Ion gauge antifouling device for vacuum degree detection

Abstract

The utility model relates to an ion gauge antifouling device for vacuum degree detection, which is characterized in that the ion gauge antifouling device comprises a shell, the shell is integrally connected with a machine table, a one-way circulation structure for reducing pollutant backflow is arranged in the shell, the one-way circulation structure comprises a main channel and multiple stages of branch channel units, the main channel extends in the flowing direction of fluid, an inlet end connected with an ion gauge and an outlet end communicated with an inner cavity of a machine table are formed at the two ends of the main channel, the multi-stage branch channel unit is composed of at least one pair of centrosymmetric branch channels, and the branch channels are bifurcated from the main channel at a bifurcation angle and converged again to form a closed loop. The ion gauge has the following advantages and effects that the pollution of pollutants to the interior of the ion gauge can be reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, specifically relates to a vacuum degree detects ion rule anti -pollution device. BACKGROUND

[0002] Ion rule is also called ionization vacuum gauge, and it is an instrument for measuring gas molecular density in vacuum environment, and its working principle is based on ionization effect of gas molecules in electric field or thermal field, and the ion flow generated by ionization is measured to calculate the vacuum degree.

[0003] When the semiconductor is processed by film, etching and the like, it needs to be ensured that the processing is carried out in the vacuum chamber of the machine table, so before the related processing technology is carried out, the internal chamber of the machine table needs to be detected by the ion rule to ensure that it meets the processing requirements.

[0004] However, it is found in the actual use that, since the ion rule is usually directly connected with the internal chamber of the machine table, during the idle or process of the equipment, the gas will flow back, causing the mixed pollutants to enter the ion collector inside the ion rule, so that the ion rule is polluted, causing the ion collector to age or even be damaged, and the vacuum degree of the equipment cannot be read normally. SUMMARY

[0005] In view of the deficiencies in the prior art, the utility model aims at providing an ion rule anti-pollution device for vacuum degree detection, which can reduce the pollution of pollutants to the ion rule.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: an ion rule anti-pollution device for vacuum degree detection, comprising a shell, the shell is integrally connected with a machine table, a one-way flow structure for reducing the backflow of pollutants is arranged in the shell, the one-way flow structure comprises a main channel and a multi-stage branch channel unit, the main channel extends along the fluid flow direction and forms an inlet end connected with the ion rule and an outlet end communicated with the internal chamber of the machine table at both ends, the multi-stage branch channel unit is composed of at least one pair of center-symmetrical branch channels, the branch channels branch from the main channel at a bifurcation angle and recombine to form a closed loop.

[0007] The utility model is further provided as follows: a gas channel communicated with the one-way flow structure is arranged in the shell, and the gas channel is used for introducing a purge gas.

[0008] The utility model is further provided as follows: an upwardly extending connecting pipeline is arranged on the shell, and the connecting pipeline is respectively communicated with the gas channel and the inlet end.

[0009] The utility model is further provided as follows: the bifurcation angle is not less than 15° and not more than 150°.

[0010] The utility model further sets up: the connecting pipeline includes the first sleeve pipe and the second sleeve pipe who constitutes the detachable connection with each other, the first sleeve pipe is integrally arranged in the shell, the first sleeve pipe is inlayed with the sealing ring, the first sleeve pipe outer periphery is equipped with the notched, the notched is equipped with the extrusion arm, the extrusion arm one end rotation is connected in the notched as the extrusion end, one end extends as the drive end, the extrusion end outer periphery is equipped with the eccentric part away from the center of the connecting place and the near heart part close to the center of the connecting place, the extrusion arm switches between the eccentric part and the near heart part through rotation, to this realizes the second sleeve pipe's push and release.

[0011] The utility model further sets up: the first sleeve pipe inner periphery is equipped with the protruding limit portion, the limit portion is used for limiting the sealing ring.

