Collecting device for photoresist lining bags
By designing a photoresist liner bag collection device for the trolley body and the material collection assembly, the separation and recycling of the liner bag and the liquid were achieved, solving the problem of large space occupation of existing devices and improving collection efficiency and space utilization.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-21
- Publication Date
- 2026-04-07
AI Technical Summary
Existing photoresist inner liner bag collection devices require a large collection space, resulting in the inner liner bags being simply stacked, occupying a large storage space, requiring frequent processing, and being time-consuming and labor-intensive.
A collection device comprising a trolley body, a crushing component, and a collecting component was designed. The crushing component crushes the inner liner bag, and the crushed inner liner bag is separated from the liquid. The material receiving frame and liquid receiving frame are used to achieve classified recycling, reducing the floor space and improving space utilization.
It achieves the separation and recycling of the inner liner bag and the liquid, reduces the floor space required, improves collection efficiency, reduces the frequency of processing, and saves time and manpower.
Smart Images
Figure CN224091202U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of photoresist technology, specifically to a collection device for a photoresist inner liner bag. Background Technology
[0002] Photoresist is an indispensable core material in the photolithography process and plays an important role in semiconductor manufacturing. The inner liner bag that comes into direct contact with the photoresist is not reusable and needs to be handled as a hazardous chemical.
[0003] In related technologies, collection devices are usually used to collect the inner lining bags for centralized processing. However, collection devices for inner lining bags usually require a large collection space, and simply stacking the inner lining bags takes up a lot of storage space, resulting in a small number of inner lining bags being collected each time, requiring frequent processing, which is time-consuming and labor-intensive. Utility Model Content
[0004] In view of this, the present invention provides a collection device for photoresist inner liner bags to solve the problems of existing collection devices requiring a large collection space to collect inner liner bags, and the simple stacking of inner liner bags occupying a large storage space, resulting in a small number of inner liner bags collected each time, requiring frequent processing, which is time-consuming and labor-intensive.
[0005] This utility model provides a collection device for photoresist inner liner bags, comprising:
[0006] Main body of the trolley;
[0007] A crushing component, mounted on the trolley body, is used to crush the inner lining bag;
[0008] The material collection assembly includes a material receiving frame and a liquid receiving frame. The material receiving frame is disposed on the trolley body. The material receiving frame is slidably embedded in the liquid receiving frame and is located below the discharge end of the crushing assembly for collecting the crushed inner liner bag. The bottom of the material receiving frame is spaced at a predetermined distance from the bottom of the liquid receiving frame, and the bottom of the material receiving frame is provided with a leakage hole for liquid to pass through.
[0009] The inner liner bag is crushed by the crushing component. The crushed inner liner bag falls into the receiving frame through the discharge end of the crushing component, while the liquid in the inner liner bag flows into the receiving frame through the leakage hole at the bottom of the receiving frame, thus separating the inner liner bag from the liquid. After collection, the receiving frame can be pulled out of the receiving frame for disassembly and recycling. This achieves classified recycling and processing. On the other hand, the separated inner liner bag is smaller in size, reducing the floor space occupied and making it easier to put into the receiving frame for overall collection, improving space utilization. This allows the receiving frame to collect more inner liner bags at once, saving time and effort and improving work efficiency.
[0010] In one optional embodiment, the outer wall of the receiving frame is provided with a limiting part, which abuts against the top of the liquid receiving frame. By providing the limiting part to cooperate with the liquid receiving frame, during installation, the bottom end of the receiving frame is slidably inserted into the liquid receiving frame until the limiting part abuts against the top of the liquid receiving frame, leaving space between the bottom of the liquid receiving frame and the bottom of the receiving frame to collect liquid. After collection is complete, the receiving frame can be slid out of the liquid receiving frame.
[0011] In one optional embodiment, the bottom of the limiting part is provided with a snap-fit groove, which is adapted to snap-fit the top of the liquid receiving frame. By providing a limiting groove that snaps into the top of the liquid receiving frame, the stability of the receiving frame when it is installed into the liquid receiving frame is improved.
