Multifunctional rotary exposure machine clamp

Abstract

The utility model discloses a multifunctional rotary exposure machine clamp, which relates to the technical field of exposure machines and comprises a support frame arranged on a support plate and fixedly connected with the support plate; the supporting column is arranged in the supporting frame and fixedly connected with the supporting frame; the moving mechanism is arranged on the supporting plate and is used for moving the photoetching plate; the clamping mechanism is arranged in the moving mechanism and is used for clamping and fixing the photoetching plate; the sliding groove is formed in the supporting plate; the sliding plate is arranged in the sliding groove and is in sliding connection with the sliding groove; the connecting groove is formed in the sliding plate; the connecting block is arranged in the connecting groove and is in sliding connection with the connecting groove; by arranging the clamping mechanism, the photoetching plate is clamped and fixed, and adjustment can be carried out according to photoetching plates with different thicknesses, so that the exposure machine is more flexible to use; and by arranging the moving mechanism, the photoetching plate can be placed and taken more conveniently.

Description

TECHNICAL FIELD

[0001] The utility model relates to exposure machine technical field especially relates to a multifunctional rotary exposure machine clamp. BACKGROUND

[0002] Exposure machine, shortly "exposure machine", is a kind of equipment that is transferred to photoresist (photosensitive glue) by optical projection and photoetching technology. It plays a core role in semiconductor manufacturing, is responsible for accurately projecting circuit pattern to the surface of silicon wafer, provides pattern positioning for subsequent etching, ion implantation and other process steps.

[0003] Exposure machine needs to fix photoetching plate when using, avoids photoetching plate to produce too much deviation when exposing, influences the stability and accuracy of exposure, but the thickness of photoetching plate is different, and the existing clamp is mostly fixed, can not be adjusted according to the photoetching plate of different thickness, so it needs to be improved. UTILITY MODEL CONTENT

[0004] In view of the deficiency of prior art, the utility model provides a multifunctional rotary exposure machine clamp, to solve the technical problem that exposure machine furniture can not fix photoetching plate of different thickness.

[0005] In order to realize the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A kind of multifunctional rotary exposure machine clamp, including control box, support plate and photoetching plate, the support plate is fixedly connected with the control box;Further comprising:

[0007] Support frame is set on the support plate, and is fixedly connected with support plate;

[0008] Support column is set in the support frame, and is fixedly connected with support frame;

[0009] Photomask is fixedly connected with the support column;

[0010] Moving mechanism is set on the support plate, and is used to move photoetching plate;

[0011] Clamping mechanism is set in the moving mechanism, and is used to clamp and fix photoetching plate;

[0012] Sliding slot is opened in the support plate;

[0013] Sliding plate is set in the sliding slot, and is slidably connected with sliding slot;

[0014] Connecting groove is opened in the sliding plate;

[0015] A connecting block is arranged in the connecting groove and is in sliding connection with the connecting groove.

[0016] Preferably, the moving mechanism comprises:

[0017] A moving frame is arranged on the support plate and is in fixed connection with the support plate.

[0018] A moving motor is in fixed connection with the moving frame.

[0019] A moving shaft is in fixed connection with the output end of the moving motor and is in rotary connection with the support plate.

[0020] A first moving gear is in fixed connection with the moving shaft.

[0021] A second moving gear is in fixed connection with the moving shaft.

[0022] Preferably, the sliding plate is in engagement with the first moving gear and is in engagement with the second moving gear.

[0023] Preferably, the clamping mechanism comprises:

[0024] A clamping groove is arranged in the sliding plate.

[0025] A clamping rod is arranged in the clamping groove and is in fixed connection with the sliding plate.

[0026] A clamping sleeve is in fixed connection with the clamping rod and is in sliding connection with the sliding plate.

[0027] A clamping block is in fixed connection with the clamping sleeve.

[0028] A rotary component is arranged on the clamping sleeve.

[0029] Preferably, the rotary component comprises:

[0030] A rotary block is arranged on the clamping sleeve and is in fixed connection with the clamping sleeve.

