Substrate carrier assembly

Abstract

The utility model discloses a substrate bearing assembly which comprises a base, a tray and a connecting rod, and the tray is arranged at the top of the base and comprises a containing groove used for supporting a substrate; the connecting rod is arranged at the bottom of the base and connected to a vacuum linear importer through a rigid coupling. According to the substrate bearing assembly, the rigid coupler is used for replacing an original elastic piece flexible coupler to be connected to the vacuum linear importer, deformation is not prone to occurring, and the problem of shaking or inclining in the lifting process is avoided. And meanwhile, an original sliding rod mechanism which ascends and descends along with the lifting mechanism and is used for guaranteeing the stability is omitted, so that the overall structure is simpler, lifting stroke limitation caused by the sliding rod mechanism is avoided, and the situation that the overall stability is affected due to the fact that a lubricating agent cannot be used in a vacuum environment, a sliding rod is scratched, jammed or even stuck is not needed to be considered.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum machinery technical field, and specifically relates to an improved substrate bearing assembly. BACKGROUND

[0002] When the substrate is transported between the sample introduction cavity and the process cavity of the MBE equipment (molecular beam epitaxy equipment), the substrate needs to be placed on a small sample holder designed for the purpose, and the substrate is transported together with the sample holder between the sample introduction cavity and the process cavity. Due to the need to transfer the sample holder and the sample between several transmission mechanisms, and due to the different sample heights and substrate placement heights between the two cavities, a lifting bearing device needs to be provided to adjust the height of the substrate. The sample holder base in the existing MBE equipment is connected to the vacuum linear introducer through a flexible coupling, and because the coupling is prone to deformation, a slide rod mechanism is provided for the base to ensure the moving direction. However, due to the vacuum environment, it is not possible to apply lubricant on the slide rod, which may cause scratches, jamming or even sticking of the slide rod after long-term use.

[0003] The information disclosed in this BACKGROUND section is only for the purpose of increasing the understanding of the background of the present utility model and should not be regarded as an acknowledgment or any form of suggestion that it forms prior art of this utility model. CONTENT OF THE UTILITY MODEL

[0004] The utility model aims to provide a substrate bearing assembly to solve the stability problem during long-term use.

[0005] In order to achieve the above-mentioned purpose, one embodiment of the utility model provides a substrate bearing assembly, which comprises a base, a tray and a connecting rod. The tray is arranged on the top of the base and comprises a placing groove for supporting the substrate. The connecting rod is arranged at the bottom of the base and is connected to the vacuum linear introducer through a rigid coupling.

[0006] In one or more embodiments of the utility model, the tray is detachably supported on the top of the base.

[0007] In one or more embodiments of the utility model, a groove is arranged on the base to accommodate the tray.

[0008] In one or more embodiments of the utility model, at least two protrusions are arranged in the groove to position the tray. The tray is provided with notches corresponding to the protrusions. The number of the protrusions and the notches is the same and one-to-one correspondence.

[0009] In one or more embodiments of the present application, the protruding block protrudes on the two opposite side walls of the groove, and the notch is arranged on the side wall of the tray.

[0010] In one or more embodiments of the present application, the base comprises a bottom plate and two side plates extending on both sides of the bottom plate, and two support plates fixed on the two side plates respectively, and the groove is formed between the two support plates.

[0011] In one or more embodiments of the present application, the bottom plate, the side plate and the support plate are detachably connected.

[0012] In one or more embodiments of the present application, a plurality of lightening holes are arranged on the side plate and / or the bottom plate.

[0013] In one or more embodiments of the present application, the connecting rod comprises a connecting plate abutting and fixed to the bottom plate, and a connecting portion extending from the connecting plate, and the connecting portion is connected to the vacuum linear guide through a rigid coupling.

[0014] In one or more embodiments of the present application, a plurality of groups of mounting holes matched with each other are arranged between the connecting plate and the bottom plate.

[0015] Compared with the prior art, the substrate bearing assembly of the present application uses a rigid coupling instead of the original elastic sheet flexible coupling to connect to the vacuum linear guide, which is not easy to deform, and avoids the problem of shaking or tilting during lifting. At the same time, the original slide rod mechanism for ensuring stability is cancelled, so that the overall structure is more simplified, the lifting stroke limitation caused by the slide rod mechanism is avoided, and there is no need to consider that lubricant cannot be used in a vacuum environment, which causes the slide rod to be scratched, jammed or even stuck, affecting the overall stability. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creating any creative labor.

[0017] Figure 1 It is a schematic view of the substrate bearing assembly in an embodiment of the present application.

[0018] Figure 2 It is a schematic view of the base in an embodiment of the present application.

