Protection structure for electrostatic chuck ejector pin

Abstract

The protection structure comprises an outer guide sleeve, a protection top pressing cover, an ejector pin body and a push plate, the protection top pressing cover is placed in the top of the outer guide sleeve, an ejector pin supporting sleeve is fixed to the top of the protection top pressing cover, and the bottom of the protection top pressing cover is connected with the push plate through a first spring. And the push plate is arranged in the outer guide sleeve. Through the arrangement of the second guide block and the first guide groove, the second guide block slides along the first guide groove in a guiding mode and can limit the auxiliary push plate to push the ejector pin body to do reciprocating motion in the protection jacking cover, the space gap between the protection jacking cover and the ejector pin body is reduced, and meanwhile no other parts exist between the ejector pin body and the protection jacking cover; the ejector pin body acts along the interior of the protective ejector pressing cover and has a stable auxiliary effect, so that the ejector pin body is always in a protected state in the movement process, and the ejector pin is ensured not to be bent and broken when acting outside the ejector pin supporting sleeve.

Description

TECHNICAL FIELD

[0001] The utility model relates to electrostatic chucking chuck pin technical field, specifically for a kind of electrostatic chucking chuck pin protection structure. BACKGROUND

[0002] Electrostatic chucking chuck pin is a kind of equipment for fixing and supporting wafer in semiconductor manufacturing process.Electrostatic chucking utilizes electrostatic adsorption principle to fix ultra-clean sheet material, such as silicon wafer, while maintaining the material better flatness, and the working principle of electrostatic chucking chuck pin is based on electrostatic adsorption.Chuck main part generates adsorption force through electrostatic field, and wafer is fixed on chuck.The chuck pin is used to further support and fix wafer, to ensure its stability and accuracy in processing process.

[0003] Traditional chuck pin has no protection device in reciprocating process, and in the case that the diameter of chuck pin is too small and the push-out force is too large, the chuck pin is easy to bend and break, which affects production efficiency, and urgent development is needed. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of electrostatic chucking chuck pin protection structure to solve the problems raised in the above background technology.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of electrostatic chucking chuck pin protection structure, including outer guide sleeve, protection top pressure cover, chuck pin body and push plate, the top of outer guide sleeve is placed with protection top pressure cover, the top of protection top pressure cover is fixed with chuck pin support sleeve, the bottom of protection top pressure cover is connected with push plate by spring one, the push plate is placed in outer guide sleeve, the middle part of protection top pressure cover is penetrated with chuck pin body, the top of chuck pin body is fixedly connected with push plate, the top end of chuck pin body extends into chuck pin support sleeve and is connected with chuck pin head, the middle part of protection top pressure cover is symmetrically connected with guide block two, the two sides of chuck pin body are all connected with guide groove one matched with guide block two, guide block two slides along guide groove one to assist to stably push chuck pin body to repeatedly move in protection top pressure cover.

[0006] Preferably, the bottom of outer guide sleeve is connected with protective sleeve, the bottom of push plate is connected with push rod, the push rod is symmetrically connected with positioning clamping groove, and the protective sleeve can protect the part of push rod extending outside the outer guide sleeve.

[0007] Preferably, the push rod is provided with protective sleeve and extends to the bottom of protective sleeve.

[0008] Preferably, the front and rear sides of push plate are both connected with guide block one, the front and rear sides in outer guide sleeve are both connected with guide groove two matched with guide block one, and guide block one slides along guide groove two to limit and assist to stably push chuck pin body.

[0009] Preferably, the top inside of the protection top pressing cover is connected with pressing grooves on both sides, the pressing grooves are provided with pressing blocks, and the inside of the protection top pressing cover is connected with limiting cavities on both sides, which are used for the movement of the limiting plates to play a limiting role.

[0010] Preferably, the inside of the limiting cavity is connected with a limiting plate through spring two, and one side of the limiting plate is connected with one side of the pressing block through a connecting rod.

[0011] Preferably, the side of the limiting plate away from the spring two is connected with a fixed clamping block.

[0012] Preferably, the inside of the outer guide sleeve is connected with fixed clamping grooves matched with the fixed clamping blocks on both sides.

[0013] Compared with the prior art, the static chuck needle protection structure has the advantages that:

[0014] (1) The static chuck needle protection structure is characterized in that the guide block two slides along the guide groove one to limit the auxiliary push plate to push the needle body to make reciprocating motion in the protection top pressing cover, the space gap between the protection top pressing cover and the needle body is reduced, there is no other component between the needle body and the protection top pressing cover, the needle body has a stable auxiliary action along the protection top pressing cover, and therefore the needle body is always in a protected state during the movement, so that the bending and breaking of the needle body when the needle action is outside the needle support sleeve are avoided.

