Gas-liquid separation device

By designing a gas-liquid separation device with an inner and outer barrel structure, and using filters and baffles for multiple water-vapor separations, the problems of high liquid nitrogen loss and safety hazards are solved, enabling rapid installation and efficient maintenance of the equipment, and optimizing energy efficiency.

CN224113632UActive Publication Date: 2026-04-14HANGZHOU CHIPSEA SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HANGZHOU CHIPSEA SEMICON TECH CO LTD
Filing Date
2025-06-06
Publication Date
2026-04-14

AI Technical Summary

Technical Problem

Existing gas-liquid separation equipment suffers from excessive liquid nitrogen loss, increasing operating costs. It also poses safety hazards such as liquid nitrogen leakage, freezing, and container rupture and explosion, and is inconvenient to install, inspect, and maintain.

Method used

A gas-liquid separation device was designed, including an inner barrel and an outer barrel structure. The outer barrel is fitted onto the surface of the inner barrel. The barrel cover is equipped with an inlet pipe, a separation pipe, and an exhaust pipe. Multiple water-vapor separations are performed using a filter screen and a baffle plate. Combined with temperature sensors and pressure detection, rapid installation and airtight protection are achieved.

Benefits of technology

By performing multiple water vapor separations, liquid nitrogen waste is reduced, the risk of equipment explosion is lowered, equipment sealing and maintenance convenience are improved, energy efficiency is optimized, and the impact of temperature fluctuations is reduced.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of low-temperature control devices, and discloses a gas-liquid separation device which comprises an inner barrel, an outer barrel is sleeved on the surface of the inner barrel, and a barrel cover, a separation pipe, an exhaust pipe and a butt joint pipe are inserted on the upper surface of the inner barrel. The garbage can is reasonable in structure, a user puts the inner can into the outer can, heat preservation protection is carried out through the heat preservation layer and the reinforcing ribs, the blocking plate is installed in the inner can, after the user pushes away the protection semi-ring, the telescopic rod moves, the spring is compressed, and after the inlet pipe, the separation pipe and the exhaust pipe are installed on the can cover, the garbage can is separated. The manual valve penetrates through the outer barrel to be installed on one side of the inner barrel, then the protective semi-ring is loosened, the spring drives the telescopic rod to reset, the protective semi-ring fixes the inlet pipe, the separation pipe, the exhaust pipe and the manual valve, then the barrel cover and the inner barrel are well fixed through the fixing bolt, and the purposes that a pipeline is conveniently and rapidly fixed, installation is easy and flexible, and use is convenient are achieved. Later overhaul and maintenance are facilitated, and the sealing performance of the interface is guaranteed.
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Description

Technical Field

[0001] This utility model relates to the field of cryogenic control device technology, specifically a gas-liquid separation device. Background Technology

[0002] As semiconductor chips become increasingly integrated and smaller in size, the requirements for low-temperature testing are becoming more stringent. On the one hand, chips manufactured using advanced processes are more sensitive to minute changes in the testing environment, requiring more stable and precise low-temperature control. On the other hand, testing efficiency also needs to be improved to meet the demands of large-scale production. Therefore, developing a low-temperature control device for semiconductor chip testing that can achieve gas-liquid separation, preventing temperature fluctuations caused by the simultaneous entry of gas and liquid into the equipment, and precisely controlling the temperature to improve testing efficiency and accuracy has become an urgent problem to be solved in the semiconductor industry.

[0003] The gas-liquid separation device disclosed in Chinese Utility Model Patent Application Publication No. CN220194263U separates the gas-liquid mixture by setting a fiber condensation module. After the liquid in the gas-liquid mixture condenses, it drips from the drain layer in the fiber condensation module, and the gas in the gas-liquid mixture is discharged from the exhaust layer of the fiber condensation module, which improves the separation accuracy of the liquid. However, the existing gas-liquid separation equipment suffers from excessive liquid nitrogen consumption during use, which increases the operating cost. It cannot perform multiple water-vapor separations and may pose safety hazards such as liquid nitrogen leakage, freezing, and container rupture and explosion. It is also inconvenient to install and subsequently inspect and maintain. Therefore, we propose a new device to solve the above problems. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the shortcomings of existing technologies, this invention provides a gas-liquid separation device that improves the purity of liquid nitrogen entering the machine. This solves the problems of excessive liquid nitrogen loss during operation of existing gas-liquid separation equipment, which increases operating costs and may pose safety hazards such as liquid nitrogen leakage, freezing damage, and container rupture and explosion.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution: a gas-liquid separation device, comprising an inner barrel, an outer barrel fitted onto the surface of the inner barrel, a barrel cover inserted into the upper surface of the inner barrel, an inlet pipe inserted into the inside of the barrel cover, a solenoid valve fitted onto one end of the inlet pipe, a liquid inlet pipe inserted into one end of the solenoid valve, a separation pipe inserted into the inside of the barrel cover, a filter screen snapped into the inside of the separation pipe, an exhaust pipe inserted into one side of the separation pipe, a connecting pipe inserted into one end of the separation pipe, a pressure testing valve inserted into one side of the connecting pipe, a pressure gauge inserted into one end of the pressure testing valve, a pressure relief valve inserted into one end of the connecting pipe, an exhaust pipe inserted into one end of the pressure relief valve, and a protective component inserted into the inside of the barrel cover.