[0019] Figure 3 It is a schematic view of the tray in an embodiment of the present application.

[0020] Figure 4 This is a schematic diagram of the connector in one embodiment of the present invention.

[0021] Explanation of key figure labels:

[0022] 100-Substrate support assembly, 10-Base, 11-Bottom plate, 12-Side plate, 13-Support plate, 14-Groove, 15-Bump, 16-Weight reduction hole, 20-Pattern, 21-Placement slot, 22-Notch, 30-Connector, 31-Connecting rod, 32-Connecting plate. Detailed Implementation

[0023] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0024] like Figures 1-4 As shown, in one embodiment of the present invention, the substrate carrier assembly 100 includes a base 10, a tray 20, and a connecting rod 30. The connecting rod 30 is fixed to the bottom of the base 10 and is connected to a vacuum linear introducer via a rigid coupling (not shown). The tray 20 is disposed on the top of the base 10 and includes a placement groove 21 for placing the substrate.

[0025] In this embodiment, the substrate carrier assembly 100 is used to place the substrate of the semiconductor chip. It adopts an improved design, using a rigid coupling instead of the original flexible spring coupling to connect to the vacuum linear introducer. The vacuum linear introducer drives the substrate carrier assembly 100 to move between the sample injection chamber and the process chamber. The rigid coupling is not easily deformed, avoiding the problem of the substrate carrier assembly 100 swaying or tilting during the lifting and lowering process. At the same time, the original sliding rod mechanism used to ensure stability during lifting and lowering is eliminated, making the overall structure more streamlined. This avoids the lifting and lowering stroke limitation caused by the sliding rod mechanism, and eliminates the need to consider the situation where the sliding rod is scratched, jammed, or even stuck due to the inability to use lubricant in a vacuum environment, which would affect the overall stability.

[0026] In one embodiment, the tray 20 and the base 10 are designed to be separable (e.g., directly overlapped on top of the base 10), so multiple trays 20 with different sized placement slots 21 can be pre-installed. When it is necessary to load substrates of different sizes, the appropriate tray 20 can be replaced, which provides high flexibility.

[0027] Preferably, the bottom of the slot 21 is mostly suspended, only having a solid bottom at the periphery, and the substrate is placed on the solid bottom of the slot 14. This arrangement reduces the overall weight of the tray 20, thereby reducing the load on the vacuum linear guide driving structure.

[0028] Further, to improve the stability of the tray 20 on the base 10, a recess 14 is provided on the top of the base 10 for accommodating the tray 20, which has a shape substantially the same as that of the tray 20. After placing the tray 20 in the recess 14, displacement or even falling off during lifting can be well avoided. Preferably, the bottom of the recess 14 is mostly suspended, only having a solid bottom at the periphery, and the tray 20 is placed on the solid bottom of the recess 14.

[0029] Further, at least two protrusions 15 are protruded in the recess 14, and correspondingly, notches 22 are provided on the tray 20 to cooperate with the protrusions 15, and the number of the protrusions 15 and the notches 22 is the same and one-to-one correspondence. The size of the protrusions 21 can be equal to or slightly larger than the size of the notches 22, so that they are tightly fitted. When placing the tray 20 in the recess 14, the notches 22 need to be aligned with the protrusions 15, so that the tray 20 can be correctly placed, further improving the stability of the tray 20 on the base 10, avoiding displacement or falling off, etc.

[0030] For example, in Figure 1 , two protrusions 15 are provided in the recess 14, which are protruded on the opposite two side walls of the recess 14. Correspondingly, two notches 22 are provided on the tray 20, which are respectively opened on the opposite two side walls of the tray 20. It is conceivable that the protrusions 15 and the notches 22 can be provided at other positions, and can also be provided in other shapes, for example, the protrusions 15 can be directly distributed on the bottom of the recess 14, and the notches 22 can be directly opened on the surface of the tray 20; the protrusions 15 can be rectangular or cylindrical, and the notches 22 can be rotatable or not rotatable through the surface of the tray 20, etc.

[0031] In the embodiment as shown in Figure 2 , the base 10 is a cuboid in shape, including a bottom plate 11, two side plates 12 extending from both ends of the bottom plate 11, and two support plates 13 fixed on the side plates 12, respectively, the two support plates 13 are not connected between them, and a half recess 14 structure is provided at the end of each support plate 13, and the two sides are combined into a complete recess 14. The side plates 12 and the bottom plate 11, the support plates 13 can be detachably fixed, so as to reduce the occupied space during transportation.

[0032] Of course, the side plates 12 and the bottom plate 11, the support plates 13 can also be integrally formed, thereby improving the rigidity and stability, and reducing the risk of errors caused by loose screws.

