Power-off continuous inflation device suitable for wafer conveying carrier
By designing a continuous nitrogen supply device suitable for wafer transport carriers during power outages, the problem of insufficient nitrogen supply caused by unstable voltage was solved, achieving continuous nitrogen supply during power outages, protecting wafers and extending process time.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2026-04-07
AI Technical Summary
During semiconductor manufacturing, insufficient nitrogen gas filling in the FOUP due to unstable voltage or circuit breaker tripping can lead to excessive humidity, which may cause wafer oxidation and affect process time.
A power-off continuous gas filling device suitable for wafer transport carriers was designed. By automatically opening the gas filling branch in the event of a power outage, continuous gas filling is achieved by using a second vacuum valve, a second speed regulating valve, and a second flow meter, ensuring that the nitrogen supply is uninterrupted.
In the event of a power outage, the device can automatically and continuously supply gas to protect the wafers inside the FOUP from damage, prevent oxidation caused by insufficient gas supply, and extend the process time.
Smart Images
Figure CN224098087U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a kind of power-off sustained inflation devices suitable for wafer conveying carrier. BACKGROUND
[0002] With the improvement of process, the semiconductor industry needs more strict control of humidity and oxygen content in Foup to reduce the contact between wafer and oxygen and humidity to avoid oxidation reaction.
[0003] Nitrogen filling for Foup is the most important process, and the equipment for nitrogen filling for Foup has gradually become a necessary equipment in wafer industry.
[0004] In the wafer manufacturing process, nitrogen needs to be filled into the Foup placed on the OHB bridge to avoid oxidation caused by long time of wafer placed on the OHB bridge and to prolong the process time of wafer. After searching, the patent: a dynamic adjustment gas flow system based on MFC (CN202323241983.1) includes a cabinet, an air inlet joint and an air outlet joint connected to the cabinet, a first pressure regulating valve connected in the cabinet, the inlet end of the first pressure regulating valve is in communication with the outlet end of the N2 tank, the outlet end of the first pressure regulating valve is in communication with the air inlet end of the air inlet valve, the air outlet end of the air inlet valve is in communication with the air inlet end of the first gas flow controller, the air outlet end of the first gas flow controller is in communication with the air inlet joint, the air outlet end of the first pressure regulating valve is in communication with the air inlet end of the second pressure regulating valve, the air outlet end of the second pressure regulating valve is in communication with the air inlet end of the second gas flow controller, the air outlet end of the second gas flow controller is in communication with the P end of the vacuum generator, the V end of the vacuum generator is in communication with the air outlet end of the flowmeter, and the E end of the vacuum generator is connected with the exhaust pipe. However, some factories have unstable voltage and tripping situation, which may cause insufficient FOUP inflation time, resulting in high moisture in FOUP and dead goods.
[0005] In view of the above defects, the designer actively researches and innovates to create a new structure of power-off sustained inflation device suitable for wafer conveying carrier, which has more industrial value. CONTENT OF UTILITY MODEL
[0006] To solve the above technical problems, the utility model aims to provide a power-off sustained inflation device suitable for wafer conveying carrier.
[0007] To achieve the above purpose, the utility model adopts the following technical solutions:
[0008] The power-off continuous inflation device suitable for wafer conveying carriers comprises a cabinet, an air inlet joint and an air outlet joint connected to the cabinet, a first pressure regulating valve, a first vacuum valve, a first speed regulating valve, a vacuum generator, a first flow meter, an air outlet valve, a second vacuum valve, a second speed regulating valve, a second flow meter and an MFC connected in the cabinet, the air inlet end of the first pressure regulating valve is connected with the air outlet end of an N2 tank, the air outlet end of the first pressure regulating valve is connected with the air inlet end of the MFC, the air outlet end of the MFC is connected with the air inlet joint, the air outlet end of the first pressure regulating valve is connected with the air inlet end of the first vacuum valve, the air outlet end of the first vacuum valve is connected with the air inlet end of the first speed regulating valve, the air outlet end of the first speed regulating valve is connected with the P end of the vacuum generator, the E end of the vacuum generator is connected with an external end, the V end of the vacuum generator is connected with the air outlet end of the first flow meter, the air inlet end of the first flow meter is connected with the air outlet end of the air outlet valve, the air inlet end of the air outlet valve is connected with the air outlet joint, the air outlet end of the first pressure regulating valve is connected with the air inlet end of the second vacuum valve, the air outlet end of the second vacuum valve is connected with the air inlet end of the second speed regulating valve, the air outlet end of the second speed regulating valve is connected with the air inlet end of the second flow meter, and the air outlet end of the second flow meter is connected with the air inlet joint.
