Pneumatic air valve

Abstract

The utility model discloses a pneumatic air valve, relates to the technical field of air pipe turn-off devices, and solves the problems that an automatic air valve in an exhaust pipe of LDS (Laser Direct Structuring) equipment in the prior art is complicated in structure, high in cost, easy to block and poor in sealing performance. According to the method, a shell, a valve plate rotationally installed in the shell, a sealing assembly used for improving the sealing performance and a driving mechanism used for driving the valve plate to rotate stably are included, the pneumatic air valve is based on a crank sliding block mechanism, driving of opening and closing of the valve plate is achieved through a simple structure of an air cylinder and a connecting rod, the structure is simple, the production cost is low, and the service life is long. When the valve plate is in a closed or opened state, the included angle between the second connecting rod and the third connecting rod and the included angle between the third connecting rod and the piston rod of the air cylinder are not 0 degree or 180 degrees, so that the jamming phenomenon is avoided, and the valve plate can be tightly attached to the first sealing plate and the second sealing plate on the two sides when closed; and the sealing performance after the valve plate is closed is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of air pipe closing device, in particular to a pneumatic air valve. BACKGROUND

[0002] In the semiconductor industry, the LDS (Liquid Delivery System) equipment is the core system for accurately delivering liquid precursors or chemicals in semiconductor manufacturing. An air valve is usually installed on the exhaust pipe of the LDS equipment to close the exhaust pipe in time to prevent carbon dioxide used for fire extinguishing from being discharged from the exhaust pipe when the LDS equipment catches fire, so as to improve the carbon dioxide fire extinguishing effect. In the prior art, a crank rocker mechanism is usually used in the exhaust pipe of the LDS equipment to realize the opening and closing of the valve by using a gas cylinder and a connecting rod. However, the gas cylinder and the connecting rod are collinear when the valve is opened or closed, at this time, the transmission angle of the device is zero, and the device is prone to be stuck and unable to act. In addition, the sealing between the valve plate and the shell of the existing air valve is poor. SUMMARY

[0003] The present application aims to overcome the problems of complex structure, high cost, easy to be stuck and poor sealing of the automatic air valve in the exhaust pipe of the LDS equipment in the prior art, and provides a pneumatic air valve.

[0004] In a first aspect, a pneumatic air valve is provided, comprising a shell, the shell being a hollow cylindrical structure with both ends open; a valve plate, the valve plate being rotatably installed inside the shell; a sealing assembly, the sealing assembly comprising a first sealing plate and a second sealing plate, the first sealing plate being fixed to the inner wall of one side of the shell, and the second sealing plate being fixed to the inner wall of the other side of the shell, wherein the valve plate is located between the first sealing plate and the second sealing plate; a driving mechanism, the driving mechanism comprising a bracket, one side of the bracket being reserved with a guide groove and being fixed with a mounting plate, one side of the mounting plate being provided with a guide part matched with the guide groove, the guide groove being provided with a sliding rod freely sliding in the guide groove, one end of the sliding rod being fixedly connected with a first rotating shaft of the valve plate through a first connecting rod, the other end of the sliding rod being connected with a second connecting rod, one end of the second connecting rod being connected with the mounting plate through a shaft, the other end of the second connecting rod being connected with a third connecting rod through a shaft, one end of the third connecting rod away from the second connecting rod being connected with a piston rod of a gas cylinder through a shaft, the cylinder body of the gas cylinder being fixedly connected with the mounting plate, wherein the second rotating shaft of the second connecting rod is coaxial with the first rotating shaft of the valve plate, the included angle between the second connecting rod and the third connecting rod and the included angle between the third connecting rod and the piston rod of the gas cylinder are both greater than zero and not equal to 180° when the valve plate is in a closed or open state.

[0005] In some possible implementation manners, the first sealing plate and the second sealing plate are arranged in a circular arc structure. Through the design of the circular arc structure, the first sealing plate and the second sealing plate can form two semicircular arcs along the direction of the inner side wall of the shell. After the valve plate is closed, one of the semicircular arcs is located above one side of the valve plate, and the other semicircular arc is located below the other side of the valve plate. The valve plate can be sealed from both sides, and a large space in the shell is not occupied, so as to ensure the ventilation volume when the air valve is opened.

[0006] In some possible implementation manners, when the valve plate is in a closed state, the first sealing plate is attached to the upper surface of one side of the valve plate, and the second sealing plate is attached to the lower surface of the other side of the valve plate. After the valve plate is closed, the first sealing plate and the second sealing plate are attached to the valve plate, so as to further improve the sealing performance between the valve plate and the first sealing plate and the second sealing plate.

