Friction device and system for evaluating dust emission amount of ground material for clean room

Abstract

The utility model discloses a friction device and a system for evaluating the dust emission amount of a floor material for a clean room, and belongs to the field of material performance testing. The friction device comprises a bottom plate; the four guide rods are vertically arranged on the upper surface of the bottom plate and are distributed in a rectangular array; the sample jacket is in sliding connection with the guide rod; the grinding assembly is arranged on the upper surface of the bottom plate and located in the inner space of the two sets of guide rods; the load assembly is arranged at the upper part of the sample jacket; when the friction device is not in the friction state of the to-be-tested sample, the sample jacket is higher than the grinding disc; and in the friction process, the sample jacket drives the to-be-tested sample to move downwards along the guide rod, and the to-be-tested sample is kept in contact with the grinding surface of the grinding disc. The utility model further provides a system which comprises the friction device and is used for evaluating the dust emission amount of the floor material for the clean room. The friction device is structurally designed, so that the quantity of particles generated in the friction process can be ensured, and the dispersion uniformity of the particles is improved.

Description

Technical Field

[0001] This utility model relates to the field of material performance testing, and in particular to a friction device and a system for evaluating the dust generation of cleanroom flooring materials. Background Technology

[0002] In the fields of materials processing, surface treatment, and micro / nano particle preparation, triboelectric technology is widely used due to its high efficiency and low energy consumption. Traditional triboelectric devices use mechanical action to physically peel off or chemically react on the surface of a sheet material, generating microparticles of specific size and shape. However, this method has many limitations in practical applications. For example, the number of particles generated during the friction process is difficult to control, and the particle distribution is not uniform.

[0003] In traditional friction devices, the output shaft of the power source (usually a motor) and the grinding disc are usually connected by a direct flange to achieve power transmission. However, such structures have significant defects under high-speed rotation or dynamic load conditions: (1) The rigid connection cannot effectively absorb the instantaneous impact caused by the start-up or sudden load change of the motor, resulting in high-frequency vibration when the grinding disc contacts the plate, which not only reduces the uniformity of particle size, but also accelerates the wear of transmission components such as bearings and gears; (2) The installation deviation between the motor shaft and the grinding disc (such as angular offset, radial misalignment) can easily cause additional bending moment, which may cause shaft deformation during long-term operation and affect the stability of the equipment; (3) During the grinding process, the change in the surface morphology or friction resistance of the plate will be directly fed back to the motor, resulting in speed fluctuation or even stall, which requires compensation by complex control algorithms, increasing the system cost.

[0004] Therefore, there is an urgent need to develop a new type of friction device to achieve an efficient, stable, and customizable particle generation process to meet the application needs of high-precision manufacturing and emerging materials fields. Utility Model Content

[0005] In view of this, the present invention provides a friction device and a system for evaluating the dust generation of cleanroom floor materials, which is used to generate particles by rubbing the material.

[0006] According to a first aspect of the present invention, a friction device is provided for friction treatment of a test sample; its structure includes:

[0007] Base plate;

[0008] The guide rods are vertically mounted on the upper surface of the base plate and are arranged in a rectangular array of four.

[0009] The sample clamp, which is slidably connected to the guide rod, is used to clamp and fix the sample to be tested;

[0010] The grinding assembly is set on the upper surface of the base plate and located in the internal space of the two sets of guide rods for rubbing the test sample; the grinding assembly includes a rotation source, and the rotation output end of the rotation source is detachably connected to a grinding disc through a flexible coupling, with the grinding surface of the grinding disc facing away from the base plate;

[0011] The load assembly, which is located on the upper part of the sample clamp, is used to apply load during the friction process of the sample to be tested.

[0012] When the friction device is not in the friction state of the test sample, the height of the sample clamp is higher than that of the grinding disc; when the friction device is in the friction state of the test sample, the test sample is in contact with the grinding surface of the grinding disc; during the friction process, the sample clamp drives the test sample to move downward along the guide rod, and the test sample remains in contact with the grinding surface of the grinding disc.

[0013] The aforementioned friction device further includes a telescopic assembly, which comprises:

[0014] The linear drive source is fixedly mounted on the base plate; and

[0015] The tray is located at the output end of the linear drive source and is in movable contact with the bottom of the sample clamp.

[0016] When the friction device is not in the friction state of the test sample, the telescopic component lifts the sample clamp upwards, and the height of the sample clamp is higher than that of the grinding disc. When the friction device is in the friction state of the test sample, the telescopic component moves away from the sample clamp, and the test sample comes into contact with the grinding surface of the grinding disc.

[0017] According to the aforementioned friction device, the sample clamp includes:

[0018] The sample placement section has a sample placement groove for placing the test sample and a threaded hole that passes through the upper surface of the sample placement section and the sample placement groove. The axis of the threaded hole is orthogonal to the sample placement groove.

