Special joint for high-purity chemical agent stock solution barrel

Abstract

The utility model provides a special joint for a high-purity chemical agent stock solution barrel, which comprises a joint body, a liquid passing pipeline for liquid to flow is arranged on the axis of the joint body, one end of the joint body is a stock solution barrel end joint, the other end of the joint body is an equipment end joint, and a movable external thread joint is sleeved on the stock solution barrel end joint. The movable external thread connector can move back and forth along the axis of the connector body, and a non-return mechanism is arranged in a liquid passing pipeline of the connector body. Installation and detachment are convenient, and the liquid backflow phenomenon in the pipeline can be effectively avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of connecting piece, concretely relates to a special joint for high-purity chemical reagent stock solution barrel. BACKGROUND

[0002] In the semiconductor industry, a large amount of high-purity chemical reagent is used in the production process, due to the particularity of semiconductor processing, the cleanliness of the processing place is extremely high, therefore, the chemical reagent needs to be guided from the stock solution barrel to the chemical cabinet of the liquid supply system, and then supplied to the processing equipment through the pipeline.

[0003] The stock solution barrel joint is a non-standard part, and the size of the joint is inconsistent with that of the chemical cabinet, so the stock solution barrel and the chemical cabinet need to be connected through a prefabricated pipeline on site.

[0004] Manual loss, personnel need to be arranged to prefabricate the pipeline according to the actual size, which consumes time and labor.

[0005] Chemical liquid backflow, the prefabricated pipeline cannot inhibit the chemical liquid backflow phenomenon, which is easy to harm personnel. SUMMARY

[0006] In order to overcome the shortcomings of the prior art, the utility model provides a special joint for high-purity chemical reagent stock solution barrel, which is convenient to install and disassemble, and can effectively prevent liquid backflow in the pipeline.

[0007] To achieve the above purpose, the special joint for high-purity chemical reagent stock solution barrel of the utility model, including the joint body, the through liquid pipeline for liquid circulation is set on the axis of the joint body, one end of the joint body is a stock solution barrel end joint, the other end of the joint body is a device end joint, a movable external thread joint is sleeved on the stock solution barrel end joint, the movable external thread joint can move forward and backward along the axis of the joint body, and a check mechanism is arranged in the through liquid pipeline of the joint body.

[0008] Further, the check mechanism includes a fixed flow limiting ring fixedly arranged in the through liquid pipeline of the joint body, the fixed flow limiting ring is a ring structure with a central hole, the outer wall of the fixed flow limiting ring is in close contact with the inner wall of the joint body cavity, and the fixed flow limiting ring is arranged at one end of the through liquid pipeline of the joint body close to the stock solution barrel end joint.

[0009] Further, the check mechanism further includes a flow limiting plug arranged in the through liquid pipeline of the joint body, the flow limiting plug is movable relative to the fixed flow limiting ring, the flow limiting plug includes a cylindrical middle section, the middle section passes through the hole of the fixed flow limiting ring, one end of the middle section close to the stock solution barrel end joint is provided with an inlet end, and the other end of the middle section close to the device end joint is provided with a closed end.

[0010] Further, the outer diameter of the intermediate section is smaller than the inner diameter of the fixed flow limiting ring, the outer diameter of the inlet end is larger than the inner diameter of the fixed flow limiting ring, and the outer end of the inlet end is conical.

[0011] Further, a plurality of through holes extending in the direction parallel to the axis of the joint body are formed on the inlet end.

[0012] Further, the outer end of the closed end is trumpet-shaped and enlarged, and the outer diameter of the outer end of the closed end is larger than the inner diameter of the fixed flow limiting ring.

[0013] Further, the side of the fixed flow limiting ring facing the closed end is provided with an inclined chamfer, and the inner diameter of the outer end of the chamfer of the fixed flow limiting ring is smaller than the inner diameter of the outer end of the closed end.

[0014] Further, the end of the raw liquid barrel end joint is provided with a protruding limiting ring, the limiting ring is annular and surrounds the outer periphery of the raw liquid barrel end, the end of the movable external thread joint close to the limiting ring is provided with a limiting groove, and the outer periphery of the end of the equipment end joint close to the joint body is provided with an equipment external thread joint.

