Compact type coiled material plasma coating equipment

Abstract

The utility model relates to compact type coiled material plasma coating equipment which comprises a bottom frame, a vacuum box, a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism and a plurality of chemical monomer vaporization units, an air exhaust assembly in the vacuum generating mechanism is arranged at the upper end in the vacuum box, and a plurality of first through holes are formed in the bottom of the vacuum box; each first through hole is connected with a chemical monomer vaporization unit, the electrode mechanism comprises an electrode plate and a power source, the electrode plate is arranged in the vacuum box and located above the first through holes, the coiled material is located between the electrode plate and the air exhaust assembly, and a plurality of second through holes are formed in the electrode plate; the projection of each first through hole on the electrode plate in the vertical direction does not coincide with or intersect with any second through hole. The first through hole for introducing the chemical monomer steam, the electrode plate, the coiled material and the air exhaust assembly are sequentially arranged from bottom to top, and the relative positions of the first through hole and the second through hole are arranged, so that the distribution uniformity of plasmas is improved, and the coating uniformity is improved.

Description

Technical Field

[0001] This utility model relates to the field of plasma coating equipment, and in particular to a compact roll-to-roll plasma coating equipment. Background Technology

[0002] Plasma deposition is a method that uses microwaves or radio frequencies to ionize a gas containing atoms that form thin film components, creating a localized plasma. Because plasma is highly chemically reactive, it readily reacts, thereby depositing the desired thin film onto the substrate. Plasma deposition has advantages such as low reaction temperature, fast deposition rate, good film quality, fewer pinholes, and less susceptibility to cracking, and is therefore widely used in industries such as automotive, electronics, and new energy.

[0003] Traditional plasma coating equipment is mostly suitable for coating sheet-like substrates. In order to facilitate the coating of roll-shaped flexible materials, roll-to-roll plasma coating equipment has emerged in the market in recent years. For example, Chinese utility model patent CN217628609U discloses a PECVD-based enhanced graphene film coating equipment, which includes a coating upper frame box, a sealing embedded plate installed below the coating upper frame box, and an installation mechanism installed below the sealing embedded plate. A control button is installed on one side of the coating upper frame box, and a winding box is installed on the outer wall of the coating upper frame box adjacent to the control button. The control button can be activated to control the operation of the equipment, and the winding box can also be used to wind up the coated film. Two limiting plates are set inside the coating upper frame box, and a discharge plate is installed between the two limiting plates. A gas supply pipe is set below the discharge plate so that the reactive gas can be injected into the discharge plate and discharged by the discharge plate to achieve plasma chemical vapor deposition.

[0004] However, in the above-mentioned coating equipment, the gas supply pipe is located below the discharge plate and the thin film is located below the gas supply pipe. The reactive gas output from the gas supply pipe needs to rise to the discharge plate for ionization and then descend to the thin film for reaction deposition. With this setting, it is difficult to guarantee the movement direction of the reactive gas, which is rising first and then falling. As a result, the reactive gas cannot be fully ionized and cannot fully react to deposit a film on the thin film. Furthermore, it is impossible to guarantee the uniform distribution of plasma when the thin film is subjected to plasma treatment, resulting in poor coating uniformity.

[0005] Furthermore, existing roll-to-roll plasma coating equipment is generally large in size, resulting in a longer vacuuming process, lower work efficiency, and higher overall cost.

[0006] Therefore, it is necessary to provide a technical solution to address the above problems. Utility Model Content

[0007] The purpose of this invention is to provide a compact roll-to-roll plasma coating equipment that can solve the technical problems of poor coating uniformity caused by the large size and poor plasma distribution uniformity of existing roll-to-roll plasma coating equipment.

[0008] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0009] A compact roll-to-roll plasma coating apparatus includes a base frame, a vacuum chamber, a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism, and several chemical monomer vaporization units. The vacuum chamber is mounted on the base frame. The vacuum generating mechanism includes a vacuum pump assembly located at the upper end of the vacuum chamber. The winding and unwinding mechanism includes a feeding reel and a taking reel, which are rotatably mounted at opposite ends inside the vacuum chamber. The two ends of the roll-to-roll are wound around the feeding reel and the taking reel, respectively. The bottom of the vacuum chamber has several first through holes, each of which is connected to one of the chemical monomer vaporization units. The electrode mechanism includes an electrode plate and a power supply electrically connected to the electrode plate. The electrode plate is located inside the vacuum chamber and above the several first through holes. The roll-to-roll is located between the electrode plate and the vacuum pump assembly. The electrode plate has several second through holes, and the projection of each first through hole onto the electrode plate in the vertical direction does not coincide with or intersect with any of the second through holes.

