which are rectangular. The clamping assembly 43 disposed on the sliding assembly 42 can move left and right along the first and second slide rails 421 and 422. (See attached diagram) Figure 6The clamping assembly 43 includes a first cylinder 431, a first clamping plate 432, a second cylinder 433, a second clamping plate 434, a first connector 435, and a second connector 436. The first cylinder 431 and the second cylinder 433 are respectively disposed on both sides of the center of the bottom end of the mounting plate 41. The first cylinder 431 and the second cylinder 434 are provided to provide clamping power to the clamping assembly 43. The first connector 435 includes a first connector 4351 and a first connecting plate 4352. The first connecting plate 4352 is connected to the working end of the first cylinder 431 through the first connector 4351, allowing the first cylinder 431 to move the first connector 435 as a whole. The second connector 436 includes a second connector 4361 and a second connecting plate 4362. The second connecting plate 4362 is connected to the working end of the second cylinder 433 through the second connector 4361, allowing the second cylinder 433 to move the second connector 436 as a whole. The top end of the first clamping plate 432 is connected to the bottom end of the first connecting member 435. In use, under the action of the first cylinder 431, the first connecting member 435 can drive the first clamping plate 432 to press against one side of the flower basket 7. Furthermore, the two ends of the first clamping plate 432 are respectively connected to the first slider 423 and the third slider 425, thus providing left and right limiting. The top end of the second clamping plate 434 is connected to the bottom end of the second connecting member 436. In use, under the action of the second cylinder 433, the second connecting member 436 can drive the second clamping plate 434 to press against the other side of the flower basket 7, thus achieving the effect of clamping both ends of the flower basket 7. Furthermore, the two ends of the second clamping plate 434 are respectively connected to the second slider 424 and the fourth slider 426, thus providing left and right limiting. (See attached image) Figure 7 The first clamping plate 432 has a first inclined block 4321 on the side away from the first connector 435, and the second clamping plate 434 has a second inclined block 4341 on the side away from the second connector 436. In use, the first inclined block 4321 and the second inclined block 4341 are adapted to the inclined surface at the top of the flower basket 7, making it easier for the clamping assembly 43 to clamp the flower basket 7. Therefore, the clamping device 4 can clamp and limit the top of the flower basket 7, preventing it from wobbling in the air and thus reducing the breakage rate of the silicon wafers in the flower basket 7 to a certain extent. The bottom end of the mounting plate 41 is connected to the positioning device 5.

[0040] As attached Figure 4The positioning device 5 includes a cylindrical portion 51. One end of the cylindrical portion 51 is connected to the center of the bottom end of the mounting plate 41. In use, the cylindrical portion 51 of the positioning device 5 passes through a pre-drilled through hole at the top of the flower basket 7, allowing the clamping device 4 to quickly clamp the flower basket 7 in a predetermined manner, thereby improving the working efficiency of the flower basket rotation and transport mechanism. The positioning device 5 also includes a first protrusion 52 and a second protrusion 53. The first protrusion 52 and the second protrusion 53 are respectively disposed on both sides of the cylindrical portion 51 along the width direction of the bottom end of the mounting plate 41, and both the first protrusion 52 and the second protrusion 53 are cylindrical. In use, the first protrusion 52 and the second protrusion 53 simultaneously abut against the top end of the flower basket 7, causing the Z-axis linear module 2 to drive the clamping device 4 to descend to a suitable position and stop, thereby facilitating the clamping device 4's clamping of the flower basket 7. The bottom end of the mounting plate 41 is also connected to the hydraulic buffer 6.

[0041] As attached Figure 6 The mounting plate 41 has a through hole at each of its four corners, and the hydraulic buffer 6 is respectively installed at the through hole of the mounting plate 41. In use, the hydraulic buffer 6 can reduce the impact force of the clamping device 4 on the basket 7, thereby reducing the damage to the silicon wafer in the basket 7.

[0042] In use, the Z-axis linear module 2 drives the rotating device 3 to descend, and stops when the rotating device 3 descends to a suitable position at the top of the flower basket 7. At this time, the clamping device 4 abuts against the top of the flower basket 7, the hydraulic buffer 6 is compressed, and the first cylinder 431 and the second cylinder 433 drive the first clamping plate 432 and the second clamping plate 434 to clamp the flower basket 7 respectively. Then, the Z-axis linear module 2 controls the clamping device 4 and the flower basket 7 to rise. At the same time, the motor 31 of the rotating device 3 drives the clamping device 4 and the flower basket 7 to rotate together, and under the action of the X-axis linear module 8, the function of rotating and transporting the flower basket 7 is realized.

[0043] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” and “the” used in this embodiment may also include the plural forms. It should be further understood that the term “comprising” as used in this embodiment means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should be understood that when we say an element is “connected” or “coupled” to another element, it can be directly connected or coupled to the other element, or there may be intermediate elements. Furthermore, “connected” or “coupled” as used herein can include wireless connections or wireless coupling. The term “and / or” as used herein includes all or any units and all combinations of one or more associated listed items.

