Test equipment

Abstract

The utility model provides a test device. The test device comprises a first test mechanism; the first test mechanism comprises a vibration member rotating with a first direction as an axis, a first bearing structure arranged along a second direction with the vibration member, and a second bearing structure arranged along a third direction with the vibration member. The first bearing structure comprises a first bearing part used for bearing a product to be tested, and the second bearing structure comprises a second bearing part used for bearing the product to be tested; the vibrating piece comprises a vibrating shaft capable of vibrating in a reciprocating mode in the axial direction of the vibrating shaft. The vibrating piece comprises a first station and a second station; the vibration part rotates to the first station, and the vibration shaft is arranged in the second direction and is correspondingly matched with the first bearing part so as to carry out vibration test on the to-be-tested product on the first bearing part; and when the vibrating piece rotates to the second station, the vibrating shaft is arranged along the third direction and is correspondingly matched with the second bearing piece to carry out vibration test on the to-be-tested product on the second bearing piece.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor package test, more particularly to a test equipment. BACKGROUND

[0002] Semiconductor package is a key link in semiconductor manufacturing process, which mainly protects the chip by ceramic, insulating plastic or metal protective material. After completing the packaging process, professional test equipment is needed to strictly detect the quality of the packaged product. However, the common test equipment on the current market has the problem of single function, mainly showing that it only supports single direction vibration test, which seriously affects the accuracy of product test. SUMMARY

[0003] In view of the above problems, the utility model provides a test equipment which can improve the accuracy of semiconductor package test.

[0004] To achieve the above purpose, the utility model adopts the following technical scheme:

[0005] The utility model provides a test equipment, which comprises: a first test mechanism for vibration test of a product to be tested; the first test mechanism comprises a vibrating member rotatable about a first direction as an axis, a first bearing structure arranged along a second direction with the vibrating member, and a second bearing structure arranged along a third direction with the vibrating member;

[0006] The first bearing structure comprises a first bearing member for bearing and fixing the product to be tested, and the second bearing structure comprises a second bearing member for bearing and fixing the product to be tested; the vibrating member comprises a vibrating shaft capable of reciprocating vibration along its own axial direction;

[0007] The vibrating member comprises a first station and a second station; the vibrating shaft is arranged along the second direction and corresponds to the first bearing member for vibration test of the product to be tested on the first bearing member when the vibrating member rotates to the first station; the vibrating shaft is arranged along the third direction and corresponds to the second bearing member for vibration test of the product to be tested on the second bearing member when the vibrating member rotates to the second station.

[0008] Preferably, the test equipment further comprises a second test mechanism, the second test mechanism comprises an acoustic pressure member movable along the second direction, and the acoustic pressure member is arranged at a position higher than the second bearing structure in the third direction; the acoustic pressure member is configured to be movable to above the first bearing member for acoustic pressure test of the product to be tested on the first bearing member, or movable to above the second bearing member for acoustic pressure test of the product to be tested on the second bearing member.

[0009] Preferably, the testing device further comprises a base, the first carrier is arranged on the base and is movable along a second direction by a first movement structure, and the first carrier is lockable in position along the second direction by the first movement structure.

[0010] Preferably, the testing device further comprises a frame, the second carrier structure further comprises a bottom plate with a middle hollow portion, the second carrier is fixed on the bottom plate and is exposed by the middle hollow portion, the bottom plate is arranged on the frame and is movable along a third direction by a second movement structure, and the bottom plate is lockable in position along the third direction by the second movement structure, and the vibration axis of the vibration member is in contact with the bottom wall of the second carrier through the middle hollow portion.

[0011] Preferably, the first testing mechanism further comprises a rotating shaft arranged along the first direction and fixed with the vibration member, and a first driving member for driving the rotating shaft to rotate, and the arrangement direction of the vibration axis is perpendicular to the arrangement direction of the rotating shaft.

[0012] Preferably, the first movement structure comprises a first sliding rail arranged along the second direction and fixed on the base, a first sliding block arranged on the first sliding rail, and a second driving member for driving the first sliding block to move.

[0013] The first carrier structure further comprises a first plate portion for being fixed with the first carrier, and a second plate portion connected with the first plate portion and in contact with the vibration axis of the vibration member, the second plate portion is arranged along the third direction and is perpendicular to the first plate portion, and the first plate portion is fixed with the first sliding block.

