Edge chamfering and grinding equipment for mask production

Abstract

The utility model discloses edge chamfering and grinding equipment for mask production, which comprises an operation table, a belt sander arranged on the operation table, a supporting seat and a moving block arranged on the operation table, a moving shaft rotationally arranged on the moving block, a driving motor arranged on the moving block, and transmission gears arranged on a motor shaft of the driving motor and the moving shaft. A moving frame and two sets of clamping devices are arranged on the moving shaft, each clamping device comprises a clamping block, a clamping groove is formed in the clamping block, clamping claws are symmetrically arranged on the clamping groove, a clamping rod is arranged on the clamping block in a sliding mode, a clamping sliding plate and a clamping sliding rod are arranged on the clamping rod, an inclined groove is formed in the clamping block, and through cooperation of a driving motor and a transmission gear, the inclined groove is matched with the inclined groove; the rotating direction of the moving shaft is adjusted, then the rotating direction of the mask plate is moved, the polishing angle is adjusted, through cooperation of the clamping sliding rod and the inclined groove, the two clamping claws are conveniently driven to clamp the mask plate, the mask plate is clamped and fixed through the clamping claws and the clamping pad, and the operation convenience is improved.

Description

Technical Field

[0001] This utility model relates to the field of photomask production technology, and more specifically, it relates to a beveling and grinding device for photomask production. Background Technology

[0002] As a key component in semiconductor and display panel manufacturing, the quality of the edge processing of photomasks directly affects the photolithography accuracy. Edge grinding is a critical process in photomask production.

[0003] Suppliers typically only provide standard-sized photomasks. Therefore, the production of non-standard-sized photomasks often involves first processing the standard-sized material through photolithography, fabrication, and cleaning. Then, a glass cutter is used to score the surface of the photomask. Finally, the photomask is forcefully pried open along the straight scoring lines to create the desired non-standard size. However, after being pried open, the edge with the scoring lines forms a right angle with the other side. Without chamfering, this can easily cause cuts. Furthermore, the right-angle structure makes the photomask more susceptible to impacts and damage during use, leading to its scrapping. Therefore, users usually require all four corners of the photomask to be chamfered. Currently, chamfering is performed by manually clamping the photomask and contacting the grinding belt with the edge-grinding device. However, manual clamping can be unstable or fail to hold the photomask properly, resulting in insufficient chamfering precision and the photomask potentially flying off and becoming unusable, or even injuring the operator. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] In view of the problems existing in the prior art, this utility model provides a beveling and grinding equipment for mask production, so as to solve the technical problems mentioned in the background art.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution: an edge grinding and beveling device for mask production, comprising an operating table, a belt sander on the operating table, a support base on the operating table, a movable block on the support base, a movable shaft rotatably mounted on the movable block, a drive motor on the movable block, transmission gears on the motor shaft of the drive motor and the movable shaft, a movable frame on the movable shaft, and two sets of clamping devices on the movable frame. Each clamping device includes a clamping block, a clamping groove within the clamping block, clamping claws symmetrically arranged on the clamping groove, a clamping rod slidably mounted on the clamping block, a clamping slide plate on the clamping rod, a clamping slide bar on the clamping slide plate, and an inclined groove on the clamping block that cooperates with the clamping slide bar.

[0008] The present invention is further configured such that limiting blocks are provided on both sides of the gripping claw, and a limiting groove that cooperates with the limiting blocks is slidably provided on the gripping groove to limit the movement direction of the gripping claw.

[0009] The present invention is further configured such that a clamping sleeve is provided on one side of the clamping block, a clamping motor is provided on the clamping sleeve, a clamping screw is provided on the motor shaft of the clamping motor, the clamping screw is threadedly connected to the clamping rod, and the clamping screw is driven to rotate by the clamping motor to move the position of the clamping rod.

[0010] The present invention is further provided that the clamping claw is provided with a clamping pad to prevent damage to the mask.

[0011] The present invention is further configured such that a movable motor is provided on the support base, and a movable screw is provided on the motor shaft of the movable motor. The movable screw is threadedly connected to the movable block, which facilitates the adjustment of the position of the movable block and the mask.

[0012] The present invention is further configured such that one set of clamping devices is fixed at one end of the clamping frame, the movable frame is provided with a movable groove, and the other set of clamping devices is slidably disposed on the movable groove via a clamping block, which facilitates the clamping of mask plates with different gears and improves adaptability.