[0015] Further, the side of the limiting ring facing the raw liquid barrel end joint is provided with a circular gasket.

[0016] The high-purity chemical agent raw liquid barrel special joint has the following advantages:

[0017] 1. The movable external thread joint provides a suitable retreat distance and is convenient to install and disassemble.

[0018] 2. When the chemical cabinet extracts raw liquid, the liquid passes through the through hole in the flow limiting plug, and when the extraction action stops, the top cover of the closed end falls down under the action of gravity, blocks the liquid pipeline, and achieves the effect of preventing backflow of liquid, thereby preventing safety hazards caused by backflow of chemical liquid. BRIEF DESCRIPTION OF DRAWINGS

[0019] The utility model will be further described and explained in combination with the drawings.

[0020] Figure 1 It is a structure schematic view of the high-purity chemical agent raw liquid barrel special joint of the preferred embodiment of the utility model.

[0021] Figure 2 It is a sectional view of the high-purity chemical agent raw liquid barrel special joint.

[0022] Figure 3 It is a structure schematic view for embodying the cooperation relationship between the fixed flow limiting ring and the flow limiting plug.

[0023] Reference signs: 1, joint body; 11, original liquid barrel end joint; 12, equipment end joint; 13, movable external thread joint; 14, limiting ring; 15, limiting groove; 16, equipment external thread joint; 17, round gasket; 21, fixed flow limiting ring; 211, chamfer; 22, flow limiting bolt; 231, middle section; 232, inlet end; 233, closed end; 234, through hole. DETAILED DESCRIPTION

[0024] The technical scheme of the utility model will be described more clearly and completely in combination with the drawings and by description of the preferred embodiment of the utility model.

[0025] As shown in Figure 1 and Figure 2 , the first preferred embodiment of the utility model high-purity chemical agent original liquid barrel special joint, including joint body 1, the axis of joint body 1 is provided with the liquid passageway for liquid circulation, one end of joint body 1 is original liquid barrel end joint 11, original liquid barrel end joint 11 is provided with movable external thread joint 13, movable external thread joint 13 can move back and forth along the axis of joint body 1, movable external thread joint 13 is used for connecting with chemical agent original liquid barrel. The end of original liquid barrel end joint 11 is provided with protruding limiting ring 14, limiting ring 14 is annular and around the original liquid barrel end, one end of movable external thread joint 13 close to limiting ring 14 is provided with limiting groove 15, the outer periphery of one end of joint body 1 close to equipment end joint 12 is provided with equipment external thread joint 16. The side of limiting ring 14 towards original liquid barrel end joint 11 is provided with round gasket 17.

[0026] As shown in Figure 1 and Figure 2 , the other end of joint body 1 is equipment end joint 12, which is used for connecting with the chemical cabinet receiving chemical liquid. In use, joint body 1 is placed vertically, the equipment end structure is connected with the chemical cabinet, and original liquid barrel end joint 11 is connected with the chemical agent original liquid barrel.

[0027] As shown in Figure 2 and Figure 3 , the liquid passageway of joint body 1 is provided with a check mechanism, the check mechanism includes fixed flow limiting ring 21 and flow limiting bolt 22 fixedly arranged in the liquid passageway of joint body 1, fixed flow limiting ring 21 is annular structure with a central aperture, the outer wall of fixed flow limiting ring 21 closely abuts the inner wall of the lumen of joint body 1, and fixed flow limiting ring 21 is arranged at one end of the liquid passageway of joint body 1 close to original liquid barrel end joint 11. Flow limiting bolt 22 is movable relative to fixed flow limiting ring 21, flow limiting bolt 22 includes cylindrical middle section 231, the outer diameter of middle section 231 is less than the inner diameter of fixed flow limiting ring 21, and middle section 231 passes through the aperture of fixed flow limiting ring 21.

[0028] As shown in Figure 2 andFigure 3 As shown, the middle section 231 has an inlet end 232 near the end connector 11 of the raw liquid tank. The outer diameter of the inlet end 232 is larger than the inner diameter of the fixed flow limiting ring 21, and the outer end of the inlet end 232 is tapered. Several through holes 234 extending in a direction parallel to the axis of the connector body 1 are provided on the inlet end 232.