[0007] In some possible implementation manners, the guide groove is arranged in a quarter circular arc shape, and the guide portion includes a quarter circular arc portion and a straight line portion that is smoothly connected to the quarter circular arc portion. The quarter circular arc portion can coincide with the guide groove to jointly limit and guide the slide rod.

[0008] In some possible implementation manners, the third connecting rod is arranged in an arc structure.

[0009] In some possible implementation manners, the third connecting rod is connected to the piston rod of the air cylinder through a connecting piece. The third connecting rod is connected to the connecting piece, and the connecting piece is fixedly connected to the piston rod of the air cylinder.

[0010] In some possible implementation manners, a sliding block is fixed to one side of the connecting piece, and the sliding block is slidably connected to the straight line portion of the guide portion.

[0011] In some possible implementation manners, the side wall of the shell is embedded with a first detector air pipe joint and a second detector air pipe joint. After the valve plate is closed, the valve plate is located between the first detector air pipe joint and the second detector air pipe joint.

[0012] The pneumatic air valve has the following beneficial effects: the pneumatic air valve is based on a crank slider mechanism, and the driving of the valve plate is realized through the simple structure of the cylinder and the connecting rod, so that the structure is simple, the production cost is low, and when the pneumatic air valve is in the closed or open state (the open state here refers to that the valve plate is fully opened), the included angle between the second connecting rod and the third connecting rod and the included angle between the third connecting rod and the piston rod of the cylinder are not 0° or 180°, so that the jamming phenomenon does not occur, the continuous and smooth movement of the valve plate can be ensured, and the valve plate can be tightly attached to the first sealing plate and the second sealing plate on both sides when being closed, so that the sealing performance after the valve plate is closed is ensured, and the gas in the LDS device cannot leak from the air valve after the air valve is closed. BRIEF DESCRIPTION OF DRAWINGS

[0013] The accompanying drawings, which form a part of the present application, are used to provide further understanding of the present application, and the illustrative embodiments of the present application and their descriptions are used to explain the present application, and do not constitute improper limitations on the present application.

[0014] In order to more clearly explain the technical solutions in the embodiments of the present application, the accompanying drawings needed to be used in the embodiment description will be briefly introduced. Obviously, the accompanying drawings in the following description are only some embodiments of the present application, and other accompanying drawings can be obtained by those skilled in the art without any creative effort on the basis of these accompanying drawings.

[0015] Figure 1 is a structural schematic view of the valve plate opening of the pneumatic air valve of the embodiment of the present application;

[0016] Figure 2 is a structural schematic view of the valve plate closing of the pneumatic air valve of the embodiment of the present application;

[0017] Figure 3 is a structural schematic view of the pneumatic air valve of the embodiment of the present application;

[0018] Figure 4 is a top view of the pneumatic air valve of the embodiment of the present application;

[0019] Figure 5 is a sectional view of the pneumatic air valve of the embodiment of the present application;

[0020] Figure 6 is a structural schematic view of the valve plate and the driving mechanism in the pneumatic air valve of the embodiment of the present application;

[0021] Figure 7 is a structural schematic view of the driving mechanism of the pneumatic air valve of the embodiment of the present application;

[0022] Figure 8 is a structural schematic view of the driving mechanism when the valve plate is in the closed state in the pneumatic air valve of the embodiment of the present application Figure 1;

[0023] Figure 9 This is a schematic diagram of the drive mechanism in the pneumatic valve of this application when the valve plate is in the closed state. Figure 2 ;

[0024] Figure 10 This is a structural schematic diagram of the connector, the second link, and the third link in the pneumatic valve of this application embodiment;

[0025] Figure 11 This is a schematic diagram of the drive mechanism in the pneumatic valve of this application when the valve plate is in the open state.

[0026] Figure label:

[0027] 100. Housing; 200. Valve plate; 300. Sealing assembly; 301. First sealing plate; 302. Second sealing plate; 400. Drive mechanism; 401. Bracket; 402. Guide groove; 403. Mounting plate; 404. Guide section; 4041. Quarter-circle section; 4042. Straight section; 405. Slide rod; 406. First connecting rod; 407. First rotating shaft; 408. Second connecting rod; 409. Third connecting rod; 410. Cylinder; 411. Piston rod; 412. Connector; 413. First detector air pipe connector; 414. Second detector air pipe connector; 415. Second rotating shaft; 416. Slider. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0029] Example

[0030] like Figures 1-3 As shown in the embodiment of this application, a pneumatic air valve includes a housing 100, which is a hollow cylindrical structure with openings at both ends. To facilitate the installation and fixing of the housing 100, connecting flanges are provided at both ends of the housing 100. A freely rotatable valve plate 200 is installed inside the housing 100. A first rotating shaft 407 is fixed in the middle of the valve plate 200. The two ends of the first rotating shaft 407 are rotatably connected to the side wall of the housing 100 through bearings and other connecting parts 412.

