Ultrahigh vacuum sample treatment device

Abstract

The utility model discloses an ultrahigh vacuum sample processing device, and particularly relates to the technical field of magnetron sputtering equipment, which comprises a fixed flange, the bottom of the fixed flange is connected with a lifting module, a hollow rotary magnetic coupler is mounted below the lifting module, and an output shaft of the hollow rotary magnetic coupler is fixedly connected with a transmission rotating shaft. The top end of the transmission rotating shaft is fixedly connected with a sample bracket module, the hollow rotating magnetic coupler is fixedly provided with a core shaft, and the top end of the core shaft is fixedly provided with a heating module; the sample bracket module comprises a sample supporting plate; a conductor is arranged at the top of the mandrel, and a conductive mechanism is arranged between the conductor and the sample supporting plate. According to the utility model, the hollow rotary magnetic coupler is adopted to drive the sample to rotate, and the conductive mechanism is utilized to provide a stable bias voltage cleaning function in the high-speed rotation process of the sample, so that the bias voltage cleaning stability is ensured; the stability of the sample processing device in compatible heating, bias cleaning and rotating functions is achieved, and the bias cleaning structure is optimized.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering equipment technical field more specifically, the utility model relates to a kind of ultrahigh vacuum sample processing device. BACKGROUND

[0002] Known ultrahigh vacuum sample heater is a kind of heating equipment specially designed for high vacuum environment, is widely used in material science, semiconductor manufacturing and surface treatment etc.Field;This heater can accurately heat sample under ultrahigh vacuum condition, while equipped with bias cleaning function, can effectively remove the impurities on the surface of sample, further improve the efficiency and quality of experiment and production.

[0003] But in actual use, existing equipment has the following problems in bias cleaning aspect: due to the adhesion of coating material, the bias cleaning function will be invalid, so the utility model provides an ultrahigh vacuum sample processing device as further improvement. UTILITY MODEL CONTENT

[0004] In order to overcome the above-mentioned defects of the prior art, the embodiments of the utility model provide an ultrahigh vacuum sample processing device to solve the problems raised in the above background art. In order to achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0005] An ultrahigh vacuum sample processing device, comprising a hollow rotary magnetic coupler, the output shaft of the hollow rotary magnetic coupler is fixedly connected with a transmission shaft, the top end of the transmission shaft is fixedly connected with a sample holder module, the inside of the hollow rotary magnetic coupler is fixedly installed with a mandrel coaxially arranged with the transmission shaft,

[0006] The sample holder module comprises a sample holder plate.

[0007] The bottom end of the mandrel is fixedly installed with a bias cleaning vacuum introduction feedthrough through a sealing fixing piece, the top of the mandrel is provided with an electrically conductive body electrically connected with the bias cleaning vacuum introduction feedthrough, and the electrically conductive body is provided with an electrically conductive mechanism between the sample holder plate.

[0008] Further, the sample holder module further comprises an adapter plate and an insulating column.

[0009] The top of the transmission shaft is fixedly installed with a protective cover, the adapter plate is fixedly installed on the top of the protective cover, at least three insulating columns not in the same plane are fixedly installed on the end of the adapter plate, and the top end of the insulating column is fixedly connected with the bottom end of the sample holder plate.

[0010] Further, the electrically conductive mechanism comprises an electrically conductive head, an electrically conductive column and a connecting wire.

[0011] The conductive body in the shield is fixedly installed on the surface of the mandrel through the insulating fixing seat, the side of the shield is fixedly connected with the fixing sleeve, the conductive head is arranged in the fixing sleeve, and the conductive head abuts against the outer surface of the conductive body;

[0012] The conductive column is parallel to the insulating column, the top of the conductive column is fixedly installed on the bottom of one end of the sample supporting plate, the bottom of the conductive column is fixedly installed on one end of the adapter plate, the end, away from the conductive body, of the conductive head is fixedly installed with a wire clamp, and the wire clamp is electrically connected with the bottom of the conductive column through a connecting wire.

