Heating assembly for MOCVD (Metal Organic Chemical Vapor Deposition)

Abstract

The utility model belongs to the technical field of heating components, and particularly relates to a heating component for MOCVD (Metal Organic Chemical Vapor Deposition), which comprises a fastening electrode, a crimping plate is connected onto the fastening electrode through a fixing bolt, a heating sheet is clamped between the crimping plate and the fastening electrode and comprises a heating part, two ends of the heating part are bent to form bent parts, and the bent parts are connected with the fastening electrode through a fixing bolt. The bending part is clamped between the crimping plate and the fastening electrode and is provided with a through hole which is adaptively connected with the fixing bolt in a sleeving manner, the middle end of the heating part is bent to form a pre-deformation compensation section, and reinforcing ribs are formed on the heating part on two sides of the pre-deformation compensation section along the circumferential direction of the heating part. Compared with the design of annular reinforcing ribs, the reinforcing ribs can provide local high rigidity, and thermal resistance is avoided while radial expansion force caused by thermal expansion is resisted in a targeted manner; according to the design of the heating part, through geometric pre-compensation, initial deformation is naturally counteracted through expansion after heating, the ideal omega shape is recovered in the working process, and heating uniformity is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model belongs to heating assembly technical field, concretely relates to a heating assembly for MOCVD. BACKGROUND

[0002] Metal organic chemical vapor deposition (MOCVD) is the core process for preparing Ⅲ-V, Ⅱ-VI compound semiconductor materials, and the performance of the core component heating assembly directly affects the uniformity of the epitaxial layer and the crystal quality. The traditional MOCVD heating assembly has the following technical bottlenecks:

[0003] 1. Uncontrollable thermal deformation: the Ω-shaped heating sheet expands radially at high temperature (usually 800~1200℃) due to thermal expansion, causing the circular arc area to expand to an oval shape, and the radial deformation will cause the temperature field of the reaction chamber to deviate, seriously affecting the uniformity of the epitaxial layer thickness;

[0004] 2. Reinforcing rib design contradiction: the prior art uses a ring-shaped reinforcing rib to suppress deformation, such as the patent with the authorization announcement number CN222557130U, but this design will form thermal resistance, and the ring-shaped rib can greatly increase the temperature difference between the center and the edge of the heating sheet, and the rib-sheet welding joint is prone to cracking under thermal cycling. SUMMARY

[0005] To solve the problems of uncontrollable thermal deformation, increased thermal resistance and stress concentration caused by reinforcing ribs at high temperature in the traditional MOCVD heating assembly, the utility model provides a heating assembly for MOCVD.

[0006] To achieve the above purpose, the utility model adopts the technical scheme: a heating assembly for MOCVD, comprising a fastening electrode, a pressure contact plate connected to the fastening electrode through a fixing bolt, a heating sheet clamped between the pressure contact plate and the fastening electrode, the heating sheet comprising a heating part, the two ends of the heating part being bent to form a bending part, the bending part being clamped between the pressure contact plate and the fastening electrode and being provided with a through hole adapted to the fixing bolt, and a pre-deformation compensation section being formed at the middle end of the heating part, and reinforcing ribs being formed on the heating part on both sides of the pre-deformation compensation section along the circumferential direction of the heating part.

[0007] The utility model has the beneficial effects that compared with the ring-shaped reinforcing rib design, the reinforcing ribs can provide local high rigidity and resist the radial expansion force caused by thermal expansion, while avoiding the formation of thermal resistance; the design of the heating part uses geometric pre-compensation to naturally offset the initial deformation by expansion after heating, and restores the ideal Ω shape during operation, ensuring uniform heating.

[0008] In order to maintain effective uniform heating of the heating part after radial expansion caused by heating;

[0009] As a further improvement of the above technical solution: the pre-deformation compensation section is inwardly recessed and bent in the axial direction of the heating part.

