Mask storage device with anti-pollution function

Abstract

The utility model discloses a mask storage device with an anti-pollution function, which comprises a storage box, a plurality of placing plates are arranged in the storage box in a sliding and stretchable manner, a plurality of placing boxes are uniformly arranged on the placing plates, each placing box comprises a base, a placing seat is arranged on the base, a limiting block is arranged on the placing seat, a placing groove is formed through the limiting block, and the placing grooves are communicated with the placing plates. The surface of the limiting block and the surface of the containing base are each provided with a protective coating, each containing base is provided with a protective cover in a turnover mode, and a lock catch structure is arranged between the front end of each protective cover and the base. And the anti-pollution performance of the mask is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mask plate storage technical field, more specifically, it relates to a mask plate storage device with anti -pollution function. BACKGROUND

[0002] Mask plate is the key element in semiconductor manufacturing, usually made of quartz glass substrate plated with chromium, the surface is engraved with precision circuit pattern. In the photoetch process, the mask plate is exposed to transfer the pattern to the silicon wafer, and its precision directly affects the chip performance.

[0003] The Chinese patent file with the publication number CN218908377U provides a mask plate intelligent storage equipment, wherein when the opening of the storage plate and the placing groove is realized, multiple ones are opened at a time, so that when one mask plate is taken, the other mask plates are also exposed, affecting the storage protection of the mask plate.

[0004] And in the above scheme, the storage plate is fixedly arranged, so that when the internal mask plate is taken, it needs to be inserted into the inside through the external mask plate, and the taking convenience is poor, and the dust carried by the operator on the body is also easy to fall on the external exposed mask plate, causing the pollution of the mask plate. UTILITY MODEL CONTENT

[0005] (I) Technical problem solved

[0006] In view of the problems existing in the prior art, the utility model provides a mask plate storage device with anti -pollution function to solve the technical problems of inconvenient single taking of mask plate and poor protection of the mask plate storage device in the prior art mentioned in the background art.

[0007] (II) Technical scheme

[0008] In order to achieve the above purpose, the utility model provides the following technical scheme:

[0009] A mask plate storage device with anti -pollution function, comprising a storage box, a plurality of placing plates are slidably and stretchably arranged in the storage box, a plurality of placing boxes are uniformly arranged on the placing plates, the placing box comprises a base, a placing seat is arranged on the base, a limiting block is arranged on the placing seat, and a placing groove is formed through the limiting block, a protective coating is arranged on the surface of the limiting block and the placing seat, a protective cover is reversibly arranged on each placing seat, and a lock catch structure is arranged between the front end of the protective cover and the base.

[0010] The utility model further sets up, the lock catch structure includes the locking frame, the locking frame can overturn setting at the front end of the protective cover, the bottom of locking frame is provided with the clamping along, the bottom is provided with the limit along cooperation, the limit along and the clamping along between each other limit clamping, the protective cover is buckled on the bottom, and make the locking frame carry the clamping along and the limit along between clamping locking, like this, can realize the locking fixed of the free end of protective cover on the bottom, realize the stable buckling of protective cover on the bottom.

[0011] The utility model further sets up, the bottom of placing box is upwards extended and is provided with the positioning groove, the positioning column and the positioning groove between can detachable clamping.

[0012] The utility model further sets up, the bottom of protective cover is provided with the sealing convex strip, the bottom is provided with the sealing recess groove cooperation, the sealing convex strip and sealing recess groove mutual sealing clamping, the cooperation of sealing convex strip and sealing recess groove can improve the sealing property when protective cover is buckled on the bottom.

[0013] The utility model further sets up, the surface of sealing convex strip and sealing recess groove all is provided with sealing pad, can strengthen the connection sealing property when the mutual clamping of sealing convex strip and sealing recess groove, thereby strengthens the overall sealing property of placing box when protective cover is buckled on the bottom, improves the storage sealing property of mask plate in placing box.

