Moving mechanism

Abstract

The utility model provides a moving mechanism. The moving mechanism comprises a carrier plate; the multiple driving structures are arranged in the first direction, each driving structure is in driving connection with the carrier plate so as to drive the carrier plate to move in the second direction at the same time, and the first direction is perpendicular to the second direction. In other words, the moving mechanism can stably and reliably operate for a long time.

Description

TECHNICAL FIELD

[0001] The utility model belongs to mobile mechanism technical field, more specifically, it relates to a mobile mechanism. BACKGROUND

[0002] Some products such as semiconductor and display panel in production and manufacture process, many key process steps need to carry out in high vacuum environment, such as photoetching, etching, deposition and laser processing process, these processes require that mobile mechanism has high stability. However, in high vacuum environment, air convection is lacked, and the heat generated when the power of mobile mechanism is too large is difficult to dissipate, so that mobile mechanism is easy to overheat, and the stability of mobile mechanism is influenced. SUMMARY

[0003] The utility model provides a mobile mechanism, the stability of the mobile mechanism is high.

[0004] The utility model discloses a mobile mechanism, which comprises:

[0005] A carrier plate;

[0006] A plurality of driving structures are arranged along a first direction, and each driving structure is drivingly connected to the carrier plate to simultaneously drive the carrier plate to move along a second direction, wherein the first direction is perpendicular to the second direction.

[0007] That is, in the mobile mechanism of the present application, a plurality of driving structures are arranged in the first direction to simultaneously drive the carrier plate to move along the second direction. This method can reduce the output power of each driving structure compared to using one driving structure to drive the carrier plate to move, thereby avoiding or reducing the heating of the driving structure. In addition, since the above-mentioned method can avoid or reduce the heating of the driving structure, when the mobile mechanism is applied in a vacuum environment, the heating of the mobile mechanism can be avoided, thereby ensuring the stability of the work and ensuring that the mobile mechanism can operate stably and reliably in the vacuum environment for a long time.

[0008] Optionally, each driving structure comprises a stator and a mover movably arranged with the stator, and the stators of the plurality of driving structures are arranged along the first direction, and each stator extends along the second direction, and the mover is drivingly connected to the carrier plate.

[0009] Optionally, a base is further included, the carrier plate is arranged on the base and can slide along the second direction on the base.

[0010] Optionally, a receiving groove is arranged on the base, and at least part of the driving structures are arranged in the receiving groove.

[0011] Optionally, the base is provided with the driving structure on one side or opposite sides, and the carrier plate is driven and connected with the driving structure on the side of the base through a first connecting member.

[0012] Optionally, the guiding structure is oppositely arranged on the base in a first direction, the carrier plate is connected with the guiding structure, and the guiding structure guides the carrier plate when the carrier plate slides relative to the base in a second direction.

[0013] The accommodating groove is arranged between the guiding structures.

[0014] Optionally, the stator is provided with an induction groove, and the mover is movably arranged in the induction groove.

[0015] In the accommodating groove, the opening of the induction groove of the stator is arranged in a first direction, and the induction groove extends in the first direction, and the carrier plate is connected with the mover through a second connecting member.

[0016] The opening of the induction groove of the stator on one side or opposite sides of the base is arranged in a third direction, and the induction groove extends in the third direction, and the third direction is perpendicular to the first direction and the second direction.

[0017] Optionally, the first connecting member includes a first connecting part and a second connecting part, the first connecting part and the second connecting part are located on opposite sides of the mover and are connected with each other to clampingly fix the mover, and the first connecting part is further connected with the carrier plate.

[0018] The second connecting member includes a third connecting part and a fourth connecting part, the third connecting part and the fourth connecting part are located on opposite sides of the mover and are connected with each other to clampingly fix the mover, and the third connecting part is further connected with the carrier plate.

[0019] Optionally, the grating ruler and a reading head for reading the grating ruler are further included, the grating ruler is arranged on the base, the reading head is connected with the carrier plate, and the grating ruler is made of ceramic material.

[0020] A baffle is further included, the baffle is arranged on a side away from the two guiding structures, and the baffle is located between the grating ruler and the guiding structures.

[0021] Optionally, the guiding structure includes a guide rail and a sliding block movably arranged on the guide rail, the guide rail is arranged on the base, and the sliding block is connected with the carrier plate.