[0013] Further, the outer surface of the conductive head is fixedly sleeved with an annular insulator, the fixing sleeve is movably sleeved on the outer surface of the annular insulator, one end of the fixing sleeve is threadedly connected with an adjusting nut, the adjusting nut is connected with the annular insulator through an adjusting spring, and the bottom of the adapter plate located below the conductive column is fixedly installed with an isolation shell, and the adjusting nut is fixedly connected with the isolation shell through a ceramic ring.

[0014] The connecting wire penetrates through the interiors of the adjusting nut and the ceramic ring.

[0015] Further, the mandrel is located in the interior of the transmission rotating shaft and penetrates out of the transmission rotating shaft at the top, and the top of the mandrel is fixedly installed with a heating module located below the sample supporting plate.

[0016] Further, the top of the hollow rotary magnetic coupling is sealingly installed with a lifting module, the top of the lifting module is sealingly connected with a fixing flange installed on the vacuum chamber, and the transmission rotating shaft and the mandrel both penetrate through the lifting module and the fixing flange from bottom to top.

[0017] Further, the sealing fixing member comprises a four-way flange, the bottom of the mandrel is fixedly connected with the four-way flange, the bias cleaning vacuum feedthrough is fixedly installed at one end of the four-way flange, and the other two ends of the four-way flange are respectively fixedly installed with a heating power vacuum feedthrough and a TC temperature measurement vacuum feedthrough.

[0018] The conductive body is electrically connected with the bias cleaning vacuum feedthrough through a wire;

[0019] The heat resistance wire and the TC thermocouple in the heating module are respectively electrically connected with the heating power vacuum feedthrough and the TC temperature measurement vacuum feedthrough through corresponding wires.

[0020] Further, the upper surface of the fixing flange is fixedly installed with a grounding device for grounding the transmission rotating shaft, and the grounding device comprises an L fixing seat, an adjusting bolt, a reset spring and a conductive block abutting against the transmission rotating shaft.

[0021] The bottom of the L fixing base is fixedly installed on the upper surface of the fixing flange, the adjusting bolt passes through the top of the L fixing base, the conductive block is fixedly installed on the end of the adjusting bolt, and the two ends of the reset spring are fixedly connected with the conductive block and the L fixing base respectively.

[0022] Further, the hollow rotary magnetic coupling comprises a driving motor, an external rotating shaft and an internal rotating shaft in a vacuum environment.

[0023] The output shaft of the driving motor is fixedly connected with the external rotating shaft, the external rotating shaft is magnetically connected with the internal rotating shaft, and the internal rotating shaft is fixedly connected with the transmission rotating shaft.

[0024] The technical effects and advantages of the utility model are as follows:

[0025] 1. Compared with the prior art, the utility model adopts a hollow rotary magnetic coupling to drive the sample to rotate, utilizes the special biasing mode of the conductive mechanism and the grounding device, and further provides stable biasing cleaning function in the high-speed rotation process of the sample; and the near-point grounding mode is adopted to realize the stability of biasing cleaning, that is, the objects needing to conduct electricity connected with the sample and the non-conductive objects with a close space position to the sample all need to be grounded, so that short circuit caused by the plasma bombarding the non-conductive objects in the biasing cleaning process is avoided, thereby ensuring the stability of biasing cleaning, and the problem of biasing cleaning function failure caused by material adhesion is solved.

[0026] 2. Compared with the prior art, the utility model solves the stability of the sample processing device in compatibility with heating, biasing cleaning and rotation functions, optimizes the biasing cleaning structure, greatly reduces the failure rate of the sample processing device, realizes stable and reliable biasing cleaning function of the sample in the rotation process, improves the uniformity and performance of the deposited material, further ensures the stable operation effect of the sample processing device in the coating environment, and solves the problem of biasing cleaning function failure caused by material adhesion. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 It is a whole structure schematic view of the utility model.

[0028] Figure 2 It is a side view of the whole structure of the utility model.

[0029] Figure 3 It is a structure schematic view of the hollow rotary magnetic coupling in the utility model.

[0030] Figure 4 It is a structure schematic view of the lifting module in the utility model.

[0031] Figure 5 It is a structure schematic view of the transmission rotating shaft and the sample bracket module in the utility model.

[0032] Figure 6 It is a structural schematic view of the conductive mechanism of the utility model.