[0029] like Figure 2 and Figure 3 As shown, the middle section 231 has a closed end 233 near the equipment end connector 12. The outer end of the closed end 233 is flared, and the outer diameter of the outer end of the closed end 233 is larger than the inner diameter of the fixed flow limiting ring 21. The side of the fixed flow limiting ring 21 facing the closed end 233 is provided with an inclined chamfer 211, and the inner diameter of the outer end of the chamfer 211 of the fixed flow limiting ring 21 is smaller than the inner diameter of the outer end of the closed end 233.

[0030] When the liquid is pumped, it can pass smoothly through the through hole 234 when it enters the front conical inlet end 232 of the check mechanism. When the pumping stops, the flow restrictor 22 is pressed tightly against the fixed flow restrictor ring 21 by its own gravity, and the flared outer end of the closed end 233 is completely pressed against the chamfer 211 of the fixed flow restrictor ring 21, thereby preventing the liquid from passing through (at the same time, there is a downward force of the liquid on the bottom).

[0031] The above-described specific embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Various modifications, substitutions, and improvements made by those skilled in the art to the technical solutions of the present invention based on the provided description and drawings, without departing from the design concept and spirit of the present invention, should all fall within the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims.

Claims

1. A special connector for a high-purity chemical reagent concentrate tank, characterized in that, The device includes a connector body, on which a liquid-passing pipe for liquid flow is provided. One end of the connector body is a raw liquid tank end connector, and the other end of the connector body is an equipment end connector. A movable external threaded connector is fitted on the raw liquid tank end connector. The movable external threaded connector can move back and forth along the axis of the connector body. A check valve mechanism is provided in the liquid-passing pipe of the connector body.

2. The special connector for high-purity chemical reagent concentrate tanks according to claim 1, characterized in that, The check valve mechanism includes a fixed flow-limiting ring fixedly installed inside the liquid-passing pipe of the connector body. The fixed flow-limiting ring is a ring-shaped structure with a central opening. The outer wall of the fixed flow-limiting ring is in close contact with the inner wall of the connector body cavity. The fixed flow-limiting ring is located at one end of the liquid-passing pipe of the connector body near the end connector of the original liquid tank.

3. The special connector for high-purity chemical reagent concentrate tanks according to claim 2, characterized in that, The check valve mechanism also includes a flow restrictor installed in the liquid-passing pipe of the connector body. The flow restrictor is movable relative to the fixed flow restrictor ring. The flow restrictor includes a cylindrical middle section that passes through the opening of the fixed flow restrictor ring. The middle section has an inlet end near the end connector of the raw liquid tank and a closed end near the end connector of the equipment.

4. The special connector for high-purity chemical reagent concentrate tanks according to claim 3, characterized in that, The outer diameter of the middle section is smaller than the inner diameter of the fixed flow-limiting ring, the outer diameter of the inlet end is larger than the inner diameter of the fixed flow-limiting ring, and the outer end of the inlet end is tapered.

5. The special connector for high-purity chemical reagent concentrate tanks according to claim 4, characterized in that, The inlet end is provided with several through holes extending in a direction parallel to the axis of the connector body.

6. The special connector for high-purity chemical reagent concentrate tanks according to claim 5, characterized in that, The outer end of the closed end is funnel-shaped and enlarged, and the outer diameter of the outer end of the closed end is larger than the inner diameter of the fixed flow-limiting ring.

7. The special connector for high-purity chemical reagent concentrate tanks according to claim 6, characterized in that, The fixed flow limiting ring has an inclined chamfer on the side facing the closed end, and the inner diameter of the outer end of the chamfer of the fixed flow limiting ring is smaller than the inner diameter of the outer end of the closed end.

8. The special connector for high-purity chemical reagent concentrate tanks according to claim 1, characterized in that, The end of the raw liquid tank end connector is provided with a protruding limiting ring. The limiting ring is annular and surrounds the outside of the raw liquid tank end. The movable external thread connector is provided with a limiting groove at one end near the limiting ring. The equipment end connector is provided with an equipment external thread connector on the outer periphery of one end near the connector body.

9. The special connector for high-purity chemical reagent concentrate tanks according to claim 8, characterized in that, The limiting ring has a circular gasket on the side facing the end connector of the original liquid tank.

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