[0009] Preferably, the power-off continuous inflation device suitable for wafer conveying carriers, a pressure gauge is connected between the first pressure regulating valve and the first vacuum valve.
[0010] Preferably, the power-off continuous inflation device suitable for wafer conveying carriers, the air outlet end of the MFC and the air outlet end of the second flow meter are connected with the air inlet joint through filters.
[0011] Preferably, the power-off continuous inflation device suitable for wafer conveying carriers, a temperature sensor is connected between the first flow meter and the air outlet valve.
[0012] Preferably, the power-off continuous inflation device suitable for wafer conveying carriers, the first vacuum valve and the second vacuum are connected with the first pressure regulating valve through a tee joint.
[0013] Preferably, the power-off continuous inflation device suitable for wafer conveying carriers, the second vacuum valve is a normally open electromagnetic valve.
[0014] By the above scheme, the power-off continuous inflation device suitable for wafer conveying carriers has at least the following advantages:
[0015] The power-off continuous inflation device suitable for wafer conveying carriers can automatically open the inflation branch to continuously inflate under the condition of power failure, so that the wafer damage caused by insufficient inflation in the power failure can be greatly protected.
[0016] The above description is only a summary of the technical scheme of the present application. In order to more clearly understand the technical means of the present application, and can be implemented in accordance with the content of the specification, the following is the preferred embodiment of the present application and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS
[0017] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will be briefly introduced to the drawings needed in the embodiments, it should be understood that the following drawings only show some embodiments of the present application, therefore should not be regarded as a limited range, for those skilled in the art, without creative effort, can also be obtained from these drawings other related drawings.
[0018] Figure 1 is the pipeline flow chart of the present application. DETAILED DESCRIPTION
[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application, the technical scheme in the embodiments of the present application is clearly and completely described, obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.
[0020] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of the present application.
[0021] EMBODIMENT
[0022] As Figure 1As shown, a kind of power-off sustained inflation device suitable for wafer conveying carrier includes cabinet, the cabinet is connected with gas inlet connector and gas outlet connector, first pressure regulating valve 1, first vacuum valve 2, first speed regulating valve 3, vacuum generator 4, first flowmeter 5, gas outlet valve 6, second vacuum valve 7, second speed regulating valve 8, second flowmeter 9 and MFC 10 are connected in the cabinet, the gas inlet end of the first pressure regulating valve 1 is connected with the gas outlet end of N 2 tank, the gas outlet end of the first pressure regulating valve 1 is connected with the gas inlet end of MFC 10, the gas outlet end of the MFC 10 is connected with gas inlet connector, the gas outlet end of the first pressure regulating valve 1 is connected with the gas inlet end of first vacuum valve 2, the gas outlet end of the first vacuum valve 2 is connected with the gas inlet end of first speed regulating valve 3, the gas outlet end of the first speed regulating valve 3 is connected with the P end of vacuum generator 4, the E end of the vacuum generator 4 is connected to outer end, the V end of the vacuum generator 4 is connected with the gas outlet end of first flowmeter 5, the gas inlet end of the first flowmeter 5 is connected with the gas outlet end of gas outlet valve 6, the gas inlet end of the gas outlet valve 6 is connected with gas outlet connector, the gas outlet end of the first pressure regulating valve 1 is connected with the gas inlet end of second vacuum valve 7, the gas outlet end of the second vacuum valve 7 is connected with the gas inlet end of second speed regulating valve 8, the gas outlet end of the second speed regulating valve 8 is connected with the gas inlet end of second flowmeter 9, the gas outlet end of the second flowmeter 9 is connected with gas inlet connector.
[0023] The first pressure regulating valve 1 and the first vacuum valve 2 are connected with a pressure gauge 11 in the utility model.
