Ceramic wafer polishing device

Abstract

The utility model belongs to the technical field of polishing equipment, and discloses a ceramic wafer polishing device which comprises a wheel disc rotating machine, a fixing mechanism and at least one balancing weight, the wheel disc rotating machine comprises a base and a rotating disc rotatably installed on the base, the fixing mechanism is installed on the base, and the balancing weight is installed on the rotating disc. The fixing mechanism is provided with at least one sample groove used for containing the ceramic wafer, the sample groove penetrates through the fixing mechanism, and the balancing weight is installed in the sample groove and used for being connected with the ceramic wafer in a pressing mode. After the ceramic wafer grinding device finishes grinding, the parallelism of the two surfaces of the ceramic wafer is high, and the grinding efficiency of the ceramic wafer grinding device is high.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, and in particular to a ceramic disc polishing device. Background Technology

[0002] LLZO (lithium lanthanum zirconium oxide) solid electrolytes offer advantages such as high ionic conductivity and good safety. Lithium extraction devices made by sealing LLZO with glass produce lithium metal with high purity and few impurities. However, the sintered ceramic sheets often have poor flatness. During glass sealing, surface unevenness and excessive gaps can lead to molten glass leakage, resulting in sealing failure. Conventional ceramic polishing machines or hand-held polishing can also result in poor parallelism of the ceramic sheets, negatively impacting the sealing process. Utility Model Content

[0003] The purpose of this invention is to provide a ceramic disc grinding device that, after grinding, achieves high parallelism between the two surfaces of the ceramic disc and has high grinding efficiency.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] This utility model discloses a ceramic disc grinding device, comprising: a rotary wheel, the rotary wheel including a base and a turntable rotatably mounted on the base; a fixing mechanism, the fixing mechanism being mounted on the base, the fixing mechanism having at least one sample slot for accommodating ceramic discs, the sample slots being disposed through the fixing mechanism; and at least one counterweight, the counterweight being mounted on the sample slots and used for pressing the ceramic discs.

[0006] In some embodiments, the fixing mechanism includes: a fixing plate, which is disposed corresponding to the turntable and spaced apart from the turntable; and a support member, one end of which is connected to the fixing plate and the other end of which is connected to the base.

[0007] In some specific embodiments, the distance between the fixed disk and the turntable is H, where H satisfies the relationship: 0mm < H < 2mm.

[0008] In some embodiments, there are multiple sample slots, which are distributed at intervals along the circumference of the turntable.

[0009] In some further embodiments, the fixing mechanism is also provided with at least one burette hole for introducing lubricating fluid into the turntable.

[0010] In some specific embodiments, the ceramic disc polishing device further includes a burette, one end of which is connected to the burette orifice and the other end of which is connected to the burette.

[0011] In some embodiments, the weight of the counterweight is W, where W satisfies the relationship: 1kg < W < 5kg.

[0012] In some embodiments, the fixing mechanism further includes a baffle disposed around the sample groove, the baffle being used to stop the counterweight.

[0013] In some specific embodiments, the baffle and the fixing mechanism are integrally formed.

[0014] In some embodiments, the inner peripheral wall of the sample well is provided with a pick-up groove extending radially outward therefrom.

[0015] The beneficial effects of the ceramic disc grinding device of this utility model are as follows: During the entire grinding process, the counterweight pressed on the ceramic disc can make the surface of the ceramic disc fit tightly against the turntable, and the pressure acting on the ceramic disc is a constant value, which ensures that the two surfaces of the ceramic disc have a high degree of parallelism. This ceramic disc grinding device is an automatic grinding device. Compared with the manual grinding method in the prior art, the grinding efficiency of the ceramic disc grinding device in this embodiment is higher.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the ceramic disc grinding device according to an embodiment of the present invention;

[0018] Figure 2 yes Figure 1 A magnified diagram showing point A.