[0010] The beneficial effect of the improvement is that the Ω-shaped top end arc of the heating part is designed as a slightly inwardly recessed pre-deformation compensation section in advance during manufacturing, and the heating expansion restores to the ideal circular arc shape, avoiding the formation of an ellipse to cause uneven heat distribution.

[0011] In order to avoid stress concentration and fracture at the connection between the pre-deformation compensation section and the heating part;

[0012] As a further improvement of the above technical solution: a fillet section is formed between the pre-deformation compensation section and the heating part.

[0013] The beneficial effect of the improvement is that the fillet transition can avoid stress concentration at the connection between the inwardly recessed area and the original Ω-shaped circular arc, preventing crack initiation at high temperature.

[0014] In order to minimize the processing difficulty of the heating sheet;

[0015] As a further improvement of the above technical solution: the reinforcing rib is inwardly recessed and bent on the heating part.

[0016] The beneficial effect of the improvement is that the reinforcing rib formed by bending not only reduces the processing difficulty of the heating sheet, but also ensures the stability of the connection with the heating part at high temperature compared with welding and other connection methods.

[0017] In order to reduce the thermal resistance and stress concentration caused by the reinforcing rib;

[0018] As a further improvement of the above technical solution: the cross-sectional shape of the inner groove of the reinforcing rib is semicircular.

[0019] The beneficial effect of the improvement is that compared with a rectangular cross-section, the semicircular inner groove cross-section can significantly reduce thermal resistance and stress concentration.

[0020] In order to minimize the damage of the reinforcing rib to the uniformity of the thermal field;

[0021] As a further improvement of the above technical solution: the number of reinforcing ribs is multiple, and they are equally spaced along the axial direction of the heating part.

[0022] The beneficial effect of the improvement is that a single reinforcing rib causes greater damage to the uniformity of the thermal field, and has high processing difficulty, which easily leads to local weakening.

[0023] The parts not involved in the device are the same as or can be implemented by the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the utility model.

[0025] Figure 2 It is a structure schematic view of the heating sheet in the utility model;

[0026] Figure 3 It is a plan view of the heating sheet in the utility model;

[0027] In the drawing: 1, fastening electrode; 2, heating sheet; 3, pressure contact plate; 4, fixed bolt; 5, heating part; 6, bending part; 7, pre-deformation compensation section; 8, round corner section; 9, reinforcing rib. DETAILED DESCRIPTION

[0028] In order to make the person skilled in the art better understand the technical scheme of the present application, the present application will be described in detail below in conjunction with the drawings, and the description in this part is only exemplary and explanatory, and should not have any limiting effect on the protection scope of the present application. Example 1:

[0029] As Figure 1--3 shown: a heating assembly for MOCVD, comprising a fastening electrode 1, a pressure plate 3 is connected to the fastening electrode 1 through a fixing bolt 4, a heating sheet 2 is clamped between the pressure plate 3 and the fastening electrode 1, the heating sheet 2 comprises a heating part 5, both ends of the heating part 5 are bent to form a bending part 6, the bending part 6 is clamped between the pressure plate 3 and the fastening electrode 1 and is provided with a through hole suitable for sleeving the fixing bolt 4, the middle end of the heating part 5 is bent to form a pre-deformation compensation section 7, the heating part 5 on both sides of the pre-deformation compensation section 7 is formed with a reinforcing rib 9 along the circumferential direction of the heating part 5, compared with the annular reinforcing rib design, the reinforcing rib 9 can provide local high rigidity and resist radial expansion force caused by thermal expansion, while avoiding the formation of thermal resistance; the design of the heating part 5 uses geometric pre-compensation to naturally offset the initial deformation by expansion after heating, and restores the ideal Ω shape during operation to ensure uniform heating, the pre-deformation compensation section 7 is concave inwardly bent to the axis direction of the heating part 5, the Ω top arc of the heating part 5 is designed as a slightly concave pre-deformation compensation section 7 during manufacturing, and restores to an ideal circular arc shape after heating expansion, avoiding the formation of an oval shape that causes uneven heat distribution, a fillet section 8 is formed between the pre-deformation compensation section 7 and the heating part 5, the fillet transition can avoid stress concentration at the connection between the concave area and the original Ω arc, preventing crack initiation at high temperature, the reinforcing rib 9 is press-bent and concave on the heating part 5, the press-bent and concave reinforcing rib 9 not only reduces the processing difficulty of the heating sheet 2, but also ensures the stability of the connection with the heating part 5 at high temperature compared with welding and other connection methods, the cross-sectional shape of the inner groove of the reinforcing rib 9 is semicircular, which can significantly reduce thermal resistance and stress concentration compared with a rectangular cross-section, the number of reinforcing ribs 9 is multiple, and they are equally spaced along the axial direction of the heating part 5, a single reinforcing rib 9 has a large impact on thermal field uniformity and high processing difficulty, which can easily lead to local weakening.

