Variable-dip-angle coated substrate clamp

Abstract

The utility model discloses a variable dip angle coating substrate clamp, which comprises a processing table, a first bearing is fixedly embedded on the upper surface of the processing table, the inner ring of the first bearing is connected with a U-shaped mounting seat, the bottom surface of the processing table is connected with a first servo motor, and the output end of the first servo motor is fixedly connected with the bottom end of the U-shaped mounting seat. According to the device, through the arrangement of the first servo motor, the first bearing, the U-shaped mounting base and the clamp assembly, elastic clamping and positioning of the base plate can be achieved, the first servo motor works to drive the U-shaped mounting base and the clamp assembly to rotate, azimuth rotation of the base plate is achieved, and through the arrangement of the second servo motor, the driving gear disc and the incomplete gear disc, rotation of the base plate is achieved. A second servo motor can be utilized to work to drive a driving gear disc to rotate, the driving gear disc is meshed and matched with an incomplete gear disc to drive a clamping assembly to turn over at an angle, then all-directional angle adjustment of the base plate is achieved, and all-directional effective machining of the base plate is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of coating substrate processing technology, especially variable inclination angle coating substrate clamp. BACKGROUND

[0002] Coating substrate refers to a carrier material that forms one or more functional thin films on the surface of a substrate under specific process conditions through physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, evaporation, coating, etc. Coating substrates are widely used in the fields of semiconductors, optics, displays, energy, aerospace, etc. Their performance directly affects the optical, electrical, mechanical, thermal, etc. characteristics of the final product. During the processing of coating substrates, clamps are often used for positioning and processing.

[0003] The current clamp structure cannot adjust the angle of the substrate after clamping and positioning the clamping plate. The processing orientation is relatively single, which is not convenient for effective processing operation of the substrate. Therefore, we propose a variable inclination angle coating substrate clamp to solve the above problems. SUMMARY

[0004] The utility model discloses a variable inclination angle coating substrate clamp to solve the problems raised in the background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] The variable inclination angle coating substrate clamp comprises a processing table, a first bearing is fixedly embedded on the upper surface of the processing table, the inner ring of the first bearing is connected with a U-shaped mounting seat, the bottom surface of the processing table is connected with a first servo motor, the output end of the first servo motor is fixedly connected with the bottom end of the U-shaped mounting seat, the inner side wall of the U-shaped mounting seat is fixedly embedded with two second bearings, the inner rings of the two second bearings are jointly connected with a U-shaped support block, the top end of the U-shaped support block is connected with a clamp assembly, the bottom surface of the U-shaped support block is connected with an incomplete gear plate, the inner side wall of the U-shaped mounting seat is fixedly embedded with two third bearings, the inner rings of the two third bearings are jointly connected with a driving gear plate, the upper surface of the processing table is connected with a supporting seat, the right side surface of the supporting seat is connected with a second servo motor, and the output end of the second servo motor is fixedly connected with the right end of the driving gear plate.

[0007] In a further embodiment, the clamp assembly comprises a clamp seat, the inner side wall of the clamp seat is connected with two extrusion springs, one end of each of the two extrusion springs close to each other is connected with a clamping plate, and the side surface of each of the two clamping plates close to each other is connected with a protective pad.

[0008] In further embodiments, the left and right sides of the clamp seat are provided with sliding holes, and the two clamping plates are connected with pulling rods on the side away from each other, and the two pulling rods are respectively penetrated through the two sliding holes and extended to the outside of the clamp seat.

[0009] In further embodiments, the front surface of the processing table is connected with a control panel, and the control panel is electrically connected with the first and second servo motors through wires.

[0010] In further embodiments, the upper surface of the processing table is provided with two storage frames.

[0011] In further embodiments, the upper surface of the U-shaped mounting seat is connected with two arc-shaped positioning plates, and the outer surface of each arc-shaped positioning plate is provided with a group of positioning screw holes.

[0012] In further embodiments, the bottom surface of the processing table is connected with two mounting legs, and the left and right sides of each mounting leg are connected with two mounting plates.

[0013] Compared with the prior art, the device has the following advantages:

[0014] The device can realize elastic clamping and positioning of the substrate through the first servo motor, the first bearing, the U-shaped mounting seat and the clamp assembly, and can realize azimuth rotation of the substrate through the rotation of the U-shaped mounting seat and the clamp assembly driven by the first servo motor, and can realize full-azimuth angle adjustment of the substrate through the rotation of the drive gear disc driven by the second servo motor and the meshing cooperation with the incomplete gear disc to drive the clamping assembly to flip, thereby facilitating full-azimuth effective processing of the substrate. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a whole three-dimensional structure schematic diagram of the variable-inclination film-coated substrate clamp.