[0012] Compared with the prior art, the utility model has the beneficial effects that:

[0013] Because the one-way flow structure is arranged in the shell, the one-way flow structure includes the main channel and the multiple-stage branch channel unit which is periodically arranged in series along the axis direction of the main channel, so that the one-way flow channel with low resistance in forward flow and high resistance in reverse flow is formed. In the process of ion flow, the gas flow passes through multiple branch channels. Since the branch channels have curved radii, the previous gas flow will hit the branch channel wall after passing through, greatly wasting the energy of forward flow. When the next branch channel is reached, the subsequent gas flow will also enter the branch channel, thereby generating energy attenuation. When the two gas flows meet, the collision between the gas flows also causes the energy to attenuate again, thereby forming the effect of high resistance in reverse flow. In turn, the pollutants in the gas flow can be locked in the one-way flow structure, avoiding the backflow of pollutants into the ion gauge. In this way, the pollution of the ion gauge caused by pollutants can be reduced. In addition, the gas molecules in the vacuum environment can reach the interior of the ion gauge through free diffusion, thereby reducing the pollution of the ion gauge caused by pollutants while not affecting the normal measurement of the vacuum degree of the chamber in the ion gauge. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is the internal structure schematic diagram of the utility model;

[0015] Fig. 2 It is the whole structure schematic diagram of the utility model;

[0016] Fig. 3 It is the internal structure schematic diagram of the connecting pipeline in the utility model;

[0017] Fig. 4 It is the specific structure schematic diagram of the extrusion arm in the utility model. DETAILED DESCRIPTION

[0018] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0019] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0020] As Figs. 1 to 4 The utility model discloses a kind of ion gauge anti-pollution devices for vacuum detection, including shell 1, which is integrally connected with machine table for carrying out film, etching etc. processing to semiconductor by welding or one-piece molding, one-way flow structure for reducing backflow of pollutants is equipped in shell 1. Specifically, one-way flow structure includes main channel 2 and multistage branch channel unit 5, main channel 2 extends along fluid flow direction and forms inlet end 3 connected with ion gauge and outlet end 4 communicated with machine table internal chamber at both ends, multistage branch channel unit 5 is made of at least a pair of center symmetrical branch channel 51, branch channel 51 bifurcates from main channel 2 with bifurcation angle and re-converges to form closed loop, when flowing forward, branch channel 51 forms coherent flow channel, fluid kinetic energy is efficiently transmitted;When flowing reversely, branch causes fluid to collide, vortex generates, significantly increases pressure drop and energy dissipation. Wherein, bifurcation angle should be not less than 15 ° and not more than 150 °, so that it can optimize forward flow efficiency, while increasing reverse resistance.

[0021] When the vacuum degree of the internal chamber of the machine table is detected by the ion gauge, the detection end of the ion gauge is connected with the inlet end 3, so that the gas molecules in the internal chamber of the machine table can diffuse from the outlet end 4 to the inside of the ion gauge by free diffusion, so as to normally measure the vacuum degree of the internal chamber of the machine table by the ion gauge; and in the process of flowing to the ion gauge, the gas flow will pass through a plurality of branch channels 51, and since the branch channels 51 have curved radii, the previous gas flow will collide with the wall of the branch channel 51 after passing through, greatly wasting the energy of the forward flow; when the next branch channel 51, the subsequent gas flow will also enter the branch channel 51, thereby causing energy attenuation; and when two gas flows meet, the collision between the gas flows will also cause the energy to attenuate again, thereby forming the effect of reverse flow high resistance, and thus the pollutants in the gas flow can be locked in the one-way flow structure, avoiding the pollutants from flowing back into the inside of the ion gauge, so as to reduce the pollution of the pollutants to the inside of the ion gauge.

[0022] In the embodiment, the gas channel 6 in communication with the one-way flow structure is arranged in the shell 1, and the gas channel 6 is used to introduce a purge gas, for example, nitrogen; when the machine table is opened for maintenance, the purge gas is continuously introduced through the gas channel 6, so as to ensure that the ion gauge and the internal chamber of the machine table are in a positive pressure state, so that the ion gauge and the vacuum chamber are greater than the atmospheric pressure, so as to further prevent the external pollutants from entering the inside of the ion gauge.