[0033] Figure 7 It is a schematic view of the connection of the connecting wire and the conductive head of the utility model.

[0034] Figure 8 It is a structural schematic view of the grounding device of the utility model.

[0035] Reference signs are:

[0036] 1, fixed flange;

[0037] 2, lifting module; 21, corrugated pipe;

[0038] 3, hollow rotating magnetic coupling; 31, driving motor; 32, external rotating shaft; 33, internal rotating shaft; 4, transmission rotating shaft;

[0039] 5, sample holder module;

[0040] 51, sample holder plate; 52, adapter plate; 521, isolation shell; 522, ceramic ring;

[0041] 53, insulating column; 54, shield;

[0042] 6, mandrel;

[0043] 7, heating module;

[0044] 8, sealing fixing part;

[0045] 81, four-way flange; 82, heating power vacuum introduction feedthrough; 83, TC temperature measurement vacuum introduction feedthrough; 9, bias cleaning vacuum introduction feedthrough;

[0046] 10, electric conductor;

[0047] 11, conductive mechanism;

[0048] 111, conductive head; 112, conductive column; 113, connecting wire; 114, insulating fixing seat;

[0049] 115, fixed sleeve; 116, wire clamp; 117, annular insulator; 118, adjusting nut;

[0050] 119, adjusting spring;

[0051] 12, grounding device;

[0052] 121, L fixing seat; 122, adjusting bolt; 123, reset spring; 124, conductive block;

[0053] 13, sample. DETAILED DESCRIPTION

[0054] In order to make the purpose, technical scheme and advantages of the utility model clearer and more apparent, the utility model will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model and not to limit the utility model.

[0055] As shown in the accompanying Figure 1 , the accompanying Figure 2 , the accompanying Figure 3 and the accompanying Figure 5 A kind of ultra-high vacuum sample processing device, including hollow rotary magnetic coupler 3, the output shaft of hollow rotary magnetic coupler 3 is fixedly connected with transmission shaft 4, the top of transmission shaft 4 is fixedly connected with sample carrier module 5, hollow rotary magnetic coupler 3 is fixedly installed with the mandrel 6 of the concentric arrangement of transmission shaft 4,

[0056] Sample carrier module 5 includes: sample support plate 51;

[0057] The bottom of mandrel 6 is fixedly installed with bias cleaning vacuum introduction feedthrough 9 by sealing fixing piece 8, the top of mandrel 6 is provided with electrically-conductive body 10 electrically connected with bias cleaning vacuum introduction feedthrough 9, and electrically-conductive mechanism 11 is arranged between electrically-conductive body 10 and sample support plate 51

[0058] Hollow rotary magnetic coupler 3 is fixedly installed with the mandrel 6 of the concentric arrangement of transmission shaft 4,

[0059] Among them, the lower flange connection surface of hollow rotary magnetic coupler 3 installs mandrel 6;

[0060] Mandrel 6 inside transmission shaft 4 is threaded out the top of transmission shaft 4, and the top of mandrel 6 is fixedly installed with heating module 7 inside sample carrier module 5;

[0061] Sample carrier module 5 includes: sample support plate 51 above heating module 7;

[0062] Among them, mandrel 6 is fixed with heating module 7 by bolt, heating module 7 is concentrically arranged with sample carrier module 5, and the upper and lower surfaces are parallel, to ensure the uniformity of heat radiation of heating module 7 in vacuum environment.

[0063] Among them, circular sample 13 is placed in the slot of sample support plate 51 for accurate positioning;

[0064] The bottom of mandrel 6 is fixedly installed with bias cleaning vacuum introduction feedthrough 9 by sealing fixing piece 8, the top of mandrel 6 is provided with electrically-conductive body 10 electrically connected with bias cleaning vacuum introduction feedthrough 9, and electrically-conductive mechanism 11 is arranged between electrically-conductive body 10 and sample support plate 51.

[0065] In a preferred embodiment, as shown in Fig. 1, Fig. 2 and Fig. 3, the sample holder module 5 further comprises: an adapter plate 52 and an insulating column 53. Figure 1 Figure 2 Figure 5 The adapter plate 52 is fixedly installed on the top of the shroud 54, and at least three insulating columns 53, which are not in the same plane, are fixedly installed on the end of the adapter plate 52. The top end of the insulating column 53 is fixedly connected with the bottom end of the sample holder plate 51.