[0014] The utility model further sets up, the inside of protective cover is provided with the compression column, the compression column is stuck and is pressed in mask plate edge, and avoids the area to be evaporated, like this, when buckling protective cover, can make the compression column press the edge of mask plate, thereby improves the stability of mask plate in placing groove, wherein the compression column preferably is the flexible material of composite condition, such as; PTFE coating material, fluorine rubber, butyl rubber etc.

[0015] The utility model further sets up, the lateral wall of storage box is evenly provided with a plurality of slide rails, the placing plate is slidably installed in the storage box through the slide rail, realizes the stable sliding installation of placing plate in the storage box through the slide rail, and the slide rail can select the appropriate product model according to the need, and the utility model does not repeat the description here.

[0016] The utility model further sets up, the surface of storage box is provided with the sealing box door, the sealing box door is provided with the perspective window, realizes the sealing protection of storage box through the sealing box door, and the condition in the storage box is convenient for observing through the perspective window.

[0017] (Three) beneficial effects

[0018] Compared with the prior art, the mask plate storage device with the anti-pollution function has the following beneficial effects:

[0019] 1、The utility model discloses a plurality of placing plates are arranged in the storage box and can slide and stretch, a plurality of placing boxes are evenly arranged on the placing plate, the placing box for placing the mask plate is arranged on the placing plate, when the storage and taking of the mask plate are realized, the placing plate can be discharged outward, thereby improving the convenience of taking and placing the mask plate, and the dust and debris brought into the storage box by the operator reaching into the storage box is avoided, and the use convenience is improved.

[0020] 2、The placing box includes a base, a placing seat is arranged on the base, a limiting block is arranged on the placing seat, a placing groove is formed through the limiting block, a protective coating is arranged on the surface of the limiting block and the placing seat, when the mask plate is placed on the placing seat, the mask plate is located in the placing groove and forms a clamping space with the limiting block, thereby improving the convenience and flexibility of the grinding plate when taking and placing, the protective coating is preferably a Teflon (PTFE) coating or a PEEK material, and the protective property of the mask plate when taking and placing is improved.

[0021] 3、The protective cover can be reversely arranged on each placing seat, and a lock catch structure is arranged between the front end of the protective cover and the base, when in use, the corresponding protective cover can be individually opened, thereby avoiding the leakage of other unused mask plates, and improving the storage protection property of the grinding plate. DRAWINGS

[0022] Figure 1 It is a whole structure schematic view of the mask plate storage device with the anti-pollution function in the utility model.

[0023] Figure 2 It is a whole structure sectional view schematic view of the utility model.

[0024] Figure 3 It is a structure schematic view of the placing box in the utility model in the unfolded state.

[0025] Figure 4 It is a whole structure sectional view schematic view of the placing box in the utility model.

[0026] Figure 5 It is a position structure schematic view between the base, the placing seat and the limiting block in the utility model.

[0027] Figure 6 It is a whole structure sectional view schematic view of the utility model Figure 4 It is a local structure enlarged view of A in the utility model.

[0028] In the figure: 1, storage box; 2, placing plate; 3, placing box; 4, base; 5, placing seat; 6, limiting block; 7, placing groove; 8, protective coating; 9, protective cover; 10, locking frame; 11, clamping edge; 12, limiting edge; 13, positioning column; 14, positioning groove; 15, sealing convex strip; 16, sealing groove; 17, sealing gasket; 18, compression column; 19, slide rail; 20, sealing box door; 21, perspective window. DETAILED DESCRIPTION

[0029] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0030] It should be noted that, unless otherwise specified, all technical and scientific terms used in the present application have the same meaning as generally understood by those skilled in the art to which the present application belongs.