[0012] In one optional implementation, the pulverizing component includes:
[0013] A crushing hopper is disposed on the main body of the trolley and located above the material collection assembly;
[0014] A drive shaft is rotatably disposed inside the crushing hopper, and a plurality of first cutting gears are spaced apart along its axial direction on the drive shaft;
[0015] A driven shaft is rotatably disposed inside the crushing hopper and is arranged parallel to the drive shaft; a plurality of second cutting gears are spaced apart along its axial direction on the driven shaft; the second cutting gears are axially offset from the first cutting gears, and their axial projections fall on the first cutting gears, for cooperating with the first cutting gears to crush the inner liner bag;
[0016] A driving component is disposed on the trolley body and is drivenly connected to the drive shaft to drive the drive shaft to rotate; the drive shaft and the driven shaft are drivenly connected through a gear assembly.
[0017] During operation, the inner liner bag is fed into the crushing hopper from above. The drive shaft is driven by the drive component to rotate the first cutting gear. The drive shaft then drives the driven shaft to rotate through the gear assembly, which in turn drives the second cutting gear to rotate. Together with the first cutting gear, the inner liner bag is crushed. The inner liner bag then falls into the receiving frame from below the crushing hopper.
[0018] In one optional embodiment, the driving component includes a drive motor and a pulley, which are spaced apart in the vertical direction. The output end of the drive motor is connected to the input end of the pulley via a belt, and the output end of the pulley is driven by the drive shaft. By using a drive motor and a pulley to drive the drive shaft, and by arranging the drive motor and pulley spaced apart in the vertical direction, the layout space of the trolley body is fully utilized, making the overall structure more compact and reducing the floor space required.
[0019] In one optional embodiment, a control component is further included, which is disposed on the trolley body and communicatively connected to the crushing component. Controlling the crushing component via the control component improves convenience.
[0020] In one optional embodiment, the trolley body has a receiving cavity, and the material collection assembly is disposed within the receiving cavity. By placing the material collection assembly within the receiving cavity of the trolley body, splashing or evaporation of liquid from the liner bag after it has been crushed, as well as the release of harmful gases into the surrounding environment, are prevented, thus avoiding environmental pollution and impacting the health of operators, and improving safety.
[0021] In an optional embodiment, an exhaust gas collection component is further included. The trolley body is provided with an exhaust port communicating with the receiving cavity. The exhaust gas collection component is connected to the receiving cavity through the exhaust port and is used to collect the gas in the receiving cavity through negative pressure. By setting up the exhaust gas collection component, during operation, the exhaust gas collection component generates negative pressure and extracts the harmful gases generated during the crushing process through the exhaust port, avoiding environmental pollution and affecting the health of operators, improving safety, and maintaining a negative pressure environment in the receiving cavity to prevent harmful gases from escaping from the crushing component.
[0022] In one optional embodiment, the trolley body is made of aluminum alloy. Using aluminum alloy for the trolley body is lightweight, easy to move, and reduces costs.
[0023] In one optional embodiment, the material of the material collection assembly is aluminum alloy. Using aluminum alloy for the material collection assembly makes it lightweight, easy to move, and reduces costs.
[0024] In one optional embodiment, a movable component is provided at the bottom of the trolley body. This movable component facilitates movement. Attached Figure Description
[0025] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0026] Figure 1 This is an axonometric view of a photoresist liner bag collection device according to an embodiment of the present invention;
[0027] Figure 2 for Figure 1A schematic diagram of the internal structure of a photoresist liner bag collection device is shown.
[0028] Figure 3 for Figure 1 A top view of a photoresist inner liner bag collection device shown.
[0029] Figure 4 for Figure 3 Sectional view at point AA;
[0030] Figure 5 for Figure 4 Enlarged view at point B in the middle;
[0031] Figure 6 This is a schematic diagram of the material collection assembly according to an embodiment of the present utility model.
[0032] Explanation of reference numerals in the attached figures:
[0033] 1. Cart body; 2. Material receiving frame; 3. Liquid receiving frame; 4. Liquid leakage hole; 5. Limiting part; 6. Snap-fit groove; 7. Crushing bucket; 8. Drive shaft; 9. First cutting gear; 10. Driven shaft; 11. Second cutting gear; 12. Gear assembly; 13. Drive motor; 14. Pulley; 15. Control assembly; 16. Receptacle; 17. Exhaust vent. Detailed Implementation
[0034] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0035] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0036] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0037] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.