[0019] The clamping part includes a threaded post that mates with a threaded hole and a pressure block fixed at the bottom of the threaded post. The threaded post is threadedly engaged with and passes through the threaded hole. The pressure block is in the sample placement groove. By rotating the threaded post, the pressure block is driven to press the sample to be tested.

[0020] According to the aforementioned friction device, the load assembly includes:

[0021] The mounting plate is rigidly fixed to the upper surface of the sample clamp via a bolt connection structure.

[0022] The weight mounting rod is set on the bearing plane of the mounting plate in an axially vertical manner, and its surface is machined with precision threaded sections.

[0023] A weight set, which is formed by fitting standard weight units onto a weight mounting rod in a nested manner; and

[0024] A fastening nut is provided on the weight mounting rod and on the top surface of the weight set.

[0025] The frictional load on the test sample is the sum of the weight of the load assembly, the weight of the sample jacket, and the weight of the test sample itself.

[0026] According to the aforementioned friction device, it also includes an XY bidirectional slide table disposed on the base plate, and the rotation source of the grinding assembly is fixedly disposed on the XY bidirectional slide table.

[0027] According to the aforementioned friction device, it also includes four adjustable support legs arranged in a rectangular array on the base plate.

[0028] According to a second aspect of this utility model, a system for evaluating the dust generation of cleanroom flooring materials is provided, comprising:

[0029] An environmental test chamber is used to provide a testing environment for the friction process of the test sample;

[0030] The gas supply device, which is connected to the environmental test chamber via pipeline, is used to provide the environmental test chamber with clean, dust-free, constant-humidity gas;

[0031] The friction device of the first aspect of this utility model is placed inside an environmental test chamber; and

[0032] A particle collection and analysis device is used to collect particles within a chamber and analyze their size and concentration; the particle collection and analysis device includes:

[0033] The particle collection port is located inside the environmental test chamber;

[0034] A particle counter, which is connected to the particle collection port;

[0035] Particles generated by friction inside the environmental test chamber enter the particle counter through the particle collection port for analysis.

[0036] According to the aforementioned system for evaluating the dust generation of floor materials used in cleanrooms, the main structure of the environmental test chamber is the chamber body. An air inlet connected to an air supply device is provided on the side wall of the chamber body. A temperature sensor, a humidity sensor, a wind speed sensor, an exhaust pump, and a temperature control module are provided on the inner wall of the chamber body. At least one circulating fan is provided on the side wall and / or top wall of the chamber body.

[0037] The air inlet is made of stainless steel or polytetrafluoroethylene tubing with evenly distributed holes, which delivers the air evenly into the cabin.

[0038] Furthermore, the gas supply device includes gas pipes connected in sequence.

[0039] Gas source, used to supply gas to the interior of the environmental test chamber;

[0040] Solenoid valves are used to open or close the air circuit;

[0041] A flow meter is used to regulate gas flow to control the ventilation rate.

[0042] High-efficiency particulate matter is used to remove airborne particles, preventing them from affecting the internal background of the environmental test chamber; and

[0043] A humidifier is used to regulate air humidity to meet the set requirements of the environmental test chamber; the humidifier is connected to the air inlet via piping.

[0044] Furthermore, the system also includes a controller, which is electrically connected to the gas supply device, the friction device, and the particle collection and analysis device. The controller is used to control the environmental parameters of the environmental test chamber, the operation and shutdown of the gas supply device, the operation and shutdown of the friction device, and to acquire particle size and concentration information.

[0045] Compared with the prior art, the present invention has the following beneficial effects:

[0046] (1) The structural design of the friction device in this utility model can ensure the number of particles generated during the friction process and improve the uniformity of particle dispersion. The sample jacket is provided with a fixed installation structure for the test sample; the guide rod is connected to the sample jacket in a sliding pair, and the sample jacket moves linearly in the vertical direction through the guiding action of the guide rod. During the friction process, as the surface of the test sample wears, the sample jacket slides downward, so that the test sample is always in contact with the grinding disc, and the friction process is stable; the load component includes an adjustable weight group, which is connected to the sample jacket through the mounting plate to form a vertical force application structure for the test sample; the weight group adopts a modular counterweight design, and the linear adjustment of the applied load is achieved by increasing or decreasing the number of standard weight units.

[0047] (2) The friction device of this utility model has a high degree of automation, which improves production efficiency and saves labor; at the same time, the friction device makes the friction process of the test sample more stable.

