Substrate film stripping device

Abstract

The utility model belongs to the field of film stripping, and particularly relates to a substrate film stripping device which comprises a film stripping container, and the interior of the film stripping container is used for containing film stripping liquid. The bearing component is used for placing a substrate; and the moving mechanism is connected with the bearing component, the moving mechanism comprises a lifting structure, and the lifting structure can drive the bearing component to do lifting motion, so that the substrate is immersed in / withdrawn from the film stripping liquid. The utility model provides a substrate film stripping device, and aims to overcome the defects of manual film stripping in the prior art.

Description

Technical Field

[0001] This utility model belongs to the field of film removal, and specifically relates to a substrate film removal device. Background Technology

[0002] In the field of liquid crystal display (LCD) manufacturing, the photomask is a core component of the photolithography process. To enable the reuse of the photomask substrate or to create new patterns, it is necessary to remove the photoresist and metal film, among other masking materials, from the photomask surface. In addition, in laboratory settings, it is often necessary to remove the metal film layer from the photomask after testing.

[0003] However, in practice, the film is often removed manually, which results in low removal efficiency and also poses a risk of injury. Utility Model Content

[0004] This invention provides a substrate stripping device, which aims to overcome the shortcomings of manual stripping in the prior art.

[0005] To achieve the above objectives, this utility model provides a substrate stripping device, comprising:

[0006] A film removal container, the interior of which is used to contain film removal solution;

[0007] Support member, the support member being used to place the substrate; and

[0008] A moving mechanism is connected to the supporting component. The moving mechanism includes a lifting structure that can drive the supporting component to move up and down, so that the substrate is immersed in / out of the stripping solution.

[0009] In this solution, a moving mechanism is used to immerse the substrate into the stripping solution and to separate the substrate from the stripping solution. Compared with the manual operation in the prior art, this improves the efficiency of picking and placing, thereby improving the stripping efficiency of the substrate. At the same time, the operation by the moving mechanism also greatly reduces the risk of worker injury.

[0010] Preferably, to improve the substrate's delamination efficiency, spraying efficiency, and drying efficiency, the moving mechanism of this solution includes a rotating structure that can drive the supporting component to rotate. This solution drives the substrate to rotate during the delamination, spraying, and drying processes, thereby ensuring that the substrate is rotating while undergoing delamination, spraying, and drying, thus improving the substrate's delamination efficiency, spraying efficiency, and drying efficiency.

[0011] Preferably, to avoid the moving mechanism interfering with the placement and removal of the substrate, the moving mechanism in this solution is located at the bottom of the supporting component. By placing the moving mechanism at the bottom of the supporting component, this solution ensures that the moving mechanism will not interfere with the placement and removal of the substrate, thus enhancing its practicality.

[0012] Preferably, after the substrate has undergone film removal, in order to separate the residual film removal liquid from the substrate, this solution further includes a spraying module. The spraying module includes nozzles that are positioned towards the supporting component. This solution uses the spraying module to spray the substrate, thereby separating the residual film removal liquid from the substrate surface and preventing a large amount of film removal liquid from remaining on the substrate.

[0013] Preferably, in order to achieve spraying of the substrate, the spraying module of this solution further includes a storage container for containing deionized water, and the storage container is connected to the nozzle.

[0014] Preferably, since deionized water remains on the substrate surface after spraying, this solution further includes a drying module to remove the residual deionized water. The drying module is positioned facing the supporting component. This solution dries the substrate using the drying module, removing the residual deionized water and preventing it from affecting the subsequent use of the substrate.

[0015] Preferably, in order to dry the substrate, the drying module of this solution includes an air outlet, which is disposed toward the supporting component.

[0016] Preferably, to avoid a large amount of liquid remaining inside the support component, the support component of this solution is constructed with a drainage hole. This solution discharges liquid by constructing a drainage hole, solving the problem of a large amount of liquid remaining inside the support component, and further improving the drying effect of the substrate.

[0017] Preferably, to prevent liquid from splashing to the outside, the film removal container in this solution is a closed chamber, and the supporting component and the moving mechanism are housed inside the film removal container. This solution performs film removal, spraying, and drying inside the closed chamber, reducing the likelihood of liquid splashing to the outside and causing leakage, thus enhancing its practicality.

[0018] The beneficial effects of this utility model are as follows: In this solution, the substrate is immersed in the stripping solution and the substrate is separated from the stripping solution by a moving mechanism. Compared with the manual operation in the prior art, the picking and placing efficiency is improved, thereby improving the stripping efficiency of the substrate. At the same time, the operation by the moving mechanism also greatly reduces the problem of worker injury. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the substrate stripping device (the substrate and the stripping solution are in a separated state).