[0022] A collision block is further included, the collision block is oppositely arranged on two ends of the base and is used for stopping the carrier plate in the second direction. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description only represent some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0024] Figure 1 The structure schematic view of the moving mechanism provided by the present application is shown in Figure 1.

[0025] Figure 2 The structure schematic view of the moving mechanism provided by the present application is shown in Figure 1. Figure 1 The partial enlarged view of A in Figure 1.

[0026] Figure 3 The structure schematic view of the moving mechanism provided by the present application is shown in Figure 1.

[0027] Figure 4 The structure schematic view of the moving mechanism provided by the present application is shown in Figure 1. Figure 3 The sectional view of B-B in Figure 1.

[0028] Reference signs:

[0029] 100, carrier plate;

[0030] 200, driving structure; 210, stator; 220, mover; 230, induction slot;

[0031] 300, base; 310, accommodating groove;

[0032] 400, first connecting piece; 410, first connecting part; 420, second connecting part; 430, adapter part;

[0033] 500, guiding structure; 510, guide rail; 520, sliding block;

[0034] 600, second connecting piece; 610, third connecting part; 620, fourth connecting part;

[0035] 700, grating ruler; 710, reading head;

[0036] 800, anti-collision block; 900, baffle. DETAILED DESCRIPTION

[0037] In order to make the technical problems, technical solutions and beneficial effects of the present application more clearly understood, the present application will be further described in detail in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0038] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0039] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the moving mechanism or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In some descriptions of utility models, "a plurality of" means two or more, unless otherwise explicitly specified.

[0041] This application provides a moving mechanism that can be applied in a vacuum environment and maintains stable movement.

[0042] See Figure 1 A moving mechanism includes a carrier plate 100 and a plurality of driving structures 200. The plurality of driving structures 200 are arranged along a first direction, and each driving structure 200 is drivenly connected to the carrier plate 100 to simultaneously drive the carrier plate 100 to move along a second direction, the second direction being perpendicular to the first direction.

[0043] In one embodiment, the carrier plate 100 may carry an object, such as a product, a processing device, or other displacement device.

[0044] It is understandable that by driving the carrier plate 100 to move along the second direction simultaneously by multiple driving structures 200, the output power of each driving structure 200 can be reduced, for example, by limiting the output power of each driving structure 200 to 10%, 20%, or 30%, which can avoid or reduce the heat generation of the driving structure 200.

[0045] In other words, in the moving mechanism of this application, by simultaneously driving the carrier plate 100 to move along the second direction using multiple drive structures 200 in the first direction, this method reduces the output power of each drive structure 200 compared to using a single drive structure 200 to drive the carrier plate 100, thereby avoiding or reducing heat generation in the drive structure 200. Furthermore, since the above method avoids or reduces heat generation in the drive structure 200, when the moving mechanism is used in a vacuum environment, it can prevent severe overheating that could affect operational stability, ensuring long-term stable and reliable operation of the moving mechanism in a vacuum environment.

[0046] See Figure 1 and 4 In some embodiments, each drive structure 200 may include a stator 210 and a mover 220 movably disposed with respect to the stator 210. It is understood that the mover 220 is capable of moving along the length direction of the stator 210 through interaction with the stator 210.

[0047] Specifically, the stators 210 of the multiple drive structures 200 are arranged along the first direction, and each stator 210 extends along the second direction, with the movers 220 respectively connected to the carrier plate 100 in a driving connection. When each mover 220 interacts with the corresponding stator 210 and moves along the second direction, the multiple movers 220 can cooperate to drive the carrier plate 100 to move along the second direction.

[0048] It can be seen that the above structure can reduce the output power of each mover 220 in conjunction with the stator 210, thereby avoiding or reducing the heat generated when the mover 220 and the stator 210 work together.

[0049] See Figure 1 , Figure 2 and Figure 4 The moving mechanism may also include a base 300, on which the carrier plate 100 is disposed and can slide along the second direction. It is understood that the base 300 can support the carrier plate 100, preventing the forces of the carrier plate 100 and the objects supported on it from being applied to the drive structure 200, thereby reducing the power output of the drive structure 200.

[0050] In some embodiments, a receiving groove 310 may be provided on the base 300, and at least part of the drive structure 200 may be provided in the receiving groove 310. This method can make full use of a portion of the space of the base 300, and can make the structure of the entire moving mechanism more compact.

