Dust calibration device capable of controlling humidity

Abstract

The utility model discloses a dust calibration device capable of controlling humidity, which comprises a ball cavity, a dust calibration device, a humidity sensor, a humidity sensor and a humidity sensor, and is characterized in that a dust inlet is formed in the top of the ball cavity; the bottom of the ball cavity is provided with a calibration interface and a standard interface; an air nozzle of the aerosol generator is connected to the dust inlet; the humidity generation unit comprises a pure water passage, a diluent gas passage, a mixed evaporation box and a sprayer, the pure water passage and the diluent gas passage are respectively communicated with the mixed evaporation box, and the sprayer is arranged in the spherical cavity and is communicated with the mixed evaporation box; the weighing calibration unit comprises a filter membrane sampling assembly and a flow control assembly, the filter membrane sampling assembly is arranged in the spherical cavity, and the flow control assembly is arranged outside the spherical cavity and connected with the filter membrane sampling assembly; and an openable and closable mounting opening is formed in a position, corresponding to the filter membrane sampling assembly, of the spherical cavity. According to the invention, the particle size and uniformity of dust generation can be controlled, air flows with different humidity can be generated, the high-humidity dust working condition can be truly simulated, and the calibration of the dust meter can be realized through a weighing calibration method or a comparison calibration method.

Description

TECHNICAL FIELD

[0001] The utility model relates to dust calibration technical field especially relates to a dust calibration device of controllable humidity. BACKGROUND

[0002] The scattering dust instrument is based on the scattering characteristic of particulate matter to light to detect dust concentration, and the light scattering characteristic of particulate matter is influenced by environmental humidity, especially when humidity is greater than 60%, the influence of humidity on the measurement result of the light scattering dust instrument cannot be ignored.

[0003] Generally, dust instruments need to be factory metering calibration when leaving factory, but it is difficult for manufacturers to provide high-humidity low-concentration working conditions as factory test environment, resulting in that factory metering calibration loses specific meaning and affects the effectiveness of instrument field use.

[0004] The current dust instrument is only calibrated by the stable dust box before laboratory environment test and factory test, and the humidity factor is not introduced in the calibration test, and the dust box cannot completely simulate the actual field humidity of the special working condition. Generally, the instrument is effectively found to be influenced by humidity in user use test, the defect convergence time is long, and serious defects may not converge, resulting in heavy loss of research and development cost. Therefore, it is necessary to complete the simulation environment test under such working condition before leaving factory to test the equipment operation reliability, and not only to avoid this problem on the basis of theory. CONTENT OF THE UTILITY MODEL

[0005] The utility model provides a dust calibration device of controllable humidity to solve the above technical problem.

[0006] To achieve the above purpose, the utility model adopts the following technical scheme:

[0007] A dust calibration device of controllable humidity, comprising:

[0008] The ball cavity is a hollow ball, and a dust inlet is formed in the top of the ball cavity; a calibration interface and a standard interface are arranged at the bottom of the ball cavity, the calibration connector is used to connect the calibrated dust instrument, and the standard connector is used to connect the standard dust instrument;

[0009] The aerosol generator is connected to the dust inlet through the air outlet;

[0010] A humidity generating unit includes a pure water passage, a dilution gas passage, a mixing evaporator, and a sprayer. The pure water passage and the dilution gas passage are respectively connected to the mixing evaporator. The sprayer is located inside the spherical cavity and is connected to the mixing evaporator. The pure water passage is used to introduce a small flow of constant water into the mixing evaporator, and the dilution gas passage is used to introduce a constant flow of dilution gas into the mixing evaporator.

[0011] The weighing calibration unit includes a filter membrane sampling component and a flow control component. The filter membrane sampling component is located inside the spherical cavity, and the flow control component is located outside the spherical cavity and connected to the filter membrane sampling component. The spherical cavity has an openable and closable mounting port at the corresponding position of the filter membrane sampling component.

[0012] Furthermore, the pure water passage is provided with a water storage container, a first flow meter, a filter and a capillary tube in sequence, and the outlet of the capillary tube is connected to the mixing evaporation box.

[0013] Furthermore, the dilution gas passage is provided with a first nitrogen cylinder and a second flow meter in sequence, with the second flow meter located between the first nitrogen cylinder and the mixing evaporation chamber.