[0014] Preferably, a plurality of protruding structures are formed on one side end surface of the vibration axis of the vibration member, and a plurality of grooves corresponding to the protruding structures are formed on the bottom wall of the second carrier.

[0015] Preferably, a plurality of protruding structures are formed on one side end surface of the vibration axis of the vibration member, and a plurality of grooves corresponding to the protruding structures are formed on the plate surface of the second plate portion close to the vibration member.

[0016] Preferably, the testing device further comprises a frame, a top plate arranged on the top surface of the frame, and a third movement structure arranged on the top plate and capable of driving the sound pressure member to reciprocate along the second direction.

[0017] Preferably, the first carrier and the second carrier each comprise a base, a PCB plate arranged on the base, a carrier seat arranged on the PCB plate, and a sensor.

[0018] The testing device has the following advantages:

[0019] The utility model discloses a rotatable vibration piece drives vibration shaft to rotate to with first bearing piece corresponding cooperation to carry out vibration test to the product to be measured on first bearing piece, or rotates to with second bearing piece corresponding cooperation to carry out vibration test to the product to be measured on second bearing piece, thereby improves the accuracy of semiconductor package test. The test equipment only relies on one rotatable vibration piece to realize the vibration test of the product to be measured in vertical direction and horizontal direction two directions, reduces the manufacturing cost of test equipment, and the overall structure is more simple and compact, improves the equipment reliability. And still possess sound pressure test function, cooperates vibration test function and can expand analog test range, further improves product test accuracy. The utility model discloses through optimizing mechanical structure layout and function integration, can realize the miniaturization and multifunction of test equipment while guaranteeing the test precision, makes semiconductor package test possess high efficiency and economy. BRIEF DESCRIPTION OF DRAWINGS

[0020] The specific embodiments of the utility model will be described in further detail below with reference to the drawings.

[0021] Figure 1 It is the structural schematic diagram of the utility model.

[0022] Figure 2 It is the internal structure schematic diagram of the utility model.

[0023] Figure 3 It is one of the vibration piece and first bearing structure cooperation schematic diagram of the utility model.

[0024] Figure 4 It is the second of the vibration piece and first bearing structure cooperation schematic diagram of the utility model.

[0025] Figure 5 It is the vibration piece and second bearing structure cooperation schematic diagram of the utility model.

[0026] Reference signs: 1, vibration piece, 11, vibration shaft, 111, protruding structure, 2, first bearing structure, 21, first bearing piece, 22, base, 23, first movement structure, 24, first plate part, 25, second plate part, 31, second bearing piece, 32, bottom plate, 33, base, 34, PCB board, 35, chip carrier, 41, sound pressure piece, 51, rotating shaft, 52, rotating shaft seat, 6, frame body, 61, top plate, 62, side plate, 63, third movement structure, 7, test machine. DETAILED DESCRIPTION

[0027] Various exemplary embodiments of the utility model will be described in detail below with reference to the drawings. It should be noted that: the relative arrangement, numerical expression and numerical value of components and steps set forth in these embodiments do not limit the scope of the utility model, unless otherwise specifically stated.

[0028] The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the application or its application or uses.

[0029] Techniques and devices known to those of ordinary skill in the relevant art can not be discussed in detail herein, but should be considered as part of the description.

[0030] In all of the examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not limiting. Thus, other examples of the exemplary embodiments can have different values.

[0031] It should be noted that like reference numerals and letters refer to like items throughout the several views, and thus a discussion of the same in one view is typically unnecessary in other views.