[0051] Furthermore, a drive structure 200 may be provided on one side or opposite sides of the base 300, and the carrier plate 100 is driven to the drive structure 200 on the side of the base 300 through a first connector 400. The first connector 400 facilitates the drive connection between the carrier plate 100 and the drive structure 200 on the side of the base 300.

[0052] Understandably, in the above method, a portion of the drive structures 200, such as one drive structure 200, is placed on the base 300, while the other drive structures 200 are placed on one or both sides of the base 300. This not only makes full use of the space of the base 300, making the moving mechanism more compact, but also avoids making the base 300 too large to install all the drive structures 200, thus avoiding increasing the weight and cost of the moving mechanism.

[0053] Furthermore, in order to facilitate the sliding of the carrier plate 100 and the base 300, and at the same time improve the accuracy of the movement of the carrier plate 100 under the action of the driving structure 200, the moving mechanism may also include a guide structure 500. The guide structure 500 is disposed opposite to the base 300 in the first direction. The carrier plate 100 is connected to the guide structure 500. The guide structure 500 guides the carrier plate 100 when it slides relative to the base 300 in the second direction.

[0054] Furthermore, the receiving slot 310 can be disposed between the guide structures 500. This method can not only improve the stability of the guide structure 500 supporting the carrier plate 100, but also facilitate the placement of the receiving slot 310 to install the drive structure 200, making the structural layout of the entire moving mechanism more reasonable.

[0055] See Figure 4 In some embodiments, the stator 210 may be provided with a sensing slot 230, and the mover 220 is movably disposed within the sensing slot 230. It is understood that when the stator 210 and the mover 220 interact, the mover 220 can move within the sensing slot 230.

[0056] Furthermore, within the receiving groove 310, the opening of the sensing groove 230 of the stator 210 is arranged along the first direction, and the sensing groove 230 extends along the first direction. The carrier plate 100 is connected to the mover 220 via the second connector 600. It can be understood that this method allows the stator 210 and mover 220 of the drive structure 200 to be positioned within the receiving groove 310 of the base 300. Simultaneously, extending the sensing groove 230 along the first direction prevents the depth of the receiving groove 310 on the base 300 (i.e., the depth of the receiving groove 310 in the third direction) from being too large. This avoids deformation of the base 300 when the mass of the object carried on the carrier plate 100 is too large, thereby affecting the accuracy of the moving mechanism.

[0057] Furthermore, the openings of the sensing slots 230 of the stator 210 on one side or opposite sides of the base 300 are arranged along a third direction, and the sensing slots 230 extend along the third direction, which is perpendicular to the first direction and the second direction respectively. This method allows the carrier plate 100 to be connected to multiple drive structures 200 simultaneously through the first connector 400, while reducing the space occupied by the stator 210 in the first direction, thereby making the moving mechanism more compact.

[0058] See Figure 4 The first connector 400 includes a first connecting portion 410 and a second connecting portion 420. The first connecting portion 410 and the second connecting portion 420 are located on opposite sides of the mover 220 and are connected to each other to clamp and fix the mover 220. The first connecting portion 410 is also connected to the carrier plate 100.

[0059] It is understandable that the stability of the connection between the first connector 400 and the mover 220 can be increased by clamping and fixing the mover 220 with the first connecting part 410 and the second connecting part 420.

[0060] Specifically, after the first connecting part 410 and the second connecting part 420 clamp the mover 220, the first connecting part 410, the stator 210 and the second connecting part 420 can be fixed together by bolts or other means.

[0061] In addition, in some embodiments, in order to facilitate the simultaneous connection of the carrier plate 100 to multiple first connecting parts 410, the carrier plate 100 can be connected to multiple first connecting parts 410 via the adapter part 430.

[0062] See Figure 4 The second connector 600 includes a third connector 610 and a fourth connector 620, which are located on opposite sides of the mover 220 and are connected to each other to clamp and fix the mover 220. The third connector 610 is also connected to the carrier plate 100.

[0063] It is understandable that the first connector 400 facilitates the connection between the carrier plate 100 and the mover 220 on the side of the base 300, and the second connector 600 facilitates the connection between the carrier plate 100 and the mover 220 provided on the base 300.

[0064] See Figure 2 The moving mechanism may also include a grating ruler 700 and a reading head 710 for reading the grating ruler 700. The grating ruler 700 is disposed on the base 300, and the reading head 710 is connected to the carrier plate 100. Specifically, when the carrier plate 100 moves, the reading head 710 can read the grating ruler 700, thereby obtaining the distance the carrier plate 100 has moved, and thus achieving precise control of the movement.