[0010] Furthermore, each of the first through holes is surrounded by a plurality of second through holes on the outer periphery of its projection in the vertical direction on the electrode plate.

[0011] Furthermore, the vacuum chamber is provided with two partition plate assemblies, which divide the interior of the vacuum chamber into a feeding chamber, a coating chamber, and a receiving chamber, with the feeding chamber and the receiving chamber located on opposite sides of the coating chamber.

[0012] Furthermore, the partition assembly includes a partition fixedly disposed with the vacuum chamber, the partition having a cutout in the middle for the roll material to pass through, and an upper baffle and a lower baffle disposed opposite each other on one side of the partition, with a gap between the upper baffle and the lower baffle for the roll material to pass through.

[0013] Furthermore, the unloading reel is rotatably disposed in the unloading chamber, the take-up reel is rotatably disposed in the take-up chamber, and one end of the take-up reel extends to the outside of the vacuum chamber and is driven and connected to the first drive motor.

[0014] Furthermore, the unwinding and rewinding mechanism also includes a clamping and conveying mechanism and a tensioning mechanism disposed between the unwinding roll and the rewinding roll. The clamping and conveying mechanism is disposed in the unwinding cavity, and the tensioning mechanism is disposed in the rewinding cavity. Both the clamping and conveying mechanism and the tensioning mechanism include an upper roller and a lower roller. One end of the upper roller is provided with an upper gear, and one end of the lower roller is provided with a lower gear. The upper gear and the lower gear mesh with each other. One end of the upper roller or the lower roller extends to the outside of the vacuum box and is driven and connected to the second drive motor.

[0015] Furthermore, the winding and unwinding mechanism also includes a plurality of reversing rollers rotatably disposed in the coating cavity, wherein the heights of adjacent reversing rollers in the vertical direction at least partially overlap.

[0016] Furthermore, each of the chemical monomer vaporization units includes a control valve and an evaporator. The inlet of the control valve is connected to an external chemical monomer supply mechanism, the outlet of the control valve is connected to the inlet of the evaporator, and the outlet of the evaporator is connected to the first through hole.

[0017] Furthermore, the vacuum generating mechanism also includes a vacuum pump group, and the air extraction component includes a plurality of air extraction pipes disposed at the upper end of the inside of the coating cavity. Each air extraction pipe has a plurality of air extraction holes. One end of each of the air extraction pipes is connected to the vacuum pump group through a connecting pipe. A chemical monomer precipitation mechanism is also provided between the connecting pipe and the vacuum pump group.

[0018] Furthermore, it also includes an exhaust mechanism, which includes an exhaust gas processor and a fan. The inlet end of the exhaust gas processor is connected to the outlet end of the vacuum pump group, and the outlet end of the exhaust gas processor is connected to the inlet end of the fan.

[0019] The beneficial effects of this utility model are as follows:

[0020] (1) By sequentially setting the first through hole for the chemical monomer gas, the electrode plate, the roll material, and the pumping component in the vacuum generating mechanism from bottom to top, the chemical monomer gas enters the vacuum box from the first through hole at the bottom of the vacuum box and moves upward under the action of the pumping component in the vacuum generating mechanism. During the upward movement, the chemical monomer gas first passes through the electrode plate to ionize and form plasma, and then continues to move upward to the roll material for reaction deposition to form a film. This ensures that the ionization process and the film deposition process are sequentially set in the movement path of the chemical monomer gas, thereby ensuring that the chemical monomer gas can be fully ionized and can fully react and deposit to form a film.

[0021] (2) By setting the projection of each first through hole on the electrode plate in the vertical direction to not coincide with or intersect with any second through hole, when the chemical monomer gas enters the vacuum chamber through the first through hole, the chemical monomer gas moves upward to the position in the electrode plate where there is no second through hole, that is, to the solid position in the electrode plate, thereby ensuring that the chemical monomer gas is fully ionized at the solid position in the electrode plate so as to form plasma. The formed plasma then moves to the position of the roll material through the second through hole. Since there are several second through holes in the electrode plate, the plasma can move to different positions of the roll material along different second through holes, so that the plasma can be evenly distributed, thereby ensuring the uniformity of the coating.