[0014] Furthermore, the filter membrane sampling assembly includes a sampling fixing head and a weighing filter membrane, wherein the sampling fixing head is fixed inside the spherical cavity, and the weighing filter membrane is placed on the sampling fixing head;

[0015] The flow control assembly includes a pump and a third flow meter. The pump is connected to the sampling fixed head via an air pipe, and the third flow meter is located between the pump and the sampling fixed head.

[0016] Furthermore, it also includes a dust concentration adjustment unit, which includes a laser dust sensor, a second nitrogen cylinder and a proportional valve. The laser dust sensor is located inside the spherical cavity and is electrically connected to the control terminal.

[0017] The second nitrogen cylinder is connected to the spherical cavity, and the proportional valve is connected between the second nitrogen cylinder and the spherical cavity; the proportional valve is electrically connected to the control terminal.

[0018] Furthermore, it also includes a particle cutter connected between the spherical cavity and the aerosol generator.

[0019] Furthermore, a circular honeycomb plate is provided inside the spherical cavity near the dust inlet, the honeycomb plate is horizontally arranged and the edge of the honeycomb plate is fixedly connected to the inner wall of the spherical cavity.

[0020] Furthermore, a fan is also provided inside the spherical cavity, and the fan is electrically connected to the control terminal.

[0021] Furthermore, a pressure sensor and a temperature and humidity sensor are provided inside the spherical cavity, and the pressure sensor and the temperature and humidity sensor are electrically connected to the control terminal respectively.

[0022] Furthermore, the mixing evaporator is equipped with a heating element.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] This utility model discloses a dust calibration device with controllable humidity. By setting the dust generation chamber in a spherical shape, it can effectively avoid particulate matter loss and make the internal flow field more uniform, thus better mixing the particulate matter. By connecting an aerosol generator to the spherical chamber, its gas supply interface can be selected with different aerosol sources, thereby directly generating dust particles of the required particle size, achieving a diverse range of particle size selection for dust generation. Through the humidity generation unit, a small flow of constant-current water is introduced into the mixing evaporation chamber through a pure water channel, and a constant-current dilution gas is introduced into the mixing evaporation chamber through a dilution gas channel. A dilution gas is introduced into a mixing evaporation chamber and heated for evaporation. Humidity is controlled by separately regulating the flow rates of the pure water and dilution gas pathways, allowing for the creation of particulate matter concentrations under varying humidity conditions. A calibration interface and a standard interface are located at the bottom of the spherical cavity, connecting to the dust meter being calibrated and a standard dust meter respectively. The dust meter being calibrated is then calibrated by comparing the detected concentrations from these two instruments. A weighing calibration unit and a filter membrane sampling component are used for sampling, and a flow control component controls the sampling flow rate. The concentration is compared and calibrated using a weighing sampling method, thus calibrating the dust meter. This application can control the particle size and uniformity of dust generation, creating airflows with varying humidity levels to realistically simulate high-humidity dust conditions, and calibrating the dust meter using either a weighing calibration method or a comparative calibration method. Attached Figure Description

[0025] Fig. 1 This is a schematic diagram of the overall structure of the dust calibration device with controllable humidity according to this utility model;

[0026] Fig. 2 This is a top view of the honeycomb panel of this utility model;

[0027] Fig. 3 This is a schematic diagram of the humidity generating unit of this utility model.

[0028] Figure labels: 1-Spherical cavity, 11-Honeycomb panel, 12-Fan, 13-Pressure sensor, 14-Temperature and humidity sensor, 2-Aerosol generator, 3-Standard dust meter, 4-Dust meter to be calibrated, 5-Pure water passage, 6-Dilution gas passage, 51-Mixing evaporator, 52-Sprayer, 53-Water storage container, 54-First flow meter, 55-Filter, 56-Capillary tube, 61-First nitrogen cylinder, 62-Second flow meter, 71-Sampling fixing head, 72-Pump, 73-Third flow meter, 81-Laser dust sensor, 82-Second nitrogen cylinder, 83-Proportional valve, 84-Control terminal, 9-Particulate matter cutter. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0030] Example

[0031] like Figs. 1-3 A dust calibration device with controllable humidity, as shown, includes:

[0032] The spherical cavity 1 is a hollow sphere with a dust inlet at the top. The bottom of the spherical cavity 1 is provided with a calibration interface and a standard interface. The calibration connector is used to connect to the dust meter 4 being calibrated, and the standard connector is used to connect to the standard dust meter 3.