[0066] The top of the transmission rotating shaft 4 is fixedly installed with the shroud 54, the adapter plate 52 is fixedly installed on the top of the shroud 54, and at least three insulating columns 53, which are not in the same plane, are fixedly installed on the end of the adapter plate 52. The top end of the insulating column 53 is fixedly connected with the bottom end of the sample holder plate 51.

[0067] The transmission rotating shaft 4 drives the shroud 54, the adapter plate 52, the insulating column 53 and the sample holder plate 51 to rotate in sequence, so as to realize the hollow rotating magnetic coupling 3 driving the sample 13 to rotate.

[0068] The shroud 54 installed on the transmission rotating shaft 4 is hollow, the adapter plate 52 is installed above the shroud 54, four holes are uniformly left around the adapter plate 52, and then the four holes are sequentially installed with three insulating columns 53 and one conductive column 112. At this time, the conductive column 112 serves as a support.

[0069] The conductive column 112 and the upper end of the insulating column 53 are fixedly installed with the sample holder plate 51 through bolts, and the middle part of the sample holder plate 51 is provided with a circular groove with a diameter of 200 mm for positioning and installing the circular sample 13.

[0070] In a preferred embodiment, as shown in Fig. 1, Fig. 2 and Fig. 3, the sample holder module 5 further comprises: an adapter plate 52 and an insulating column 53. Figure 6

[0071] The conductive body 10 located in the shroud 54 is fixedly installed on the surface of the mandrel 6 through the insulating fixing seat 114,

[0072] In order to simultaneously consider the rotation of the sample 13 and the bias cleaning function of the sample 13, the mandrel 6 is installed with the insulating fixing seat 114 through hole shaft cooperation, and the structure is used for isolating the conductive body 10 installed on the outer circle of the insulating fixing seat 114.

[0073] The side of the shroud 54 is fixedly connected with a fixed sleeve 115, the conductive head 111 is arranged in the fixed sleeve 115, and the conductive head 111 abuts against the outer surface of the conductive body 10.

[0074] The conductive head 111 is located in the fixed sleeve 115 on the side of the shroud 54, the conductive head 111 moves axially along the fixed sleeve 115, and then the conductive head 111 contacts and conducts electricity with the conductive body 10.

[0075] ​​​The conductive column 112 is parallel to the insulating column 53, the top of the conductive column 112 is fixedly installed at the bottom of one end of the sample supporting plate 51, the bottom of the conductive column 112 is fixedly installed at one end of the adapter plate 52, the conductive head 111 is fixedly installed with the wire clamp 116 away from the one end of the conductive body 10, and the wire clamp 116 is electrically connected with the bottom of the conductive column 112 through the connecting wire 113;

[0076] The conductive head 111 is abutted on the outer surface of the conductive body 10, and the sample supporting plate 51 is electrically connected with the conductive head 111 through the conductive column 112, the connecting wire 113 and the wire clamp 116, so that the conductive body 10 can pass the bias voltage to the sample supporting plate 51, thereby having the bias cleaning function.

[0077] Therefore, the conductive path is in sequence: the bias cleaning vacuum feedthrough 9, the conductive body 10, the conductive head 111, the connecting wire 113, the conductive column 112, the sample supporting plate 51 and the sample 13.

[0078] The conductive head 111 is abutted on the outer surface of the conductive body 10, and the sample supporting plate 51 is electrically connected with the conductive head 111 through the conductive column 112, the connecting wire 113 and the wire clamp 116, so that the conductive body 10 can pass the bias voltage to the sample supporting plate 51, thereby having the bias cleaning function.

[0079] In a preferred embodiment, as shown in the accompanying drawings Figure 6 And the accompanying drawings Figure 7 As shown, the outer surface of the conductive head 111 is fixedly sleeved with the annular insulator 117,

[0080] The annular insulator 117 installed in the outer hole of the conductive head 111 is used for wrapping the exposed part of the conductive head 111 and is used for concentric gap cooperation with the fixed sleeve 115 of the side hole of the shield 54, so that it can freely move in the fixed sleeve 115 along the axial direction.