[0022] (3) By setting reversing rollers and ensuring that the height of adjacent reversing rollers overlaps at least partially in the vertical direction, the volume of the vacuum box can be effectively reduced, thereby saving vacuuming time, improving production efficiency, and saving production costs. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of the compact roll-to-roll plasma coating equipment of this utility model.

[0024] Figure 2 This is a schematic diagram of the overall structure of the compact roll-to-roll plasma coating equipment of this utility model (after removing the cover).

[0025] Figure 3 This is a cross-sectional structural schematic diagram of the compact roll-to-roll plasma coating equipment of this utility model.

[0026] Figure 4 This utility model Figure 3 A magnified structural diagram of point A in the middle.

[0027] Figure 5 This is a cross-sectional view of the compact roll-to-roll plasma coating equipment of this utility model from another angle.

[0028] Figure 6 This is another cross-sectional view of the compact roll-to-roll plasma coating equipment of this utility model.

[0029] Figure 7 This is a schematic diagram of the electrode plate and the first through hole projected onto the electrode plate in the vertical direction.

[0030] Explanation of reference numerals in the attached figures:

[0031] 10-Roll material; 1-Base frame; 2-Vacuum box; 21-First through hole; 22-Separator assembly; 221-Separator; 222-Knockout position; 223-Upper baffle; 224-Lower baffle; 23-Discharge chamber; 24-Coating chamber; 25-Receiving chamber; 26-Main body; 27-Box cover; 28-Hinge; 29-Snap fastener; 31-Vacuum pump assembly; 32-Evacuation pipe; 321-Evacuation hole; 33-Connecting pipe; 34-Chemical monomer precipitation mechanism; 41-Discharge roll ; 42-Receiving reel; 43-Clamping and conveying mechanism; 431-Upper roller; 432-Lower roller; 433-Upper gear; 434-Lower gear; 44-Tightening mechanism; 45-First drive motor; 46-Second drive motor; 47-Reversing roller; 48-Support frame; 51-Electrode plate; 511-Second through hole; 52-Power supply; 6-Chemical monomer vaporization unit; 61-Control valve; 62-Evaporator; 7-Exhaust mechanism; 71-Waste gas processor; 72-Fan. Detailed Implementation

[0032] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention.

[0033] like Figures 1 to 7 As shown, this utility model provides a compact roll-to-roll plasma coating equipment, including a base frame 1, a vacuum chamber 2, a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism, and several chemical monomer vaporization units 6. The vacuum chamber 2 is mounted on the base frame 1. The vacuum generating mechanism includes a vacuum pump assembly, which is located at the upper end inside the vacuum chamber 2. The winding and unwinding mechanism includes a feeding roll 41 and a taking roll 42, which are rotatably mounted at both ends inside the vacuum chamber 2. The two ends of the roll 10 are respectively wound around the feeding roll 41 and the taking roll 42. The vacuum chamber 2 has several first through holes 21 at its bottom, each of which is connected to a chemical monomer vaporization unit 6. The electrode mechanism includes an electrode plate 51 and a power supply 52 electrically connected to the electrode plate 51. The electrode plate 51 is disposed inside the vacuum chamber 2 and above the several first through holes 21. The roll material is located between the electrode plate 51 and the vacuum pumping assembly. The electrode plate 51 has several second through holes 511, and the projection 21′ of each first through hole 21 on the electrode plate 51 in the vertical direction does not coincide with or intersect with any of the second through holes 511. Specifically, the power supply 52 is a radio frequency power supply.