[0033] Aerosol generator 2, the jet nozzle of aerosol generator 2 is connected to the dust inlet;

[0034] The humidity generating unit includes a pure water passage 5, a dilution gas passage 6, a mixing evaporator 51, and a sprayer 52. The pure water passage 5 and the dilution gas passage 6 are respectively connected to the mixing evaporator 51. The sprayer 52 is located inside the spherical cavity 1 and is connected to the mixing evaporator 51. The pure water passage 5 is used to introduce a small flow of constant water into the mixing evaporator 51, and the dilution gas passage 6 is used to introduce a constant flow of dilution gas into the mixing evaporator 51.

[0035] The weighing calibration unit includes a filter membrane sampling component and a flow control component. The filter membrane sampling component is located inside the spherical cavity 1, and the flow control component is located outside the spherical cavity 1 and connected to the filter membrane sampling component. The spherical cavity 1 has an openable and closable mounting port at the corresponding position of the filter membrane sampling component.

[0036] The following will further describe a dust calibration device with controllable humidity in this exemplary embodiment.

[0037] In one embodiment of this application, the aforementioned spherical cavity 1 is a hollow sphere. Compared to typical cylindrical or cuboid chambers, the sphere has neither corners nor edges, effectively avoiding particulate matter loss at the corners. Furthermore, due to the consistent geometry of the sphere, the internal flow field is more uniform, thereby better mixing the particulate matter evenly.

[0038] As an example, the aforementioned spherical cavity 1 is made of acrylic, which has a light transmittance of up to 93%, eliminating the need for additional windows for easy observation. The inner wall of the spherical cavity 1 can be coated with a polyurethane-type antistatic coating to prevent particulate matter from being electrostatically adsorbed and lost, and the antistatic effect is not affected by humidity.

[0039] As an example, the top of the aforementioned spherical cavity 1 is provided with a dust inlet, which is shaped like a trumpet. The trumpet-shaped dust inlet causes the airflow to flow turbulently into the interior of the spherical cavity 1.

[0040] As an example, a circular honeycomb plate 11 is provided inside the spherical cavity 1 near the dust inlet. The honeycomb plate 11 is horizontally arranged and its edge is fixedly connected to the inner wall of the spherical cavity 1. Turbulent flow diffuses through the honeycomb plate 11, causing the dust to be evenly distributed inside the spherical cavity 1, which can improve the uniformity of airflow and dust. Moreover, the flow field loss inside the sphere is small and more uniform, resulting in higher uniformity and stability of dust generation.

[0041] In one embodiment of this application, the jet nozzle of the aerosol generator 2 is connected to the dust inlet, and its air supply interface is connected to an air supply source. The generated airflow containing particulate matter enters from the dust inlet. By configuring the aerosol generator 2, different aerosol sources can be selected, thereby directly generating dust particles of the desired particle size.

[0042] As an example, a particle cutter 9 is also connected between the aforementioned spherical cavity 1 and the aerosol generator 2. By selectively installing cutters of different particle sizes, the dust particles are sieved to generate the required particle size, thus matching the calibration for dust concentration measurement under different working conditions. In conjunction with the aerosol generator 2, different particle sizes can be selected to generate dust, achieving a diverse and wide range of particle size selection for dust generation.

[0043] In one embodiment of this application, the humidity generating unit includes a pure water passage 5, a dilution gas passage 6, a mixing evaporation chamber 51, and a sprayer 52. The pure water passage 5 and the dilution gas passage 6 are respectively connected to the mixing evaporation chamber 51. The sprayer 52 is disposed inside the spherical cavity 1 and is connected to the mixing evaporation chamber 51. The pure water passage 5 is used to introduce a small flow of constant-flow water into the mixing evaporation chamber 51, and the dilution gas passage 6 is used to introduce a constant-flow dilution gas into the mixing evaporation chamber 51. The two passages mix in the mixing evaporation chamber 51, heating and evaporating the introduced pure water and mixing it with the dilution gas to obtain an airflow with a certain water content. By controlling the flow rate of pure water and the flow rate of dilution gas, airflows with different relative humidities can be generated, which can realistically reproduce the high-humidity dust conditions on site and verify the equipment quality and R&D technical solutions during the product development process.