[0031] In the present application, unless otherwise stated, the orientation such as "up, down" is generally with respect to the direction shown in the drawings, or with respect to the vertical, perpendicular or gravity direction; similarly, for the convenience of understanding and description, "left, right" is generally with respect to the left and right shown in the drawings; "inner, outer" refers to the inner and outer with respect to the contour of each component itself, but the above orientation words are not used to limit the present application.

[0032] Please refer to Figures 1-6 A mask storage device with anti-pollution function, comprising a storage box 1, a plurality of placing plates 2 are slidably and stretchably arranged in the storage box 1, a plurality of placing boxes 3 are uniformly arranged on the placing plates 2, the placing boxes 3 comprise a base 4, a placing seat 5 is arranged on the base 4, a limiting block 6 is arranged on the placing seat 5, and a placing groove 7 is formed through the limiting block 6, the surfaces of the limiting block 6 and the placing seat 5 are provided with a protective coating 8, a protective cover 9 is reversibly arranged on each placing seat 5, and a lock catch structure is arranged between the front end of the protective cover 9 and the base 4.

[0033] Please refer to Figures 1-6 As an embodiment of the lock catch structure: the lock catch structure comprises a locking frame 10, the locking frame 10 is reversibly arranged at the front end of the protective cover 9, the bottom end of the locking frame 10 is provided with a clamping edge 11, a limiting edge 12 is cooperatively arranged on the base 4, the limiting edge 12 and the clamping edge 11 are limited and clamped with each other, the protective cover 9 is buckled on the base 4, and the locking frame 10 is clamped and locked between the clamping edge 11 and the limiting edge 12, so that the free end of the protective cover 9 is fixed on the base 4, thereby realizing stable buckling of the protective cover 9 on the base 4.

[0034] Please refer to Figures 1-6As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped.

[0035] As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped. Figures 1-6 As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped.

[0036] Figures 1-6 As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped.

[0037] As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped. Figures 1-6 As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped.

[0038] Figures 1-6 As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped.

[0039] As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped. Figures 1-6 As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped.

[0040] As an embodiment of the placing plate 2, positioning columns 13 are arranged on the placing plate 2, and the bottom end of the placing box 3 is upwardly extended to be provided with positioning grooves 14, and the positioning columns 13 and the positioning grooves 14 are detachably clamped.

[0041] ​​The utility model discloses a plurality of placing plates 2 are arranged in the storage box 1 and can be stretched, a plurality of placing boxes 3 are evenly arranged on the placing plate 2, the placing box 3 for placing the mask plate is arranged on the placing plate 2, so that when the storage and taking of the mask plate are realized, the placing plate 2 can be discharged outward, thereby improving the taking and placing convenience of the mask plate, and meanwhile, the situation that dust and debris are brought into the storage box 1 due to the hand of the operator reaching into the storage box is avoided, and the use convenience is improved.

[0042] The utility model discloses a placing box 3 includes base 4, is provided with the placing seat 5 on the base 4, is provided with the limiting block 6 on the placing seat 5, and is formed with the placing groove 7 through the limiting block 6, the surface of limiting block 6 and placing seat 5 all is provided with protective coating 8, so that the mask plate is placed on the placing seat 5 through the forming of placing groove 7, is located in the placing groove 7, and the clamping space is formed between the limiting block 6, thereby the convenience and flexibility of the grinding plate when taking and placing can be improved, wherein the protective coating 8 is preferably Teflon (PTFE) coating or PEEK material, and the protective property of the mask plate when taking and placing is improved.

[0043] The utility model discloses that the protective cover 9 can be reversely arranged on every placing seat 5, and the lock catch structure is arranged between the front end of protective cover 9 and base 4, so that in use, the corresponding protective cover 9 can be opened alone, thereby avoiding the situation that other unused mask plates are exposed, and the storage protective property of the grinding plate is improved.

[0044] The utility model can cooperate with the SMIF Pod system dustproof and oxidation -resistant, and the cooperation structure between it and the storage box 1 in the utility model is prior art, and the improvement of the utility model for prior art is wrong, and the utility model does not repeat the description here.