[0031] A rotary spring has one end in fixed connection with the sliding plate and the other end in fixed connection with the rotary block.

[0032] Two first rotary shafts are symmetrically arranged on the rotary block and are in fixed connection with the rotary block.

[0033] A rotary plate is in rotary connection with the first rotary shaft.

[0034] A second rotary shaft is in rotary connection with the rotary plate.

[0035] A connecting component is arranged on the sliding plate.

[0036] Preferably, the connecting component comprises:

[0037] A connecting frame is arranged on the connecting block and fixedly connected with the connecting block and the second rotating shaft;

[0038] A connecting plate is fixedly connected with the connecting block.

[0039] Preferably, a supporting groove is arranged on the sliding plate for placing a photoetching plate.

[0040] In conclusion, the present application has the following advantages:

[0041] The clamping mechanism is arranged to clamp and fix the photoetching plate, and can be adjusted according to photoetching plates with different thicknesses, so that the exposure machine is more flexible to use. The moving mechanism is arranged to place and take the photoetching plate more conveniently. BRIEF DESCRIPTION OF DRAWINGS

[0042] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed in the embodiment description. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.

[0043] Figure 1 A perspective structural schematic view of a multifunctional rotary exposure machine clamp is shown.

[0044] Figure 2 A perspective sectional structural schematic view of a multifunctional rotary exposure machine clamp is shown.

[0045] Figure 3 A perspective exploded view of a multifunctional rotary exposure machine clamp is shown.

[0046] Figure 4 A moving mechanism exploded view of a multifunctional rotary exposure machine clamp is shown.

[0047] Figure 5 A clamping mechanism exploded view of a multifunctional rotary exposure machine clamp is shown.

[0048] Figure 6 An enlarged view of A in the figure is shown. Figure 5 An enlarged view of B in the figure is shown.

[0049] Figure 7 An enlarged view of C in the figure is shown. Figure 2 An enlarged view of D in the figure is shown.

[0050] Legend:

[0051] 1. Control box; 2. Support plate; 3. Photolithography plate; 4. Support frame; 5. Support column; 6. Photomask; 7. Sliding groove; 8. Sliding plate; 9. Connecting groove; 10. Connecting block; 11. Moving frame; 12. Moving motor; 13. Moving shaft; 14. First moving gear; 15. Second moving gear; 16. Clamping groove; 17. Clamping rod; 18. Clamping sleeve; 19. Clamping block; 20. Rotating block; 21. Rotating spring; 22. First rotating shaft; 23. Rotating plate; 24. Second rotating shaft; 25. Connecting frame; 26. Connecting plate; 27. Support groove. Detailed Implementation

[0052] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0053] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0054] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0055] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0056] Reference Figures 1 to 7The present invention provides a further description of an embodiment of a multifunctional rotary exposure machine fixture.

[0057] A multifunctional rotary exposure machine fixture includes a control box 1, a support plate 2, and a photomask 3, with the support plate 2 fixedly connected to the control box 1. It also includes: a support frame 4, mounted on and fixedly connected to the support plate 2; a support column 5, located within and fixedly connected to the support frame 4; a photomask 6, fixedly connected to the support column 5; a moving mechanism mounted on the support plate 2 for moving the photomask 3; a clamping mechanism located within the moving mechanism for clamping and fixing the photomask 3; a sliding groove 7 formed on the support plate 2; a sliding plate 8, located within and slidably connected to the sliding groove 7; a connecting groove 9 formed on the sliding plate 8; and a connecting block 10, located within and slidably connected to the connecting groove 9.

[0058] Reference Figure 4 In a preferred embodiment, the moving mechanism includes: a moving frame 11, which is disposed on the support plate 2 and fixedly connected to the support plate 2; a moving motor 12, which is fixedly connected to the moving frame 11; a moving shaft 13, which is fixedly connected to the output end of the moving motor 12 and rotatably connected to the support plate 2; a first moving gear 14, which is fixedly connected to the moving shaft 13; and a second moving gear 15, which is fixedly connected to the moving shaft 13.