[0016] Figure 2 It is an internal exploded structure schematic diagram of the processing table in the variable-inclination film-coated substrate clamp.

[0017] Figure 3 It is a three-dimensional structure schematic diagram of the clamp assembly in the variable-inclination film-coated substrate clamp.

[0018] Figure 4 It is a side view of the clamp seat in the variable-inclination film-coated substrate clamp.

[0019] Figure 5 For variable inclination film-coated substrate clamp Figure 2 Structure diagram is partially enlarged at A in the figure.

[0020] In the figure: 1, processing table; 2, storage frame; 3, mounting leg; 31, mounting plate; 4, control panel; 5, first servo motor; 6, second servo motor; 7, support seat; 8, clamp assembly; 81, clamp seat; 82, extrusion spring; 83, clamping plate; 84, protective pad; 85, limiting rod; 86, limiting hole; 87, pulling rod; 88, sliding hole; 9, U-shaped mounting seat; 10, first bearing; 11, arc-shaped positioning plate; 111, positioning screw hole; 112, positioning screw; 12, second bearing; 13, third bearing; 14, driving gear disc; 15, incomplete gear disc; 16, U-shaped support block. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0022] Please refer to Figures 1-5 In the utility model, the variable inclination film-coated substrate clamp comprises a processing table 1, a first bearing 10 is fixedly embedded on the upper surface of the processing table 1, a U-shaped mounting seat 9 is connected to the inner ring of the first bearing 10, a first servo motor 5 is connected to the bottom surface of the processing table 1, the output end of the first servo motor 5 is fixedly connected to the bottom end of the U-shaped mounting seat 9, two second bearings 12 are fixedly embedded on the inner side wall of the U-shaped mounting seat 9, a U-shaped support block 16 is connected to the inner rings of the two second bearings 12, a clamp assembly 8 is connected to the top end of the U-shaped support block 16, an incomplete gear disc 15 is connected to the bottom surface of the U-shaped support block 16, two third bearings 13 are fixedly embedded on the inner side wall of the U-shaped mounting seat 9, a driving gear disc 14 is connected to the inner rings of the two third bearings 13, a support seat 7 is connected to the upper surface of the processing table 1, a second servo motor 6 is connected to the right side surface of the support seat 7, and the output end of the second servo motor 6 is fixedly connected to the right end of the driving gear disc 14.

[0023] The clamp assembly 8 comprises a clamp seat 81, two extrusion springs 82 are connected to the inner side wall of the clamp seat 81, the ends of the two extrusion springs 82 close to each other are connected with two clamping plates 83, the side faces of the two clamping plates 83 close to each other are connected with two protective pads 84, the left and right side faces of the clamp seat 81 are provided with sliding holes 88, the side faces of the two clamping plates 83 away from each other are connected with two pulling rods 87, the ends of the two pulling rods 87 away from each other respectively penetrate through the two sliding holes 88 and extend to the outside of the clamp seat 81, the left and right side faces of the clamp seat 81 are provided with two limiting holes 86, the side faces of the two clamping plates 83 away from each other are connected with two limiting rods 85, and the ends of the two limiting rods 85 away from the clamping plates 83 respectively penetrate through the limiting holes 86 and extend to the outside of the clamp seat 81, so that the elastic force clamping of the substrate can be realized, and the quick positioning operation of the substrate is facilitated.

[0024] The front face of the machining table 1 is connected with a control panel 4, the control panel 4 is electrically connected with the first servo motor 5 and the second servo motor 6 through wires, so that the clamp can be conveniently controlled, the clamping machining operation of the substrate is facilitated, the upper surface of the machining table 1 is provided with two storage frames 2, the machined substrate can be stored, the upper surface of the U-shaped mounting seat 9 is connected with two arc-shaped positioning plates 11, a group of positioning screw holes 111 are formed in the outer surfaces of the two arc-shaped positioning plates 11, the inner walls of the two positioning screw holes 111 are threadedly connected with positioning screws 112, so that the U-shaped mounting seat 9 can be locked and positioned, and the stable machining of the substrate is facilitated, and the bottom face of the machining table 1 is connected with two mounting legs 3, the left and right side faces of each mounting leg 3 are connected with two mounting plates 31, so that the machining table 1 can be installed and fixed, and the stable use of the clamp is facilitated.