[0045] In all the schemes mentioned above, the connection between the two components can be selected according to the actual situation, such as welding, bolt and nut connection, bolt or screw connection, or other known connection methods. In the above, whenever there is a fixed connection, welding is preferred. Although the embodiments of the utility model have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and deformations can be made to these embodiments without departing from the principles and spirits of the utility model. The scope of the utility model is defined by the appended claims and their equivalents.

[0046] In all the schemes mentioned above, the electrical element operation is controlled by the controller if not specifically described. Since the controller is matched with common equipment, its control principle and circuit connection belong to prior art and mature technology, and the specific circuit structure is not repeated here.

[0047] In all the above-mentioned schemes, if the motor is actually needed, it can be matched with a speed reducer, the connection structure and working principle between the motor and the speed reducer are known art, and thus will not be described herein.

[0048] In all the above-mentioned schemes, if the synchronous belt transmission structure is involved, if no specific structure is mentioned, it is the matching of the synchronous belt and the synchronous wheel in the prior art, and the connection between the matching shaft structure is known art, and thus will not be described herein.

[0049] In all the above-mentioned schemes, if the solar panel is connected with the battery, the inverter, the battery charging controller, the cable, the fuse, the bracket and other necessary accessories can be matched, the control principle and the line connection all belong to the known and mature technology, and thus the specific circuit structure will not be described herein.

Claims

1. A mask storage device with anti-contamination function, comprising a storage box (1), characterized in that: The storage box (1) is slidably provided with a plurality of placing plates (2), the placing plates (2) are uniformly provided with a plurality of placing boxes (3), the placing box (3) comprises a base (4), the base (4) is provided with a placing seat (5), the placing seat (5) is provided with a limiting block (6), and a placing groove (7) is formed in the limiting block (6), the surfaces of the limiting block (6) and the placing seat (5) are provided with a protective coating (8), each placing seat (5) is reversibly provided with a protective cover (9), and a lock catch structure is arranged between the front end of the protective cover (9) and the base (4).

2. The mask storage device with anti-pollution function according to claim 1, characterized in that: The lock catch structure comprises a locking frame (10), the locking frame (10) is reversibly arranged at the front end of the protective cover (9), the bottom end of the locking frame (10) is provided with a clamping edge (11), the base (4) is provided with a limiting edge (12) in cooperation, and the limiting edge (12) and the clamping edge (11) are limited and clamped with each other.

3. The mask storage device with anti-pollution function according to claim 1, characterized in that: The placing plate (2) is provided with a positioning column (13), the bottom end of the placing box (3) is upwardly extended from the base (4) to form a positioning groove (14), and the positioning column (13) and the positioning groove (14) are detachably clamped.

4. The mask storage device with anti-pollution function according to claim 1, characterized in that: The bottom end of the protective cover (9) is provided with a sealing convex strip (15), the base (4) is provided with a sealing groove (16) in cooperation, and the sealing convex strip (15) and the sealing groove (16) are sealed and clamped with each other.

5. The mask storage device with anti-pollution function according to claim 4, characterized in that: The surfaces of the sealing convex strip (15) and the sealing groove (16) are provided with sealing pads (17).

6. The mask storage device with anti-pollution function according to any one of claims 1-5, characterized in that: The inside of the protective cover (9) is provided with a pressing column (18), the pressing column (18) is abutted and pressed against the edge of the mask plate, and avoids the to-be-evaporated area.

7. The mask storage device with anti-pollution function according to claim 1, characterized in that: The side wall of the storage box (1) is uniformly provided with a plurality of slide rails (19), and the placing plate (2) is slidably installed in the storage box (1) through the slide rails (19).

8. The mask storage device with anti-pollution function according to claim 1, characterized in that: The surface of the storage box (1) is provided with a sealing box door (20), and the sealing box door (20) is provided with a perspective window (21).

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