[0032] In order to solve the problems existing in the prior art, the utility model provides a kind of test equipment, combine Figures 1 to 5As shown, the test device comprises a first test mechanism for performing vibration test on the product under test. The first test mechanism comprises a vibration member 1 rotatable about a first direction as an axis, a first carrier structure 2 arranged along a second direction with the vibration member 1, and a second carrier structure arranged along a third direction with the vibration member. The second carrier structure is arranged at a position higher than the first carrier structure 2 in the third direction. The first carrier structure 2 comprises a first carrier 21 for carrying and fixing the product under test, and the second carrier structure comprises a second carrier 31 for carrying and fixing the product under test. The second carrier 31 is arranged at a position higher than the first carrier 21 in the third direction. The vibration member 1 comprises a vibration shaft 11 reciprocable along an axis thereof. The vibration member 1 is rotatable to correspondingly cooperate with the first carrier 21 to perform vibration test on the product under test on the first carrier 21, or to correspondingly cooperate with the second carrier 31 to perform vibration test on the product under test on the second carrier 31. That is, the vibration member 1 comprises a first station and a second station. When the vibration member 1 is rotated to the first station, the vibration shaft 11 is arranged along the second direction and correspondingly cooperates with the first carrier 21 to perform vibration test on the product under test on the first carrier 21. When the vibration member 1 is rotated to the second station, the vibration shaft 11 is arranged along the third direction and correspondingly cooperates with the second carrier 31 to perform vibration test on the product under test on the second carrier 31. The vibration member 1 can be switched to the first station or the second station by rotation. When the vibration member 1 is in the first station, a free end of the vibration shaft 11 is located below the second carrier 31. When the vibration member 1 is in the second station, the free end of the vibration shaft 11 is located aside the first carrier 21. The vibration member 1 can be a telescopic motor. The output shaft of the telescopic motor is the vibration shaft 11. The body of the telescopic motor is fixed with the rotating shaft 51, so that the telescopic motor can rotate with the rotating shaft 51. When the telescopic motor is in different working positions, the vibration shaft can be driven to reciprocate along an axis thereof, thereby performing vibration test on the product under test on the first carrier 21 or the second carrier 31. In order to further improve the accuracy of the vibration test, the first carrier 21 and the second carrier 31 each comprise a base 33, a PCB 34 fixed on the base 33, a plurality of chip carriers 35, and a plurality of sensors on the PCB 34. The sensors arranged on the first carrier 21 and the second carrier 31 are used to monitor the state change of the product under test in the vibration test process in real time, and the data obtained by the sensors are processed in real time by the test machine 7, thereby more accurately evaluating the test performance of the product under test. It should be noted that the vibration test device is described in detail with reference to the accompanying drawings. Figure 2 As shown, the first direction is the X direction, the second direction is the Y direction, and the third direction is the Z direction. The first direction is perpendicular to the second direction, and the third direction is perpendicular to both the first direction and the second direction.

[0033] In the above embodiment, the test device further comprises a second test mechanism for performing acoustic pressure test on the products under test. The second test mechanism comprises an acoustic pressure piece 41 movable in a second direction, the acoustic pressure piece 41 being located at a position higher than the second carrier 31 of the second carrier structure in a third direction; the acoustic pressure piece 41 is configured to be movable to a position directly above the first carrier 21 to perform acoustic pressure test on the products under test on the first carrier 21, or to a position directly above the second carrier 31 to perform acoustic pressure test on the products under test on the second carrier 31. By using the second test mechanism to perform acoustic pressure test on the products under test, the acoustic performance of the products under test in the actual working environment can be further simulated, so that the quality and reliability of the products can be comprehensively evaluated. The acoustic pressure piece 41 can be an acoustic element such as a loudspeaker or a microphone, by adjusting the frequency, amplitude and other parameters of the sound emitted or received by the acoustic pressure piece 41, different acoustic environments can be simulated, and more detailed test can be performed on the products under test. The test device provided by the utility model realizes more comprehensive, efficient and accurate test on the semiconductor packaging products by integrating the vibration test and acoustic pressure test functions. The test device improves the accuracy and consistency of the test, and reduces the test cost and time. By arranging sensors on the first carrier 21 and the second carrier 31 respectively, the state change of the products under test during the acoustic pressure test process can be monitored in real time, and the data obtained by the sensors can be processed in real time by the test machine 7, so that the test performance of the products under test can be more accurately evaluated.

[0034] In a specific embodiment, the test device further comprises a base 22, the first carrier 21 is arranged on the base 22 and can move in the second direction through the first movement structure 23, and the position of the first carrier 21 in the second direction can be locked through the first movement structure 23. The first carrier structure 2 further comprises a first plate part 24 fixed with the first carrier 21 and a second plate part 25 connected with the first plate part 24 and used to contact and cooperate with the vibration shaft 11 of the vibration piece 1; the second plate part 25 is arranged in the third direction and perpendicular to the first plate part 24. The vibration shaft 11 of the vibration piece 1 is in contact and cooperation with the side plate surface close to the second plate part 25. When the second plate part 25 corresponds to the position of the vibration shaft 11, the plate surface of the second plate part 25 is parallel to the end surface of the vibration shaft 11, so that when the vibration piece 1 drives the vibration shaft 11 to rotate to correspond to the position of the first carrier 21, the vibration shaft 11 can be stably connected with the second plate part 25, and the products under test arranged on the first carrier 21 can be subjected to vibration test in the second direction through the reciprocating vibration in the second direction. In addition, a plurality of chip carriers are arranged on the first carrier 21, so that the products under test can be stably placed and fixed on the first carrier 21, and the stability of the products under test during the test and the accuracy of the test results can be ensured.