[0034] In this embodiment, the first through-hole 21 for introducing the chemical monomer gas, the electrode plate 51, the roll material 10, and the vacuum generating mechanism are arranged sequentially from bottom to top. This allows the chemical monomer gas to enter the vacuum chamber 2 through the first through-hole 21 at the bottom of the vacuum chamber 2. Under the action of the pumping component of the vacuum generating mechanism, the chemical monomer gas moves upward. During its upward movement, the chemical monomer gas first passes through the electrode plate 51 to ionize and form plasma, and then continues to move upward to the roll material 10 for reaction deposition to form a film. This ensures that the ionization process and the film deposition process are arranged sequentially in the movement path of the chemical monomer gas, thereby ensuring that the chemical monomer gas can be fully ionized and fully reacted to form a film. Furthermore, by setting the projection 21′ of each first through hole 21 on the electrode plate 51 in the vertical direction to not coincide with or intersect with any of the second through holes 511, when the chemical monomer gas enters the vacuum chamber 2 through the first through hole 21, the chemical monomer gas moves upward to a position in the electrode plate 51 where no second through hole 511 is provided, that is, to contact the solid position of the electrode plate 51. This ensures that the chemical monomer gas is fully ionized at the solid position of the electrode plate 51 to form plasma. The formed plasma then moves to the position of the roll 10 through the second through hole 511. Since there are several second through holes 511 in the electrode plate 51, the plasma can move to different positions of the roll 10 along different second through holes 511, thus ensuring that the plasma can be evenly distributed and guaranteeing the uniformity of the coating. Therefore, in this embodiment, the electrode plate 51 not only serves as an ionization electrode but also as a gas equalization plate, serving multiple purposes, simplifying the overall structure and saving costs.

[0035] More specifically, such as Figure 7As shown, each of the first through holes 21 has a plurality of second through holes 511 arranged around its projection 21′ on the electrode plate 51 in the vertical direction. Specifically, the plurality of second through holes 511 are evenly arranged around the projection 21′. In this embodiment, a plurality of second through holes 511 are arranged around the outer periphery of the projection 21′ of the first through hole 21 on the electrode plate 51 in the vertical direction, for example, eight second through holes 511 are arranged. When the chemical monomer gas enters the vacuum chamber 2 through the first through hole 21, the chemical monomer gas moves upward and contacts the position of the projection 21′ of the first through hole 21 on the electrode plate 51, that is, the physical position of the electrode plate 51, thereby ionizing and generating plasma. The generated plasma then continues to move upward through the plurality of second through holes 511 on the outer periphery of the physical position. This arrangement allows the chemical monomer gas flowing in from each first through hole 21 to flow out from the plurality of second through holes 511 on the outer periphery of the corresponding first through hole 21 and continue to move upward. That is, the plurality of second through holes 511 on the outer periphery plays a role in uniformly dispersing the chemical monomer gas flowing in from the corresponding first through hole 21, thereby allowing the plasma to be more uniformly distributed on the surface of the roll to be coated, thereby further improving the uniformity of the coating.

[0036] More specifically, such as Figure 3-4 As shown, the vacuum chamber 2 has two partition plate assemblies 22 inside, which divide the interior of the vacuum chamber 2 into a feeding chamber 23, a coating chamber 24, and a receiving chamber 25. The feeding chamber 23 and the receiving chamber 25 are located on opposite sides of the coating chamber 24. Further, each partition plate assembly 22 includes a partition plate 221 fixedly disposed with the vacuum chamber 2. The partition plate 221 has a perforated position 222 in its center for the roll material 10 to pass through. An upper baffle 223 and a lower baffle 224 are disposed vertically opposite each other on one side of the partition plate 221, and a gap for the roll material 10 to pass through is provided between the upper baffle 223 and the lower baffle 224. Specifically, the partition plate 221 is integrally disposed with the vacuum chamber 2, and a groove is formed in the center of the upper end of the partition plate 221 to create the perforated position 222.

[0037] In this embodiment, the interior of the vacuum chamber 2 is divided into a feeding chamber 23, a coating chamber 24, and a receiving chamber 25 by the partition plate assembly 22, thereby separating the roll coating process from the unwinding and rewinding processes, preventing the roll from being coated in a rolled state, and further ensuring the uniformity of the coating.

[0038] More specifically, such as Figure 2-3As shown, the unwinding reel 41 is rotatably disposed in the unwinding chamber 23, and the take-up reel 42 is rotatably disposed in the take-up chamber 25, with one end of the take-up reel 42 extending to the outside of the vacuum chamber 2 and being driven and connected to the first drive motor 45. In this embodiment, the first drive motor 45 drives the take-up reel 42 to rotate, thereby realizing the winding of the roll material and simultaneously driving the unwinding of the roll material.

