Dedicated 6-inch and 8-inch flower basket compatible wafer reversing device for photoetching

Abstract

The utility model relates to a 6-inch and 8-inch flower basket compatible wafer reversing device special for photoetching. The wafer reversing device comprises a base, a supporting block is connected to the upper portion of one end of the base. An arc-shaped baffle plate used for reversing the wafer is detachably arranged at the end part of the supporting block; the base is provided with an 8-inch flower basket positioning groove and a 6-inch flower basket positioning groove. According to the utility model, the 8-inch flower basket positioning groove and the 6-inch flower basket positioning groove are arranged, so that the 8-inch flower basket and the 6-inch flower basket can be positioned, the two flower baskets can be accurately aligned, the two flower baskets are placed in the grooves in an opening-to-opening manner during wafer pouring, and wafers can be transferred through the arc-shaped baffle plate by horizontally pushing the flower baskets inwards; the arc-shaped baffle plate is tightly attached to the side surface of the wafer to prevent the wafer from rotating; due to the positioning grooves, the flower basket is prevented from shaking, and the scratching condition is reduced.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, specifically to a photolithography-specific compatible 6-inch and 8-inch basket wafer flipper. Background Technology

[0002] In the mass production process of semiconductor front-end manufacturing, there are situations where wafers are transferred from one basket to another, and between baskets dedicated to the equipment. At the same time, 6-inch and 8-inch products are produced on the production line. Without the assistance of special fixtures, the switching is completed by manual alignment and the gravity of the wafer itself. This switching process is time-consuming and labor-intensive, involves large movements of personnel, and is prone to scratching the wafer and causing particles to fall off the surface, which seriously affects production efficiency and yield. Utility Model Content

[0003] The purpose of this invention is to solve the technical problem of providing a photolithography-specific compatible 6-inch and 8-inch basket washer that can help wafers perform wafer flipping.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model for a photolithography-specific compatible 6-inch and 8-inch basket rewinder is as follows:

[0005] Includes a base; a support block is connected to one end of the base; the end of the support block is detachably equipped with an arc-shaped baffle for wafer flipping; the base is provided with an 8-inch basket positioning slot and a 6-inch basket positioning slot.

[0006] The base has mounting holes at all four ends for fixing it to the work surface.

[0007] The support block has a vertical insertion groove at its end; the arc-shaped baffle is inserted into the vertical insertion groove.

[0008] A transverse sliding hole is also provided on the inner side of the middle part of the support block; a transverse slider is slidably connected in the transverse sliding hole; one end of the transverse slider is connected to a transverse insertion rod, and the other end is installed with a spring; a positioning insertion hole is provided on the side of the arc-shaped baffle near the transverse insertion rod; the outer end of the transverse insertion rod passes through the support block and is inserted into the positioning insertion hole; one end of the spring abuts against the bottom wall of the transverse sliding hole, and the other end is installed on the transverse slider; a transverse limiting groove communicating with the transverse sliding hole is provided on the outer side of the support block; a push rod corresponding to the transverse limiting groove is connected to the side of the transverse slider; the push rod is slidably connected to the transverse limiting groove, and the outer end of the push rod passes through the transverse limiting groove and is exposed on the outer side of the support block.

[0009] A first positioning block is connected to the bottom wall of the transverse sliding hole; a second positioning block is connected to the transverse slider; one end of the spring is sleeved on the first positioning block, and the other end is sleeved on the second positioning block.

[0010] The support block has transverse limiting grooves on both sides of its transverse sliding hole, and the corresponding transverse sliders are connected to push rods corresponding to the two transverse limiting grooves on both sides.