[0024] The gas outlet end of the MFC 10 and the gas outlet end of the second flowmeter 9 are connected with the gas inlet connector through the filter 12 in the utility model.
[0025] The first flowmeter 5 and the gas outlet valve 6 are connected with a temperature sensor 13 in the utility model.
[0026] The first vacuum valve 2 and the second vacuum valve 7 are connected with the first pressure regulating valve 1 through a tee pipe in the utility model.
[0027] The second vacuum valve 7 is a normally open solenoid valve in the utility model.
[0028] The inflation working principle in the utility model has been disclosed in the background art, and any superfluous description will not be made, and in the case of power failure, the solenoid valve is closed under the power-on state, the branch gas circuit is not passed, under the condition of accidental power failure, the solenoid valve is powered off, the coil is reset under the action of magnetic force, and the solenoid valve is opened.
[0029] It should be noted that like reference numerals and characters refer to like elements throughout the following figures and description, and thus, once certain terminologies are defined in one figure, they do not need to be further defined and explained in the subsequent figures.
[0030] In the description of the present application, it should be noted that the terms "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the application is used, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0031] In addition, the terms "horizontal", "vertical", etc. do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0032] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "arrangement", "installation", "connection", "connection" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0033] The above is only the preferred embodiment of the present application, and is not used to limit the present application, and it should be pointed out that for ordinary skilled in the art, without departing from the technical principles of the present application, a number of improvements and modifications can be made, and these improvements and modifications should be considered as the protection scope of the present application.
Claims
1. A power-off continuous gas charging device suitable for wafer transport carriers, comprising a cabinet, wherein an air inlet connector and an air outlet connector are connected to the cabinet, characterized in that: The cabinet is equipped with a first pressure regulating valve (1), a first vacuum valve (2), a first speed regulating valve (3), a vacuum generator (4), a first flow meter (5), an outlet valve (6), a second vacuum valve (7), a second speed regulating valve (8), a second flow meter (9), and an MFC (10). The inlet of the first pressure regulating valve (1) is connected to the outlet of the N2 tank, and the outlet of the first pressure regulating valve (1) is connected to the inlet of the MFC (10). The outlet of the MFC (10) is connected to an inlet connector. The outlet of the first pressure regulating valve (1) is connected to the inlet of the first vacuum valve (2), and the outlet of the first vacuum valve (2) is connected to the inlet of the first speed regulating valve (3). The outlet of the first speed regulating valve (3) is connected to the P end of the vacuum generator (4). The E end of the vacuum generator (4) is connected to the outer end. The V end of the vacuum generator (4) is connected to the outlet of the first flow meter (5). The inlet of the first flow meter (5) is connected to the outlet of the outlet valve (6). The inlet of the outlet valve (6) is connected to the outlet connector. The outlet of the first pressure regulating valve (1) is connected to the inlet of the second vacuum valve (7). The outlet of the second vacuum valve (7) is connected to the inlet of the second speed regulating valve (8). The outlet of the second speed regulating valve (8) is connected to the inlet of the second flow meter (9). The outlet of the second flow meter (9) is connected to the inlet connector.
2. The power-off continuous gas charging device for a wafer transport carrier according to claim 1, characterized in that: A pressure gauge (11) is connected between the first pressure regulating valve (1) and the first vacuum valve (2).
3. The power-off continuous gas charging device for a wafer transport carrier according to claim 1, characterized in that: The outlet of the MFC (10) and the outlet of the second flow meter (9) are both connected to the inlet connector through a filter (12).
4. A power-off continuous gas charging device for a wafer transport carrier according to claim 1, characterized in that: A temperature sensor (13) is connected between the first flow meter (5) and the outlet valve (6).
5. A power-off continuous gas charging device for a wafer transport carrier according to claim 1, characterized in that: The first vacuum valve (2) and the second vacuum valve (7) are connected to the first pressure regulating valve (1) through a three-way pipe.
6. A power-off continuous gas charging device for a wafer transport carrier according to claim 1, characterized in that: The second vacuum valve (7) is a normally open solenoid valve.
Citation Information
Patent Citations
Dynamic gas outlet flow adjusting system based on MFC
CN221463603U