[0059] This configuration ensures that when the mobile motor 12 is running, it drives the mobile shaft 13, which is fixedly connected to the output end of the mobile motor 12, to rotate, causing the first mobile gear 14 and the second mobile gear 15, which are fixedly connected to the mobile shaft 13, to rotate.

[0060] Reference Figure 4 In a preferred embodiment, the sliding plate 8 meshes with the first moving gear 14 and with the second moving gear 15.

[0061] This configuration allows the sliding plate 8, which meshes with the first moving gear 14 and the second moving gear 15, to slide within the sliding groove 7, thereby driving the photomask 3 to move into the exposure machine, enabling convenient movement and removal of the photomask 3.

[0062] Reference Figure 5 and Figure 6 In a preferred embodiment, the clamping mechanism includes: a clamping groove 16, which is formed in the sliding plate 8; a clamping rod 17, which is disposed in the clamping groove 16 and fixedly connected to the sliding plate 8; a clamping sleeve 18, which is fixedly connected to the clamping rod 17 and slidably connected to the sliding plate 8; a clamping block 19, which is fixedly connected to the clamping sleeve 18; and a rotating component disposed on the clamping sleeve 18.

[0063] This configuration allows pressing the clamping block 19 to move it closer to the sliding plate 8, causing the clamping sleeve 18, which is fixedly connected to the clamping block 19, to slide on the clamping rod 17, thereby driving the rotating component to operate.

[0064] Reference Figure 5 and Figure 6 In a preferred embodiment, the rotating component includes: a rotating block 20, disposed on the clamping sleeve 18 and fixedly connected to the clamping sleeve 18; a rotating spring 21, one end of which is fixedly connected to the sliding plate 8 and the other end of which is fixedly connected to the rotating block 20; two first rotating shafts 22, which are symmetrically disposed on the rotating block 20 and fixedly connected to the rotating block 20; a rotating plate 23, which is rotatably connected to the first rotating shafts 22; a second rotating shaft 24, which is rotatably connected to the rotating plate 23; and a connecting component disposed on the sliding plate 8.

[0065] This configuration causes the rotating block 20, which is fixedly connected to the clamping sleeve 18, to move, thereby compressing the rotating spring 21, which is fixedly connected to the rotating block 20, generating elastic potential energy, which in turn drives the rotating plate 23, which is rotatably connected to the first rotating shaft 22, to rotate, thus driving the connecting components to run.

[0066] Reference Figure 5 and Figure 6 In a preferred embodiment, the connecting component includes: a connecting frame 25, which is disposed on the connecting block 10, fixedly connected to the connecting block 10, and fixedly connected to the second rotating shaft 24; and a connecting plate 26, which is fixedly connected to the connecting block 10.

[0067] Reference Figure 4 In a preferred embodiment, the sliding plate 8 has a support groove 27 for placing the photomask 3.

[0068] This configuration allows the connecting frame 25, which is fixedly connected to the second rotating shaft 24, to slide the connecting block 10 within the connecting groove 9, causing the connecting plate 26, which is fixedly connected to the connecting block 10, to move away from each other. Then, the photomask 3 is placed into the support groove 27, and the clamping block 19 is released, causing the rotating spring 21 to release its elastic potential energy, which in turn causes the connecting plates 26 to move closer to each other until the connecting plate 26 contacts the photomask 3, thereby clamping and fixing the photomask 3.

[0069] Working principle: In use, first press the clamping block 19 to move it closer to the sliding plate 8, so that the clamping sleeve 18, which is fixedly connected to the clamping block 19, slides on the clamping rod 17, thereby moving the rotating block 20, which is fixedly connected to the clamping sleeve 18, and compressing the rotating spring 21, which is fixedly connected to the rotating block 20, generating elastic potential energy, thereby driving the rotating plate 23, which is rotatably connected to the first rotating shaft 22, to rotate. This causes the connecting frame 25, which is fixedly connected to the second rotating shaft 24, to slide the connecting block 10 in the connecting groove 9, and causes the connecting plate 26, which is fixedly connected to the connecting block 10, to move away from each other. Then, the photomask 3 is placed in the support groove 27, and the clamping block 19 is released, so that the rotating spring 21 releases its elastic potential energy, causing the connecting plate 26 to move closer to each other until the connecting plate 26 contacts the photomask 3, thus clamping and fixing the photomask 3.