[0048] (3) This utility model provides a system for evaluating the dust generation of floor materials used in cleanrooms. It provides constant environmental conditions through an environmental test chamber and simulates the friction process with a friction device. It evaluates the dust generation of different particle sizes of floor materials under different environmental conditions (including temperature, relative humidity, and wind speed) and friction conditions (including load, abrasive particle size, friction area, and friction speed). This ensures the accuracy and repeatability of the test results, significantly saves manpower and time costs, and provides reliable support for selecting suitable floor materials for cleanrooms and related controlled environments. Attached Figure Description

[0049] Figure 1 A three-dimensional structural diagram of the friction device in a system for evaluating the dust generation of cleanroom flooring materials;

[0050] Figure 2 for Figure 1 A magnified view of a section at point A in the middle;

[0051] Figure 3 This is a front view of the friction device when it is not in a friction state.

[0052] Figure 4 This is a front view of the friction device in a friction state.

[0053] Figure 5 A perspective view of a sample placement section;

[0054] Figure 6 This is a perspective view of another configuration of the sample placement section and connecting plate.

[0055] Figure 7 A schematic diagram of the system for evaluating the dust generation of flooring materials used in cleanrooms;

[0056] Figure 8 The curves show the change in particle concentration over time for particles with a diameter ≥1.0 μm.

[0057] Explanation of reference numerals in the attached figures:

[0058] 100. Sample to be tested;

[0059] 200. Friction device; 210. Base plate; 220. Guide rod; 230. Sample clamp; 231. Sample placement part; 2311. Sample placement groove; 2312. Threaded hole; 2313. Through hole; 232. Clamping part; 2321. Threaded column; 2322. Pressure block; 2323. Handle; 233. Connecting plate; 240. Grinding assembly; 241. Rotation source; 242. Flexible coupling; 243. Grinding disc; 250. Load assembly; 251. Mounting plate; 252. Weight placement rod; 253. Weight set; 254. Fastening nut; 260. Telescopic assembly; 261. Linear drive source; 262. Support plate; 270. Bushing; 280. XY bidirectional slide table; 290. Support leg;

[0060] 300. Environmental test chamber; 310. Chamber body; 320. Air inlet; 330. Temperature sensor; 340. Humidity sensor; 350. Wind speed sensor; 360. Exhaust pump; 370. Temperature control module; 380. Circulating fan;

[0061] 400. Gas supply device; 410. Gas source; 420. Solenoid valve; 430. Flow meter; 440. High-efficiency filter; 450. Humidifier;

[0062] 500. Particle acquisition and analysis device; 510. Particle acquisition port; 520. Particle counter;

[0063] 600. Controller. Detailed Implementation

[0064] To make the technical problem to be solved, the technical solution and advantages of this utility model clearer, the following will be described in conjunction with the accompanying drawings. Figures 1 to 8 The technical solution of this utility model is clearly and completely described in conjunction with specific embodiments.

[0065] Figure 1 This is a three-dimensional structural diagram of the friction device 200. The friction device 200 is used to perform friction treatment on the test sample 100.

[0066] The friction device 200 includes a base plate 210. Four guide rods 220 arranged in a rectangular array are vertically disposed on the upper surface of the base plate 210. The guide rods 220 are slidably connected to a sample clamp 230, which is used to clamp and fix the test sample 100. A grinding assembly 240 is disposed on the upper surface of the base plate 210 and within the internal space of the two sets of guide rods 220. The grinding assembly 240 is used to rub the test sample 100. The grinding assembly 240 includes a rotation source 241. The rotation output end of the rotation source 241 is detachably connected to a grinding disc 243 via a flexible coupling 242. The grinding surface of the grinding disc 243 faces away from the base plate 210. A load assembly 250 is disposed above the sample clamp 230 to apply a load during the friction process of the test sample 100. When the friction device 200 is not in the friction state of the test sample 100, the height of the sample clamp 230 is higher than that of the grinding disk 243, which facilitates the placement of the test sample 100 into the sample clamp 230; when the friction device 200 is in the friction state of the test sample 100, the test sample 100 is in contact with the grinding surface of the grinding disk 243; during the friction process, the sample clamp 230 drives the test sample 100 to move downward along the guide rod 220, and the test sample 100 remains in contact with the grinding surface of the grinding disk 243.

[0067] The rotation source 241 can be any device capable of outputting rotation, such as an electric motor, engine, hydraulic motor, or a combination of one of these with a reducer. A small and technologically mature electric motor is preferred. The grinding disc 243 is made of diamond or silicon carbide, with an abrasive grit size ranging from P12 to P2500 and a friction area ranging from 0 to 0.1 μm. 2 .

[0068] By connecting the rotating source 241 and the grinding disc 243 through the flexible coupling 242, the power transmission stability required for high-precision grinding is achieved at low cost, providing a reliable basic structure for the controllable preparation of particles. Furthermore, the radial deviation compensation of the flexible coupling 242 is ±0.1mm.