[0033] In an embodiment, the base 10 adopts a hollow design, i.e. a plurality of weight-reducing holes 16 are arranged on the side plate 12 and / or the bottom plate 11, which reduces the weight without reducing the overall rigidity, facilitates the operation of the staff, and reduces the load on the vacuum linear guide. Figure 2 In the embodiment shown in FIG. 1, a plurality of weight-reducing holes 16 of various shapes such as rectangles and triangles are arranged on the bottom plate 11 and the side plate 12, which further improves the overall aesthetics while reducing the weight.

[0034] As shown in FIGS. 2 and 3, the connecting rod 30 includes a connecting plate 32 abutting and fixed to the bottom plate 11, and a connecting portion 31 extending from the connecting plate 32, which is in the form of a cylinder and connected to the vacuum linear guide through a rigid shaft coupling. Figure 1 4 Similarly, the connecting rod 30 and the base 10 can be integrally formed, which has higher strength. Of course, the connecting rod 30 and the base 10 can also be detachably fixed as shown in FIG. 4, i.e. a plurality of mounting holes are arranged on the connecting plate 32 and the bottom plate 11 respectively, and the connecting rod 30 is fixed to the base 10 through bolt fastening.

[0035] Similarly, the connecting rod 30 and the base 10 can be integrally formed, which has higher strength. Of course, the connecting rod 30 and the base 10 can also be detachably fixed as shown in FIG. 4, i.e. a plurality of mounting holes are arranged on the connecting plate 32 and the bottom plate 11 respectively, and the connecting rod 30 is fixed to the base 10 through bolt fastening. Figure 1

[0036] As shown in FIG. 5, four groups of mounting holes are arranged between the connecting plate 32 and the bottom plate 11, wherein the mounting holes on the connecting plate 32 can be in the form of threaded holes with built-in threads, i.e. the fixing bolts can be directly screwed onto the connecting plate 32. Alternatively, the mounting holes can all be through holes with smooth inner walls, and the connecting rod 30 is fixed to the base 10 through the combination of bolts and nuts. Figure 1

[0037] As shown in FIG. 6, the mounting holes on the bottom plate 11 can be arranged in the form of long strips, so that the positions between the connecting rod 30 and the base 10 are not constant when they are fixed, and the positions can be adjusted by adjusting the positions of the fixing bolts in the mounting holes on the bottom plate 11, which has high flexibility. Figure 2 It is apparent for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and range of equivalents of the elements of the claims are intended to be embraced therein. Any reference signs in the claims should not be considered as limiting the claims involved.

[0038]

[0039] ​​​​Furthermore, it should be understood that although the specification is described in terms of embodiments, not every embodiment includes every feature described. The specification can include implicit combinations of explicitly mentioned features and / or explicit combinations of implicitely mentioned features. Each embodiment depends on the explicit combinations of features and / or the implicit combinations of features made specifically within that embodiment, and each such embodiment can be combined with every other such embodiment to create further embodiments.

Claims

1. A substrate carrier assembly, characterized in that, include: Base; A tray, disposed on top of the base, the tray including a placement groove for supporting the substrate; as well as A connecting rod is located at the bottom of the base, and the connecting rod is connected to the vacuum linear introducer via a rigid coupling.

2. The substrate carrier assembly according to claim 1, characterized in that, The tray is detachably supported on top of the base.

3. The substrate carrier assembly according to claim 1, characterized in that, The base is provided with a groove for accommodating the tray.

4. The substrate carrier assembly according to claim 3, characterized in that, The groove is provided with at least two protrusions for positioning the tray, and the tray is provided with notches that cooperate with the protrusions. The number of protrusions and notches are the same and they correspond one-to-one.

5. The substrate carrier assembly according to claim 4, characterized in that, The protrusion extends from the two opposite sidewalls of the groove, and the notch is formed on the sidewall of the tray.

6. The substrate carrier assembly according to claim 3, characterized in that, The base includes a base plate and two side plates extending on both sides of the base plate, and two support plates fixed to the two side plates respectively, with the groove formed between the two support plates.

7. The substrate carrier assembly according to claim 6, characterized in that, The base plate, side plates, and support plate are detachably connected.

8. The substrate carrier assembly according to claim 6, characterized in that, The side plate and / or bottom plate are provided with multiple weight reduction holes.

9. The substrate carrier assembly according to claim 6, characterized in that, The connecting rod includes a connecting plate that abuts against and is fixed to the base plate, and a connecting portion extending from the connecting plate, the connecting portion being connected to the vacuum linear inlet via a rigid coupling.

10. The substrate carrier assembly according to claim 9, characterized in that, Multiple sets of matching mounting holes are provided between the connecting plate and the base plate.

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