[0035] Further, the first movement structure 23 includes a first sliding rail fixed on the base 22 in a second direction, a first sliding block arranged on the first sliding rail, and a second driving member for driving the first sliding block to move. The first plate part 24 is fixed with the first sliding block. Specifically, the first movement structure includes a first sliding rail fixedly installed on the base. The sliding rail is arranged in the second direction. The second direction is perpendicular to the first direction. The specific direction is selected according to the initial design and use requirements of the device. The first sliding block arranged on the first sliding rail can freely slide on the sliding rail to realize movement in the second direction. In addition, in order to ensure that the first carrier 21 can stably follow the first sliding block to move on the first sliding rail, the fixed connection mode of the first plate part 24 with the first sliding block and the first carrier 21 with the first plate part 24 can be realized by screws, welding or other mechanical fixing means. Through the above design, the movement of the first carrier becomes flexible and stable, which can meet the needs of various precision operations. Through the above setting, the first carrier 21 can move as a whole in the horizontal direction. The second driving member can be a linear motor or a pneumatic cylinder, which provides driving force in the second direction for the second carrier structure. When the second driving member is started, the first carrier 21 can move linearly in the second direction on the base 22 to provide a rotation avoiding space for the rotating action of the vibration piece 1 which needs to be rotated to the horizontal direction, and to realize the abutment of the second plate part 25 with the vibration shaft 11 after the vibration piece 1 is rotated in place to facilitate the contact between the vibration shaft 11 and the second plate part 25. Specifically, before the vibration piece 1 is rotated, the second driving member drives the first carrier 21 to move linearly in the second direction on the base 22 to the right; after the vibration piece 1 is rotated to the horizontal arrangement of the vibration shaft 11, the second driving member drives the first carrier 21 to move linearly in the second direction on the base to the left to realize the abutment of the second plate part 25 with the vibration shaft 11.

[0036] In a specific embodiment, the test device further includes a frame body 6; the second carrier structure further includes a bottom plate 32 with a middle hollow part, and the second carrier 31 is fixed on the bottom plate 32 and exposed by the middle hollow part; the bottom plate 32 is arranged on the frame body 6 and the position of the bottom plate 32 in the third direction can be locked by the second movement structure. The vibration shaft 11 of the vibration piece 1 can pass through the middle hollow part and abut with the bottom wall of the second carrier 31. At this time, the vibration end of the vibration shaft 11 passes through the middle hollow part on the bottom plate 32 and contacts with the second carrier 31, so as to vibrate the product to be tested on the second carrier 31 in the vertical direction by the vibration piece 1.

[0037] Further, the second moving structure comprises a second sliding rail fixed to the frame 6 in a third direction, a second sliding block arranged on the second sliding rail, and a third driving member for driving the second sliding block to move. The bottom plate 32 is fixed to the second sliding block. The second carrier 31 can be subjected to a reciprocating vibration force in the vertical direction through the vibration of the vibration member 1. It can be understood that the second carrier 31 is arranged horizontally, and in order to ensure that the second carrier 31 can stably vibrate the product to be tested, a plurality of chip seats 35 for carrying the fixed chip are arranged on the second carrier 31, and the chip seats 35 are fixed and electrically connected to the PCB 34. Through the above arrangement, the second carrier structure can move in the vertical direction as a whole. The third driving member can be a linear motor or a pneumatic cylinder, which can provide a driving force in the third direction for the second carrier structure. When the third driving member is started, the second carrier structure can move linearly in the third direction on the frame 6 to provide a rotation avoiding space for the rotation of the vibration member 1 from the horizontal direction to the vertical direction, and after the vibration member 1 is rotated to the position, the second carrier 31 and the vibration shaft 11 are abutted and matched with each other. Specifically, before the vibration member 1 is rotated, the third driving member drives the bottom plate 32 to move linearly upward in the third direction on the frame 6; after the vibration member 1 is rotated to the vertical arrangement of the vibration shaft 11, the third driving member drives the bottom plate 32 to move linearly downward in the third direction on the frame 6 to realize the abutment and matching of the second carrier 31 and the vibration shaft 11.