[0070] Next, the moving motor 12 is started, which drives the moving shaft 13, which is fixedly connected to the output end of the moving motor 12, to rotate. This causes the first moving gear 14 and the second moving gear 15, which are fixedly connected to the moving shaft 13, to rotate. This causes the sliding plate 8, which meshes with the first moving gear 14 and the second moving gear 15, to slide in the sliding groove 7. This causes the photomask 3 to move into the exposure machine, thus enabling convenient movement and removal of the photomask 3.

[0071] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multifunctional rotary exposure machine fixture, comprising a control box (1), a support plate (2), and a photomask (3), wherein the support plate (2) is fixedly connected to the control box (1); characterized in that, Also includes: A support frame (4) is disposed on the support plate (2) and fixedly connected to the support plate (2); A support column (5) is set inside the support frame (4) and is fixedly connected to the support frame (4); The photomask (6) is fixedly connected to the support column (5); A moving mechanism is provided on the support plate (2) for moving the photomask (3); A clamping mechanism is provided inside the moving mechanism for clamping and fixing the photomask (3); A sliding groove (7) is formed on the support plate (2); A sliding plate (8) is disposed in the sliding groove (7) and is slidably connected to the sliding groove (7); A connecting groove (9) is formed on the sliding plate (8); A connecting block (10) is disposed in the connecting groove (9) and is slidably connected to the connecting groove (9).

2. The multifunctional rotary exposure machine fixture according to claim 1, characterized in that, The moving mechanism includes: The movable frame (11) is set on the support plate (2) and fixedly connected to the support plate (2); A movable motor (12) is fixedly connected to the movable frame (11); The movable shaft (13) is fixedly connected to the output end of the movable motor (12) and rotatably connected to the support plate (2); The first moving gear (14) is fixedly connected to the moving shaft (13); The second moving gear (15) is fixedly connected to the moving shaft (13).

3. The multifunctional rotary exposure machine fixture according to claim 2, characterized in that, The sliding plate (8) meshes with the first moving gear (14) and with the second moving gear (15).

4. A multifunctional rotary exposure machine fixture according to claim 3, characterized in that, The clamping mechanism includes: A clamping groove (16) is formed inside the sliding plate (8); A clamping rod (17) is disposed in the clamping groove (16) and fixedly connected to the sliding plate (8); The clamping sleeve (18) is fixedly connected to the clamping rod (17) and slidably connected to the sliding plate (8); The clamping block (19) is fixedly connected to the clamping sleeve (18); A rotating component is disposed on the clamping sleeve (18).

5. A multifunctional rotary exposure machine fixture according to claim 4, characterized in that, The rotating component includes: A rotating block (20) is disposed on the clamping sleeve (18) and fixedly connected to the clamping sleeve (18); The rotating spring (21) is fixedly connected at one end to the sliding plate (8) and at the other end to the rotating block (20); There are two first rotating shafts (22), and the two first rotating shafts (22) are symmetrically arranged on the rotating block (20) and fixedly connected to the rotating block (20); The rotating plate (23) is rotatably connected to the first rotating shaft (22); The second rotating shaft (24) is rotatably connected to the rotating plate (23); The connecting component is disposed on the sliding plate (8).

6. A multifunctional rotary exposure machine fixture according to claim 5, characterized in that, The connecting component includes: A connecting frame (25) is disposed on the connecting block (10), fixedly connected to the connecting block (10), and fixedly connected to the second rotating shaft (24); The connecting plate (26) is fixedly connected to the connecting block (10).

7. A multifunctional rotary exposure machine fixture according to claim 6, characterized in that, The sliding plate (8) has a support groove (27) for placing the photomask (3).

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