[0025] The working principle of the utility model is:

[0026] In use, first, the machining table 1 and the clamp device are installed and fixed through the mounting leg 3 and the mounting plate 31, the substrate to be machined is placed into the clamp seat 81, the elastic force clamping of the substrate is realized by the extrusion spring 82 pushing the two clamping plates 83 close to each other, meanwhile, the first servo motor 5 is controlled to work through the control panel 4 to drive the U-shaped mounting seat 9 and the clamp assembly 8 to rotate, the orientation rotation of the substrate is realized, the second servo motor 6 is controlled to work to drive the driving gear plate 14 to rotate, the clamp assembly 8 is driven to overturn through the meshing cooperation with the incomplete gear plate 15, and then the omnibearing angle adjustment of the substrate is realized, and the omnibearing machining of the substrate is realized.

[0027] It is apparent for a person skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary and non-limiting, the scope of the present application being defined by the claims appended hereto rather than by the above description, and all the changes which fall within the meaning and the scope of the equivalent elements of the claims are intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims to the figures in which the reference signs are used.

[0028] Furthermore, it should be understood that although the present specification describes exemplary embodiments, not every embodiment contains only one independent technical solution, and the present specification is described in this way only for the sake of clarity, and a person skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that a person skilled in the art can understand.

Claims

1. A variable angle coating substrate holder, characterized by: The utility model provides a kind of machining platform, including processing table (1), the upper surface of the processing table (1) is fixedly embedded with first bearing (10), the inner ring of the first bearing (10) is connected with U-shaped mounting seat (9), the bottom surface of the processing table (1) is connected with first servo motor (5), the output end of the first servo motor (5) is fixedly connected with the bottom end of U-shaped mounting seat (9), the inner side wall of the U-shaped mounting seat (9) is fixedly embedded with two second bearings (12), the inner ring of two second bearings (12) is commonly connected with U-shaped support block (16), the top end of the U-shaped support block (16) is connected with fixture assembly (8), the bottom surface of the U-shaped support block (16) is connected with incomplete gear disc (15), the inner side wall of the U-shaped mounting seat (9) is fixedly embedded with two third bearings (13), the inner ring of two third bearings (13) is commonly connected with driving gear disc (14), the upper surface of the processing table (1) is connected with support seat (7), the right side surface of the support seat (7) is connected with second servo motor (6), the output end of the second servo motor (6) is fixedly connected with the right end of driving gear disc (14).

2. The variable angle coated substrate holder of claim 1, wherein: The fixture assembly (8) includes a clamp seat (81), the inner side wall of the clamp seat (81) is connected with two extrusion springs (82), one end of two extrusion springs (82) is connected with a clamping plate (83), and the side face of two clamping plates (83) is connected with a protective pad (84).

3. The variable angle coated substrate holder of claim 2, wherein: The left and right side faces of the clamp seat (81) are both provided with a sliding hole (88), the side face of two clamping plates (83) is connected with a pulling rod (87), and one end of two pulling rods (87) is respectively penetrated through two sliding holes (88) and extends to the outside of the clamp seat (81), the left and right side faces of the clamp seat (81) are both provided with two limiting holes (86), the side face of two clamping plates (83) is connected with a limiting rod (85), and one end of each limiting rod (85) is penetrated through the limiting hole (86) and extends to the outside of the clamp seat (81).

4. The variable angle coated substrate holder of claim 1, wherein: The front face of the processing table (1) is connected with a control panel (4), and the control panel (4) is electrically connected with the first servo motor (5) and the second servo motor (6) through wires.

5. The variable angle coated substrate holder of claim 1, wherein: The upper surface of the processing table (1) is placed with two storage frames (2).

6. The variable angle coated substrate holder of claim 1, wherein: The upper surface of the U-shaped mounting seat (9) is connected with two arc-shaped positioning plates (11), and the outer surface of each arc-shaped positioning plate (11) is provided with a group of positioning screw holes (111), and the inner wall of two positioning screw holes (111) is threadedly connected with a positioning screw (112).

7. The variable angle coated substrate holder of claim 1, wherein: The bottom surface of the processing table (1) is connected with two mounting legs (3), and the left and right side faces of each mounting leg (3) are both connected with two mounting plates (31).

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