Roller bottom turntable structure of roller plasma equipment

Abstract

A drum bottom turntable structure of drum plasma equipment is a rotary connection structure and comprises a fixed part and a rotary part, a drum is of a cylindrical structure with two open ends, and the bottom of the drum is fixed on the rotary part; the rotating part is in linkage connection with a roller variable frequency motor arranged outside to drive the roller to rotate; the rotary connecting structure comprises a fixed part of a central disc and a rotary part of a cylinder bottom circular ring, the central disc is fixed on the inner side of the bottom surface of the vacuum cavity and is concentric with the bottom surface of the vacuum cavity, rotating wheels are arranged on the peripheral side surface of the central disc at fixed angle intervals, and the rotating wheels protrude out of the peripheral surface of the central disc; the center disc is sleeved with the rotating part, the rotating wheel abuts against the inner side face of a circular ring of the rotating part, and the rotating part can rotate around the center disc. According to the utility model, the sealed drum-type plasma equipment can complete the plasma cleaning function, the rotating and sealing functions are better, and the plasma cleaning effect is improved.

Description

Technical Field

[0001] This utility model relates to plasma cleaning equipment technology, and in particular to a rotary drum structure at the bottom of a drum plasma cleaning device. Background Technology

[0002] Plasma equipment comes in various styles, and among them, equipment used for plasma cleaning of product surfaces to improve surface activity can utilize drum-type plasma treatment equipment when dealing with large-volume small-product applications. However, since the optimal environment for plasma cleaning is a vacuum, the design of drum-type plasma cleaning equipment requires not only excellent insulation and sealing performance but also effective rotation drive functionality. Currently, most commercially available rotary drive structures provide basic rotation drive capabilities, but no product has yet met all the requirements for a rotation drive structure used in plasma cleaning equipment. Therefore, developing a structure that meets these functional requirements is a crucial issue for achieving better cleaning performance in plasma cleaning equipment. Utility Model Content

[0003] The technical problem solved by this utility model is to provide a drum bottom turntable structure for a drum plasma device, which can enable a sealed drum-type plasma device to complete the plasma cleaning function and has better rotation and sealing functions.

[0004] The technical solution of this utility model is:

[0005] A rotary drum structure for a drum plasma cleaning device is disclosed, comprising a rotating connection structure for mounting and connecting to the bottom of a vacuum chamber of a drum plasma cleaning device. A drum is fitted inside the vacuum chamber. The rotating connection structure includes a fixed part and a rotating part. The drum is a cylindrical structure with openings at both ends, and its bottom is fixed to the rotating part. The rotating part is linked to an externally mounted drum frequency converter motor to drive the drum to rotate.

[0006] The rotating connection structure includes a fixed part of a central disk and a rotating part of a bottom ring. The central disk is fixed to the inner side of the bottom surface of the vacuum cavity and is concentrically arranged with the bottom surface of the vacuum cavity. Rotating wheels are provided on the outer peripheral side of the central disk at fixed angular intervals, and the rotating wheels protrude from the outer peripheral surface of the central disk. The rotating part is sleeved around the central disk, and the rotating wheels abut against the inner side of the ring of the rotating part. The rotating part can rotate around the central disk.

[0007] As described above, in the rotary drum plasma equipment, the rotating part is the bottom ring of the drum. The inner diameter of the bottom ring matches the outer diameter of the central disk. The thickness of the central disk is greater than the thickness of the bottom ring. The bottom ring is sleeved on the outer circumference of the central disk, and its inner surface is directly in contact with the rotating wheel. The rotating wheel is located on the side close to the drum.

[0008] As described above, in the rotary drum structure of the drum plasma equipment, a rotary transmission track is provided on one side of the bottom ring of the drum facing the bottom surface of the vacuum chamber. The output end of a sealed coupling passes through the transmission hole on the bottom surface of the vacuum chamber and is linked to the rotary transmission track. The sealed coupling is fixed to the outside of the bottom surface of the vacuum chamber and is connected to the drum frequency conversion motor.