[0015] (2) The static chuck needle protection structure is characterized in that the guide block one is arranged on the front and rear sides of the push plate, the guide block one slides along the guide groove two to ensure smooth running of the needle body, and the setting of the needle support sleeve can assist in supporting the needle head outside the protection top pressing cover and the connecting end of the needle body, so that the bending and breaking of the needle body when the needle action is outside the needle support sleeve are avoided.

[0016] (3) The static chuck needle protection structure is characterized in that the pressing block, the connecting rod, the limiting plate and the fixed clamping block are arranged and used in cooperation, the fixed clamping block and the fixed clamping groove can be manually controlled to be inserted, the fixed clamping block is pushed away from the fixed clamping groove by pressing the pressing block, the protection top pressing cover, the needle body and the push rod can be conveniently separated from the range of the outer guide sleeve and the protective sleeve, and the replacement operation of the damaged internal components is facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a front view structural schematic diagram of the utility model;

[0018] Figure 2 It is a front view structural schematic diagram of the utility model Figure 1 It is an enlarged structural schematic diagram of A in the utility model;

[0019] Figure 3 This is a schematic diagram of the ejector pin body structure of this utility model;

[0020] Figure 4 This is a side view of the connection between the outer guide sleeve, the ejector pin body, and the push plate of this utility model.

[0021] Figure 5 This is a schematic diagram of the overall external structure of this utility model.

[0022] In the diagram: 1. Outer guide sleeve; 2. Ejector head; 3. Ejector support sleeve; 4. Guide groove one; 5. Guide groove two; 6. Guide block one; 7. Protective sleeve; 8. Push rod; 9. Protective top cover; 10. Guide block two; 11. Spring one; 12. Ejector body; 13. Push plate; 14. Positioning slot; 15. Pressing slot; 16. Pressing block; 17. Connecting rod; 18. Fixing slot; 19. Fixing block; 20. Limiting plate; 21. Limiting cavity; 22. Spring two. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0024] Please see Figures 1-5 This utility model provides an embodiment of a protective structure for an electrostatic chuck ejector pin, comprising an outer guide sleeve 1, a protective top cover 9, an ejector pin body 12, and a push plate 13. The protective top cover 9 is placed inside the top of the outer guide sleeve 1. An ejector pin support sleeve 3 is fixed to the top of the protective top cover 9. The bottom of the protective top cover 9 is connected to the push plate 13 via a spring 11. The push plate 13 is placed inside the outer guide sleeve 1. The ejector pin body 12 passes through the middle of the protective top cover 9. The ejector pin body 12 is fixedly connected to the top of the push plate 13. The top end of the ejector pin body 12 extends into the ejector pin support sleeve 3 and is connected to an ejector pin head 2. Guide blocks are symmetrically connected to the middle of the protective top cover 9. 2.10, both sides of the ejector body 12 are connected to guide grooves 4 that match the guide block 2.10. The guide block 2.10 and guide groove 4 are provided so that the guide block 2.10 slides along the guide groove 4 and can limit the auxiliary push plate 13 to push the ejector body 12 to reciprocate within the protective top cover 9. This reduces the space gap between the protective top cover 9 and the ejector body 12. At the same time, there are no other parts between the ejector body 12 and the protective top cover 9, so that the ejector body 12 moves within the protective top cover 9 with a stable auxiliary effect. This ensures that the ejector body 12 is always in a protected state during the movement, and that the ejector will not bend or break when it moves outside the ejector support sleeve 3.

[0025] The bottom of the outer guide sleeve 1 is connected to a protective sleeve 7, and the bottom of the push plate 13 is connected to a push rod 8. The push rod 8 is symmetrically connected to a positioning slot 14.

[0026] The push rod 8 passes through the protective sleeve 7 and extends to the bottom of the protective sleeve 7.

[0027] The push plate 13 is connected to guide blocks 6 on both the front and rear sides. Guide blocks 6 are provided on both the front and rear sides of the push plate 13. By guiding the sliding along the guide groove 5 through the guide blocks 6, the smooth operation of the ejector body 12 can be ensured. In addition, the ejector support sleeve 3 can provide auxiliary support for the connection end between the ejector head 2 extending out of the protective top cover 9 and the ejector body 12, further ensuring that the ejector will not bend or break when it moves outside the ejector support sleeve 3.

[0028] The front and rear sides of the outer guide sleeve 1 are both connected to guide grooves 5 that match the guide block 6.