[0019] Figure label:

[0020] 100. Rotary wheel mechanism; 110. Base; 120. Rotary wheel; 130. Foot pedal;

[0021] 200. Fixing mechanism; 210. Fixing plate; 211. Sample holder; 212. Sample taking slot; 213. Titration hole; 220. Support component;

[0022] 300. Counterweight;

[0023] 400. Baffle;

[0024] 500. Burette tubing. Detailed Implementation

[0025] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0026] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] In the description of this embodiment, the terms "upper," "lower," "left," "right," "front," and "rear," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0028] This utility model discloses a ceramic disc grinding device, referenced Figure 1 and Figure 2As shown, the ceramic disc grinding device of this embodiment includes a rotary wheel 100, a fixing mechanism 200, and at least one counterweight 300. The rotary wheel 100 includes a base 110 and a turntable 120 rotatably mounted on the base 110. The fixing mechanism 200 is mounted on the base 110 and has at least one sample groove 211 for accommodating ceramic discs. The sample groove 211 extends through the fixing mechanism 200. The counterweight 300 is mounted in the sample groove 211 and is used to press the ceramic disc. It is understood that the turntable 120 is used to mount a diamond grinding disc. In actual operation, the ceramic disc is installed into the sample groove 211. Since the sample groove 211 extends through the fixing mechanism 200, the ceramic disc can abut against the turntable 120. The counterweight 300 is then pressed onto the ceramic disc. After the turntable 120 is started to rotate, the surface of the ceramic disc can be ground. After grinding one surface, the ceramic disc is flipped over and mounted onto the fixing mechanism 200 for further grinding. Because the counterweight 300 pressed onto the ceramic sheet during the entire polishing process ensures that the surface of the ceramic sheet is tightly attached to the turntable 120, and the pressure acting on the ceramic sheet is a constant value, the parallelism of the two surfaces of the ceramic sheet is high. This ceramic sheet polishing device is an automatic polishing device. Compared with the manual polishing method in the prior art, the polishing efficiency of the ceramic sheet polishing device in this embodiment is higher.

[0029] Optionally, the sample groove 211 is circular. Of course, in other embodiments of this utility model, the sample groove 211 can be set according to the shape of the ceramic sheet being polished, and can also be set to other shapes such as triangle or quadrilateral.

[0030] It should be noted that, in this embodiment, the lubricant can be selected according to the type of ceramic sheet. If it is a lithium lanthanum zirconium oxide ceramic, the lubricant can be an organic solvent such as ethanol. If it is another ordinary ceramic, the lubricant can be pure water.

[0031] Optionally, the rotary table 100 has a control device for controlling the start of the drive unit connected to the turntable 120, such as a foot pedal 130. This allows the operator to easily start or stop the rotation of the turntable 120 during the polishing process.

[0032] The fixing mechanism 200 includes a fixing plate 210 and a support member 220. The fixing plate 210 is positioned corresponding to and spaced apart from the turntable 120. One end of the support member 220 is connected to the fixing plate 210, and the other end is connected to the base 110. It can be understood that the support member 220 stably connects the fixing plate 210, which houses the sample groove 211, to the base 110, thereby ensuring that the fixing plate 210 can stably restrain the ceramic sheet to be polished.

[0033] Optionally, multiple support members 220 are arranged circumferentially around the fixed plate 210. This improves the installation stability of the fixed plate 210. The support members 220 and the fixed plate 210 can be connected by any method, such as plug-in connection, welding, or bonding; no restrictions are placed on the connection method between the support members 220 and the fixed plate 210. The support members 220 and the base 110 can also be connected by any method, such as plug-in connection, welding, or bonding; no restrictions are placed on the connection method between the support members 220 and the base 110.

[0034] Optionally, the distance between the fixed disk 210 and the turntable 120 is H, where H satisfies the relationship: 0mm < H < 2mm. It is understood that if the distance between the fixed disk 210 and the turntable 120 is too large, the ceramic disc will be placed against the turntable 120, and its upper end will detach from the fixed disk 210, meaning the ceramic disc will detach from the sample groove 211, reducing the installation stability of the ceramic disc. In this embodiment, the distance between the fixed disk 210 and the turntable 120 is controlled between 0-2mm to ensure that after the ceramic disc is placed against the turntable 120, its upper part is confined within the sample groove 211, thereby ensuring the stability of the ceramic disc during the grinding process. Alternatively, the distance between the fixed plate 210 and the turntable 120 can be 0.1mm, 0.2mm, 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm, 1.1mm, 1.2mm, 1.3mm, 1.4mm, 1.5mm, 1.6mm, 1.7mm, 1.8mm, 1.9mm, or 2mm. Of course, the distance between the fixed plate 210 and the turntable 120 can also be other values ​​within the range of 0mm-2mm, or other ranges can be selected according to the thickness of the ceramic sheet, and is not limited to the above limitations.

