Boat for vacuum thermal evaporation aluminum plating

Abstract

The utility model relates to the field of boats for aluminum plating, in particular to a boat for vacuum thermal evaporation aluminum plating. Comprising a metal base body, the upper surface of the metal base body is fixedly connected with upper surface ceramic, the lower surface of the metal base body is fixedly connected with lower surface ceramic, the sides, away from each other, of the upper surface ceramic and the lower surface ceramic are each provided with a groove, and the metal base body is divided into a middle layer and a ceramic surface layer; the metal matrix middle layer is made of high-temperature-resistant metal, the metal matrix middle layer is specifically made of tungsten, molybdenum and tantalum alloy materials (or two of the tungsten, molybdenum and tantalum alloy materials and a single metal material), the areas, used for connection, of the two ends of the metal matrix middle layer are thick, and the area in the middle of the metal matrix middle layer is thin. The vacuum thermal evaporation aluminum plating boat provided by the utility model has the advantages of good corrosion resistance, good heat transfer and good contact, and can be used for a long time.

Description

TECHNICAL FIELD

[0001] The utility model relates to a boat for aluminizing, especially to a boat for vacuum thermal evaporation aluminizing. BACKGROUND

[0002] The thermal evaporation aluminizing film is widely used in the field of semiconductor device research and has important application value. The traditional vacuum evaporation method for aluminizing includes evaporating aluminum particles with a metal boat, winding aluminum wire on a tungsten wire, using a tungsten wire basket and boron nitride crucible for secondary heat transfer aluminizing, graphite crucible and electron beam evaporation, and directly using doped conductive boron nitride ceramic boat. Although these methods have been widely used, there are still some problems. For example, when high-temperature aluminum liquid is used to prepare aluminum with high-temperature resistant metal boats or metal wires, the high-temperature aluminum liquid will form an alloy with the metal, which will cause obvious corrosion and lead to brittle fracture or liquid leakage. The secondary heat transfer efficiency of the ceramic crucible is poor and it is difficult to melt. The direct use of thick doped boron nitride boat often has the problems of poor contact, easy disconnection and poor thermal conductivity.

[0003] The utility model discloses a boat for thermal evaporation aluminizing which has good corrosion resistance, good heat transfer and good contact and can be used for a long time, and improves various problems that may be encountered when using evaporation method to plate Al. CONTENT

[0004] The utility model discloses a boat for thermal evaporation aluminizing which has good corrosion resistance, good heat transfer and good contact and can be used for a long time, and improves various problems that may be encountered when using evaporation method to plate Al.

[0005] To solve the above technical problems, the utility model provides a boat for vacuum thermal evaporation aluminizing, which comprises a metal base, an upper surface ceramic fixedly connected to the upper surface of the metal base, a lower surface ceramic fixedly connected to the lower surface of the metal base, recesses formed on the sides of the upper surface ceramic and the lower surface ceramic away from each other, and a middle layer and a ceramic surface layer of the metal base.

[0006] Preferably, the middle layer of the metal base is made of high-temperature resistant metal, and the middle layer of the metal base is made of tungsten, molybdenum, tantalum alloy material (or alloy material of two of them, and single metal material).

[0007] Preferably, the middle layer of the metal base is thicker at the connecting areas at both ends and thinner in the middle.

[0008] Preferably, the upper surface, lower surface and side surface of the thinner area of the metal base are coated with a layer of ceramic material, and the both ends of the metal base still have metal areas for connection.

[0009] Preferably, the ceramic layer of the metal base is a coating resistant to high-temperature aluminum liquid corrosion, and the ceramic layer is made of zirconium oxide, boron nitride or silicon carbide (or aluminum nitride, silicon nitride or magnesium oxide, and the ceramic layer can be made of three of the six materials).

[0010] Preferably, the ceramic surface layer of the upper and lower surfaces of the metal base is designed with a groove, and the two ends of the metal base are significantly higher than the inner side of the metal base.

[0011] Preferably, the bottom thickness of the ceramic groove is only 0.01-2mm, and the ceramic groove can ensure that the metal base effectively transfers heat to the surface.

[0012] Compared with the related art, the boat for vacuum thermal evaporation and aluminum plating has the following beneficial effects:

[0013] The boat for vacuum thermal evaporation and aluminum plating provided by the present application has the following beneficial effects: BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 The structure of the boat for vacuum thermal evaporation and aluminum plating provided by the present application is shown in the accompanying drawings;

[0015] Figure 2 The metal base cross-sectional structure is shown in the accompanying drawings; Figure 1 The ceramic surface layer structure is shown in the accompanying drawings.

[0016] Figure 3 The ceramic surface layer structure is shown in the accompanying drawings. Figure 2 The ceramic surface layer structure is shown in the accompanying drawings.

[0017] In the drawings, 1 is a metal base, 11 is an intermediate layer, 12 is a ceramic surface layer, 121 is zirconium oxide, 122 is boron nitride, 123 is silicon carbide, 2 is an upper surface ceramic, 3 is a groove, and 4 is a lower surface ceramic. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application and do not limit the present application.