[0039] More specifically, such as Figure 3 and 5 As shown, the unwinding and winding mechanism further includes a clamping and conveying mechanism 43 and a tensioning mechanism 44 disposed between the unwinding reel 41 and the winding reel 42. The clamping and conveying mechanism 43 is disposed in the unwinding chamber 23, and the tensioning mechanism 44 is disposed in the winding chamber 25. Both the clamping and conveying mechanism 43 and the tensioning mechanism 44 include an upper roller 431 and a lower roller 432. One end of the upper roller 431 is provided with an upper gear 433, and one end of the lower roller 432 is provided with a lower gear 434. The upper gear 433 and the lower gear 434 mesh with each other. One end of the upper roller 431 or the lower roller 432 extends to the outside of the vacuum box 2 and is driven and connected to the second drive motor 46. In this embodiment, a clamping and conveying mechanism 43 and a tensioning mechanism 44 are provided between the unloading reel 41 and the take-up reel 42 to ensure stable conveying of the roll material and to ensure that the roll material in the coating cavity 24 is kept taut, thereby preventing the roll material in the coating cavity 24 from affecting the uniformity of the coating due to unstable conveying and / or wrinkles.

[0040] More specifically, the winding and unwinding mechanism further includes a plurality of reversing rollers 47 rotatably disposed in the coating cavity 24, wherein the heights of adjacent reversing rollers 47 in the vertical direction at least partially overlap. Specifically, as... Figure 6 As shown, four reversing rollers 47 are provided. In this embodiment, by setting reversing rollers, the running time of the roll material in the coating chamber 24 can be extended without increasing the length of the vacuum box 2, thereby extending the time for coating deposition on the roll material surface. This not only effectively reduces the length of the vacuum box 2 but also further ensures the uniformity of the coating. Furthermore, the heights of adjacent reversing rollers 47 in the vertical direction at least partially overlap, effectively reducing the height of the vacuum box 2. Therefore, by setting reversing rollers 47, the overall volume of the vacuum box can be effectively reduced, thereby saving vacuuming time, improving production efficiency, and saving production costs.

[0041] More specifically, each of the chemical monomer vaporization units 6 includes a control valve 61 and an evaporator 62. The inlet of the control valve 61 is connected to an external chemical monomer supply mechanism, the outlet of the control valve 61 is connected to the inlet of the evaporator 62, and the outlet of the evaporator 62 is connected to the first through hole 21. In this embodiment, the amount of chemical monomer entering the evaporator is controlled by the control valve 61. The chemical monomer evaporates in the evaporator 62 to form chemical monomer vapor, thereby facilitating its entry into the interior of the vacuum chamber 2.

[0042] More specifically, the vacuum generating mechanism further includes a vacuum pump assembly 31, and the air extraction assembly includes a plurality of air extraction pipes 32 disposed at the upper end of the coating chamber 24. Each air extraction pipe 32 has a plurality of air extraction holes 321. One end of each of the air extraction pipes 32 is connected to the vacuum pump assembly 31 via a connecting pipe 33. A chemical monomer precipitation mechanism 34 is also connected between the connecting pipe 33 and the vacuum pump assembly 31. Specifically, the air extraction holes 321 are located on the side of the air extraction pipe 32 facing the roll material. In this embodiment, by connecting the connecting pipe 33 and the vacuum pump assembly 31 with the chemical monomer precipitation mechanism 34, the chemical monomer gas extracted by the air extraction pipe can be precipitated and recovered in the chemical monomer precipitation mechanism 34.

[0043] More specifically, it also includes an exhaust mechanism 7, which comprises a waste gas processor 71 and a fan 72. The inlet end of the waste gas processor 71 is connected to the outlet end of the vacuum pump assembly 31, and the outlet end of the waste gas processor 71 is connected to the inlet end of the fan 72. Specifically, the fan 72 is a mobile fan. In this embodiment, by providing the waste gas processor 71, the gas extracted from the vacuum chamber 2 can be treated and then discharged into the atmosphere.

[0044] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A compact roll-to-roll plasma coating apparatus, comprising a base frame (1), a vacuum chamber (2), a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism, and several chemical monomer vaporization units (6), wherein the vacuum chamber (2) is mounted on the base frame (1); characterized in that: The vacuum generating mechanism includes a pumping assembly, which is located at the upper end inside the vacuum chamber (2); the unwinding and winding mechanism includes a feeding reel (41) and a taking-up reel (42), which are rotatably located at both ends inside the vacuum chamber (2), and the two ends of the roll material (10) are respectively wound around the feeding reel (41) and the taking-up reel (42); the bottom of the vacuum chamber (2) is provided with a plurality of first through holes (21), and each first through hole (21) is connected to a chemical monomer vaporization unit. (6) The electrode mechanism includes an electrode plate (51) and a power supply (52) electrically connected to the electrode plate (51). The electrode plate (51) is disposed inside the vacuum chamber (2) and above the plurality of first through holes (21). The roll material (10) is located between the electrode plate (51) and the pumping assembly. The electrode plate (51) is provided with a plurality of second through holes (511). The projection (21′) of each first through hole (21) on the electrode plate (51) in the vertical direction does not coincide with or intersect with any of the second through holes (511).