[0044] As an example, the pure water passage 5 is sequentially equipped with a water storage container 53, a first flow meter 54, a filter 55, and a capillary tube 56. The outlet of the capillary tube 56 is connected to the mixing evaporation chamber 51, and all the above structures are connected by pipes. The mixing evaporation chamber 51 is equipped with a heating element for heating and evaporating pure water. The heating element is connected to a control terminal 84, which can control the heating. The water storage container 53 contains pure water (with a conductivity of 2 MΩ / cm or higher). The flow rate of pure water in the water storage container 53 is controlled by the first flow meter 54. Under external pressure, the pure water is filtered through a porous filter to remove impurities and then flows into the capillary tube 56 (a quartz tube with an inner diameter of 0.25 mm). By controlling the pressure difference in the capillary tube 56, a stable small flow rate of water is obtained and then fed into the mixing evaporation chamber 51 for heating and evaporation.

[0045] As an example, the dilution gas passage 6 is provided with a first nitrogen cylinder 61 and a second flow meter 62 in sequence, with the second flow meter 62 located between the first nitrogen cylinder 61 and the mixing evaporation chamber 51. The first nitrogen cylinder 61 releases nitrogen gas, and the flow rate of the nitrogen gas is controlled by the second flow meter 62. The nitrogen gas is then introduced into the mixing evaporation chamber 51 through a gas pipe, where it mixes with the evaporated water vapor to dilute it, so that the gas flow from the mixing evaporation chamber 51 contains a constant amount of water vapor.

[0046] Specifically, the principle of humidity control:

[0047] According to Poiseuille's law,

[0048] Where: Q—fluid flow rate, u—fluid viscosity, R—pipe radius, L—pipe length, P1—inlet pressure, P2—outlet pressure.

[0049] The flow rate (Q) of the fluid is directly proportional to the pressure difference (P1-P2) across the capillary tube 56 and inversely proportional to its length (L). By selecting a capillary tube 56 of a certain length and accurately controlling the pressure difference across its two ends, a stable small flow rate of water can be obtained. Then, by diluting it with a constant flow of gas, a constant humidity airflow can be obtained. The outlet of the capillary tube 56 is located in the center of the airflow.

[0050] Airflows with different moisture contents can be obtained by controlling pressure and airflow:

[0051] Water vapor content added to the airflow:

[0052] Dilute the residual water vapor content in the air:

[0053] Calculation of relative humidity in the output airflow:

[0054] In the formula: C—the content of water vapor added to the airflow, g / m 3 ; △P—Pressure difference across the capillary tube, kPa; K—Pressure difference and water flow coefficient, mg / (h·Pa); Q—Air flow rate, m³ / h 3 / h; C′—Residual water vapor content in diluted air, g / m 3 P—Partial pressure of residual water vapor in diluted air, Pa; T—Temperature, °C; RH—Relative humidity of output airflow, %; C 饱 —Saturated water vapor content at a certain temperature, g / m 3 When the diluted air is dried to completely remove moisture, C′=0.

[0055] In one embodiment of this application, the weighing calibration unit includes a filter membrane sampling component and a flow control component. The filter membrane sampling component is disposed inside the spherical cavity 1, and the flow control component is disposed outside the spherical cavity 1 and connected to the filter membrane sampling component. The spherical cavity 1 has an openable and closable mounting port at the corresponding position of the filter membrane sampling component. By controlling the extraction flow rate of the filter membrane sampling component through the flow control component, dust particles are collected into the filter membrane sampling component. The particles are then removed through the openable and closable mounting port for weighing comparison before and after collection. The dust concentration under different humidity conditions can be calculated, thus achieving weighing comparison calibration.

[0056] As an example, the above-mentioned filter membrane sampling assembly includes a sampling fixing head 71 and a weighing filter membrane. The sampling fixing head 71 is fixed inside the spherical cavity 1, and the weighing filter membrane is placed on the sampling fixing head 71. The above-mentioned flow control assembly includes a pump 72 and a third flow meter 73. The pump 72 is connected to the sampling fixing head 71 through an air pipe, and the third flow meter 73 is located between the pump 72 and the sampling fixing head 71. The pump 72 provides suction force and controls the extraction flow rate through the third flow meter 73, adsorbing dust particles onto the weighing filter membrane. The weighing filter membrane is weighed before sampling and then removed and weighed again after sampling. The before and after weighing results are compared, and the dust concentration under a certain humidity condition can be obtained by calculating the weight and volume. This can then be compared with the dust meter 4 being calibrated, thereby achieving the calibration of the dust meter 4.