[0065] In one embodiment, the grating ruler 700 can be disposed on the side wall of the base 300 to facilitate the setting of the grating ruler 700 and the reading by the reading head 710.

[0066] In one embodiment, the grating ruler 700 may be made of ceramic material. It is understood that the ceramic grating ruler 700 is less affected by temperature, which can always ensure the accuracy of the reading head 710.

[0067] Furthermore, the moving mechanism may also include a baffle 900, which is disposed on one side of the two guide structures 500 that are opposite to each other, and the baffle 900 is located between the grating ruler 700 and the guide structure 500. The baffle 900 is used to prevent oil stains from the guide structure 500 from contaminating the grating ruler 700.

[0068] Understandably, in order to make the movement of the carrier plate 100 smoother, the guide structure 500 usually contains lubricating oil and other substances. However, the carrier plate 100 may cause oil to splash during high-speed movement. Therefore, by setting the baffle 900, oil can be prevented from contaminating the grating ruler 700.

[0069] Specifically, in one embodiment, the guide structure 500 may further include a guide rail 510 and a slider 520 slidably disposed on the guide rail 510. The guide rail 510 is disposed on the base 300, and the slider 520 is connected to the carrier plate 100.

[0070] See Figure 1 The moving mechanism may also include anti-collision blocks 800, which are disposed opposite to each other at both ends of the base 300 for stopping the baffle plate 100 in the second direction.

[0071] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of some utility models should be included within the protection scope of some utility models.

Claims

1. A mobile mechanism, characterized in that, include: Carrier plate; Multiple driving structures are arranged along a first direction, and each driving structure is connected to the carrier plate to drive the carrier plate to move along a second direction, wherein the first direction is perpendicular to the second direction.

2. The moving mechanism as described in claim 1, characterized in that, Each of the driving structures includes a stator and a mover movably disposed with the stator. The stators of the plurality of driving structures are arranged along a first direction, and each stator extends along a second direction. The movers are respectively driven and connected to the carrier plate.

3. The moving mechanism as described in claim 2, characterized in that, It also includes a base, on which the carrier plate is disposed and can slide along a second direction.

4. The moving mechanism as described in claim 3, characterized in that, The base is provided with a receiving groove, and at least part of the driving structure is provided in the receiving groove.

5. The moving mechanism as described in claim 4, characterized in that, The driving structure is provided on one side or opposite sides of the base, and the carrier plate is driven to the driving structure on the side of the base through a first connector.

6. The moving mechanism as described in claim 5, characterized in that, It also includes a guide structure, which is disposed opposite to the base in a first direction, the carrier plate being connected to the guide structure, and the guide structure guiding the carrier plate as it slides relative to the base in a second direction; and The receiving groove is disposed between the guide structures.

7. The moving mechanism as described in claim 6, characterized in that, The stator is provided with a sensing slot, and the mover is movably disposed within the sensing slot; and Within the receiving groove, the opening of the induction groove of the stator is arranged along a first direction, and the induction groove extends along the first direction; the carrier plate is connected to the moving part via a second connector. The openings of the induction slots of the stator on one side or opposite sides of the base are arranged along a third direction, and the induction slots extend along the third direction, which is perpendicular to the first direction and the second direction respectively.

8. The moving mechanism as described in claim 7, characterized in that, The first connector includes a first connecting part and a second connecting part, which are located on opposite sides of the mover and are connected to each other to clamp and fix the mover. The first connecting part is also connected to the carrier plate. The second connector includes a third connecting portion and a fourth connecting portion, which are located on opposite sides of the mover and are connected to each other to clamp and fix the mover. The third connecting portion is also connected to the carrier plate.

9. The moving mechanism as described in claim 6, characterized in that, It also includes a grating ruler and a reading head for reading the grating ruler, the grating ruler being disposed on the base, the reading head being connected to the carrier plate, and the grating ruler being made of ceramic material; and It also includes a baffle, which is disposed on one side of the two guide structures that are opposite to each other, and the baffle is located between the grating ruler and the guide structure.

10. The moving mechanism as described in claim 9, characterized in that, The guide structure includes a guide rail and a slider slidably disposed on the guide rail. The guide rail is disposed on the base, and the slider is connected to the carrier plate. It also includes anti-collision blocks, which are disposed opposite to each other at both ends of the base, for stopping the carrier plate in a second direction.

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