[0038] More specifically, a plurality of protruding structures 111 are formed on the free end face of the vibration shaft 11 of the vibration member 1, and a plurality of grooves corresponding to the protruding structures are formed on the bottom wall of the second carrier 31. Through the above arrangement, the connection stability and reliability between the vibration shaft 11 and the second carrier 31 can be increased through the matching design of the protruding structures 111 and the grooves, so as to prevent the vibration shaft 11 from being loosened during the vibration test. At the same time, this matching mode also facilitates the quick disassembly and replacement of the vibration shaft, and improves the operation convenience and flexibility of the test equipment. Similarly, a plurality of grooves corresponding to the protruding structures 111 are formed on the plate face of the second plate part 25 close to the vibration member 1. Through the above arrangement, the connection stability and reliability between the vibration shaft 11 and the second plate part 25 can be increased through the matching design of the protruding structures 111 and the grooves, so as to prevent the vibration shaft 11 from being loosened during the vibration test. At the same time, this matching mode also facilitates the quick disassembly and replacement of the vibration shaft 11, and improves the operation convenience and flexibility of the test equipment.

[0039] In an embodiment, the first testing mechanism further comprises a rotating shaft 51 fixed with the vibration member 1 and arranged in the first direction, and a first driving member for driving the rotating shaft 51 to rotate; the arrangement direction of the vibration shaft 11 is perpendicular to the arrangement direction of the rotating shaft 51. The rotating shaft 51 is rotatably arranged on a rotating shaft seat 52, the rotating shaft 51 is fixed with the vibration member 1, and one end is connected with an output shaft of the first driving member, which can be a driving motor. When the first driving member is started, the rotating shaft 51 can be driven to rotate around the first direction as the axis. Since the vibration member 1 is fixed with the rotating shaft, the vibration member 1 will also rotate in the first direction along with the rotating shaft 51. Through this design, the vibration member 1 can not only exert a vibration force on the second carrier 31 in the vertical direction through the vibration shaft 11, but also exert a vibration force on the first carrier 21 in the horizontal direction through the vibration shaft 11, thereby increasing the vibration test direction of the product to be tested in the packaging test process, helping to more comprehensively simulate the vibration situation in the actual working environment, and improving the accuracy and reliability of the test. At the same time, the arrangement direction of the vibration shaft 11 is perpendicular to the arrangement direction of the rotating shaft 51, which also ensures the independence of the two in the vibration and rotation actions, avoids mutual interference, and ensures the stability of the equipment.

[0040] In an embodiment, the testing device further comprises a top plate 61 arranged on the top surface of the frame 6, and a third movement structure 63 arranged on the top plate 61 and capable of driving the sound pressure member to reciprocate in the second direction. The third movement structure 63 comprises a third sliding rail extending in the second direction, a third sliding block arranged on the third sliding rail, and a fourth driving member for driving the third sliding block to move; the fourth driving member can be a driving air cylinder. The sound pressure member 41 is fixed with the third sliding block. The above arrangement enables the sound pressure member 41 to slide in the second direction under the guidance of the third sliding rail. The position of the sound pressure member 41 can be accurately controlled by using the fourth driving member, thereby meeting the needs of separately testing the products to be tested on different carriers. The design of the top plate 61 not only enhances the stability of the testing device, but also provides a stable mounting platform for the third movement structure 63. More specifically, an outer cover is fixedly arranged on the outer periphery of the frame 6, and the outer cover comprises a side plate 62 and a top plate 61. The first testing mechanism, the second testing mechanism, the vibration member 1, and the testing machine 7 are all arranged in the outer cover, so that the whole testing device is compact in structure, easy to operate and maintain, and ensures the isolation of the test environment from the outside. In addition, a linear module capable of moving in the vertical direction can be arranged on the third sliding block, and the sound pressure member 41 is mounted on the moving part of the linear module, so that the height of the sound pressure member in the vertical direction is adjustable, thereby the distance between the sound pressure member and the product to be tested can be adjusted according to the test requirements. It can be understood that the first driving member, the second driving member, the third driving member, and the fourth driving member all have self-locking function to lock the position after driving is completed.