[0009] As described above, in the rotary drum structure of the drum plasma equipment, a cover plate is provided on the side of the central disc near the drum. The diameter of the cover plate is larger than the diameter of the central disc, forming a rim that protrudes from the central disc and extends to the surface of the bottom ring of the drum.

[0010] As described above, in the rotary drum structure of the drum plasma equipment, the rotating wheel is a metal bearing, which is installed in a roller groove opened in the periphery of the central disc. The roller groove has an opening on the outer circumferential surface of the central disc, and the outer periphery of the bearing protrudes from the opening and can roll into contact with the inner circumferential surface of the bottom ring. The roller groove has a connecting locking screw hole groove on both sides, and the roller groove and the locking screw hole groove are covered with a groove cover plate. The groove cover plate is bolted to the screw hole of the locking screw hole groove, and the outer side of the groove cover plate is flush with the surface of the central disc.

[0011] As described above, in the rotary drum plasma equipment bottom turntable structure, the rotary transmission track is a groove with meshing teeth on the side of the track, and the output end of the sealing coupling has meshing teeth on the side that cooperate with the meshing teeth. The output end of the sealing coupling rotates to drive the bottom of the drum to rotate around the central disc.

[0012] As described above, in the rotary drum structure of the bottom of the drum plasma equipment, the fixed part is provided with an electrode mounting hole, a vacuum hole and a process gas hole that communicate with the outside. An electrode rod is sealed and inserted into the electrode mounting hole. The electrode rod is electrically connected to the power supply. The process gas hole is connected to a process gas source device. The vacuum hole is connected to a vacuum pump.

[0013] As can be seen from the above description, compared with the prior art, this utility model can indeed achieve the following effects:

[0014] The rotary drum structure of this invention comprises a rotating part and a fixed part. The fixed part uses a metal bearing to support the rotation of the rotating part. By connecting and fixing this invention to the vacuum chamber and drum of the rotary drum plasma equipment, a better plasma cleaning effect can be provided to the rotary drum plasma equipment. Attached Figure Description

[0015] Figure 1 This is a cross-sectional structural diagram of the preferred embodiment of the present invention assembled inside a drum plasma device;

[0016] Figure 2 This is a schematic diagram of a preferred embodiment of the fixing part of this utility model.

[0017] Explanation of key component designations:

[0018] This utility model:

[0019] 14: Vacuum chamber; 15: Variable frequency motor for drum; 16: Drum.

[0020] 39: Fixed part; 40: Electrode mounting hole; 41: Slot cover plate

[0021] 42: Metal bearing; 43: Rotating part; 44: Cover plate

[0022] 45: Output end; 46: Rotary transmission track Detailed Implementation

[0023] To provide a clearer understanding of the technical features, objectives, and effects of this utility model, the specific embodiments of this utility model are now described with reference to the accompanying drawings.

[0024] This utility model discloses a rotary table structure at the bottom of a drum plasma device. In a preferred embodiment, please refer to... Figure 1 and Figure 2As shown, preferably, this utility model is a rotating connection structure for installation and connection to the bottom of the vacuum chamber 14 of a drum-type plasma cleaning equipment. A drum 16 is sleeved inside the vacuum chamber 14. The rotating connection structure includes a fixed part 39 and a rotating part 43. The drum 16 is a cylindrical structure with open ends, and its bottom is fixed to the rotating part 43. The rotating part 43 is linked to a drum frequency conversion motor 15 disposed externally to drive the drum 16 to rotate. The rotating connection structure includes a fixed part 39 of a central disc and a rotating part 43 of a bottom ring. The central disc is fixed to the inner side of the bottom surface of the vacuum chamber 14 and is concentrically arranged with the bottom surface of the vacuum chamber 14. Rotating wheels are provided on the outer peripheral side of the central disc at fixed angular distances, and the rotating wheels are arranged to protrude from the outer peripheral surface of the central disc. The rotating part 43 is sleeved around the central disc, and the rotating wheels abut against the inner side of the ring of the rotating part 43. The rotating part 43 can rotate around the central disc. This allows the roller 16 to be driven by the rotating part 43 to form a structure that can rotate within the vacuum chamber 14. The product is placed inside the roller 16, and through the rotation of the roller 16, the product continuously tumbles inside the roller 16, allowing the plasma gas to have better contact with the outer surface of the product.