[0069] The grinding disc 243 is detachably connected to the flexible coupling 242, and different grinding discs 243 can be replaced to adapt to different abrasive particle sizes and friction areas.

[0070] To facilitate the placement of the test sample 100 on the sample holder 230 before friction, the friction device 200 also includes a telescopic component 260. The telescopic component 260 includes a linear drive source 261 fixedly mounted on the base plate 210 and a support plate 262 located at the output end of the linear drive source 261. The support plate 262 is in movable contact with the bottom of the sample holder 230. When the friction device 200 is not in the friction state of the test sample 100, the telescopic component 260 lifts the sample holder 230 upwards. The height of the sample holder 230 is higher than the grinding disc 243, and a safe distance of 10mm~15mm is maintained between the bottom surface of the sample holder 230 and the working plane of the grinding disc 243, facilitating the placement of the test sample 100 into the sample holder 230. Figure 3 As shown; when the friction device 200 is in the friction state of the test sample 100, the telescopic component 260 moves away from the sample clamp 230, and the test sample 100 comes into contact with the grinding surface of the grinding disc 243, as shown. Figure 4 As shown.

[0071] The linear drive source 261 can be a cylinder, hydraulic cylinder, electric actuator, etc., as long as it can provide linear driving force.

[0072] like Figure 2As shown, the sample holder 230 includes a sample placement part 231 and a clamping part 232. The sample placement part 231 has a sample placement groove 2311 for placing the test sample 100. The clamping part 232 cooperates with the sample placement part 231 to fix the test sample 100. The sample placement part 231 has a threaded hole 2312, which passes through the upper surface of the sample placement part 231 and the sample placement groove 2311. The axis of the threaded hole 2312 is orthogonal to the sample placement groove 2311. The clamping part 232 includes a threaded post 2321 that mates with the threaded hole 2312 and a pressure block 2322 fixed to the bottom end of the threaded post 2321. The threaded post 2321 is threadedly engaged with and passes through the threaded hole 2312. The pressure block 2322 is in the sample placement groove 2311. By rotating the threaded post 2321, the pressure block 2322 is driven to press the test sample 100. The sample holder 230 can accommodate friction tests on samples of different thicknesses, making it versatile. A handle 2323 is provided at the top of the threaded post 2321 for easy tightening.

[0073] A sample placement part 231 has the following structure: Figure 5 As shown, the sample placement part 231 has a U-shaped structure, and a sample placement groove 2311 along the U-shape is opened on the inner side of the sample placement part 231. Two adjacent guide rods 220 form a group, and the two groups of guide rods 220 are arranged opposite each other, with each group of guide rods 220 slidably connected to the opposite side wall of the sample placement part 231. The sample placement groove 2311 in the side wall opposite to the U-shaped opening can limit the position of the test sample 100. Another sample placement part 231 structure is as follows: Figure 6 As shown, the sample placement part 231 has a long strip structure, and a sample placement groove 2311 extending through the length direction is opened on one side of the sample placement part 231. Two adjacent guide rods 220 are arranged as a group, and the two groups of guide rods 220 are arranged opposite each other. Each group of guide rods 220 is slidably connected to one sample placement part 231. The sample placement grooves 2311 of the two sample placement parts 231 are arranged opposite each other. Connecting plates 233 are provided at the front and rear ends of the two sample placement parts 231 to keep the height of the two sample placement parts 231 consistent.

[0074] One sliding connection between the guide rod 220 and the sample placement part 231 is as follows: Through holes 2313 are provided at both ends of the sample placement part 231, and the guide rod 220 passes through the through holes 2313 of the sample clamp 230, with a clearance fit between the guide rod 220 and the through holes 2313. Another sliding connection between the guide rod 220 and the sample clamp 230 is as follows: Through holes 2313 are provided at both ends of the sample clamp 230, and a bushing 270 is coaxially fixed in the through holes 2313. The guide rod 220 passes through the bushing 270, resulting in more stable sliding of the sample placement part 231 on the guide rod 220.

[0075] The load assembly 250 adopts an integrated counterweight adjustment mechanism, specifically including the following structural features: the mounting plate 251 is rigidly fixed to the upper surface of the sample clamp 230 via a bolt connection structure; the weight placement rod 252 is set on the bearing plane of the mounting plate 251 in an axially vertical manner, and its rod surface is machined with a precision thread section (preferably with a thread pitch of 0.8 mm to 1.2 mm); standard weight units are assembled on the weight placement rod 252 in a nested manner to form a modular weight group 253; and an anti-loosening fastening nut 254 is set on the weight placement rod 252 and on the top surface of the weight group 253. The frictional load on the test sample 100 is the sum of the weight of the load assembly 250, the weight of the sample clamp 230, and the weight of the test sample 100 itself (the change in the weight of the test sample 100 during friction is negligible).