[0008] Optionally, a temperature sensor is installed on the upper surface of the bucket lid.

[0009] Optionally, the protective assembly includes a fixing pad, a telescopic rod, a spring, a connecting pad, and a protective half-ring. The telescopic rod is inserted into one side of the fixing pad, a spring is installed on the surface of the telescopic rod, a connecting pad is sleeved on one end of the telescopic rod, and a protective half-ring is sleeved on one side of the connecting pad.

[0010] Optionally, a protective pad is provided on one side of the protective semi-ring, and the protective pad is made of fluoroplastic.

[0011] Optionally, protective components are installed inside both the outer bucket and the bucket lid. A hole is opened on one side of the inner bucket, and a manual valve is inserted into one side of the outer bucket. A liquid outlet pipe is inserted into one end of the manual valve.

[0012] Optionally, the outer barrel has an inner insulation layer made of foam, the outer barrel has multiple reinforcing ribs inside, the lower surface of the separation tube has a leakage port, and the filter screen is made of foam.

[0013] Optionally, a sealing ring is snapped onto the upper surface of the inner tub, and the sealing ring is made of fluoroplastic.

[0014] Optionally, a fixing bolt is threaded through the upper surface of the bucket lid, and the inner bucket is threaded through the bucket lid via the fixing bolt.

[0015] Optionally, a baffle plate is inserted into the inner wall of the inner tub, and the surface of the baffle plate has multiple holes, and the baffle plate is inclined.

[0016] In summary, the technical effects and advantages of this utility model are as follows:

[0017] 1. This utility model has a reasonable structure. The user places the inner barrel inside the outer barrel, where insulation and reinforcing ribs provide insulation and protection. A baffle plate is installed inside the inner barrel, and a sealing ring is installed on the upper surface. After the user pushes open the protective half-ring, the telescopic rod moves and the spring compresses, allowing the inlet pipe, separation pipe, and exhaust pipe to be installed on the barrel lid. A manual valve is then installed on one side of the inner barrel, passing through the outer barrel. The user then releases the protective half-ring, causing the spring and telescopic rod to reset, securing the inlet pipe, separation pipe, exhaust pipe, and manual valve. Finally, the barrel lid and inner barrel are secured with bolts. This achieves convenient and quick pipe fixing, simple and flexible installation, and facilitates future inspection and maintenance. It ensures interface sealing, thereby reducing the risk of explosion due to excessive internal pressure, preventing equipment tearing and injury. It also provides insulation, reducing liquid nitrogen waste. Liquid nitrogen is delivered to the inner barrel through the inlet pipe, allowing water vapor to enter the separation pipe and drain through the leak on the lower surface of the separation pipe. This process allows some condensate to leak out of the drain outlet. Cold air passes through the filter screen inside the separator tube, where some condensate is separated again. Some water vapor flows back into the inner tank through the exhaust pipe. The water vapor then hits multiple baffles, causing further separation. Condensate flows into the inner tank through the holes in the baffles. Cold air passes through the filter screen, then through the connecting pipe and pressure relief valve, and is discharged from the exhaust pipe. Users can check the pressure of the equipment using a pressure gauge after opening the pressure testing valve to ensure it is within a normal range. If the pressure inside the equipment is too high, the user can open the pressure relief valve for pressure relief protection. When the condensate in the inner tank reaches a certain amount, the user can open the manual valve to discharge the condensate from the outlet pipe. This achieves convenient and quick water vapor separation. Multiple water vapor separations optimize energy efficiency, reducing the risk of excessive water vapor in the cold air, which could damage external equipment, cause temperature fluctuations, and lead to deviations in test results. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the exploded structure of the bucket lid of this utility model;