[0030] The working principle of the technical solution is as follows: a direct current pulse power supply is applied with typical parameters: voltage 20V, current 200A, the current flows along the circumference of the heating part 5, and the temperature rises to a set temperature such as 1000℃ through Joule heat; when the temperature is 0~300℃, the reinforcing rib 9 preferentially expands by heat, and the semicircular cross-section improves the radial stiffness and inhibits the initial deformation; when the temperature is 300~800℃, the pre-deformation compensation section 7 gradually expands outward, and the amount of concave continues to decrease; when the temperature is above 800℃, the heating part restores to the ideal Ω shape, and the heat flow in the interval area of the reinforcing rib is uniformly diffused.

[0031] It should be noted that in this document, the terms "comprising", "including", or any other variant thereof are intended to cover non-exclusive inclusions, so that processes, methods, articles or devices including a series of elements not only include those elements, but also include other elements not explicitly listed, or inherent to such processes, methods, articles or devices.

[0032] The principles and implementations of the present application are described herein with specific examples. The above examples are only used to help understand the method of the present application and its core idea. The above description is only the preferred embodiments of the present application. It should be pointed out that due to the limited expression of the text, there are objectively infinite specific structures. For ordinary skilled persons in the art, without departing from the principles of the present application, some improvements, refinements or changes can be made, or the above technical features can be combined in an appropriate manner. These improvements, refinements, changes or combinations, or without improvement, the concept and technical solution of the present application are directly applied to other occasions, which should be regarded as the protection scope of the present application.

Claims

1. A heating assembly for MOCVD, characterized by: The utility model relates to a fastening electrode (1) is connected with the crimping plate (3) through the fixed bolt (4), the crimping plate (3) and fastening electrode (1) between clamping have the heating sheet (2), the heating sheet (2) includes heating part (5), the both ends of heating part (5) are bent and are formed with the bending part (6), the bending part (6) clamping are set between crimping plate (3) and fastening electrode (1) and are equipped with the through -hole of adaptation socket fixed bolt (4), the middle end of heating part (5) is bent and is formed with the predeformation compensation section (7), the predeformation compensation section (7) two sides heating part (5) on the circumferential direction of heating part (5) is formed with the reinforcing rib (9).

2. The heating assembly for MOCVD of claim 1, wherein: The predeformation compensation section (7) is concave and bent in the axial direction of the heating part (5).

3. The heating assembly for MOCVD of claim 1, wherein: A fillet section (8) is formed between the predeformation compensation section (7) and the heating part (5).

4. The heating assembly for MOCVD of claim 1, wherein: The reinforcing rib (9) is pressed and bent into a concave shape on the heating part (5).

5. The heating assembly for MOCVD of claim 1, wherein: The cross-sectional shape of the inner groove of the reinforcing rib (9) is semicircular.

6. The heating assembly for MOCVD of claim 1, wherein: The number of reinforcing ribs (9) is multiple, and they are equally spaced along the axial direction of the heating part (5).

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