[0076] The friction device 200 also includes an XY bidirectional slide 280 mounted on the base plate 210, and the rotation source 241 of the grinding assembly 240 is fixedly mounted on the XY bidirectional slide 280. The XY bidirectional slide 280 can adjust the horizontal position of the grinding assembly 240 along the X and Y axes, so that the grinding assembly 240 can perform friction tests on the test sample 100 in the horizontal direction (i.e., the front-back and left-back directions), facilitating testing at different positions of the test sample 100. It should be noted that the XY bidirectional slide 280 can be a knob-type manual adjustment platform or an electric adjustment platform; its specific structure is existing technology and will not be described in detail.

[0077] The friction device 200 also includes four adjustable support legs 290 arranged in a rectangular array on the base plate 210 to ensure that the base plate 210 is horizontal, thereby ensuring that the guide rod 220 is perpendicular to the horizontal plane. The sample clamp 230 moves vertically up and down on the guide rod 220, ensuring that the load assembly 250 applies force accurately. A level bubble level is installed on the base plate 210 to indicate whether the base plate 210 is horizontal. The support legs 290 are conventional prior art and will not be described in detail here.

[0078] This invention features a structural design for the friction device that ensures the number of particles generated during friction and improves the uniformity of particle dispersion. The sample clamp 230 has a fixed mounting structure for the test sample 100 inside. The guide rod 220 is connected to the sample clamp 230 via a sliding pair. The guide rod 220 guides the sample clamp 230 to move linearly in the vertical direction. During friction, as the surface of the test sample 100 wears, the sample clamp 230 slides downwards, ensuring that the test sample 100 remains in constant contact with the grinding disc 243, thus stabilizing the friction process. The load assembly 250 includes an adjustable weight set 253, which is connected to the sample clamp 230 via a mounting plate 251. The components 30 are connected to form a vertical force-applying structure for the test sample 100. The grinding disc 243 is located at the bottom of the chamber 310 and forms a friction pair with the test sample 100, which moves vertically. The chamber 310 forms a sealed chamber structure to accommodate abrasive particles generated during friction. The weight set 253 adopts a modular counterweight design, and the applied load can be linearly adjusted by increasing or decreasing the number of standard weight units. The clearance between the guide rod 220 and the sample clamp 230 is controlled within the range of 0.05mm to 0.1mm to ensure motion accuracy. The friction device 200 has a high degree of automation, which improves production efficiency and saves labor. At the same time, the friction device 200 makes the friction process of the test sample 100 more stable.

[0079] This utility model provides a system for evaluating the dust generation of cleanroom flooring materials, such as... Figure 7 As shown, the system for evaluating the dust generation of cleanroom flooring materials includes: an environmental test chamber 300, an air supply device 400, a friction device 200, a particle collection and analysis device 500, and a controller 600. The friction device 200 is placed inside the environmental test chamber 300.

[0080] The environmental test chamber 300 provides a testing environment for the friction process of the test sample 100. The gas supply device 400 is connected to the environmental test chamber 300 via pipes and provides clean, dust-free, constant-humidity gas to the environmental test chamber 300. The friction device 200 is located inside the environmental test chamber 300 and is used to rub the test sample 100 placed inside the environmental test chamber 300. A particle collection and analysis device 500 collects particles from the chamber and analyzes their particle size and concentration. A controller 600 is electrically connected to the gas supply device 400, the friction device 200, and the particle collection and analysis device 500. The controller 600 controls the environmental parameters of the environmental test chamber 300, the operation and shutdown of the gas supply device 400 and the friction device 200, and acquires particle size and concentration information.

[0081] Specifically, the main structure of the environmental test chamber 300 is a chamber body 310. An air inlet 320 connected to the air supply device 400 is provided on the side wall of the chamber body 310. A temperature sensor 330, a humidity sensor 340, a wind speed sensor 350, an exhaust pump 360, and a temperature control module 370 are installed on the inner wall of the chamber body 310. At least one circulating fan 380 is installed on the side wall and / or top wall of the chamber body 310. The circulating fan 380 is configured to promote rapid mixing of air and heat through forced convection, while maintaining a uniform dispersion of particles within the environmental test chamber 300, thereby ensuring the measurement accuracy of environmental parameter data. The internal volume of the chamber body 310 is 0.2 m³. 3 ~2m 3 The chamber 310 is constructed of metal sandwich panels for heat insulation; the air inlet 320 is a stainless steel or polytetrafluoroethylene pipe with evenly distributed holes, which evenly delivers the incoming air into the chamber; the circulating fan 380 is made of stainless steel and has a speed of 50 rpm to 500 rpm; the temperature sensor 330 is used to monitor the temperature inside the chamber in real time, with a temperature monitoring range of 0℃ to 100℃; the humidity sensor 340 is used to monitor the humidity inside the chamber in real time, with a monitoring range of 0% to 90%; the wind speed sensor 350 is used to monitor the wind speed inside the chamber in real time, with a monitoring range of 0 to 5 m / s; and the exhaust pump 360 discharges air from the chamber at a set speed; the environmental test chamber 300 has an operating temperature range of 15℃ to 40℃, a relative humidity range of 20% to 80%, and a wind speed range of 0.1 m / s to 0.5 m / s.