[0081] The fixed sleeve 115 is movably sleeved on the outer surface of the annular insulator 117, one end of the fixed sleeve 115 is threadedly connected with the adjusting nut 118, the adjusting nut 118 is connected with the annular insulator 117 through the adjusting spring 119,

[0082] Since the shield 54 is fixed with the transmission shaft 4, the two will rotate at the same time, in order to ensure that the conductive body 10 and the conductive head 111 are in real-time contact, the adjusting spring 119 is arranged at the rear of the annular insulator 117, the other end of the adjusting spring 119 is connected with the adjusting nut 118, and the fixed sleeve 115 fixed on the side of the shield 54 is threadedly connected with the adjusting nut 118;

[0083] Therefore, the rotation of the adjusting nut 118 can adjust the compression amount of the adjusting spring 119, and then control the pressure applied by the conductive head 111 fixed inside the annular insulator 117 to the conductive body 10.

[0084] Wherein, since the conductive body 10 is not concentric with the shield 54, when the shield 54 rotates, the conductive body 10 is relatively stationary, and the conductive head 111 in contact with the conductive body 10 moves relatively, that is, the conductive head 111 and the annular insulator 117 will fluctuate in the fixed sleeve 115, and the elastic force provided by the adjusting spring 119 needs to be increased or decreased by adjusting the adjusting nut 118, so as to ensure the smoothness during rotation as much as possible when contacting;

[0085] The bottom of the adapter plate 52 located below the conductive column 112 is fixedly installed with an isolation shell 521, and the adjusting nut 118 is fixedly connected with the isolation shell 521 through a ceramic ring 522;

[0086] The connecting wire 113 passes through the inside of the adjusting nut 118 and the ceramic ring 522.

[0087] Wherein, considering the position movement of the conductive head 111, the connecting wire 113 connected thereto here adopts a ring winding mode, which is not easy to cause damage to the connecting wire 113 and lead to a break.

[0088] In a preferred embodiment, as shown in the accompanying Figure 1 , the accompanying Figure 2 , and the accompanying Figure 3 , the accompanying

[0089] The mandrel 6 is located inside the transmission shaft 4 and its top passes out of the transmission shaft 4, and the top end of the mandrel 6 is fixedly installed with a heating module 7 located below the sample holder 51, so as to heat the sample 13.

[0090] In a preferred embodiment, as shown in the accompanying Figure 1 , the accompanying Figure 2 , the accompanying Figure 3 , and the accompanying Figure 4 , the top of the hollow rotary magnetic coupling 3 is sealingly installed with a lifting module 2, the top of the lifting module 2 is sealingly connected with a fixed flange 1 installed on the vacuum chamber, and the transmission shaft 4 and the mandrel 6 both pass through the lifting module 2 and the fixed flange 1 from bottom to top in sequence.

[0091] In a preferred embodiment, as shown in the accompanying Figure 1 , the accompanying Figure 2 , and the accompanying Figure 3 , the top of the hollow rotary magnetic coupling 3 is sealingly installed with a lifting module 2, the top of the lifting module 2 is sealingly connected with a fixed flange 1 installed on the vacuum chamber, and the transmission shaft 4 and the mandrel 6 both pass through the lifting module 2 and the fixed flange 1 from bottom to top in sequence.

[0092] The output shaft of the hollow rotary magnetic coupling 3 is connected with the transmission rotating shaft 4, and the upper end of the transmission rotating shaft 4 is fixedly connected with the sample holder module 5 through the fixed flange 1, so that the two components are relatively fixed;

[0093] The fixed flange 1 is provided with CF sealing interfaces of different sizes at the upper end and the lower end, and the upper surface of the fixed flange 1 is connected with the vacuum cavity through the CF150 sealing interface, so that the utility model can be fixed and docked.

[0094] The fixed flange 1 is provided with CF sealing interfaces of different sizes at the upper end and the lower end, and the upper surface of the fixed flange 1 is connected with the vacuum cavity through the CF150 sealing interface, so that the utility model can be fixed and docked.