[0031] like Figure 1As shown, in order to increase the sealing performance of the valve plate 200 after being closed, a sealing assembly 300 is further arranged, which comprises a first sealing plate 301 and a second sealing plate 302. Specifically, the first sealing plate 301 and the second sealing plate 302 are both arranged in a circular arc structure. Through the design of the circular arc structure, the first sealing plate 301 and the second sealing plate 302 can form two semicircular arcs along the inner side wall of the shell 100. After the valve plate 200 is closed, one of the semicircular arcs is located above one side of the valve plate 200, and the other semicircular arc is located below the other side of the valve plate 200. Thus, the valve plate 200 can be sealed from both sides, without occupying a large space in the shell 100, so as to ensure the ventilation volume when the air valve is opened. The first sealing plate 301 is fixed to the inner wall of one side of the shell 100, and the second sealing plate 302 is fixed to the inner wall of the other side of the shell 100. The valve plate 200 is located between the first sealing plate 301 and the second sealing plate 302. When the valve plate 200 is in the closed state, the first sealing plate 301 is attached to the upper surface of one side of the valve plate 200, and the second sealing plate 302 is attached to the lower surface of the other side of the valve plate 200. Specifically, when the shell 100 is placed vertically, i.e., one of the two ports of the shell 100 is vertically upward and the other is vertically downward, after the valve plate 200 is completely closed, if the first sealing plate 301 is located above the horizontal plane of the valve plate 200, the second sealing plate 302 is located below the horizontal plane of the valve plate 200. The first sealing plate 301 and the second sealing plate 302 seal the valve plate 200 from both sides, thereby increasing the sealing performance of the valve plate 200 after being closed. Meanwhile, the first sealing plate 301 and the second sealing plate 302 can also limit the valve plate 200 during the closing process, so that one side of the valve plate 200 is tightly attached to the first sealing plate 301 and the other side is tightly attached to the second sealing plate 302 after being closed, thereby avoiding the air leakage problem caused by the dislocation of the valve plate 200.

[0032] As Figures 4-11As shown, in order to drive the valve plate 200 to rotate to realize the closing and opening of the valve plate 200, a driving mechanism 400 is further included, the driving mechanism 400 includes a bracket 401, wherein the bracket 401 is provided in a "concave" shape, one side of the bracket 401 is reserved with a guide groove 402 and is fixed with a mounting plate 403, wherein the guide groove 402 is provided in a quarter circular arc structure, the inner wall of the guide groove 402 is polished to improve the smoothness of the guide groove 402, reduce the resistance and jerk feeling of the sliding rod 405 sliding in the guide groove 402, the mounting plate 403 includes a parallel part and a vertical part, the parallel part is parallel to and attached to the side of the bracket 401 away from the shell 100, and the vertical part is perpendicular to the parallel part and is provided at one end of the parallel part, one side of the mounting plate 403 is provided with a guide part 404 matched with the guide groove 402, wherein the guide part 404 includes a quarter circular arc part 4041 and a straight line part 4042 smoothly connected with the quarter circular arc part 4041, wherein the quarter circular arc part 4041 can coincide with the guide groove 402 to jointly play a limiting and guiding role on the sliding rod 405, the guide groove 402 is provided with a sliding rod 405 which can freely slide along the guide groove 402, one end of the sliding rod 405 is fixedly connected with a first rotating shaft 407 of the valve plate 200 through a first connecting rod 406, the other end of the sliding rod 405 is connected with a second connecting rod 408, one end of the second connecting rod 408 is connected with the mounting plate 403 through a second rotating shaft 415, so that the second connecting rod 408 can rotate along the axis of the second rotating shaft 415, the other end of the second connecting rod 408 is connected with a third connecting rod 409, wherein the third connecting rod 409 is provided in an arc structure, the arc design can disperse the concentrated stress, reduce the stress peak at the connection, thereby reducing the risk of cracks of the third connecting rod 409, prolonging the service life of the third connecting rod 409, the arc-shaped third connecting rod 409 can change the moment of inertia, so that the hinging of both ends of the third connecting rod 409 will not appear dead point at the same time, thereby making the third connecting rod 409 not easy to appear jamming phenomenon in the opening and closing process of the valve plate 200, improving the stability in the opening and closing process of the valve plate 200, the end of the third connecting rod 409 away from the second connecting rod 408 is connected with a piston rod 411 of a cylinder 410, the cylinder body of the cylinder 410 is fixedly connected with the mounting plate 403, wherein the second rotating shaft 415 of the second connecting rod 408 is coaxial with the first rotating shaft 407 of the valve plate 200, when the valve plate 200 is in the closing or opening state, the included angle between the second connecting rod 408 and the third connecting rod 409 and the included angle between the third connecting rod 409 and the piston rod 411 of the cylinder 410 are both greater than zero and not equal to 180°.

