Lifting appliance for CVD (Chemical Vapor Deposition) equipment

Abstract

The utility model provides a lifting appliance for CVD (Chemical Vapor Deposition) equipment. The lifting appliance comprises four fixing plates, a plurality of adjusting assemblies and a plurality of splicing assemblies, the multiple adjusting assemblies are arranged at the two ends of the four fixing plates correspondingly, each adjusting assembly comprises an adjusting groove, an adjusting block, an adjusting plate, an L-shaped fixing block and a fixing bolt, the adjusting grooves are formed in the surfaces of the fixing plates, the adjusting blocks are slidably connected to the interiors of the adjusting grooves, the adjusting plates are connected to one sides of the adjusting blocks, the L-shaped fixing blocks are connected to one sides of the adjusting blocks, and the L-shaped fixing blocks are connected to the other sides of the adjusting blocks. The fixing bolt is arranged between the L-shaped fixing block and the fixing plate; the multiple splicing assemblies are arranged between the multiple adjusting plates correspondingly. According to the lifting appliance for the CVD equipment, the adjusting grooves are formed in the two sides of the four fixing plates, the adjusting blocks, the adjusting plates, the L-shaped fixing blocks and the fixing bolts are matched with a plurality of splicing assemblies for use, the length of the fixing plates can be adjusted according to the use condition, and meanwhile the four fixing plates can be stably fixed; and loosening during use is prevented.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of microelectronic manufacturing, especially to a lifting appliance for CVD equipment. BACKGROUND

[0002] Chemical vapor deposition is a kind of chemical vapor reaction growth method, and at present, this kind of technology is not only applied to the coating of heat-resistant substances, but also applied to the refining of high-purity metals, powder synthesis, semiconductor thin film and other processes. Its principle is to introduce reaction gas into the reactor chamber, so that it is dissociated into highly active ions or ion groups under the action of heat energy, plasma or light energy, and the ions or ion groups reach the solid substrate surface by diffusion and chemical reaction, generating solid products and depositing on the substrate surface. In the whole CVD film forming process, in order to make the reaction deposit accurately deposit on the predetermined position of the substrate to form a film with a specific shape, and prevent the deposit film from becoming particles, a shielding frame is usually installed inside the PC cavity as a side wall of the chamber, which can effectively inhibit the generation of particles by heating.

[0003] The patent application with the publication number CN205205224U is proposed in the prior art, which adopts a carrier plate to carry the shielding frame, greatly increases the contact surface between the lifting appliance and the shielding frame, reduces the probability of breaking the shielding frame, and through the cooperation of the rotating screw rod and the stretching piece, the carrier plate can be stretched to move along the carrying guide rail, facilitating the safe withdrawal of the lifting appliance from the chamber.

[0004] However, the current device adjusts the size by the screw rod and the stretching piece and fixes multiple carrier plates by the connecting plate when in use, but this way cannot connect and fix multiple connecting plates and multiple carrier plates when adjusting the spacing between multiple carrier plates.

[0005] Therefore, it is necessary to provide a lifting appliance for CVD equipment to solve the above technical problems. UTILITY MODEL CONTENT

[0006] The utility model provides a lifting appliance for CVD equipment, which solves the problem that the current device adjusts the size by the screw rod and the stretching piece and fixes multiple carrier plates by the connecting plate when in use, but this way cannot connect and fix multiple connecting plates and multiple carrier plates when adjusting the spacing between multiple carrier plates.

[0007] To solve the above technical problems, the utility model provides a lifting appliance for CVD equipment, which comprises:

[0008] four fixed plates, multiple adjusting assemblies and multiple splicing assemblies;

[0009] A plurality of said adjusting components are respectively arranged at both ends of the four said fixing plates, the adjusting component comprises an adjusting groove, an adjusting block, an adjusting plate, an L-shaped fixing block and a fixing bolt, the adjusting groove is opened on the surface of the fixing plate, the adjusting block is slidingly connected to the inside of the adjusting groove, the adjusting plate is connected to one side of the adjusting block, the L-shaped fixing block is connected to one side of the adjusting block, and the fixing bolt is arranged between the L-shaped fixing block and the fixing plate.

[0010] A plurality of said splicing components are respectively arranged between a plurality of said adjusting plates.

[0011] Preferably, a rectangular through groove is opened on the side of the fixing plate and located on the side opposite to the adjusting groove.

[0012] Preferably, an installation groove is opened at one end of the adjusting plate.

[0013] Preferably, the splicing component comprises a splicing block, a connecting block, two fixing columns and two fixing sleeves, the splicing block is arranged in the inside of the installation groove, the two fixing columns are respectively connected to the bottom of the connecting block, and the two fixing sleeves are both sleeved on the surface of the two fixing columns.

[0014] Preferably, a fixing through hole adapted to the fixing column is opened between the adjusting plate and the splicing block.

[0015] Preferably, a limiting plate is connected to the surface of the adjusting plate.