[0035] Optionally, there are multiple sample slots 211, which are distributed at intervals along the circumference of the turntable 120. Optionally, having multiple sample slots 211 allows for the simultaneous grinding of multiple ceramic discs during operation, improving the grinding efficiency of the ceramic disc grinding device. In this embodiment, there are three sample slots 211. However, in other embodiments of this invention, the number of sample slots 211 can be two, four, or more, and is not limited to the three in this embodiment.

[0036] Optionally, the fixing mechanism 200 is also provided with at least one burette hole 213, which is used to introduce lubricant into the turntable 120. It is understood that in actual operation, after the lubricant flows in from the burette hole 213, it will diffuse to other positions on the turntable 120, so that each ceramic disc is lubricated between itself and the turntable 120, thereby ensuring the polishing quality.

[0037] Alternatively, the burette orifice 213 may be positioned at the center of the turntable 120. It is understood that when there are multiple sample cells 211, positioning the burette orifice 213 at the center of the turntable 120 ensures that the lubricant flowing from the burette orifice 213 will evenly flow radially outwards from the turntable 120, guaranteeing lubrication between each ceramic plate and the turntable 120, thereby ensuring polishing quality.

[0038] Optionally, the weight of the counterweight 300 is W, where W satisfies the relationship: 1kg < W < 5kg. It is understood that if the weight of the counterweight 300 is too large, the pressure on the ceramic sheet during actual operation will be too high, potentially leading to over-grinding. Conversely, if the weight of the counterweight 300 is too small, the pressure on the ceramic sheet will be too low, which is not conducive to proper grinding. In this embodiment, controlling the weight of the counterweight 300 between 1kg and 5kg ensures that the counterweight 300 can apply appropriate pressure to the ceramic sheet, thereby ensuring grinding quality. Alternatively, the weight of the counterweight 300 can be 1kg, 1.1kg, 1.2kg, 1.3kg, 1.4kg, 1.5kg, 1.6kg, 1.7kg, 1.8kg, 1.9kg, 2kg, 2.1kg, 2.2kg, 2.3kg, 2.4kg, 2.5kg, 2.6kg, 2.7kg, 2.8kg, 2.9kg, 3kg, 3.1kg, 3.2kg, 3.3kg, 3.4kg, 3.5kg, 3.6kg, 3.7kg, 3.8kg, 3.9kg, 4kg, 4.1kg, 4.2kg, 4.3kg, 4.4kg, 4.5kg, 4.6kg, 4.7kg, 4.8kg, 4.9kg, or 5kg. Of course, the weight of the counterweight 300 can also be any other value in the range of 1kg-5kg, or other ranges can be selected according to the polishing requirements of the ceramic sheet, and is not limited to the above limitations.

[0039] Optionally, the cross-section of the counterweight 300 matches the shape of the sample groove 211. Thus, the sample groove 211 can provide a certain degree of restraint for the counterweight 300, thereby preventing grinding defects caused by the counterweight 300 shifting during the grinding process.

[0040] refer to Figure 1 As shown, the fixing mechanism 200 also includes a baffle 400, which surrounds the sample groove 211 and is used to stop the counterweight 300. It is understood that relying solely on the constraint of the sample groove 211, the counterweight 300 may still shift. In this embodiment, the baffle 400 is added to stop the counterweight 300, ensuring that the counterweight 300 can stably press against the ceramic sheet during grinding, thereby ensuring grinding quality.

[0041] Optionally, the baffle 400 and the fixing mechanism 200 are integrally formed. It is understood that the integral forming of the baffle 400 and the fixing mechanism 200 improves the stability of the baffle 400, thereby ensuring stable stopping of the counterweight 300, minimizing the risk of the counterweight 300 shifting, and ensuring that the counterweight 300 can stably press against the ceramic sheet during grinding, thus ensuring grinding quality.

[0042] Optionally, the inner peripheral wall of the sample reservoir 211 is provided with a removal groove 212 extending radially outward. Understandably, after grinding, the operator can clamp the edge of the ceramic sheet and remove it from the sample reservoir 211, facilitating user operation.

[0043] Optionally, the ceramic disc grinding device also includes a burette 500, one end of which is connected to the burette orifice 213, and the other end to the burette. Understandably, in actual assembly, it is only necessary to connect the burette 500 to the burette via a flexible tube, making operation very convenient. Further optionally, the burette 500 is welded to the fixed plate 210, thereby improving the connection stability between the burette 500 and the fixed plate 210, thus preventing lubricant from leaking out from the gap between the fixed plate 210 and the burette 500.