[0020] Figure 2 This is a schematic diagram of the substrate stripping device (the substrate and the stripping solution are in contact).

[0021] The reference numerals in the attached drawings include: film removal container 1, opening 11, supporting component 2, moving mechanism 3, lifting structure 31, rotating structure 32, spraying module 4, drying module 5, and substrate 6. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. When the following description refers to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this disclosure. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this disclosure as detailed in the appended claims.

[0023] In this disclosure, unless otherwise stated, directional terms such as "inner" and "outer" are defined based on the contours of the corresponding components. Terms such as "first" and "second" used in this disclosure are for distinguishing one element from another and do not imply sequence or importance.

[0024] Example 1

[0025] The basics are as follows: Figure 1 To be continued Figure 2 As shown, a substrate stripping device includes a stripping container 1, a support component 2, a moving mechanism 3, a spraying module 4, and a drying module 5.

[0026] In this embodiment, the stripping container 1 is a closed chamber, and the overall shape of the stripping container 1 can be rectangular. The interior of the stripping container 1 is used to contain the stripping liquid, and the stripping container 1 can prevent the stripping liquid from splashing to the outside during substrate stripping, thus preventing liquid leakage. The type of stripping liquid matches the type of film layer on the substrate, so that the film layer on the substrate surface can be stripped completely. The top of the stripping container 1 has an opening 11. When substrate stripping is required, the substrate is inserted into the stripping container 1 through the opening 11; after the substrate stripping is completed, the substrate is removed from the opening 11. At the same time, a door can be provided at the opening 11 of the substrate, thereby realizing the opening or closing of the stripping container 1 and preventing the stripping liquid from splashing at the opening 11.

[0027] To replace the stripping solution inside the stripping container 1, an inlet pipe and a drain pipe can be installed on the stripping container 1. The inlet pipe is used to introduce the stripping solution into the stripping container 1, and the drain pipe is used to discharge the stripping solution from the stripping container 1. After prolonged use, the stripping solution inside the stripping container 1 can be replaced by using the inlet and drain pipes.

[0028] In this embodiment, the supporting component 2 is specifically a receiving platform, which is rectangular in shape. Each of the four corners of the receiving platform has a protrusion, which is frustum-shaped with inclined sides. The protrusions at the four corners cooperate to limit and position the substrate, ensuring its stable placement on the platform and preventing it from falling. Furthermore, the substrate is suspended on the platform, allowing for sufficient contact between the substrate and the stripping solution. To prevent excessive liquid residue inside the receiving platform, a drainage hole is included, allowing any residual liquid to drain out, thus resolving the liquid residue issue.

[0029] To enable the movement of the supporting component 2, allowing the substrate to be immersed in the stripping solution and to separate the substrate from the stripping solution, a moving mechanism 3 is fixedly connected to the bottom of the supporting component 2. The moving mechanism 3 enables the movement of the substrate. Specifically, the moving mechanism 3 includes a lifting structure 31 and a rotating structure 32. The lifting structure 31 enables the immersion of the substrate in the stripping solution and the separation of the substrate from the stripping solution. During the stripping process, the rotating structure 32 drives the substrate to rotate, improving the stripping efficiency.

[0030] The lifting structure 31 in this embodiment can be a lifting cylinder or other lifting structures 31 in the prior art. The lifting structure 31 is used to drive the supporting component 2 to move up and down. The lifting structure 31 is fixedly connected to the bottom of the supporting component 2 by fasteners. The rotating structure 32 can be a rotating platform or other rotating structures 32 in the prior art. The rotating structure 32 is used to drive the substrate to rotate. The rotating structure 32 is specifically installed in the inner bottom of the film removal container 1. The rotating structure 32 and the lifting structure 31 are connected by welding or by fasteners. When the rotating structure 32 is working, it drives the lifting structure 31 and the supporting component 2 to rotate synchronously; while when the lifting structure 31 is working, it only drives the supporting component 2 to move up and down.

[0031] The following describes the working process of the moving mechanism 3 during the film removal process: When film removal is required, the lifting structure 31 drives the supporting component 2 to sink into the film removal liquid. During the film removal process, the rotating structure 32 drives the supporting component 2 to rotate, improving the film removal efficiency of the substrate. After the substrate has been removed, the lifting structure 31 drives the supporting component 2 to rise, and the substrate separates from the film removal liquid.