[0025] In a preferred embodiment of the rotary drum plasma equipment structure described above, the rotating part 43 is the bottom ring of the drum 16. The inner diameter of the bottom ring matches the outer diameter of the central disk. The thickness of the central disk is greater than the thickness of the bottom ring. The bottom ring is fitted around the outer circumference of the central disk, and its inner surface is directly in contact with the rotating wheel. The rotating wheel is located on the side close to the drum 16. Preferably, the central disk can be fixed as a stable base to the bottom of the vacuum chamber 14, and the top of the central disk, together with the bottom ring, forms the bottom of the drum 16.

[0026] In a preferred embodiment of the rotary drum structure of the present invention described above, a rotary transmission track 46 is provided on the side of the bottom ring of the drum that faces the bottom surface of the vacuum chamber 14. The output end 45 of a sealed coupling passes through a transmission hole on the bottom surface of the vacuum chamber 14 and is linked to the rotary transmission track 46. The sealed coupling is fixed to the outside of the bottom surface of the vacuum chamber 14 and is connected to the drum variable frequency motor 15. By providing a rotary transmission track 46 on the outer surface of the bottom ring, and linking it with a transmission shaft extending from the outside, for example, by using a gear and rack track linkage, the output end 45 of the external sealed coupling can drive the bottom ring to rotate.

[0027] In a preferred embodiment of the rotary drum structure of the present invention, as described above, a cover plate 44 is provided on the side of the central disc near the drum 16. The diameter of the cover plate 44 is larger than the diameter of the central disc, forming a protruding rim that extends to the surface of the bottom ring. The cover plate 44 covers the central disc, and the extended rim can cover the gap between the central disc and the bottom ring, preventing abnormal situations caused by the gap.

[0028] In the preferred embodiment of the rotary drum structure of the present invention described above, the rotating wheel is a metal bearing 42. The rotating wheel is installed in a roller groove formed within the periphery of the central disc. The roller groove has an opening on the outer circumferential surface of the central disc. The outer periphery of the bearing protrudes from the opening and can roll into contact with the inner circumferential surface of the bottom ring. Connecting locking screw holes are provided on both sides of the roller groove. A cover plate 41 covers the roller groove and the locking screw holes. The cover plate 41 is bolted to the screw holes of the locking screw holes, and its outer surface is flush with the surface of the central disc. The use of a metal bearing 42 replaces conventionally used plastic or rubber rollers and avoids the direct use of steel balls. This improves the support force and rotational stability of the rotating part 43.

[0029] In the preferred embodiment of the rotary plasma equipment drum bottom turntable structure of the present invention as described above, the rotary transmission track 46 is a groove with meshing teeth on the side of the track, and the output end 45 of the sealing coupling has meshing teeth on the side of the end that cooperate with the meshing teeth. The output end 45 of the sealing coupling rotates to drive the drum bottom circle to rotate around the central disc.

[0030] In the preferred embodiment of the rotary drum structure of the rotary plasma equipment described above, the fixed part 39 is provided with an electrode mounting hole 40, a vacuum hole, and a process gas hole that communicate with the outside. An electrode rod is sealed and inserted into the electrode mounting hole 40. The electrode rod is electrically connected to the power supply. The process gas hole is connected to a process gas source device. The vacuum hole is connected to a vacuum pump.