[0029] The top of both sides of the protective top cover 9 is connected to a pressing groove 15. The pressing groove 15 is provided with a pressing block 16. The pressing block 16, connecting rod 17, limiting plate 20 and fixing block 19 are set and used in combination to manually control the insertion state of the fixing block 19 and the fixing groove 18. Pressing the pressing block 16 can push the fixing block 19 away from the positioning range of the fixing groove 18, which can facilitate the removal of the protective top cover 9, the ejector pin body 12 and the push rod 8 from the outer guide sleeve 1 and the protective sleeve 7, and facilitate the replacement of internal damaged parts.

[0030] Both sides of the protective top cover 9 are connected to limiting cavities 21.

[0031] The limiting cavity 21 is connected to the limiting plate 20 by a spring 22, and one side of the limiting plate 20 is connected to one side of the pressing block 16 by a connecting rod 17.

[0032] The limiting plate 20 is connected to a fixing block 19 on the side away from the spring 22.

[0033] Both sides inside the outer guide sleeve 1 are connected to fixing slots 18 that match the fixing block 19.

[0034] In this embodiment, the following features are provided: the guide block 2 10 and the guide groove 1 4 allow the guide block 2 10 to slide along the guide groove 1 4, which can limit the auxiliary push plate 13 to push the ejector body 12 to reciprocate within the protective top cover 9. This reduces the spatial gap between the protective top cover 9 and the ejector body 12. Since there are no other components between the ejector body 12 and the protective top cover 9, the movement of the ejector body 12 within the protective top cover 9 is stabilized and assisted, ensuring that the ejector body 12 is always protected during movement. The push plate 13 is provided with guide blocks 1 6 on both the front and rear sides. By guiding the guide blocks 1 6 along the guide groove 2 5, the smooth operation of the ejector body 12 can be ensured. Furthermore, the ejector support sleeve 3 provides auxiliary support for the connection between the ejector head 2 extending out of the protective top cover 9 and the ejector body 12.

[0035] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0036] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0037] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0038] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A protective structure for an electrostatic chuck pin, characterized in that, The device includes an outer guide sleeve (1), a protective top cover (9), a ejector pin body (12), and a push plate (13). The protective top cover (9) is placed inside the top of the outer guide sleeve (1). An ejector pin support sleeve (3) is fixed to the top of the protective top cover (9). The bottom of the protective top cover (9) is connected to the push plate (13) by a spring (11). The push plate (13) is placed inside the outer guide sleeve (1). The ejector pin body (12) passes through the middle of the protective top cover (9). The ejector pin body (12) is fixedly connected to the top of the push plate (13). The top of the ejector pin body (12) extends into the ejector pin support sleeve (3) and is connected to the ejector pin head (2). A guide block (10) is symmetrically connected inside the middle of the protective top cover (9). A guide groove (4) matching the guide block (10) is connected to both sides of the ejector pin body (12).

2. The protective structure for an electrostatic chuck pin according to claim 1, characterized in that: The bottom of the outer guide sleeve (1) is connected to a protective sleeve (7), the bottom of the push plate (13) is connected to a push rod (8), and the push rod (8) is symmetrically connected to a positioning slot (14).

3. The protective structure for an electrostatic chuck pin according to claim 2, characterized in that: The push rod (8) passes through the protective sleeve (7) and extends to the bottom of the protective sleeve (7).

4. The protective structure for an electrostatic chuck pin according to claim 2, characterized in that: The push plate (13) is connected to guide block 1 (6) on both the front and rear sides, and the outer guide sleeve (1) is connected to guide groove 2 (5) that matches the guide block 1 (6) on both the front and rear sides.

5. The protective structure for an electrostatic chuck pin according to claim 1, characterized in that: The protective top cover (9) has a pressing groove (15) connected to the top of both sides, and a pressing block (16) is provided in the pressing groove (15). The protective top cover (9) has a limiting cavity (21) connected to both sides.

6. The protective structure for an electrostatic chuck pin according to claim 5, characterized in that: The interior of the limiting cavity (21) is connected to the limiting plate (20) by the second spring (22), and one side of the limiting plate (20) is connected to one side of the pressing block (16) by the connecting rod (17).

7. The protective structure for an electrostatic chuck pin according to claim 6, characterized in that: The limiting plate (20) is connected to a fixing block (19) on the side away from the second spring (22).

8. The protective structure for an electrostatic chuck pin according to claim 1, characterized in that: Both sides inside the outer guide sleeve (1) are connected to a fixing slot (18) that matches the fixing block (19).

Images