[0095] The hollow rotary magnetic coupling 3 adopts the principle that the magnets inside and outside the vacuum attract each other.

[0096] In one preferred embodiment, as shown in the accompanying drawings Figure 1 , the accompanying drawings Figure 2 , and the accompanying drawings Figure 3 The bottom of the mandrel 6 is fixedly connected with the four-way flange 81, that is, the flange lower portion of the mandrel 6 is provided with the four-way flange 81.

[0097] The bias cleaning vacuum feedthrough 9 is fixedly installed at one end of the four-way flange 81, and the other two ends of the four-way flange 81 are respectively fixedly provided with the heating power vacuum feedthrough 82 and the TC temperature measurement vacuum feedthrough 83.

[0098] The conductive body 10 is electrically connected with the bias cleaning vacuum feedthrough 9 through wires.

[0099] The heating module 7 is electrically connected with the heating power vacuum feedthrough 82 and the TC temperature measurement vacuum feedthrough 83 through corresponding wires.

[0100] In the embodiment, the bias cleaning vacuum feedthrough 9 and the TC temperature measurement vacuum feedthrough 83 are respectively installed at the left side and the right side of the four-way flange 81 through CF metal sealing, and the heating power vacuum feedthrough 82 is installed at the bottom of the four-way flange 81.

[0101] The bias cleaning vacuum feedthrough 9 is used for introducing a bias cleaning voltage from the atmospheric end to the vacuum interior.

[0102] The TC temperature measuring vacuum feedthrough 83 is used for monitoring the TC temperature signal to detect the temperature inside the heating module 7 in real time.

[0103] The heating power vacuum feedthrough 82 is used for supplying power to the heating module 7 to realize the heating function.

[0104] The bias cleaning vacuum feedthrough 9, the heating power vacuum feedthrough 82 and the TC temperature measuring vacuum feedthrough 83 are inserted into the hollow rotating magnetic coupling 3 and the mandrel 6 through connecting different kinds of wires, and are respectively introduced into the conductive body 10, the heat resistance wire inside the heating module 7 and the TC thermocouple inside the heating module 7. The heat resistance wire inside the heating module 7 is used for generating heat, and the TC thermocouple inside the heating module 7 is used for measuring the temperature inside the heating module 7.

[0105] In a preferred embodiment, as shown in the accompanying drawings Figure 1 , the accompanying drawings Figure 2 , the accompanying drawings Figure 3 and the accompanying drawings Figure 8 , the upper surface of the fixed flange 1 is fixedly installed with a grounding device 12 for transmitting the ground of the rotating shaft 4. The grounding device 12 comprises an L-shaped fixed seat 121, an adjusting bolt 122, a reset spring 123 and a conductive block 124 abutting against the rotating shaft 4.

[0106] The bottom of the L-shaped fixed seat 121 is fixedly installed on the upper surface of the fixed flange 1, the adjusting bolt 122 is threaded through the top of the L-shaped fixed seat 121, the conductive block 124 is fixedly installed on the end of the adjusting bolt 122, and the two ends of the reset spring 123 are fixedly connected with the conductive block 124 and the L-shaped fixed seat 121 respectively.

[0107] In order to ensure the stable bias cleaning function during the high-speed rotation of the sample 13, the near-point grounding mode is adopted to realize the stability of the bias cleaning, that is, the objects that need to be conductive and the non-conductive objects that are close to the sample 13 in space need to be grounded to avoid short circuit caused by plasma striking the non-conductive objects during the bias cleaning. The grounding device 12 is fixedly installed on the fixed flange 1 to realize the near-point grounding of the rotating shaft 4,

[0108] In order to ensure the stability of the contact between the rotating shaft 4 and the fixed flange 1 during rotation, the spring is used for compression;

[0109] Wherein, the L fixed seat 121 is fixed on the fixed flange 1 through bolt connection, two 4mm through holes are reserved on the upper portion of the L fixed seat 121 for installing adjusting bolts 122, the adjusting bolts 122 pass through the through holes, a reset spring 123 is arranged on the adjusting bolts 122, the reset spring 123 is concentric with the adjusting bolts 122, one end of the reset spring 123 is in contact with the side surface of the L fixed seat 121, the other end of the reset spring 123 is connected with a conductive block 124, and the conductive block 124 is fixed on the adjusting bolts 122 and is connected with each other through thread cooperation, then the reset spring 123 provides the elastic force for supporting the conductive block 124, and the conductive block 124 is closely attached to the transmission rotating shaft 4 under the influence of the elastic force.