[0044] The ceramic grinding device in this embodiment grinds ceramic sheets as follows:

[0045] First, ceramic sheet pretreatment: Use diamond sandpaper (100-600 grit) to manually polish the ceramic sheet, preferably an LLZO ceramic plate with a diameter of 90 mm and a thickness of 3 mm, to prevent particles on the ceramic surface from affecting the polishing.

[0046] Second, coarse grinding: Open the titrator and continuously drip ethanol onto the turntable 120. The rotation speed of the turntable 120 is less than 300 r / min (the ceramic sheet is prone to breakage when grinding at high speed); place the ceramic sheet into the sample slot 211 of the fixing mechanism 200, place the counterweight block (1kg < counterweight block 300 < 5kg) on ​​the ceramic sheet, and use a low-mesh (100 mesh - 600 mesh) diamond abrasive disc to grind the ceramic surface quickly for 10min-30min to make the ceramic surface flat overall, but there will be micro-cracks on the surface after grinding;

[0047] Third, fine grinding: Replace with a higher grit (600-2000 grit) diamond grinding disc for polishing, at a speed below 300 rpm (ceramic discs are prone to breakage during high-speed grinding). Polishing the LLZO ceramic eliminates micro-cracks caused by coarse grinding, improves post-grinding strength, and reduces the risk of ceramic breakage. Although fine grinding eliminates coarse grinding scratches and micro-cracks, it leaves many fine dust particles on the surface.

[0048] Fourth, repeat the coarse and fine grinding operations on the other side of the ceramic sheet;

[0049] Fifth, cleaning: Immerse the polished ceramic sheet in an ethanol solution for ultrasonic cleaning;

[0050] Sixth, tempering: Take out the cleaned ceramic sheet and place it on the alumina ceramic plate in the furnace. The temperature is raised from room temperature to 1000℃ at 5℃ / min and held for 1 hour to eliminate the stress and cracks after polishing.

[0051] Seventh, after removal, vacuum storage should be performed to prevent prolonged contact between the surface and air, which would cause lithium carbonate to continuously form on the surface.

[0052] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0053] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A ceramic disc grinding device, characterized in that, include: A roulette wheel (100) includes a base (110) and a turntable (120) rotatably mounted on the base (110); A fixing mechanism (200) is installed on the base (110). The fixing mechanism (200) is provided with at least one sample groove (211) for accommodating ceramic pieces. The sample groove (211) is disposed through the fixing mechanism (200). At least one counterweight (300) is installed in the sample groove (211) and is used to press the ceramic sheet.

2. The ceramic disc grinding device according to claim 1, characterized in that, The fixing mechanism (200) includes: A fixed disk (210) is provided corresponding to the turntable (120) and spaced apart from the turntable (120); A support member (220) is provided, one end of which is connected to the fixed plate (210) and the other end of which is connected to the base (110).

3. The ceramic disc grinding device according to claim 2, characterized in that, The distance between the fixed disk (210) and the turntable (120) is H, and H satisfies the relationship: 0mm < H < 2mm.

4. The ceramic disc grinding device according to claim 1, characterized in that, There are multiple sample slots (211), and the multiple sample slots (211) are distributed at intervals along the circumference of the turntable (120).

5. The ceramic disc grinding device according to claim 1, characterized in that, The fixing mechanism (200) is also provided with at least one burette (213), which is used to introduce lubricant into the turntable (120).

6. The ceramic disc grinding device according to claim 5, characterized in that, It also includes at least one burette (500), one end of which is connected to the burette orifice (213) and the other end of which is connected to the burette.

7. The ceramic disc grinding apparatus according to any one of claims 1-6, characterized in that, The weight of the counterweight (300) is W, and W satisfies the relationship: 1kg < W < 5kg.

8. The ceramic disc grinding apparatus according to any one of claims 1-6, characterized in that, The fixing mechanism (200) further includes a baffle (400) arranged around the sample groove (211) and used to stop the counterweight (300).

9. The ceramic disc grinding device according to claim 8, characterized in that, The baffle (400) and the fixing mechanism (200) are integrally formed.

10. The ceramic disc grinding apparatus according to any one of claims 1-6, characterized in that, The sample slot (211) has a take-up slot (212) extending radially outward on its inner peripheral wall.

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