[0082] The temperature control module 370, as the core component for temperature control in the cabin 310, includes a heating unit and a cooling unit. The heating unit uses a PTC ceramic heater or resistance wire, possessing self-limiting temperature characteristics to ensure safe and efficient heating. The cooling unit can be either a thermoelectric cooler (TEC) or a micro-compressor system, preferably a TEC for compact spaces. By integrating heating and cooling functions and combining with the temperature sensor 330 to form a closed-loop feedback control, the temperature control module 370 provides reliable temperature management for the cabin 310.

[0083] Specifically, the gas supply device 400 includes a gas source 410, a solenoid valve 420, a flow meter 430, and a humidifier 450 connected sequentially via pipelines. The humidifier 450 is connected to the interior of the environmental test chamber 300 via pipelines. The gas source 410 is used to supply gas to the interior of the environmental test chamber 300. Specifically, the gas source 410 can be an air compressor or a high-purity gas tank. A high-efficiency filter 440 is installed on the pipeline between the flow meter 430 and the humidifier 450. The solenoid valve 420 is used to open or close the gas path. The flow meter 430 is a mass flow meter used to regulate the gas flow rate to control the ventilation rate. The high-efficiency filter 440 is used to remove particulate matter from the air to avoid affecting the internal background of the environmental test chamber 300. The humidifier 450 is used to regulate the air humidity to meet the set requirements of the environmental test chamber 300.

[0084] The particle collection and analysis device 500 includes a particle collection port 510 and a particle counter 520 connected to the particle collection port 510. The particle collection port 510 is located inside the chamber 310; the particle counter 520 is electrically connected to the controller 600. The particle collection port 510 is funnel-shaped and made of stainless steel tubing. Particles generated by friction inside the chamber 310 enter the particle counter 520 through the particle collection port 510 for analysis.

[0085] The controller 600 is electrically connected to the temperature sensor 330, humidity sensor 340, wind speed sensor 350, exhaust pump 360, and temperature control module 370 of the environmental test chamber 300; to the air source 410, solenoid valve 420, flow meter 430, and humidifier 450 of the air supply device 400; to the rotation source 241, linear drive source 261, and XY bidirectional slide 280 of the friction device 200; and to the particle counter 520 of the particle acquisition and analysis device 500. The controller 600 is used to control the environmental parameters of the environmental test chamber 300, the operation and shutdown of the air supply device 400 and the friction device 200, and to acquire particle size and concentration information. It controls and adjusts environmental conditions (temperature, relative humidity, wind speed, air exchange rate) and friction conditions (load, abrasive particle size, friction area, friction speed), and records monitoring data in real time, achieving precise control and real-time monitoring of environmental test parameters and friction conditions, thus improving the accuracy and reliability of test data.

[0086] This invention provides a system for evaluating the dust generation of cleanroom flooring materials. An environmental test chamber provides constant environmental conditions, and a friction device simulates the friction process. The system evaluates the dust generation of different particle sizes under various environmental conditions (including temperature, relative humidity, and wind speed) and friction conditions (including load, abrasive particle size, friction area, and friction speed). This ensures the accuracy and repeatability of the test results, significantly saving labor and time costs, and providing reliable support for selecting suitable flooring materials for cleanrooms and related controlled environments.

[0087] The test method for evaluating the dust generation of cleanroom flooring materials according to this embodiment of the invention includes the following steps:

[0088] S1. Adjust the preset environmental parameters of the environment in which the test sample 100 is located according to the friction test conditions of the test sample 100; wherein, the environmental parameters include temperature, humidity and wind speed. Specifically, the temperature range of the inner cavity of the environmental test chamber 300 is 15℃~40℃, the relative humidity range is 20%~80%, and the wind speed range is 0.1m / s~0.5m / s.

[0089] S2. Adjust the preset friction conditions, which include load, abrasive particle size, friction area and friction speed.

[0090] S3. Once the temperature, humidity, and wind speed inside the environmental test chamber 300 have stabilized and met the preset requirements, shut off the air intake and exhaust.