[0110] In a preferred embodiment, as shown in the accompanying drawings, Figure 3 The hollow rotating magnetic coupling 3 comprises a driving motor 31, an external rotating shaft 32 and an internal rotating shaft 33 located in a vacuum environment.

[0111] The output shaft of the driving motor 31 is fixedly connected with the external rotating shaft 32, the external rotating shaft 32 is magnetically connected with the internal rotating shaft 33, and the internal rotating shaft 33 is fixedly connected with the transmission rotating shaft 4.

[0112] The driving motor 31 transmits torque to the external rotating shaft 32, and the torque is converted to the internal rotating shaft 33 in the vacuum through the attraction of the inner and outer magnets to realize rotating motion.

[0113] The transmission rotating shaft 4 and the internal rotating shaft 33 of the hollow rotating magnetic coupling 3 are both hollow structures, and wires can be arranged inside for transmitting electrical signals.

[0114] The working principle of the utility model is as follows: when in use, the fixed flange 1 is installed with the vacuum chamber, and the sample 13 is placed in the slot of the sample supporting plate 51 for accurate positioning.

[0115] If the sample 13 needs to be heated, the driving heating module 7 is powered to convert electricity into heat, and the temperature field is applied to the sample 13 through the heat radiation of the facing surfaces.

[0116] If bias cleaning is needed, the bias cleaning vacuum feedthrough 9 is connected with negative voltage, which is introduced to the conductor 10 through wires, and is conducted to the sample supporting plate 51 through the conductive mechanism 11, the sample 13 is in contact with the sample supporting plate 51 and conducts electricity at the same time, and then argon gas is introduced into the vacuum chamber, argon ions are generated by ionizing the argon gas through negative voltage, and the argon ions freely move and bombard the surface of the sample 13 to complete the bias cleaning.

[0117] If the sample 13 needs to be driven to rotate, the hollow rotating magnetic coupling 3 needs to be driven to rotate to drive the internal transmission rotating shaft 4 to rotate, and at the same time drive the sample bracket module 5 connected with the internal transmission rotating shaft 4 to rotate around the axis, and at the same time drive the sample 13 placed on the sample bracket 51 to rotate.

[0118] If the sample 13 needs to be moved, the lifting module 2 can be driven to move to drive the sample 13 to move up and down.

[0119] It should be noted that the relative terms such as first and second, and the like, are used herein solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0120] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. An ultrahigh vacuum sample handling device, characterized by: The utility model relates to a kind of ultra-high vacuum sample processing devices, including hollow rotary magnetic coupling (3), the output shaft of the hollow rotary magnetic coupling (3) is fixedly connected with transmission rotating shaft (4), the top end of the transmission rotating shaft (4) is fixedly connected with sample carrier module (5), the inside of the hollow rotary magnetic coupling (3) is fixedly installed with the mandrel (6) being arranged concentrically with transmission rotating shaft (4), The sample carrier module (5) includes a sample support plate (51). The bottom end of the mandrel (6) is fixedly installed with bias cleaning vacuum introduction feedthrough (9) by sealing fixing part (8), the top of the mandrel (6) is provided with electric conductor (10) electrically connected with bias cleaning vacuum introduction feedthrough (9), and electric conduction mechanism (11) is provided between the electric conductor (10) and the sample support plate (51).

2. An ultrahigh vacuum sample handling device according to claim 1, characterized in that: The sample carrier module (5) further includes an adapter plate (52) and an insulating column (53). The top of the transmission rotating shaft (4) is fixedly installed with a shield (54), the adapter plate (52) is fixedly installed on the top of the shield (54), and at least three insulating columns (53) not in the same plane are fixedly installed on the end of the adapter plate (52).