[0020] Figure 3 This is a schematic diagram of the exploded structure of the outer barrel of this utility model;

[0021] Figure 4 This is a schematic diagram of the explosion structure of the inlet pipe of this utility model;

[0022] Figure 5 This is a schematic diagram of the exploded structure of the separation tube of this utility model;

[0023] Figure 6This is a schematic diagram of the exploded structure of the protective component of this utility model;

[0024] Figure 7 This is a schematic diagram of the exploded structure of the manual valve of this utility model;

[0025] Figure 8 This is a schematic diagram of the butt joint structure of this utility model.

[0026] In the diagram: 1. Inner tub; 2. Outer tub; 3. Tub lid; 4. Inlet pipe; 5. Solenoid valve; 6. Liquid inlet pipe; 7. Separation pipe; 8. Filter screen; 9. Exhaust pipe; 10. Connecting pipe; 11. Pressure testing valve; 12. Pressure gauge; 13. Pressure relief valve; 14. Vent pipe; 15. Protective components; 501. Fixing pad; 502. Telescopic rod; 503. Spring; 504. Connecting pad; 505. Protective semi-ring; 16. Temperature sensor; 17. Manual valve; 18. Liquid outlet pipe; 19. Reinforcing rib; 20. Sealing ring; 21. Fixing bolt; 22. Baffle plate. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Example: Reference Figures 1-8 The gas-liquid separation device shown includes an inner barrel 1, an outer barrel 2 fitted onto the surface of the inner barrel 1, a barrel cover 3 inserted into the upper surface of the inner barrel 1, an inlet pipe 4 inserted into the inside of the barrel cover 3, a solenoid valve 5 fitted onto one end of the inlet pipe 4, a liquid inlet pipe 6 inserted into one end of the solenoid valve 5, a separation pipe 7 inserted into the inside of the barrel cover 3, a filter screen 8 snapped into the inside of the separation pipe 7, an exhaust pipe 9 inserted into one side of the separation pipe 7, a connecting pipe 10 inserted into one end of the separation pipe 7, a pressure testing valve 11 inserted into one side of the connecting pipe 10, a pressure gauge 12 inserted into one end of the pressure testing valve 11, a pressure relief valve 13 inserted into one end of the connecting pipe 10, an exhaust pipe 14 inserted into one end of the pressure relief valve 13, a protective component 15 inserted into the inside of the barrel cover 3, and a temperature sensor 16 installed on the upper surface of the barrel cover 3.