[0091] S4. Obtain the particle size D of each particle in the chamber under no-load conditions. p All particles are categorized into N groups. b See the i-th particle size range; obtain the background concentration C of particles in the i-th particle size range. Pi0 , i∈[1,N b ].

[0092] S5. Place the test sample 100 inside the environmental test chamber.

[0093] S6. Turn on the friction device 200. The friction device 200 rubs the sample to be tested and measures the particle concentration C of the i-th particle size band in the chamber at time t in real time. Pi(t) ;

[0094] S7. Obtain the average dust generation of the test sample 100 under preset environmental parameters and preset friction conditions. The average particle concentration is calculated using the following formula:

[0095] ;

[0096] The average dust generation rate is calculated using the following formula:

[0097] ;

[0098] In the formula,

[0099] C Pi(av) The average concentration of particles in the i-th particle size range, expressed in particles per cubic meter;

[0100] C Pi(t) Let be the concentration of particles in the i-th particle size range at time t, in particles per cubic meter;

[0101] C Pi0 The background concentration of particles in the i-th particle size range, expressed in particles per cubic meter;

[0102] t0 is the start-up time of the friction device;

[0103] t1 is the time when the friction device is closed;

[0104] E Pi(av) The average dust generation of particles in the i-th particle size range, expressed in particles per square meter;

[0105] A represents the friction area of ​​the test sample 100, in square meters;

[0106] V represents the internal volume of the environmental test chamber, measured in cubic meters.

[0107] The following provides specific examples of methods and systems for evaluating the dust generation of flooring materials used in cleanrooms.

[0108] This study simulates and evaluates the dust generation of a PVC flooring material intended for use in semiconductor cleanrooms under service conditions. An environmental test chamber with a volume of 1 m³ and a capacity of 300 mL was used. 3 The environmental test chamber was set at 23°C, 50% relative humidity, and 0.3 m / s to 0.5 m / s wind speed. The environmental conditions (temperature, relative humidity, wind speed, and air exchange rate) were set on the controller (600). The abrasive particle size was P220, and the friction area was 0.05 m². 2 The grinding disc 243 was used, and the friction load of the test sample 100 was 10 kg. A motor 241 was used as the rotation source, and the motor speed was set to 80 rpm. After the set environmental conditions were reached, the air intake and exhaust were shut off; the particle collection and analysis device 500 was started to monitor the background value of particle concentration in the air inside the chamber; approximately 0.1 m of PVC flooring was cut. 2 The sample was cleaned with deionized water, air-dried, and then blown clean with a powerful blower to remove surface dust before being mounted on the sample holder 230. The grinding assembly 240 was started, and the concentration of particles of different sizes in the air inside the chamber was monitored for 10 minutes. The grinding assembly 240 was then turned off. The average dust generation of the test sample 100 under the set conditions is shown in Table 1.

[0109] Table 1

[0110]

[0111] Figure 8 The curve shows the change in particle concentration over time for particles with a diameter ≥1.0μm. t0 is the start-up time of the friction system, t1 is the shut-off time of the friction system, and t1-t0=10 min.

[0112] Finally, it should be noted that the above-described embodiments are merely specific implementations of this utility model, used to illustrate the technical solutions of this utility model, and not to limit it. The protection scope of this utility model is not limited thereto. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this utility model. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model, and should all be covered within the protection scope of this utility model.

Claims

1. A friction device, characterized in that, It is used to perform friction treatment on the test sample (100); Its structure includes: Base plate (210); Guide rods (220) are vertically mounted on the upper surface of the base plate (210) and are arranged in a rectangular array of four. The sample clamp (230) is slidably connected to the guide rod (220) and is used to clamp and fix the test sample (100). The grinding assembly (240) is disposed on the upper surface of the base plate (210) and located in the internal space of the two sets of guide rods (220) for rubbing the test sample (100); the grinding assembly (240) includes a rotation source (241), the rotation output end of the rotation source (241) is detachably connected to a grinding disc (243) via a flexible coupling (242), and the grinding surface of the grinding disc (243) faces away from the base plate (210); A load assembly (250) is disposed on the upper part of the sample clamp (230) for applying load to the test sample (100) during friction. When the friction device (200) is not in the friction state of the test sample (100), the height of the sample holder (230) is higher than that of the grinding disc (243); when the friction device (200) is in the friction state of the test sample (100), the test sample (100) is in contact with the grinding surface of the grinding disc (243); during the friction process, the sample holder (230) drives the test sample (100) to move downward along the guide rod (220), and the test sample (100) remains in contact with the grinding surface of the grinding disc (243).