2. The compact roll-to-roll plasma coating equipment according to claim 1, characterized in that: Each of the first through holes (21) has a plurality of second through holes (511) arranged around the outer periphery of its projection (21′) on the electrode plate (51) in the vertical direction.

3. The compact roll-to-roll plasma coating equipment according to claim 1, characterized in that: The vacuum chamber (2) is provided with two partition plate assemblies (22), which divide the interior of the vacuum chamber (2) into a feeding chamber (23), a coating chamber (24) and a receiving chamber (25). The feeding chamber (23) and the receiving chamber (25) are located on both sides of the coating chamber (24).

4. The compact roll-to-roll plasma coating equipment according to claim 3, characterized in that: The partition assembly (22) includes a partition (221) fixedly disposed with the vacuum chamber (2). The partition (221) has a hollowed-out position (222) in the middle for the roll material (10) to pass through. An upper baffle (223) and a lower baffle (224) are disposed opposite each other on one side of the partition (221). A gap for the roll material (10) to pass through is provided between the upper baffle (223) and the lower baffle (224).

5. The compact roll-to-roll plasma coating equipment according to claim 3, characterized in that: The unloading reel (41) is rotatably disposed in the unloading chamber (23), and the take-up reel (42) is rotatably disposed in the take-up chamber (25). One end of the take-up reel (42) extends to the outside of the vacuum box (2) and is driven and connected to the first drive motor (45).

6. The compact roll-to-roll plasma coating equipment according to claim 5, characterized in that: The unwinding and winding mechanism further includes a clamping and conveying mechanism (43) and a tensioning mechanism (44) disposed between the unwinding reel (41) and the winding reel (42). The clamping and conveying mechanism (43) is disposed in the unwinding chamber (23), and the tensioning mechanism (44) is disposed in the winding chamber (25). Both the clamping and conveying mechanism (43) and the tensioning mechanism (44) include an upper roller (431) and a lower roller (432). One end of the upper roller (431) is provided with an upper gear (433), and one end of the lower roller (432) is provided with a lower gear (434). The upper gear (433) and the lower gear (434) mesh with each other. One end of the upper roller (431) or the lower roller (432) extends to the outside of the vacuum box (2) and is driven and connected to the second drive motor (46).

7. The compact roll-to-roll plasma coating equipment according to claim 5, characterized in that: The winding and unwinding mechanism also includes a plurality of reversing rollers (47) rotatably disposed in the coating cavity (24), wherein the heights of adjacent reversing rollers (47) in the vertical direction at least partially overlap.

8. The compact roll-to-roll plasma coating equipment according to claim 1, characterized in that: Each of the chemical monomer vaporization units (6) includes a control valve (61) and an evaporator (62). The inlet of the control valve (61) is connected to an external chemical monomer supply mechanism, the outlet of the control valve (61) is connected to the inlet of the evaporator (62), and the outlet of the evaporator (62) is connected to the first through hole (21).

9. The compact roll-to-roll plasma coating equipment according to claim 3, characterized in that: The vacuum generating mechanism also includes a vacuum pump group (31). The air extraction component includes a plurality of air extraction pipes (32) disposed at the upper end of the coating cavity (24). Each air extraction pipe (32) is provided with a plurality of air extraction holes (321). One end of each of the plurality of air extraction pipes (32) is connected to the vacuum pump group (31) through a connecting pipe (33). A chemical monomer precipitation mechanism (34) is also provided between the connecting pipe (33) and the vacuum pump group (31).

10. The compact roll-to-roll plasma coating equipment according to claim 9, characterized in that: It also includes an exhaust mechanism (7), which includes an exhaust gas processor (71) and a fan (72). The inlet end of the exhaust gas processor (71) is connected to the outlet end of the vacuum pump group (31), and the outlet end of the exhaust gas processor (71) is connected to the inlet end of the fan (72).

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