[0057] In one embodiment of this application, the bottom of the aforementioned spherical cavity 1 is provided with a calibration interface and a standard interface. The calibration connector is used to connect to the dust meter 4 to be calibrated, and the standard connector is used to connect to the standard dust meter 3. The standard dust meter 3 is a dust meter that has been verified or calibrated and has the same or higher accuracy and sensitivity. By comparing the standard dust meter 3 with the dust meter 4 to be calibrated, the dust meter 4 to be calibrated can be calibrated. Considering that the particulate matter will be affected by gravity due to high humidity, the dust meter 4 to be calibrated and the standard dust meter 3 are set at the bottom of the spherical cavity 1. Sampling can be performed under the action of gravity or by adsorption of the dust meter, which enables rapid calibration and realizes routine calibration in the laboratory.

[0058] This application establishes a weighing calibration unit, configures filter membrane sampling, and uses a weighing sampling method for comparison and calibration (benchmark verification method). By setting up a standard dust meter 3 for comparison, the dust meter being calibrated is calibrated using a standard dust meter 3 that has been verified or calibrated and has the same or higher accuracy and sensitivity (comparison verification method). Both the benchmark verification method and the comparison verification method can be used simultaneously to calibrate the dust meter.

[0059] In one embodiment of this application, a dust concentration adjustment unit is also included. The dust concentration adjustment unit includes a laser dust sensor 81, a second nitrogen cylinder 82, and a proportional valve 83. The laser dust sensor 81 is disposed inside the spherical cavity 1 and is electrically connected to the control terminal 84 for real-time monitoring of the dust value inside the spherical cavity 1 and transmitting the data to the control terminal 84.

[0060] The second nitrogen cylinder 82 is connected to the spherical cavity 1, and a proportional valve 83 is connected between the second nitrogen cylinder 82 and the spherical cavity 1; the proportional valve 83 is electrically connected to the control terminal 84. The control terminal 84 feeds back the received data to the proportional valve 83 to adjust the opening, accurately controlling the nitrogen dilution ratio, achieving adjustable and sufficiently stable concentration, and realizing closed-loop regulation and control of dust concentration.

[0061] In one embodiment of this application, a fan 12 is also provided inside the spherical cavity 1. The fan 12 is electrically connected to the control terminal 84. The fan 12 is located at the lower part of the spherical cavity 1 to achieve a uniform flow field.

[0062] In one embodiment of this application, the aforementioned spherical cavity 1 is provided with a pressure sensor 13 and a temperature and humidity sensor 14. The pressure sensor 13 and the temperature and humidity sensor 14 are electrically connected to the control terminal 84, respectively, for detecting and controlling the internal environmental parameters of the spherical cavity 1.

[0063] In one specific embodiment, the aerosol generator 2 generates a particulate-laden airflow that enters through a dust inlet at the top of the spherical cavity 1. The inlet is funnel-shaped, creating turbulence that diffuses through the honeycomb plate 11, causing the dust to be evenly distributed inside the spherical cavity 1. The flow rate of pure nitrogen gas is adjusted by controlling the opening of the proportional valve 83, which can dilute the dust concentration inside the spherical cavity 1 when it is high. A laser dust sensor 81 is installed inside the spherical cavity, which detects the dust concentration in real time and transmits the concentration signal to the computer system software in real time. The system automatically controls the proportional valve 83 according to the concentration deviation, implementing continuous feedback adjustment. Temperature and humidity sensors 14 and pressure sensors 13 are configured inside to detect and control the internal environmental parameters of the sphere. The fan 12 achieves a uniform flow field. The dilution gas passage 6 uses a second flow meter 62 to control the flow rate of pure nitrogen, while the pure water passage 5 uses a capillary tube 56 to control the differential pressure to obtain a stable low-velocity flow of pure water. The two passages are mixed in a mixing evaporator 51, where the water is heated and evaporated, then mixed with the dilution air flow to obtain airflows with different water contents. The relative humidity of the airflow can be calculated based on data such as pressure, airflow, and temperature. A pump 72 provides suction and controls the extraction flow rate through a third flow meter 73, adsorbing dust particles onto a weighing filter membrane, enabling weighing comparison calibration under different humidity conditions. The dust meter being calibrated 4 and the standard dust meter 3 are located at the bottom of the spherical cavity 1, allowing for comparative calibration of the dust meters under different humidity conditions. This application simulates the on-site operating conditions of the equipment, allowing for quality inspection during product development; it also verifies the rationality of the humidity-related technical solutions implemented during the equipment's development process, enabling corresponding improvements.