[0033] As Figures 8-10As shown, in a further embodiment, a connector 412 is also included. The connector 412 is installed on the end of the piston rod 411 of the cylinder 410 by a nut. The cylinder 410 is also detachably fixed to the vertical part of the mounting plate 403 by a nut structure, so that the cylinder 410 can be removed from the mounting plate 403 for easy maintenance and replacement. For example, the connector 412 is configured as an "L" shape. The third connecting rod 409 is axially connected to the piston rod 411 of the cylinder 410 through the connector 412. The third connecting rod is axially connected to one side of the connector 412. The end of the piston rod 411 of the cylinder 410 is machined with an external thread. The other side of the connector 412 is fixedly connected to the piston rod 411 of the cylinder 410 by a nut structure.

[0034] like Figures 9-10 As shown, in order to make the movement of the connector 412 more stable during the opening and closing of the valve plate 200, a slider 416 is fixed on one side of the connector 412, and the slider 416 is slidably disposed in the straight section 4042 of the guide section 404. The slider 416 can slide smoothly along the straight section 4042, thereby using the limiting effect of the straight section 4042 on the slider 416 to maintain the stability of the connector 412 during the movement.

[0035] In addition, when the pneumatic air valve in this embodiment is installed on the housing 100 of the LDS device, since the LDS device contains chemical agents and the pneumatic air valve is normally always open, when a harmful gas leak occurs inside the LDS device, the harmful gas can be discharged from the pneumatic air valve into the air duct for treatment before exiting. To facilitate the detection of whether a harmful gas leak has occurred inside the LDS device, a first detector air pipe connector 413 and a second detector air pipe connector 414 are embedded in the side wall of the housing 100. When the valve plate 200 is closed, it is located between the first detector air pipe connector 413 and the second detector air pipe connector 414. Between the two detector air pipe joints 414, if the pneumatic air valve is installed and the first detector air pipe joint 413 is close to the LDS equipment, the detector will take a sample from the first detector air pipe joint 413 and detect whether it contains harmful gas. The detected gas will then be discharged into the housing 100 through the second detector air pipe joint 414. If the pneumatic air valve is installed and the second detector air pipe joint 414 is close to the LDS equipment, the detector will take a sample from the second detector air pipe joint 414 and detect whether it contains harmful gas. The detected gas will then be discharged into the housing 100 through the first detector air pipe joint 413.

[0036] Since the LDS device is filled with liquid, it needs to be extinguished by carbon dioxide. The pneumatic air valve of the embodiment is used for the LDS device. Once the liquid in the LDS device catches fire, high-temperature smoke will be generated. In order to prevent the high-temperature smoke from causing great damage to the first sealing plate 301 and the second sealing plate 302, the first sealing plate 301 and the second sealing plate 302 are made of high-temperature-resistant materials, so that the first sealing plate 301 and the second sealing plate 302 can maintain a certain sealing property and service life even in a high-temperature environment.

[0037] When the valve plate 200 is switched from the open state to the closed state, as shown in Figure 1 and Figure 11 , the piston rod 411 of the cylinder 410 is retracted into the cylinder body of the cylinder 410 when the valve plate 200 is in the open state. By controlling the cylinder 410 to extend the piston rod 411 from the cylinder body, the sliding block 416 slides along the linear portion 4042 to the direction of the quarter circular arc portion 4041, and at the same time, the second connecting rod 408 is pushed by the third connecting rod 409 to rotate counterclockwise at the shaft joint of the second connecting rod 408 and the mounting plate 403, so that the sliding rod 405 slides along the guide portion 404 and the quarter circular arc portion 4041, and then the valve plate 200 is driven by the first connecting rod 406 to rotate counterclockwise by 90°, so that the valve plate 200 is switched from the vertical state to the horizontal state, realizing the closing of the valve plate 200.