[0011] The technical effects achieved by this utility model are as follows: This utility model provides a photolithography-specific wafer rewinder compatible with both 6-inch and 8-inch basket wafers, equipped with 8-inch basket positioning grooves and 6-inch basket positioning grooves. This allows for precise positioning of either the 8-inch or 6-inch basket wafers, ensuring accurate alignment between them. During wafer rewinding, the two baskets are placed mouth-to-mouth in the grooves, and the baskets are pushed inwards. The wafer is then transferred via an arc-shaped baffle. The arc-shaped baffle fits tightly against the side of the wafer, preventing wafer rotation. The positioning grooves prevent basket wobbling and reduce scratches. The arc-shaped baffle is detachably connected to the support block. When rewinding wafers with 8-inch basket wafers, the arc-shaped baffle suitable for 8-inch basket wafers can be replaced; similarly, when rewinding wafers with 6-inch basket wafers, the arc-shaped baffle suitable for 6-inch basket wafers can be replaced. Attached Figure Description

[0012] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments:

[0013] Figure 1 This utility model relates to a photolithography-specific compatible 6-inch and 8-inch basket rewinder (using an 8-inch arc-shaped baffle).

[0014] Figure 2 yes Figure 1 Enlarged view of part A;

[0015] Figure 3 This utility model relates to a photolithography-specific compatible 6-inch and 8-inch basket rewinder (using a 6-inch arc-shaped baffle).

[0016] Figure 4 This is a cross-sectional view of a photolithography-specific compatible 6-inch and 8-inch basket rewinder according to this utility model;

[0017] Figure 5 yes Figure 4 Enlarged view of part B;

[0018] Figure 6 This is an exploded view of a photolithography-specific compatible 6-inch and 8-inch basket rewinder according to this utility model;

[0019] Figure 7 yes Figure 6 Enlarged view of part C. Detailed Implementation

[0020] The present invention will now be described in further detail with reference to the accompanying drawings.

[0021] See Figures 1 to 7 .

[0022] A photolithography-specific wafer flopper compatible with 6-inch and 8-inch wafers includes a base 1, with a support block 2 connected to one end of the base 1. The support block 2 has a detachable arc-shaped baffle 4 for wafer flopping. Specifically, the support block 2 has a vertical insertion slot 11 at its end, into which the arc-shaped baffle 4 is inserted. More specifically, the support block 2 also has a transverse sliding hole 12 on its inner side, within which a transverse slider 13 is slidably connected. One end of the transverse slider 13 is connected to a transverse insertion rod 14, and the other end is fitted with a spring 15. The arc-shaped baffle 4 rests against... A positioning insertion hole 16 is provided on the side near the transverse insertion rod 14. The outer end of the transverse insertion rod 14 passes through the support block 2 and is inserted into the positioning insertion hole 16. One end of the spring 15 abuts against the bottom wall of the transverse sliding hole 12, and the other end is installed on the transverse slider 13. A transverse limiting groove 17 communicating with the transverse sliding hole 12 is provided on the outer side of the support block 2. A push rod 18 corresponding to the transverse limiting groove 17 is connected to the side of the transverse slider 13. The push rod 18 is transversely slidably connected to the transverse limiting groove 17, and the outer end of the push rod 18 passes through the transverse limiting groove 17 and is exposed on the outer side of the support block 2.

[0023] In terms of installation, the arc-shaped baffle 4 of this utility model is inserted into the vertical insertion slot 11, and then limited by the horizontal insertion rod 14. Specifically, the outer end of the horizontal insertion rod 14 passes through the support block 2 and is inserted into the positioning insertion hole 16 of the horizontal insertion rod 14, thereby achieving the limitation; when it is necessary to remove the arc-shaped baffle 4 (refer to...) Figure 4 , 5 By pushing the push rod 18 to the left, the push rod 18, the horizontal slider 13 and the horizontal insertion rod 14 move to the left along the horizontal sliding hole 12. At this time, the spring 15 is compressed until the horizontal insertion rod 14 disengages from the positioning insertion hole 16. Then the arc-shaped baffle 4 can be pulled out from the vertical insertion slot 11 and replaced.

[0024] Regarding the specific fixing of the spring 15, the bottom wall of the transverse sliding hole 12 of this utility model is connected to a first positioning block 21, and the transverse slider 13 is connected to a second positioning block 22. One end of the spring 15 is sleeved on the first positioning block 21, and the other end is sleeved on the second positioning block 22. Preferably, the support block 2 has transverse limiting grooves 17 on both sides of the transverse sliding hole 12, and the corresponding transverse slider 13 is connected to push rods 18 on both sides corresponding to the two transverse limiting grooves 17.