[0016] Preferably, a dismounting component is arranged between the adjusting plate and the limiting plate, the dismounting component comprises a dismounting groove, a dismounting block, a circular hole and a bolt, the dismounting groove is opened on the surface of the adjusting plate, the dismounting block is arranged in the inside of the dismounting groove, the circular hole is opened on the surface of the dismounting block, and the bolt is arranged in the inside of the circular hole.

[0017] Compared with the related art, the lifting appliance for CVD equipment has the following beneficial effects:

[0018] The lifting appliance for CVD equipment is provided with adjusting grooves, adjusting blocks, adjusting plates, L-shaped fixing blocks and fixing bolts on both sides of four fixing plates in cooperation with a plurality of splicing components, so that the length of the fixing plate can be adjusted according to the use condition, and meanwhile, the four fixing plates can be stably fixed, thereby preventing loosening during use. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a structural schematic view of the first embodiment of the lifting appliance for CVD equipment provided by the utility model;

[0020] Figure 2 As shown in the enlarged view of A part of Figure 1

[0021] Figure 3 As shown in the first perspective view of the lifting appliance of Figure 1

[0022] Figure 4 As shown in the enlarged view of B part of Figure 3

[0023] Figure 5 As shown in the second perspective view of the lifting appliance of Figure 1

[0024] Figure 6 As shown in the enlarged view of C part of Figure 5

[0025] Figure 7 As shown in the structural schematic view of the second embodiment of the lifting appliance for CVD equipment provided by the utility model;

[0026] Figure 8 As shown in the enlarged view of D part of Figure 7

[0027] Reference numerals in the drawing: 1, fixed plate;

[0028] 2, adjusting assembly; 21, adjusting groove; 22, adjusting block; 23, adjusting plate; 24, L-shaped fixed block; 25, rectangular through groove; 26, fixed bolt;

[0029] 3, limiting plate; 4, mounting groove;

[0030] 5, splicing assembly; 51, splicing block; 52, connecting block; 53, fixed column; 54, fixed sleeve;

[0031] 6, fixed through hole;

[0032] 7, dismounting assembly; 71, dismounting groove; 72, dismounting block; 73, circular hole; 74, bolt. DETAILED DESCRIPTION

[0033] The utility model will be further explained in combination with the drawings and embodiments.

[0034] First embodiment

[0035] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 , among which, Figure 1 ​​​​​​The utility model provides a kind of hoist for the structure schematic view of first embodiment of CVD equipment. Figure 2 For Figure 1 The enlarged schematic view of A part shown in the figure. Figure 3 For Figure 1 The three-dimensional structure schematic view of hoist first view shown in the figure. Figure 4 For Figure 3 The enlarged schematic view of B part shown in the figure. Figure 5 For Figure 1 The three-dimensional structure schematic view of hoist second view shown in the figure. Figure 6 For Figure 5 The enlarged schematic view of C part shown in the figure. A kind of hoist for CVD equipment, comprising:

[0036] Four fixed plates 1, multiple adjusting assemblies 2 and multiple splicing components 5.

[0037] Multiple adjusting assemblies 2 are respectively arranged at both ends of four fixed plates 1, and the adjusting assembly 2 includes adjusting groove 21, adjusting block 22, adjusting plate 23, L-shaped fixed block 24 and fixed bolt 26, the adjusting groove 21 is opened in the surface of the fixed plate 1, the adjusting block 22 is slidably connected in the inside of the adjusting groove 21, the adjusting plate 23 is connected to one side of the adjusting block 22, the L-shaped fixed block 24 is connected to one side of the adjusting block 22, and the fixed bolt 26 is arranged between the L-shaped fixed block 24 and the fixed plate 1.

[0038] Multiple splicing components 5 are respectively arranged between multiple adjusting plates 23.

[0039] The side of the fixed plate 1 and the side located on the opposite side of the adjusting groove 21 are provided with rectangular through slot 25.

[0040] One end of the adjusting plate 23 is provided with mounting groove 4.

[0041] The splicing component 5 includes splicing block 51, connecting block 52, two fixed columns 53, two fixed sleeves 54, the splicing block 51 is arranged in the inside of the mounting groove 4, two fixed columns 53 are respectively connected to the bottom of the connecting block 52, and two fixed sleeves 54 are all sleeved on the surface of two fixed columns 53.

[0042] The use of the adjusting groove 21 and the adjusting block 22 can adjust the length of the fixed plate 1 through the adjusting plate 23, the rectangular through groove 25 is convenient for the movement of the L-shaped fixed block 24, the fixing hole matched with the fixing bolt 26 is arranged on the side of the fixed plate 1, and when the length of the fixed plate 1 is adjusted, the adjusting plate 23 is pulled to be pulled under the action of the adjusting groove 21 and the adjusting block 22, and when the length between the fixed plate 1 and the adjusting plate 23 is adjusted, the fixing bolt 26 is used to pass through the L-shaped fixed block 24 and be connected with the fixed plate 1.

[0043] The adjusting plate 23 and the splicing block 51 are provided with the fixed through hole 6 matched with the fixed column 53.

[0044] The surface of the adjusting plate 23 is connected with the limiting plate 3.