3. The ultra-high vacuum sample processing device of claim 2, wherein: The electric conduction mechanism (11) includes an electrically conductive head (111), an electrically conductive column (112), and a connecting wire (113). The electric conductor (10) located in the shield (54) is fixedly installed on the surface of the mandrel (6) by an insulating fixed seat (114), the side of the shield (54) is fixedly connected with a fixed sleeve (115), the electrically conductive head (111) is arranged in the fixed sleeve (115), and the electrically conductive head (111) abuts against the outer surface of the electric conductor (10). The electrically conductive column (112) is parallel to the insulating column (53), the top of the electrically conductive column (112) is fixedly installed on the bottom of one end of the sample support plate (51), and the bottom of the electrically conductive column (112) is fixedly installed on one end of the adapter plate (52).

4. An ultrahigh vacuum sample handling device according to claim 3, characterized in that: The outer surface of the electrically conductive head (111) is fixedly sleeved with an annular insulator (117), the fixed sleeve (115) is movably sleeved on the outer surface of the annular insulator (117), one end of the fixed sleeve (115) is threadedly connected with an adjusting nut (118), the adjusting nut (118) is connected with the annular insulator (117) through an adjusting spring (119), the bottom of the adapter plate (52) located below the electrically conductive column (112) is fixedly installed with an isolation shell (521), and the adjusting nut (118) is fixedly connected with the isolation shell (521) through a ceramic ring (522). The connecting wire (113) penetrates through the inside of the adjusting nut (118) and the ceramic ring (522).

5. An ultrahigh vacuum sample handling device according to claim 1, characterized in that: The core shaft (6) is located inside the transmission rotating shaft (4) and its top is provided through the transmission rotating shaft (4), and the top of the core shaft (6) is fixedly installed with a heating module (7) located below the sample supporting plate (51).

6. An ultrahigh vacuum sample handling device according to claim 1, characterized in that: The top of the hollow rotating magnetic coupling (3) is sealingly installed with a lifting module (2), the top of the lifting module (2) is sealingly connected with a fixing flange (1) installed on the vacuum chamber, and the transmission rotating shaft (4) and the core shaft (6) are sequentially provided through the lifting module (2) and the fixing flange (1) from bottom to top.

7. An ultrahigh vacuum sample handling device according to claim 5, characterized in that: The sealing fixing part (8) comprises a four-way flange (81), the bottom of the core shaft (6) is fixedly connected with the four-way flange (81), the bias cleaning vacuum feedthrough (9) is fixedly installed at one end of the four-way flange (81), and the other two ends of the four-way flange (81) are fixedly installed with a heating power vacuum feedthrough (82) and a TC temperature measurement vacuum feedthrough (83) respectively. The conductive body (10) is electrically connected with the bias cleaning vacuum feedthrough (9) through a wire. The heating resistance wire and the TC thermocouple in the heating module (7) are electrically connected with the heating power vacuum feedthrough (82) and the TC temperature measurement vacuum feedthrough (83) through corresponding wires respectively.

8. An ultrahigh vacuum sample handling device according to claim 6, characterized in that: The upper surface of the fixing flange (1) is fixedly installed with a grounding device (12) for grounding the transmission rotating shaft (4), and the grounding device (12) comprises an L fixing seat (121), an adjusting bolt (122), a reset spring (123) and a conductive block (124) abutting against the transmission rotating shaft (4). The bottom of the L fixing seat (121) is fixedly installed on the upper surface of the fixing flange (1), the adjusting bolt (122) is provided through the top of the L fixing seat (121), the conductive block (124) is fixedly installed on the end of the adjusting bolt (122), and the two ends of the reset spring (123) are fixedly connected with the conductive block (124) and the L fixing seat (121) respectively.

9. An ultrahigh vacuum sample handling device according to claim 1, characterized in that: The hollow rotating magnetic coupling (3) comprises a driving motor (31), an external rotating shaft (32) and an internal rotating shaft (33) located in a vacuum environment. The output shaft of the driving motor (31) is fixedly connected with the external rotating shaft (32), the external rotating shaft (32) is magnetically connected with the internal rotating shaft (33), and the internal rotating shaft (33) is fixedly connected with the transmission rotating shaft (4).

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