[0038] The following is combined with Figures 1 to 6 The following describes embodiments of the present invention.
[0039] According to an embodiment of the present invention, a collection device for photoresist inner liner bags is provided, comprising: a trolley body 1; a crushing component disposed on the trolley body 1 for crushing the inner liner bag; and a collection component comprising a receiving frame 2 and a liquid receiving frame 3, wherein the receiving frame 2 is disposed on the trolley body 1; the receiving frame 2 is slidably embedded in the liquid receiving frame 3 and is located below the discharge end of the crushing component for collecting the crushed inner liner bag; the bottom of the receiving frame 2 is spaced apart from the bottom of the liquid receiving frame 3 by a predetermined distance, and the bottom of the receiving frame 2 is provided with a leakage hole 4 for liquid to pass through.
[0040] It should be noted that the receiving frame 2 can be slidably embedded in the liquid receiving frame 3 in the vertical direction.
[0041] In this embodiment, the inner liner bag is crushed by the crushing component. The crushed inner liner bag falls into the receiving frame 2 through the discharge end of the crushing component, while the liquid in the inner liner bag flows into the liquid receiving frame 3 through the leakage hole 4 at the bottom of the receiving frame 2, thus separating the inner liner bag from the liquid. After collection, the receiving frame 2 can be pulled out from the liquid receiving frame 3 for disassembly and recycling. On the one hand, it achieves classified recycling, and on the other hand, the separated inner liner bag is smaller in size, reducing the floor space occupied, and is easier to put into the receiving frame 2, facilitating overall collection, improving space utilization, and allowing the receiving frame 2 to collect more inner liner bags at once, saving time and effort and improving work efficiency.
[0042] In one embodiment, such as Figure 5 and Figure 6 As shown, the outer wall of the receiving frame 2 is provided with a limiting part 5, which abuts against the top of the receiving frame 3.
[0043] In this embodiment, by setting a limiting part 5 to cooperate with the liquid receiving frame 3, during installation, the bottom end of the receiving frame 2 is slidably inserted into the liquid receiving frame 3 until the limiting part 5 abuts against the top of the liquid receiving frame 3, so that there is space between the bottom of the liquid receiving frame 3 and the bottom of the receiving frame 2 to collect liquid. After collection is completed, the receiving frame 2 can be slid out of the liquid receiving frame 3.
[0044] In one embodiment, such as Figure 5 and Figure 6 As shown, the bottom of the limiting part 5 is provided with a snap-fit groove 6, which is adapted to snap-fit the top of the liquid receiving frame 3.
[0045] In this embodiment, the stability of the receiving frame 2 when it is installed in the receiving frame 3 is improved by setting a limiting groove that engages with the top of the receiving frame 3.
[0046] In one embodiment, such as Figures 1 to 4 As shown, the crushing assembly includes: a crushing hopper 7, mounted on the trolley body 1 and positioned above the material collection assembly; a drive shaft 8, rotatably mounted inside the crushing hopper 7, with multiple first cutting gears 9 spaced apart along its axial direction on the drive shaft 8; a driven shaft 10, rotatably mounted inside the crushing hopper 7 and arranged parallel to the drive shaft 8; multiple second cutting gears 11 spaced apart along its axial direction on the driven shaft 10; the second cutting gears 11 are axially offset from the first cutting gears 9, and their axial projections fall on the first cutting gears 9, for cooperating with the first cutting gears 9 to crush the inner lining bag; and a drive unit, mounted on the trolley body 1 and drivenly connected to the drive shaft 8, for driving the drive shaft 8 to rotate; the drive shaft 8 and the driven shaft 10 are drivenly connected via a gear assembly 12.
[0047] In this embodiment, during operation, the inner liner bag is fed into the crushing hopper 7 from above. The drive shaft 8 is driven by the drive component to rotate the first cutting gear 9. The drive shaft 8 then drives the driven shaft 10 to rotate through the gear assembly 12, which in turn drives the second cutting gear 11 to rotate. The driven shaft 10 works with the first cutting gear 9 to crush the inner liner bag. The inner liner bag then falls into the receiving frame 2 from below the crushing hopper 7.