[0032] After the film removal process is completed, in order to separate the film removal solution from the substrate, the spray module 4 in this embodiment operates after the film removal process. The specific structure of the spray module 4 includes a nozzle, a pump body, and a storage container. The storage container is used to hold deionized liquid, and the storage container can be a storage tank. The inlet of the pump body is connected to the storage container, and the outlet of the pump body is connected to the nozzle. The nozzle is a nozzle in the prior art, which is fixedly installed inside the film removal container 1 and faces the top of the supporting component 2. When the pump body is working, the pump body delivers the deionized liquid inside the storage container to the nozzle, and the nozzle sprays the deionized liquid precisely onto the substrate surface to achieve the separation of the film removal solution from the substrate. During spraying, the rotating structure 32 synchronously drives the substrate to rotate, so that the deionized liquid comes into more thorough contact with the substrate, improving the separation effect of the deionized liquid and the substrate.

[0033] After the stripping solution separates from the substrate, the drying module 5 in this embodiment operates after the spraying process to dry the substrate. The drying module 5 is used to dry the substrate and prevent residual liquid from remaining on it. Specifically, the drying module 5 includes a fan and an air outlet duct; the fan can be a blower. The fan is connected to the air outlet duct, which is fixedly installed inside the stripping container 1, with its outlet facing the top of the supporting component 2. The airflow output from the air outlet duct contacts the substrate surface, achieving substrate drying. During drying, the rotating structure 32 synchronously rotates the substrate, ensuring more thorough contact between the substrate and the airflow, thus improving the drying effect.

[0034] It should be noted that while this embodiment preferably uses air blowing to dry the substrate surface, other drying methods from the prior art can be used in some other embodiments. For example, a drying device can be configured in the film removal container 1 to dry the substrate.

[0035] To achieve automation of the entire device, in this embodiment, the moving mechanism 3, spraying module 4, and drying module 5 are all connected to the control module via signals. The control module can be an industrial control computer or a PLC control module, as is available in the prior art. By controlling the moving mechanism 3, spraying module 4, and drying module 5 to work sequentially, the device achieves a higher degree of automation.

[0036] The following detailed description of the specific implementation method is as follows: When it is necessary to remove the film from the substrate, the operator opens the opening 11 of the film removal container 1, puts the substrate into the film removal container 1, and places the substrate on the surface of the support member 2.

[0037] The moving mechanism 3 drives the supporting component 2 to sink into the stripping solution, bringing the solution into contact with the substrate. The coating on the substrate surface is then stripped. Simultaneously, during the stripping process, the moving mechanism 3 rotates the substrate, improving stripping efficiency.

[0038] After the substrate has undergone film removal, the moving mechanism 3 lifts the substrate, separating it from the stripping solution. Then, the spraying module 4 operates, spraying deionized liquid onto the substrate to separate any remaining stripping solution from the substrate surface. During spraying, the rotating structure 32 simultaneously rotates the substrate, enhancing the spraying effect. After spraying, the drying module 5 then operates, blowing air onto the substrate surface to dry it. During drying, the rotating structure 32 simultaneously rotates the substrate, further enhancing the drying effect.

[0039] After the substrate surface is dried, the operator removes the substrate from the uncoating container 1.

[0040] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A substrate stripping device, characterized in that: include A film removal container, the interior of which is used to contain film removal solution; A support component for placing a substrate; as well as A moving mechanism is connected to the supporting component. The moving mechanism includes a lifting structure that can drive the supporting component to move up and down, so that the substrate is immersed in / out of the stripping solution.

2. The substrate stripping apparatus according to claim 1, characterized in that: The moving mechanism includes a rotating structure that can drive the supporting component to rotate.

3. The substrate stripping apparatus according to claim 1 or 2, characterized in that: The moving mechanism is located at the bottom of the supporting component.

4. The substrate stripping apparatus according to claim 1, characterized in that: It also includes a spray module, which includes nozzles that are positioned toward the support component.

5. The substrate stripping apparatus according to claim 4, characterized in that: The spray module also includes a storage container for holding deionized water, and the storage container is connected to the nozzle.

6. The substrate stripping apparatus according to claim 1, characterized in that: It also includes a drying module, which is positioned toward the supporting component.

7. The substrate stripping apparatus according to claim 6, characterized in that: The drying module includes an air outlet, which is positioned toward the supporting component.

8. The substrate stripping apparatus according to claim 1, characterized in that: The supporting component is equipped with a drainage hole.

9. The substrate stripping apparatus according to claim 1, characterized in that: The film removal container is a closed chamber, and the supporting components and moving mechanism are housed inside the film removal container.

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