2. The friction device according to claim 1, characterized in that, The friction device (200) also includes a telescopic assembly (260), which includes: A linear drive source (261) is fixedly mounted on a base plate (210); and The tray (262) is located at the output end of the linear drive source (261) and is in active contact with the bottom of the sample clamp (230); When the friction device (200) is not in the friction state of the test sample (100), the telescopic component (260) lifts the sample clamp (230) upward, and the height of the sample clamp (230) is higher than that of the grinding disc (243). When the friction device (200) is in the friction state of the test sample (100), the telescopic component (260) moves away from the sample clamp (230), and the test sample (100) comes into contact with the grinding surface of the grinding disc (243).

3. The friction device according to claim 1, characterized in that, The sample holder (230) includes: The sample placement section (231) has a sample placement groove (2311) for placing the test sample (100), and a threaded hole (2312) extending from the upper surface of the sample placement section (231) to the sample placement groove (2311). The axis of the threaded hole (2312) is orthogonal to the sample placement groove (2311). The clamping part (232) includes a threaded post (2321) that mates with a threaded hole (2312) and a pressure block (2322) fixed to the bottom end of the threaded post (2321). The threaded post (2321) is threadedly engaged with the threaded hole (2312) and passes through the threaded hole (2312). The pressure block (2322) is in the sample placement groove (2311). By rotating the threaded post (2321), the pressure block (2322) is driven to press the sample to be tested (100).

4. The friction device according to claim 1, characterized in that, The load assembly (250) includes: The mounting plate (251) is rigidly fixed to the upper surface of the sample clamp (230) by means of a bolt connection structure; The weight mounting rod (252) is set on the bearing plane of the mounting plate (251) in an axially vertical extension manner, and the surface of the rod is machined with a precision thread section; A weight set (253), which is formed by fitting standard weight units onto a weight mounting rod (252) in a nested manner; and A fastening nut (254) is provided on the weight mounting rod (252) and on the top surface of the weight set (253); The friction load of the test sample (100) is the sum of the weight of the load assembly (250), the weight of the sample jacket (230), and the weight of the test sample (100) itself.

5. The friction device according to claim 1, characterized in that, It also includes an XY bidirectional slide (280) mounted on the base plate (210), and the rotation source (241) of the grinding assembly (240) is fixedly mounted on the XY bidirectional slide (280).

6. The friction device according to claim 1, characterized in that, It also includes four adjustable support legs (290) arranged in a rectangular array on the base plate (210).

7. A system for evaluating the dust generation of flooring materials used in cleanrooms, characterized in that, include: An environmental test chamber (300) is used to provide a test environment for the friction process of the test sample (100); A gas supply device (400) is connected to the environmental test chamber (300) via a pipeline and is used to provide the environmental test chamber (300) with clean, dust-free, constant humidity gas; The friction device (200) according to any one of claims 1 to 6 is placed inside the environmental test chamber (300); as well as A particle collection and analysis device (500) is used to collect particles within a chamber and analyze the particle size and concentration; the particle collection and analysis device (500) includes: The particle collection port (510) is located inside the environmental test chamber (300); A particle counter (520) is connected to a particle collection port (510); The particles generated by friction inside the environmental test chamber (300) enter the particle counter (520) through the particle collection port (510) for analysis.

8. The system for evaluating the dust generation of cleanroom flooring materials according to claim 7, characterized in that, The main structure of the environmental test chamber (300) is a chamber body (310). An air inlet (320) connected to an air supply device (400) is provided on the side wall of the chamber body (310). A temperature sensor (330), a humidity sensor (340), a wind speed sensor (350), an exhaust pump (360), and a temperature control module (370) are provided on the inner wall of the chamber body (310). At least one circulating fan (380) is provided on the side wall and / or top wall inside the chamber body (310). The air inlet (320) is a stainless steel or polytetrafluoroethylene pipe with evenly distributed holes, which delivers the air evenly into the cabin.

9. The system for evaluating the dust generation of cleanroom flooring materials according to claim 8, characterized in that, The gas supply device (400) includes gas supplied in series via pipelines. Gas source (410) for supplying gas to the interior of environmental test chamber (300); Solenoid valve (420) is used to open or close the air circuit; Flow meter (430) is used to regulate gas flow to control ventilation rate; A high-efficiency filter (440) is used to remove particulate matter from the air to avoid affecting the internal background of the environmental test chamber (300); as well as Humidifier (450) is used to regulate air humidity to meet the set requirements of environmental test chamber (300); humidifier (450) is connected to air inlet (320) through pipe.

10. The system for evaluating the dust generation of cleanroom flooring materials according to claim 7, characterized in that, The system also includes a controller (600), which is electrically connected to the gas supply device (400), the friction device (200), and the particle collection and analysis device (500). The controller (600) is used to control the environmental parameters of the environmental test chamber (300), the operation and stop of the gas supply device (400), the operation and stop of the friction device (200), and to acquire particle size and concentration information.

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