[0023] Correspondingly, the housing 1 is provided with a connecting pipe 7 corresponding to the gas channel 6 and the inlet end 3 respectively, which extends upward. Specifically, the connecting pipe 7 comprises a first sleeve 71 and a second sleeve 72 which are detachably connected to each other, wherein the second sleeve 72 in the connecting pipe 7 corresponding to the gas channel 6 and the inlet end 3 respectively is integrally connected with the gas inlet pipe and the ion gauge detection end respectively, the first sleeve 71 is integrally connected with the housing 1 by welding or integral molding, the first sleeve 71 is provided with a notch 711 on the outer periphery, and the notch 711 is used to connect a pressing arm 73, that is, one end of the pressing arm 73 is rotatably connected to the notch 711 as a pressing end for contacting the second sleeve 72, and the other end extends out of the notch 711 as a driving end, wherein the outer periphery of the pressing end is provided with an eccentric portion 731 away from the center of the connection and a centripetal portion 732 close to the center of the connection, that is, the distance between the centripetal portion 732 and the center of the connection is less than the distance between the eccentric portion 731 and the center of the connection in the same plane. Thus, when it is necessary to connect the gas inlet pipe and the ion gauge detection end through the corresponding second sleeve 72 and the first sleeve 71 respectively, the second sleeve 72 is first inserted into the first sleeve 71, and then the pressing arm 73 is driven to rotate by the driving end, so that the eccentric portion 731 gradually transitions to the centripetal portion 732, so that the pressure exerted by the pressing end on the second sleeve 72 gradually increases, and as the pressing arm 73 rotates, the pressure will generate an axial horizontal component, so as to push the second sleeve 72 to tightly press the sealing ring 8 embedded in the first sleeve 71, ensuring the sealing property of the connection.

[0024] In addition, a protruding limiting portion 9 is arranged on the inner periphery of the first sleeve 71, which can abut against the surface of the sealing ring 8 after the sealing ring 8 is embedded in the first sleeve 71, so as to limit the sealing ring 8 and prevent the sealing ring 8 from falling off.

[0025] The specific embodiment is only an explanation of the present application, which is not a limitation of the present application, and those skilled in the art can make modifications to the embodiment without creative contribution after reading the specification, but as long as it is within the scope of the claims of the present application, it is protected by the patent law.

Claims

1. A vacuum degree detection ion gauge anti-fouling device, characterized in that, The shell is integrally connected with a machine table, and a one-way flow structure for reducing backflow of pollutants is arranged in the shell. The one-way flow structure comprises a main channel and a multi-stage branch channel unit. The main channel extends along a fluid flow direction and forms an inlet end connected with an ion gauge at both ends and an outlet end communicated with an internal chamber of the machine table. The multi-stage branch channel unit is composed of at least one pair of center-symmetric branch channels. The branch channels diverge from the main channel at a diverging angle and recombine to form a closed loop.

2. The ion gauge anti-contamination device for vacuum degree detection according to claim 1, characterized in that, A gas channel communicated with the one-way flow structure is arranged in the shell, and the gas channel is used for introducing a carrier gas.

3. The ion gauge anti-contamination device according to claim 2, wherein An upwardly extending connecting pipeline is arranged on the shell and communicated with the gas channel and the inlet end respectively.

4. The ion gauge anti-contamination device for vacuum degree detection according to claim 1, characterized in that, The diverging angle is not less than 15° and not more than 150°.

5. The ion gauge anti-contamination device according to claim 3, wherein The connecting pipeline comprises a first sleeve and a second sleeve which are detachably connected with each other. The first sleeve is integrally arranged in the shell. A sealing ring is embedded in the first sleeve. A slot is arranged on the outer periphery of the first sleeve. An extrusion arm is arranged in the slot. One end of the extrusion arm is rotatably connected to the slot as an extrusion end, and the other end extends outwardly as a driving end. The extrusion end is used for contacting the second sleeve. An eccentric portion away from the center of the connection and a centric portion close to the center of the connection are arranged on the outer periphery of the extrusion end. The extrusion arm is switched between the eccentric portion and the centric portion by rotation, so as to push and release the second sleeve.

6. The ion gauge anti-contamination device according to claim 5, wherein A protruding limiting portion is arranged on the inner periphery of the first sleeve, and the limiting portion is used for limiting the sealing ring.

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