[0048] Specifically, such as Figure 3 As shown, the gear assembly 12 includes a first gear and a second gear. The first gear is coaxially mounted on the drive shaft 8, and the second gear is coaxially mounted on the driven shaft 10. The first gear and the second gear mesh with each other to facilitate transmission.
[0049] In one embodiment, the driving component includes a drive motor 13 and a belt pulley 14, which are spaced apart in the vertical direction; the output end of the drive motor 13 is connected to the input end of the belt pulley 14 via a belt, and the output end of the belt pulley 14 is driven connected to the drive shaft 8.
[0050] In this embodiment, by using a drive motor 13 and a belt pulley 14 to drive the drive shaft 8, the drive motor 13 and the belt pulley 14 are arranged at intervals in the vertical direction, making full use of the layout space of the trolley body 1, making the whole more compact and reducing the floor space occupied.
[0051] Specifically, the output shaft of the drive motor 13 is coaxially provided with a first pulley, and the input end of the belt pulley 14 is provided with a second pulley corresponding to the first pulley. The first pulley is driven to the second pulley via a belt.
[0052] In one embodiment, such as Figures 1 to 4 As shown, the photoresist inner liner bag collection device also includes a control component 15, which is mounted on the trolley body 1 and is communicatively connected to the crushing component.
[0053] In this embodiment, the crushing component is controlled by the control component 15, which improves convenience.
[0054] In one embodiment, such as Figure 2 and Figure 4 As shown, the trolley body 1 has a receiving cavity 16, and the material collection assembly is installed in the receiving cavity 16.
[0055] In this embodiment, by placing the material collection component inside the accommodating cavity 16 of the trolley body 1, the liquid in the inner liner bag after the inner liner bag is crushed is prevented from splashing or evaporating, and the harmful gases generated are prevented from spreading to the surrounding environment, thus avoiding environmental pollution and affecting the health of operators, and improving safety.
[0056] In one embodiment, such as Figure 1 As shown, the collection device for the photoresist inner liner bag also includes an exhaust gas collection component. The trolley body 1 is provided with an exhaust port 17 that communicates with the accommodating cavity 16. The exhaust gas collection component communicates with the accommodating cavity 16 through the exhaust port 17 and is used to collect the gas in the accommodating cavity 16 through negative pressure.
[0057] In this embodiment, by setting up an exhaust gas collection component, the exhaust gas collection component generates negative pressure during operation and extracts the harmful gases generated during the crushing process through the exhaust port 17, thereby avoiding environmental pollution and affecting the health of operators, improving safety, and maintaining a negative pressure environment in the containment cavity to prevent harmful gases from overflowing from the crushing component and causing secondary pollution.
[0058] Specifically, the exhaust gas collection assembly is equipped with a negative pressure fan, which generates negative pressure to absorb harmful gases and avoid secondary pollution.
[0059] In one embodiment, the trolley body 1 is made of aluminum alloy.
[0060] In this embodiment, the trolley body 1 is made of aluminum alloy, which is lightweight, easy to move, and reduces costs.
[0061] In one embodiment, the material of the aggregate assembly is aluminum alloy.
[0062] In this embodiment, the material of the material collection assembly is aluminum alloy, which is lightweight, easy to move, and reduces costs.
[0063] In one embodiment, a movable component is provided at the bottom of the trolley body 1.
[0064] In this embodiment, a movable component is provided at the bottom of the trolley body 1 to facilitate movement.
[0065] Specifically, the moving component includes multiple evenly distributed casters for easy movement.