Claims

1. A flower basket rotating and carrying mechanism, characterized by comprising: The utility model relates to a kind of flower basket rotating device, including: X-axis linear module (8); Z-axis linear module (2), is connected with the X-axis linear module (8); First rack (1), including vertical plate (11), with the bottom plate (12) of vertical plate (11) connection;The vertical plate (11) is connected with the Z-axis linear module (2), and the Z-axis linear module (2) is used to drive the first rack (1) to move up and down along the Z-axis linear module (2); Rotary device (3), with the lower end of bottom plate (12) connection; Clamping device (4), it is arranged in the bottom end of rotary device (3), for clamping flower basket (7); When using, the Z-axis linear module (2) drives the first rack (1) to move to the top end of flower basket (7), when the bottom end of clamping device (4) and the top end of flower basket (7) contact, the clamping device (4) clamps flower basket (7), and rotary device (3) drives flower basket (7) to make rotary motion;And under the action of the Z-axis linear module (2) and the X-axis linear module (8), realize the function of flower basket (7) carrying.

2. The flower basket rotating and carrying mechanism according to claim 1, characterized in that: It further includes second rack (9), and the Z-axis linear module (2) is connected on the X-axis linear module (8) by the second rack (9), so that the X-axis linear module (8) can drive the Z-axis linear module (2) to move left and right.

3. The flower basket rotating and carrying mechanism according to claim 1, characterized in that, The clamping device (4) includes: Mounting plate (41), with the bottom end of rotary device (3) connection; Sliding assembly (42), including first slide rail (421) and second slide rail (422) being arranged in the bottom end of mounting plate (41), the first slide rail (421) and the second slide rail (422) are parallel, and the first slide rail (421) and the second slide rail (422) extend along the direction of X axis; Wherein, the both ends of the length direction of the first slide rail (421) are respectively provided with first sliding block (423) and second sliding block (424);The both ends of the length direction of the second slide rail (422) are respectively provided with third sliding block (425) and fourth sliding block (426);And Clamping assembly (43), it is arranged on the first sliding block (423), the second sliding block (424) and the third sliding block (425) and the fourth sliding block (426).

4. The flower basket rotating and carrying mechanism according to claim 3, characterized in that, The clamping assembly (43) further includes: First cylinder (431), it is arranged in the bottom end of mounting plate (41); First connecting piece (435), with the working end of first cylinder (431) connection; First clamping plate (432), with the bottom end of first connecting piece (435) connection, and the both ends of the first clamping plate (432) are respectively connected with the first sliding block (423) and the third sliding block (425); Second cylinder (433), it is arranged in the bottom end of mounting plate (41), and the second cylinder (433) is opposite with the first cylinder (431); Second connecting piece (436), with the working end of second cylinder (433) connection; A second clamping plate (434) is connected with the bottom end of the second connecting piece (436), and two ends of the second clamping plate (434) are connected with the second slider (424) and the fourth slider (426) respectively; In use, the first cylinder (431) synchronously moves with the first connecting piece (435) and the first clamping plate (432) to abut against one side of the flower basket (7), and the second cylinder (433) synchronously moves with the second connecting piece (436) and the second clamping plate (434) to abut against the other side of the flower basket (7).

5. The flower basket rotating and carrying mechanism according to claim 4, characterized in that: The first connecting piece (435) comprises: A first joint (4351); A first connecting plate (4352), the bottom end of the first connecting plate (4352) is connected with the first clamping plate (432), and one end of the first connecting plate (4352) is connected with the working end of the first cylinder (431) through the first joint (4351); The second connecting piece (436) comprises: A second joint (4361); A second connecting plate (4362), the bottom end of the second connecting plate (4362) is connected with the second clamping plate (434), and one end of the second connecting plate (4362) is connected with the working end of the second cylinder (433) through the second joint (4361).

6. The flower basket rotating and carrying mechanism according to claim 3, characterized in that, The carrying mechanism further comprises: A positioning device (5), the cylindrical part (51) of the positioning device (5) is connected with the bottom end of the mounting plate (41).

7. The flower basket rotating and carrying mechanism according to claim 6, characterized in that, The positioning device (5) further comprises: A first protrusion (52) is arranged at the bottom end of the mounting plate (41), and the first protrusion (52) is located at one side of the cylindrical part (51); A second protrusion (53) is arranged at the bottom end of the mounting plate (41), and the second protrusion (53) is located at the other side of the cylindrical part (51).

8. The flower basket rotating and carrying mechanism according to claim 3, characterized in that, The carrying mechanism further comprises: An oil buffer (6) is arranged at the corner of the bottom end of the mounting plate (41).

9. The flower basket rotating and carrying mechanism according to claim 8, characterized in that, The rotating device (3) comprises: A motor (31) is installed on the bottom plate (12) of the first rack (1), and the working end of the motor (31) penetrates through the bottom plate (12); A driving piece (32), one side of the driving piece (32) is connected with the working end of the motor (31), and the other side of the driving piece (32) is connected with the top end of the mounting plate (41).

10. The flower basket rotating and carrying mechanism according to claim 4, characterized in that: A first inclined block (4321) is arranged at the side of the first clamping plate (432) away from the first connecting piece (435), and a second inclined block (4341) is arranged at the side of the second clamping plate (434) away from the second connecting piece (436).

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