[0045] The use of the limiting plate 3 can limit the object placed between the four fixed plates 1 and the plurality of adjusting plates 23.

[0046] The splicing block 51 and the connecting block 52 are both L-shaped, the splicing block 51 can splice the two adjusting plates 23 between the diagonal sides of the two fixed plates 1, and the connecting block 52 is used to pull and insert the adjusting plate 23 and the splicing block 51.

[0047] Compared with the related art, the lifting appliance for CVD equipment has the following beneficial effects:

[0048] The lifting appliance for CVD equipment is provided with the adjusting groove 21, the adjusting block 22, the adjusting plate 23, the L-shaped fixed block 24 and the fixing bolt 26 matched with the plurality of splicing assemblies 5 on the two sides of the four fixed plates 1, the length of the fixed plate 1 can be adjusted according to the use condition, meanwhile, the four fixed plates 1 can be stably fixed, and loosening during use is prevented.

[0049] Second embodiment

[0050] Please refer to Figure 7 and Figure 8 , based on the first embodiment of the application, the second embodiment of the application provides another lifting appliance for CVD equipment. The second embodiment is only a preferred mode of the first embodiment, and the implementation of the second embodiment does not affect the separate implementation of the first embodiment.

[0051] Specifically, the second embodiment of the present application provides a lifting appliance for CVD equipment, which is different in that a dismounting assembly 7 is arranged between the adjusting plate 23 and the limiting plate 3, the dismounting assembly 7 comprises a dismounting groove 71, a dismounting block 72, a circular hole 73 and a bolt 74, the dismounting groove 71 is arranged on the surface of the adjusting plate 23, the dismounting block 72 is arranged in the dismounting groove 71, the circular hole 73 is arranged on the surface of the dismounting block 72, and the bolt 74 is arranged in the circular hole 73.

[0052] The use of the dismounting groove 71 and the dismounting block 72 facilitates the positioning when the limiting plate 3 and the adjusting plate 23 are mounted, and the circular hole 73 facilitates the bolt 74 to be flush with the surface of the adjusting plate 23 when the bolt 74 is mounted with the dismounting block 72 and the adjusting plate 23.

[0053] The working principle of the lifting appliance for CVD equipment is as follows:

[0054] When the limiting plate 3 and the adjusting plate 23 are dismounted, the bolt 74 in the circular hole 73 is first removed, and then the limiting plate 3 is pulled to drive the dismounting block 72 to separate from the dismounting block 72.

[0055] Compared with the related art, the lifting appliance for CVD equipment has the following beneficial effects:

[0056] The lifting appliance for CVD equipment is provided, and the dismounting groove 71, the dismounting block 72, the circular hole 73 and the bolt 74 arranged between the adjusting plate 23 and the limiting plate 3 can be mounted and dismounted according to the use condition.

[0057] The above is only an embodiment of the present application, and does not limit the patent range of the present application, and any equivalent structure or equivalent process conversion, or direct or indirect application in other related technical fields, is also included in the patent protection range of the present application.

Claims

1. A spreader for a CVD apparatus, characterized by comprising: The utility model relates to a kind of adjustable display stand, including: Four fixed plates, multiple adjusting components and multiple splicing components; Multiple adjusting components are respectively arranged at both ends of four fixed plates, and the adjusting component includes adjusting groove, adjusting block, adjusting plate, L-shaped fixed block and fixed bolt, the adjusting groove is opened in the surface of the fixed plate, the adjusting block is slidably connected in the inside of the adjusting groove, the adjusting plate is connected in one side of the adjusting block, the L-shaped fixed block is connected in one side of the adjusting block, and the fixed bolt is arranged between the L-shaped fixed block and the fixed plate; Multiple splicing components are respectively arranged between multiple adjusting plates.

2. The spreader for CVD equipment according to claim 1, wherein Rectangular through slot is opened in the side of the fixed plate and the side opposite to the adjusting groove.

3. The spreader for CVD equipment according to claim 1, wherein One end of the adjusting plate is provided with mounting groove.

4. The spreader for CVD equipment according to claim 3, wherein The splicing component includes splicing block, connecting block, two fixed columns, two fixed sleeves, the splicing block is arranged in the inside of the mounting groove, two fixed columns are respectively connected in the bottom of the connecting block, and two fixed sleeves are all sleeved in the surface of two fixed columns.

5. The spreader for CVD equipment according to claim 4, wherein Fixed through hole that is adapted to the fixed column is opened between the adjusting plate and the splicing block.

6. The spreader for CVD equipment according to claim 1, wherein The surface of the adjusting plate is connected with limiting plate.

7. The CVD apparatus sling according to claim 6, wherein Disassembling component is arranged between the adjusting plate and the limiting plate, and the disassembling component includes disassembling groove, disassembling block, circular hole and bolt, the disassembling groove is opened in the surface of the adjusting plate, the disassembling block is arranged in the inside of the disassembling groove, the circular hole is opened in the surface of the disassembling block, and the bolt is arranged in the inside of the circular hole.

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