[0031] The rotary drum structure of this invention includes a rotating part and a fixed part 39. The fixed part uses a metal bearing to support the rotation of the rotating part. By connecting and fixing this invention to the vacuum chamber and drum of the rotary drum plasma equipment, a better plasma cleaning effect can be provided to the rotary drum plasma equipment.

[0032] The above description is merely an illustrative embodiment of this utility model and is not intended to limit the scope of this utility model. Any equivalent changes and modifications made by those skilled in the art without departing from the concept and principles of this utility model should fall within the protection scope of this utility model.

Claims

1. A rotary table structure at the bottom of a drum plasma equipment, characterized in that, It is a rotating connection structure used to install and connect to the bottom of the vacuum chamber of a drum-type plasma cleaning equipment. A drum is sleeved inside the vacuum chamber. The rotating connection structure includes a fixed part and a rotating part. The drum is a cylindrical structure with open ends, and its bottom is fixed to the rotating part. The rotating part is linked to an externally mounted drum frequency conversion motor to drive the drum to rotate. The rotating connection structure includes a fixed part of a central disk and a rotating part of a bottom ring. The central disk is fixed to the inner side of the bottom surface of the vacuum cavity and is concentrically arranged with the bottom surface of the vacuum cavity. Rotating wheels are provided on the outer peripheral side of the central disk at fixed angular intervals, and the rotating wheels protrude from the outer peripheral surface of the central disk. The rotating part is sleeved around the central disk, and the rotating wheels abut against the inner side of the ring of the rotating part. The rotating part can rotate around the central disk.

2. The rotary drum structure of the drum plasma equipment as described in claim 1, characterized in that, The rotating part is the bottom ring of the drum. The inner diameter of the bottom ring matches the outer diameter of the central disk. The thickness of the central disk is greater than the thickness of the bottom ring. The bottom ring is sleeved on the outer circumference of the central disk, and its inner surface is directly in contact with the rotating wheel. The rotating wheel is located on the side close to the drum.

3. The rotary drum structure of the drum plasma equipment as described in claim 2, characterized in that, A rotary transmission track is provided on one side of the bottom ring of the cylinder facing the bottom surface of the vacuum chamber. The output end of a sealed coupling passes through the transmission hole on the bottom surface of the vacuum chamber and is linked to the rotary transmission track. The sealed coupling is fixed to the outside of the bottom surface of the vacuum chamber and is connected to the roller frequency conversion motor.

4. The rotary drum structure of the drum plasma equipment as described in claim 3, characterized in that, A cover plate is provided on the side of the central disk near the roller. The diameter of the cover plate is larger than the diameter of the central disk, forming a rim that protrudes from the central disk and extends to the surface of the bottom ring of the cylinder.

5. The rotary drum structure of the drum plasma equipment as described in claim 4, characterized in that, The rotating wheel is a metal bearing, which is installed in a roller groove opened in the periphery of the central disk. The roller groove has an opening on the outer circumferential surface of the central disk. The outer periphery of the bearing protrudes from the opening and can roll into contact with the inner circumferential surface of the bottom ring of the cylinder. The roller groove has a connecting locking screw hole groove on both sides. The roller groove and the locking screw hole groove are covered with a groove cover plate. The groove cover plate is locked to the screw hole of the locking screw hole groove by bolts. The outer side of the groove cover plate is flush with the surface of the central disk.

6. The rotary drum structure of the drum plasma equipment as described in claim 5, characterized in that, The rotary transmission track is a groove with meshing teeth on the side of the track. The output end of the sealing coupling has meshing teeth on its side that cooperate with the meshing teeth. The output end of the sealing coupling rotates to drive the bottom of the cylinder to rotate around the central disk.

7. The rotary drum structure of the drum plasma equipment as described in claim 6, characterized in that, The fixed part is provided with an electrode mounting hole, a vacuum hole and a process gas hole that communicate with the outside. An electrode rod is sealed and inserted into the electrode mounting hole. The electrode rod is electrically connected to a power source. The process gas hole is connected to a process gas source device. The vacuum hole is connected to a vacuum pump.

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