[0038] When the valve plate 200 is switched from the closed state to the horizontal state, as shown in Figure 2 and Figure 8 , the piston rod 411 of the cylinder 410 is extended from the cylinder body of the cylinder 410 when the valve plate 200 is in the closed state. By controlling the cylinder 410 to retract the piston rod 411 into the cylinder body, the sliding block 416 slides along the linear portion 4042 to the direction away from the quarter circular arc portion 4041, and at the same time, the second connecting rod 408 is pushed by the third connecting rod 409 to rotate clockwise at the shaft joint of the second connecting rod 408 and the mounting plate 403, so that the sliding rod 405 slides along the guide portion 404 and the quarter circular arc portion 4041, and then the valve plate 200 is driven by the first connecting rod 406 to rotate clockwise by 90°, so that the valve plate 200 is switched from the horizontal state to the vertical state, realizing the closing of the valve plate 200.

[0039] In the embodiment, the pneumatic air valve is based on a crank slider mechanism, and the driving of the valve plate 200 is realized by the simple structure of the cylinder 410 and the connecting rod. The pneumatic air valve has simple structure and low production cost. When the pneumatic air valve is in the closed or open state, the angle between the second connecting rod 408 and the third connecting rod 409 and the angle between the third connecting rod 409 and the piston rod 411 of the cylinder 410 are not 0° or 180°, so that the air valve does not appear to be stuck, and the continuous and smooth movement of the valve plate 200 can be ensured. When the valve plate 200 is closed, the valve plate 200 can be tightly attached to the first sealing plate 301 and the second sealing plate 302 on both sides, so as to ensure the sealing performance of the valve plate 200 after being closed, so that the gas in the LDS device does not leak from the air valve after the air valve is closed, and the carbon dioxide used for fire extinguishing is effectively prevented from being discharged from the pneumatic air valve, so as to improve the effect and efficiency of carbon dioxide fire extinguishing.

[0040] The above is only a preferred specific embodiment of the present application; however, the protection scope of the present application is not limited thereto. Any skilled person in the art can make equivalent replacements or changes to the technical range disclosed in the present application according to the technical solution and the improvement concept of the present application, which should be covered in the protection scope of the present application.

Claims

1. A pneumatic air valve, characterized in that, include: The shell is a hollow cylindrical structure with openings at both ends; A valve plate, which is rotatably mounted inside the housing; A sealing assembly, comprising a first sealing plate and a second sealing plate, wherein the first sealing plate is fixed to one inner wall of the housing, the second sealing plate is fixed to the other inner wall of the housing, and the valve plate is located between the first sealing plate and the second sealing plate. A drive mechanism includes a bracket with a guide groove on one side and a mounting plate fixed thereon. A guide portion adapted to the guide groove is provided on one side of the mounting plate. A slide rod that can slide freely along the guide groove is provided within the guide groove. One end of the slide rod is fixedly connected to the first rotation axis of the valve plate via a first connecting rod. The other end of the slide rod is connected to a second connecting rod. One end of the second connecting rod is axially connected to the mounting plate, and the other end of the second connecting rod is axially connected to a third connecting rod. The end of the third connecting rod away from the second connecting rod is axially connected to the piston rod of a cylinder. The cylinder body is fixedly connected to the mounting plate. The second rotation axis of the second connecting rod is coaxial with the first rotation axis of the valve plate.

2. The pneumatic air valve according to claim 1, characterized in that, Both the first sealing plate and the second sealing plate are configured as arc-shaped structures.

3. The pneumatic air valve according to claim 1 or 2, characterized in that, When the valve plate is in the closed state, the first sealing plate is in contact with the upper surface of one side of the valve plate, and the second sealing plate is in contact with the lower surface of the other side of the valve plate.

4. The pneumatic air valve according to claim 1, characterized in that, The guide groove is configured as a quarter-circle arc, and the guide portion includes a quarter-circle arc portion and a straight portion that smoothly connects with the quarter-circle arc portion.

5. The pneumatic air valve according to claim 4, characterized in that, The third link is configured as an arc-shaped structure.

6. The pneumatic air valve according to claim 5, characterized in that, The third connecting rod is axially connected to the piston rod of the cylinder via a connector, wherein the third connecting rod is axially connected to the connector, and the connector is fixedly connected to the piston rod of the cylinder.

7. The pneumatic air valve according to claim 6, characterized in that, A slider is fixed on one side of the connector, and the slider is slidably connected to the straight part of the guide.

8. The pneumatic air valve according to claim 1, characterized in that, The housing sidewall is fitted with a first detector air pipe connector and a second detector air pipe connector, wherein the valve plate is located between the first detector air pipe connector and the second detector air pipe connector after it is closed.

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