[0025] The base 1 has an 8-inch basket positioning slot 5 and a 6-inch basket positioning slot 6. The base 1 also has mounting holes 3 at its four ends for fixing it to a workbench. In use, the base 1 is first fixed to the workbench via the four mounting holes 3 (specifically, with bolts) to prevent it from shaking. Then, the two baskets are slidably connected to their corresponding basket positioning slots. Specifically, the two 8-inch baskets are slidably connected to the 8-inch basket positioning slot 5, and the two 6-inch baskets are slidably connected to the 6-inch basket positioning slot 6. The basket positioning slots on the upper surface of the base ensure precise alignment between the two baskets. During wafer transfer, the two baskets are placed mouth-to-mouth in the slots, and the baskets are pushed inwards to transfer the wafer via the arc-shaped baffle 4. The arc-shaped baffle 4 fits tightly against the side of the wafer, preventing wafer rotation. The positioning slots prevent basket shaking and reduce scratches. The operation can be completed in seconds with minimal movement, improving efficiency, reducing particle issues, and increasing yield.

[0026] This utility model designs two different arc-shaped baffles 4 for different flower baskets (see reference). Figure 1 , 3 This refers to the 6-inch curved baffle 4 and the 8-inch curved baffle 4. The 8-inch curved baffle 4 is suitable for 8-inch flower baskets, while the 6-inch curved baffle 4 is suitable for 6-inch flower baskets. Furthermore, by adopting a design where the curved baffle 4 is detachably connected to the support block 2, users can easily replace the 6-inch curved baffle 4 or the 8-inch curved baffle 4 according to their needs.

Claims

1. A photolithography-specific compatible 6-inch and 8-inch basket rewinder, characterized in that: Includes a base (1); a support block (2) is connected to one end of the base (1); an arc-shaped baffle (4) for wafer flipping is detachably attached to the end of the support block (2); an 8-inch basket positioning groove (5) and a 6-inch basket positioning groove (6) are provided on the base (1); a vertical insertion groove (11) is provided at the end of the support block (2); the arc-shaped baffle (4) is inserted into the vertical insertion groove (11); a horizontal sliding hole (12) is also provided on the inner side of the middle of the support block (2); a horizontal slider (13) is horizontally slidably connected in the horizontal sliding hole (12); a horizontal insertion rod (14) is connected to one end of the horizontal slider (13), and a spring (15) is installed at the other end; the arc-shaped baffle (4) The horizontal plug-in rod (14) is provided with a positioning plug-in hole (16) on the side near the horizontal plug-in rod (14); the outer end of the horizontal plug-in rod (14) passes through the support block (2) and is inserted into the positioning plug-in hole (16); one end of the spring (15) abuts against the bottom wall of the horizontal sliding hole (12), and the other end is installed on the horizontal slider (13); the outer side of the support block (2) is provided with a horizontal limiting groove (17) that communicates with the horizontal sliding hole (12); the side of the horizontal slider (13) is connected with a push rod (18) corresponding to the horizontal limiting groove (17); the push rod (18) is horizontally slidably connected to the horizontal limiting groove (17), and the outer end of the push rod (18) passes through the horizontal limiting groove (17) and is exposed on the outside of the support block (2).

2. The photolithography-specific compatible 6-inch and 8-inch basket rewinder according to claim 1, characterized in that: The base (1) has mounting holes (3) at its four ends for fixing to the work table.

3. The photolithography-specific compatible 6-inch and 8-inch basket rewinder according to claim 1, characterized in that: The bottom wall of the transverse sliding hole (12) is connected to a first positioning block (21); the transverse slider (13) is connected to a second positioning block (22); one end of the spring (15) is fitted onto the first positioning block (21), and the other end is fitted onto the second positioning block (22).

4. A photolithography-specific compatible 6-inch and 8-inch basket rewinder according to claim 1, characterized in that: The support block (2) has transverse limiting grooves (17) on both sides of its transverse sliding hole (12), and the corresponding transverse slider (13) is connected to push rods (18) on both sides corresponding to the two transverse limiting grooves (17).

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