[0019] The specific implementation of the present application will be described in detail below in combination with specific examples.

[0020] Please refer to Figures 1 to 3 The utility model discloses an evaporate aluminium with vacuum heat of boat provides, including: metal base 1, the upper surface ceramic 2 of metal base 1's upper surface is fixedly connected with, the lower surface ceramic 4 of metal base 1's lower surface is fixedly connected with, the upper surface ceramic 2 and the lower surface ceramic 4 are away from each other's side and are all set up recess 3, metal base 1 is divided into middle layer 11 and ceramic surface layer 12, its characterized in that, metal base 1 middle layer 11 is high temperature resistance metal, metal base 1 middle layer 11 specifically is tungsten, molybdenum, tantalum alloy material quality (or alloy material quality of two of them, and single metal material quality), its characterized in that, the area of metal base 1 middle layer 11 both ends is used to connect and is relatively thick, the area of metal base 1 middle layer 11 middle is relatively thin, the upper surface and the lower surface and the side of the thinner area of metal base 1 are all coated with a layer of ceramic material, the both ends of metal base 1 still remain the metal area and connect, the ceramic layer of metal base 1 is the coating that high temperature resistance aluminum liquid corrosion, the ceramic layer specifically is zirconium oxide 121, boron nitride 122, silicon carbide 123 (or is aluminum nitride, silicon nitride, magnesium oxide, and the ceramic layer can be three of six kinds of material), the ceramic surface layer 12 of the upper surface and the lower surface of metal base 1 designs recess 3, the both ends of metal base 1 are significantly higher than the inside of metal base 1, the bottom thickness of ceramic recess 3 only has 0.01~2mm, and ceramic recess 3 can guarantee that metal base 1 effectively heat transfer to the surface;

[0021] The utility model provides a kind of evaporate aluminium with vacuum heat of boat's working principle as follows: before carrying out evaporate aluminium, it needs to ensure that heat evaporation boat and its accessories are clean and pollution-free.The substrate surface also needs to be thoroughly cleaned to avoid surface impurities affecting the adhesion and quality of coating, check the state of heat evaporation boat, including whether material has crack or damage, ensure that boat body is intact, correctly install heat evaporation boat in vacuum evaporation equipment, ensure that it is well connected with power supply, heating system, place pure aluminum or aluminum alloy metal into the heating groove of heat evaporation boat, ensure that metal is evenly filled, and avoid excessive or too little, affect evaporation efficiency, according to the thickness of required coating and evaporation time, reasonably adjust aluminum metal, wherein ceramic surface layer can resist heat and high temperature aluminum liquid corrosion.

[0022] The circuit and control involved in the utility model are prior art, and will not be described in detail here.

[0023] The above only describes the embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structure or equivalent process conversion using the content of the utility model specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection range of the utility model.

Claims

1. A boat for vacuum thermal evaporation aluminum plating, characterized in that, include: A metal substrate (1) has an upper surface ceramic (2) fixedly connected to its upper surface and a lower surface ceramic (4) fixedly connected to its lower surface. Grooves (3) are provided on the sides of the upper surface ceramic (2) and the lower surface ceramic (4) that are far apart from each other. The metal substrate (1) is divided into an intermediate layer (11) and a ceramic surface layer (12).

2. The boat for vacuum thermal evaporation aluminum plating according to claim 1, characterized in that, The intermediate layer (11) of the metal substrate (1) is a high-temperature resistant metal, and the intermediate layer (11) of the metal substrate (1) is specifically made of tungsten, molybdenum and tantalum alloy.

3. The boat for vacuum thermal evaporation aluminum plating according to claim 1, characterized in that, The area at both ends of the intermediate layer (11) of the metal substrate (1) is thicker, while the area in the middle of the intermediate layer (11) of the metal substrate (1) is thinner.

4. The boat for vacuum thermal evaporation aluminum plating according to claim 1, characterized in that, The upper, lower and side surfaces of the thinner area of ​​the metal substrate (1) are covered with a layer of ceramic material, and the two ends of the metal substrate (1) still retain metal areas for connection.

5. The boat for vacuum thermal evaporation aluminum plating according to claim 1, characterized in that, The ceramic layer of the metal substrate (1) is a heat-resistant and high-temperature resistant aluminum liquid corrosion coating, specifically zirconium oxide (121), boron nitride (122), and silicon carbide (123).

6. The boat for vacuum thermal evaporation aluminum plating according to claim 1, characterized in that, The upper and lower surfaces of the metal substrate (1) are designed with grooves (3) in the ceramic surface layer (12), and the two ends of the metal substrate (1) are significantly higher than the inner side of the metal substrate (1).

7. The boat for vacuum thermal evaporation aluminum plating according to claim 1, characterized in that, The bottom thickness of the ceramic groove (3) is only 0.01 to 2 mm, and the ceramic groove (3) can ensure that the metal substrate (1) can effectively transfer heat to the surface.

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