[0029] As a preferred embodiment of this example, Figures 2 to 8As shown, an outer barrel 2 is fitted onto the surface of an inner barrel 1. The outer barrel 2 has an insulation layer made of foam. Multiple reinforcing ribs 19 are located inside the outer barrel 2. A hole is opened on one side of the inner barrel 1. A sealing ring 20, made of fluoroplastic, is snapped onto the upper surface of the inner barrel 1. A barrel lid 3 is inserted into the upper surface of the inner barrel 1. A fixing bolt 21 is threaded through the upper surface of the barrel lid 3, and the inner barrel 1 is threaded through the barrel lid 3 via the fixing bolt 21. An inlet pipe 4 is inserted into the inside of the barrel lid 3. A solenoid valve 5 is fitted onto one end of the inlet pipe 4. The solenoid valve 5 is an electromagnetically controlled industrial device, a basic component for controlling fluids in automation, and belongs to the actuator category, not limited to hydraulic or pneumatic systems. An inlet pipe 6 is inserted into one end of the solenoid valve 5. A liquid inlet pipe 6 is inserted into the inside of the barrel lid 3. The separator 7 has a drain outlet on its lower surface. A filter screen 8, made of foam, is fitted inside the separator 7. An exhaust pipe 9 is inserted into one side of the separator 7. A connecting pipe 10 is inserted into one end of the separator 7. A pressure testing valve 11 is inserted into one side of the connecting pipe 10. A pressure gauge 12 is inserted into one end of the pressure testing valve 11. A pressure relief valve 13 is inserted into one end of the connecting pipe 10. An air outlet pipe 14 is inserted into one end of the pressure relief valve 13. A protective assembly 15 is inserted symmetrically inside the lid 3. The protective assembly 15 includes a fixing pad 501, a telescopic rod 502, a spring 503, a connecting pad 504, and a protective half-ring 505. A telescopic rod 502 is inserted into one side of the fixing pad 501, and a spring 505 is mounted on the surface of the telescopic rod 502. 3. A connecting pad 504 is fitted onto one end of the telescopic rod 502. A protective half-ring 505 is fitted onto one side of the connecting pad 504. A protective pad is provided on one side of the protective half-ring 505. The protective pad is made of fluoroplastic. A temperature sensor 16 is installed on the upper surface of the lid 3. The temperature sensor 16 is a sensor that can sense temperature and convert it into a usable output signal. Protective components 15 are installed inside both the outer bucket 2 and the lid 3. A manual valve 17 is inserted into one side of the outer bucket 2. A liquid outlet pipe 18 is inserted into one end of the manual valve 17. A baffle plate 22 is inserted into the inner wall of the inner bucket 1. The surface of the baffle plate 22 has multiple holes. The baffle plate 22 is inclined. During use, the user puts the inner bucket 1 into the outer bucket 2, and the liquid enters through the insulation layer and reinforcing ribs 19. For thermal insulation and protection, the baffle plate 22 is installed inside the inner tub 1, and the sealing ring 20 is installed on the upper surface of the inner tub 1. After the user pushes open the protective half-ring 505, the telescopic rod 502 moves and the spring 503 is compressed. After installing the inlet pipe 4, the separation pipe 7, and the exhaust pipe 9 on the tub lid 3, the manual valve 17 is installed on one side of the inner tub 1 through the outer tub 2. After the user releases the protective half-ring 505, the spring 503 and the telescopic rod 502 return to their original positions, and the protective half-ring 505 fixes the inlet pipe 4, the separation pipe 7, the exhaust pipe 9, and the manual valve 17. Finally, the tub lid 3 and the inner tub 1 are fixed with the fixing bolts 21. This achieves convenient and quick fixing of the pipeline, simple and flexible installation, and facilitates future inspection and maintenance.Ensuring the sealing of the interface reduces the risk of explosion due to excessive internal pressure, preventing equipment tearing and injury. Insulation reduces liquid nitrogen waste. Liquid nitrogen is delivered to the inner tank 1 via the inlet pipe 6, allowing water vapor to enter the separator pipe 7. Some condensate leaks out through the drain port on the lower surface of the separator pipe 7. Cold air passes through the filter screen 8 inside the separator pipe 7, further separating some condensate. Some water vapor flows back into the inner tank 1 through the exhaust pipe 9. After passing through the baffle plate 22, the water vapor hits multiple baffle plates 22, causing further separation. Condensate flows into the inner tank 1 through the holes in the baffle plate 22. Cold air passes through the filter screen 8 and then through the connecting pipe 1. After the pressure relief valve 13 is activated, the condensate is discharged from the outlet pipe 14. Users can check the pressure of the equipment using the pressure gauge 12 after opening the pressure testing valve 11 to determine if the pressure is within a normal range. If the pressure inside the equipment is too high, the user can open the pressure relief valve 13 for pressure relief protection. When the condensate in the inner tank 1 reaches a certain amount, the user can open the manual valve 17, and the condensate will be discharged from the liquid outlet pipe 18. This achieves convenient and quick water vapor separation. Multiple water vapor separations optimize energy efficiency, thereby reducing excessive water vapor in the cold air and preventing damage to external equipment after discharge, which can cause temperature fluctuations and deviations in test results.

[0030] The working principle of this practical application is as follows:

[0031] During use, the user places the inner bucket 1 into the outer bucket 2. Insulation and protection are achieved through the insulation layer and reinforcing ribs 19. The baffle plate 22 is installed inside the inner bucket 1, and the sealing ring 20 is installed on the upper surface of the inner bucket 1. After the user pushes open the protective half-ring 505, the telescopic rod 502 moves and the spring 503 is compressed. The inlet pipe 4, separation pipe 7, and exhaust pipe 9 are installed on the bucket lid 3. The manual valve 17 is then installed on one side of the inner bucket 1 through the outer bucket 2. After the user releases the protective half-ring 505, the spring 503 returns to its original position along with the telescopic rod 502, securing the inlet pipe 4, separation pipe 7, exhaust pipe 9, and manual valve 17. The bucket lid 3 and inner bucket 1 are then secured with fixing bolts 21. Liquid nitrogen is then delivered into the inner bucket 1 through the liquid inlet pipe 6, allowing water vapor to enter the separation pipe 7. The drain outlet on the lower surface allows some condensate to leak out. Cold air passes through the filter screen 8 from inside the separator pipe 7, and some condensate is separated again. Some water vapor flows back into the inner tank 1 from the exhaust pipe 9. After passing through the baffle plate 22, the water vapor hits multiple baffle plates 22, causing the water vapor to separate again. The condensate flows into the inner tank 1 through the holes in the baffle plate 22. After passing through the filter screen 8, the cold air passes through the connecting pipe 10 and the pressure relief valve 13, and is discharged from the air outlet pipe 14. The user can open the pressure testing valve 11 and use the pressure gauge 12 to check the pressure of the equipment to determine if the pressure is within a normal range. When the pressure inside the equipment is too high, the user can open the pressure relief valve 13 for pressure relief protection. When the condensate in the inner tank 1 reaches a certain amount, the user can open the manual valve 17 and the condensate will be discharged from the liquid outlet pipe 18.

[0032] All electrical components mentioned in this article are connected to an external main controller and 220V AC mains power, and the main controller can be a conventional known device such as a computer that can control it.

[0033] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A gas-liquid separation device, comprising an inner tank (1), characterized in that: The inner barrel (1) is fitted with an outer barrel (2). A barrel cover (3) is inserted into the upper surface of the inner barrel (1). An inlet pipe (4) is inserted into the inside of the barrel cover (3). A solenoid valve (5) is fitted into one end of the inlet pipe (4). A liquid inlet pipe (6) is inserted into one end of the solenoid valve (5). A separation pipe (7) is inserted into the inside of the barrel cover (3). A filter screen (8) is snapped into the inside of the separation pipe (7). An exhaust pipe (9) is inserted into one side of the separation pipe (7). A connecting pipe (10) is inserted into one end of the separation pipe (7). A pressure testing valve (11) is inserted into one side of the connecting pipe (10). A pressure gauge (12) is inserted into one end of the pressure testing valve (11). A pressure relief valve (13) is inserted into one end of the connecting pipe (10). An air outlet pipe (14) is inserted into one end of the pressure relief valve (13). A protective component (15) is inserted into the inside of the barrel cover (3).

2. The gas-liquid separation device according to claim 1, characterized in that: A temperature sensor (16) is installed on the upper surface of the bucket lid (3).

3. The gas-liquid separation device according to claim 1, characterized in that: The protective component (15) includes a fixing pad (501), a telescopic rod (502), a spring (503), a connecting pad (504), and a protective half-ring (505). The telescopic rod (502) is inserted into one side of the fixing pad (501), and the spring (503) is installed on the surface of the telescopic rod (502). The connecting pad (504) is sleeved on one end of the telescopic rod (502), and the protective half-ring (505) is sleeved on one side of the connecting pad (504).

4. The gas-liquid separation device according to claim 3, characterized in that: A protective pad is provided on one side of the protective semi-ring (505), and the protective pad is made of fluoroplastic.

5. The gas-liquid separation device according to claim 1, characterized in that: The outer barrel (2) and the barrel lid (3) are both equipped with protective components (15). The inner barrel (1) has a hole on one side. The outer barrel (2) has a manual valve (17) inserted on one side. One end of the manual valve (17) is connected to a liquid outlet pipe (18).

6. The gas-liquid separation device according to claim 1, characterized in that: The outer barrel (2) has an inner insulation layer made of foam. The outer barrel (2) has multiple reinforcing ribs (19) inside. The lower surface of the separation tube (7) has a leakage port. The filter screen (8) is made of foam.

7. The gas-liquid separation device according to claim 1, characterized in that: The upper surface of the inner barrel (1) is fitted with a sealing ring (20), and the sealing ring (20) is made of fluoroplastic.

8. The gas-liquid separation device according to claim 1, characterized in that: The upper surface of the bucket lid (3) is threaded with a fixing bolt (21), and the inner bucket (1) is threaded through the fixing bolt (21) of the bucket lid (3).

9. The gas-liquid separation device according to claim 1, characterized in that: A baffle plate (22) is inserted into the inner wall of the inner barrel (1). The surface of the baffle plate (22) has multiple holes and the baffle plate (22) is inclined.

Citation Information

Patent Citations

  • Gas-liquid separation device

    CN220194263U