[0041] In conclusion, the utility model discloses a rotatable vibration piece drives vibration shaft rotation to correspond with first bearing piece cooperation to carry out vibration test to the product on first bearing piece and rotate to correspond with second bearing piece cooperation to carry out vibration test to the product on second bearing piece, thereby improve the accuracy of semiconductor package test. This test equipment only relies on one rotatable vibration piece to realize the vibration test of the product in vertical direction and horizontal direction, reduces the manufacturing cost of test equipment, and the overall structure is more simple and compact, improves the equipment reliability. And still have the sound pressure test function, cooperate vibration test function to can expand the simulation test range, further improve product test accuracy. The utility model discloses through optimizing mechanical structure layout and function integration, can guarantee the test accuracy while realizing the miniaturization and multifunction of test equipment, makes semiconductor package test have high efficiency and economy.

[0042] Obviously, the above embodiments of the utility model are only examples for clearly illustrating the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, on the basis of the above description, other different forms of changes or changes can be made, here cannot be exhausted to all the embodiments, and all the embodiments of the utility model still belong to the protection scope of the utility model.

Claims

1. A test apparatus, characterized by, The test device comprises: a first test mechanism for testing a product to be tested; the first test mechanism comprises a vibration member rotatable along a first direction as an axis, a first bearing structure arranged along a second direction with the vibration member, and a second bearing structure arranged along a third direction with the vibration member; the first bearing structure comprises a first bearing member for bearing a product to be tested, and the second bearing structure comprises a second bearing member for bearing a product to be tested; the vibration member comprises a vibration shaft capable of reciprocating along the axis of the vibration shaft; the vibration member comprises a first station and a second station; the vibration member is rotated to the first station, the vibration shaft is arranged along the second direction and correspondingly matched with the first bearing member to test the product to be tested on the first bearing member; the vibration member is rotated to the second station, the vibration shaft is arranged along the third direction and correspondingly matched with the second bearing member to test the product to be tested on the second bearing member.

2. The test apparatus of claim 1, wherein, The test device further comprises a second test mechanism, the second test mechanism comprises an acoustic pressure member movable along the second direction, and the acoustic pressure member is arranged at a position higher than the second bearing structure along the third direction; the acoustic pressure member is configured to be movable to a position directly above the first bearing member to test the product to be tested on the first bearing member, or to a position directly above the second bearing member to test the product to be tested on the second bearing member.

3. The test apparatus of claim 1, wherein, The test device further comprises a base, the first bearing member is arranged on the base and is movable along the second direction through a first movement structure, and the position of the first bearing member along the second direction is lockable through the first movement structure.

4. The test apparatus of claim 1, wherein, The test device further comprises a frame body; the second bearing structure further comprises a bottom plate with a middle part being hollow, the second bearing member is fixed on the bottom plate and exposed by the middle part being hollow; the bottom plate is arranged on the frame body and is movable along the third direction through a second movement structure, and the position of the bottom plate along the third direction is lockable through the second movement structure; the vibration shaft of the vibration member is capable of penetrating through the middle part being hollow and being in contact with the bottom wall of the second bearing member.

5. The test apparatus of claim 1, wherein, The first test mechanism further comprises a rotating shaft arranged along the first direction and fixed with the vibration member, and a first driving member for driving the rotating shaft to rotate; the arrangement direction of the vibration shaft is perpendicular to the arrangement direction of the rotating shaft.

6. The test apparatus of claim 3, wherein, The first movement structure comprises a first sliding rail arranged along the second direction and fixed on the base, a first sliding block arranged on the first sliding rail, and a second driving member for driving the first sliding block to move; The first bearing structure further comprises a first plate part for being fixed with the first bearing member, and a second plate part connected with the first plate part and in contact with the vibration shaft of the vibration member; the second plate part is arranged along the third direction and is perpendicular to the first plate part; the first plate part is fixed with the first sliding block.

7. The test apparatus of claim 1, wherein, A plurality of protruding structures are formed on one side end surface of the vibration shaft of the vibration member, and a plurality of grooves corresponding to the protruding structures are formed on the bottom wall of the second bearing member.

8. The test apparatus of claim 6, wherein, A plurality of protruding structures are formed on one side end surface of the vibration shaft of the vibration member, and a plurality of grooves corresponding to the protruding structures are formed on the plate surface of the second plate part close to the vibration member.

9. The test apparatus of claim 2, wherein, The test device further comprises a frame body, a top plate arranged on a top surface of the frame body, and a third movement structure arranged on the top plate and configured to drive the sound pressure component to reciprocate in a second direction.

10. The test apparatus of claim 1, wherein, The first carrier and the second carrier each comprise a base, a PCB arranged on the base, a carrier seat arranged on the PCB, and a sensor.

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