[0066] The specific working principle of the photoresist liner bag collection device provided in this embodiment is as follows: When the liner bag needs to be processed, the drive motor 13 is started by the control component 15. The drive motor 13 drives the belt pulley 14 to rotate the drive shaft 8. Then the drive shaft 8 rotates through the driven shaft 10. Then the first cutting gear 9 and the second cutting gear 11 cooperate to crush the liner bag put into the crushing hopper 7. The crushed liner bag falls into the receiving frame 2, while the liquid in the liner bag flows into the liquid receiving frame 3 through the leakage hole 4 at the bottom of the receiving frame 2. During the crushing process, the exhaust gas collection component uses negative pressure to extract the harmful gas in the receiving cavity for treatment, thereby separating the liner bag from the liquid. After the collection is completed, the receiving frame 2 can be pulled out from the liquid receiving frame 3 for disassembly and recycling. On the one hand, it realizes classified recycling. On the other hand, the separated liner bag is smaller in size, reduces the floor space, and is easier to put into the receiving frame 2, which facilitates overall collection, improves space utilization, and allows the receiving frame 2 to collect more liner bags at one time, saving time and effort and improving work efficiency. The existing collection devices require a large collection space to collect the inner lining bags, and the simple stacking of the inner lining bags takes up a lot of storage space, resulting in a small number of inner lining bags collected each time, requiring frequent processing, which is time-consuming and labor-intensive.
[0067] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.
Claims
1. A collection device for photoresist inner liner bags, characterized in that, include: Main body of the trolley (1); A crushing assembly is provided on the trolley body (1) for crushing the inner lining bag; The material collection assembly includes a receiving frame (2) and a liquid receiving frame (3). The receiving frame (2) is disposed on the trolley body (1). The receiving frame (2) is slidably embedded in the liquid receiving frame (3) and located below the discharge end of the crushing assembly for collecting the crushed inner liner bag. The bottom of the receiving frame (2) is spaced at a predetermined distance from the bottom of the liquid receiving frame (3), and the bottom of the receiving frame (2) is provided with a leakage hole (4) for liquid to pass through.
2. The collection device for the photoresist inner liner bag according to claim 1, characterized in that, The outer wall of the receiving frame (2) is provided with a limiting part (5), which abuts against the top of the liquid receiving frame (3).
3. The collection device for the photoresist inner liner bag according to claim 2, characterized in that, The bottom of the limiting part (5) is provided with a snap-fit groove (6), which is adapted to snap-fit the top of the liquid receiving frame (3).
4. The collection device for the photoresist inner liner bag according to claim 1, characterized in that, The crushing component includes: A crushing hopper (7) is disposed on the trolley body (1) and located above the material collection assembly; The drive shaft (8) is rotatably disposed inside the crushing bucket (7), and a plurality of first cutting gears (9) are spaced apart along its axial direction on the drive shaft (8); A driven shaft (10) is rotatably disposed inside the crushing hopper (7) and is arranged parallel to the drive shaft (8); a plurality of second cutting gears (11) are spaced apart along its axial direction on the driven shaft (10); the second cutting gears (11) are offset from the first cutting gears (9) in the axial direction, and their axial projections fall on the first cutting gears (9), for cooperating with the first cutting gears (9) to crush the inner liner bag; A driving component is disposed on the trolley body (1) and drivenly connected to the drive shaft (8) for driving the drive shaft (8) to rotate; the drive shaft (8) and the driven shaft (10) are drivenly connected through a gear assembly (12).
5. The collection device for the photoresist inner liner bag according to claim 4, characterized in that, The driving component includes a drive motor (13) and a belt pulley (14), which are spaced apart in the vertical direction. The output end of the drive motor (13) is connected to the input end of the belt pulley (14) via a belt, and the output end of the belt pulley (14) is driven by the drive shaft (8).
6. The collection device for the photoresist inner liner bag according to claim 1, characterized in that, It also includes a control component (15), which is disposed on the trolley body (1) and is communicatively connected to the crushing component.
7. The collection device for the photoresist inner liner bag according to any one of claims 1 to 6, characterized in that, The trolley body (1) is provided with a receiving cavity (16), and the material collection assembly is disposed in the receiving cavity (16).
8. The collection device for the photoresist inner liner bag according to claim 7, characterized in that, It also includes an exhaust gas collection component. The trolley body (1) is provided with an exhaust port (17) that communicates with the accommodating cavity (16). The exhaust gas collection component communicates with the accommodating cavity (16) through the exhaust port (17) and is used to collect the gas in the accommodating cavity (16) by negative pressure.
9. The collection device for the photoresist inner liner bag according to claim 1, characterized in that, The main body (1) of the trolley is made of aluminum alloy; And / or, the material of the aggregate assembly is aluminum alloy.
10. The collection device for the photoresist inner liner bag according to claim 1, characterized in that, The bottom of the trolley body (1) is provided with a moving component.