[0064] Of course, there may be other embodiments of this utility model. Without departing from the spirit and essence of this utility model, those skilled in the art can make various corresponding changes and modifications based on this utility model, but these corresponding changes and modifications should all fall within the protection scope of the appended claims of this utility model.

Claims

1. A dust calibration device with controllable humidity, characterized in that, include: The spherical cavity is a hollow sphere with a dust inlet at the top. The bottom of the spherical cavity has a calibration interface and a standard interface. The calibration interface is used to connect to the dust meter being calibrated, and the standard interface is used to connect to a standard dust meter. An aerosol generator, wherein the nozzle of the aerosol generator is connected to the dust inlet; A humidity generating unit includes a pure water passage, a dilution gas passage, a mixing evaporator, and a sprayer. The pure water passage and the dilution gas passage are respectively connected to the mixing evaporator. The sprayer is located inside the spherical cavity and is connected to the mixing evaporator. The pure water passage is used to introduce a small flow of constant water into the mixing evaporator, and the dilution gas passage is used to introduce a constant flow of dilution gas into the mixing evaporator. The weighing calibration unit includes a filter membrane sampling component and a flow control component. The filter membrane sampling component is located inside the spherical cavity, and the flow control component is located outside the spherical cavity and connected to the filter membrane sampling component. The spherical cavity has an openable and closable mounting port at the corresponding position of the filter membrane sampling component.

2. The dust calibration device with controllable humidity according to claim 1, characterized in that, The pure water passage is provided with a water storage container, a first flow meter, a filter and a capillary tube in sequence, and the outlet of the capillary tube is connected to the mixing evaporation box.

3. The dust calibration device with controllable humidity according to claim 1, characterized in that, The dilution gas passage is provided with a first nitrogen cylinder and a second flow meter in sequence, with the second flow meter located between the first nitrogen cylinder and the mixing evaporation box.

4. The dust calibration device with controllable humidity according to claim 1, characterized in that, The filter membrane sampling assembly includes a sampling fixing head and a weighing filter membrane. The sampling fixing head is fixed inside the spherical cavity, and the weighing filter membrane is placed on the sampling fixing head. The flow control assembly includes a pump and a third flow meter. The pump is connected to the sampling fixed head via an air pipe, and the third flow meter is located between the pump and the sampling fixed head.

5. The dust calibration device with controllable humidity according to claim 1, characterized in that, It also includes a dust concentration adjustment unit, which includes a laser dust sensor, a second nitrogen cylinder and a proportional valve. The laser dust sensor is located inside the spherical cavity and is electrically connected to the control terminal. The second nitrogen cylinder is connected to the spherical cavity, and the proportional valve is connected between the second nitrogen cylinder and the spherical cavity; the proportional valve is electrically connected to the control terminal.

6. The dust calibration device with controllable humidity according to claim 1 or 5, characterized in that, It also includes a particle cutter connected between the spherical cavity and the aerosol generator.

7. The dust calibration device with controllable humidity according to claim 1, characterized in that, A circular honeycomb plate is provided inside the spherical cavity near the dust inlet. The honeycomb plate is horizontally arranged and its edge is fixedly connected to the inner wall of the spherical cavity.

8. The dust calibration device with controllable humidity according to claim 1, characterized in that, The spherical cavity is also equipped with a fan, which is electrically connected to the control terminal.

9. The dust calibration device with controllable humidity according to claim 1 or 8, characterized in that, The spherical cavity is equipped with a pressure sensor and a temperature and humidity sensor, which are electrically connected to the control terminal.

10. The dust calibration device with controllable humidity according to claim 1, characterized in that, The mixing evaporator is equipped with a heating element.

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