[0013] The present invention is further configured such that an adjusting screw is threadedly connected to the movable frame, and one end of the adjusting screw is rotatably connected to the clamping block, thereby moving the position of the clamping block by adjusting the screw.

[0014] The present invention is further configured such that a protractor is provided on the moving block, which facilitates manual observation of the flip angle of the moving frame and the mask.

[0015] (III) Beneficial Effects

[0016] Compared with the prior art, this utility model provides a beveling and grinding device for photomask production, which has the following advantages:

[0017] 1. By cooperating with the drive motor and transmission gears, the rotation direction of the moving shaft is adjusted, thereby moving the rotation direction of the mask and adjusting the grinding angle. By setting the moving motor to drive the moving screw to rotate, the moving block moves on the support base, thereby adjusting the height of the mask and cooperating with the belt sander for chamfering grinding.

[0018] 2. The clamping screw drives the clamping rod to move, which in turn drives the clamping slide and clamping slide bar to move. The clamping slide bar cooperates with the inclined groove to facilitate the clamping of the two clamping claws to clamp the mask. The clamping claws and clamping pads clamp and fix the mask, improving the ease of operation.

[0019] 3. By adjusting the screw, the clamping block is moved on the moving slot, thereby adjusting the relative position of the clamping device. This makes it easier to adjust the position of the clamping device according to the size of the mask, thus improving its practicality. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a beveling and grinding device for mask production according to the present invention;

[0021] Figure 2 This is a schematic diagram of the structure of the support base, moving block, moving shaft, drive motor and transmission gear in this utility model;

[0022] Figure 3 This is a schematic diagram of the cooperative structure of the movable frame and the adjustment device in this utility model;

[0023] Figure 4 This is a cross-sectional view of the clamping device in this utility model;

[0024] Figure 5 This is a cross-sectional view of the clamping device in this utility model from another angle.

[0025] In the diagram: 1. Operating table; 2. Belt sander; 3. Support base; 4. Moving block; 5. Moving shaft; 6. Drive motor; 7. Transmission gear; 8. Moving frame; 9. Clamping block; 10. Clamping groove; 11. Clamping claw; 12. Clamping rod; 13. Clamping slide plate; 14. Clamping slide bar; 15. Inclined groove; 16. Limiting block; 17. Limiting groove; 18. Clamping sleeve; 19. Clamping motor; 20. Clamping screw; 21. Clamping pad; 22. Moving motor; 23. Moving screw; 24. Moving groove; 25. Adjusting screw; 26. Protractor. Detailed Implementation

[0026] It should be noted that, where there is no conflict, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0028] In this utility model, unless otherwise stated, the orientations used, such as "up" and "down", usually refer to the direction shown in the accompanying drawings, or to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" usually refer to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0029] Please see Figures 1-5 An edge-grinding device for mask production includes an operating table 1, a belt sander 2 mounted on the operating table 1, a support base 3 mounted on the operating table 1, a movable block 4 mounted on the support base 3, a movable shaft 5 rotatably mounted on the movable block 4, a drive motor 6 mounted on the movable block 4, transmission gears 7 mounted on the motor shaft of the drive motor 6 and the movable shaft 5, a movable frame 8 mounted on the movable shaft 5, and two sets of clamping devices mounted on the movable frame 8. Each clamping device includes a clamping block 9, a clamping groove 10 within the clamping block 9, clamping claws 11 symmetrically arranged on the clamping groove 10, and a clamping rod 12 slidably mounted on the clamping block 9. A holding slide plate 13 is provided with a clamping slide rod 14. A clamping block 9 is provided with an inclined groove 15 that cooperates with the clamping slide rod 14. A moving motor 22 is provided on the support base 3. A moving screw 23 is provided on the motor shaft of the moving motor 22. The moving screw 23 is threadedly connected to the moving block 4. One set of clamping devices is fixed at one end of the clamping frame. A moving groove 24 is provided on the moving frame 8. Another set of clamping devices is slidably set on the moving groove 24 through the clamping block 9. An adjusting screw 25 is threadedly connected to the moving frame 8. One end of the adjusting screw 25 is rotatably connected to the clamping block 9. A protractor 26 is provided on the moving block 4.

[0030] In this embodiment, during use, the position of the clamping device is adjusted according to the size of the mask. The adjusting screw 25 is rotated to move the clamping block 9 within the moving groove 24, thereby adjusting the position of one of the clamping devices. The mask is clamped and fixed by the clamping device. Then, according to the chamfer angle, the drive motor 6 is started. The drive motor 6 drives the moving shaft 5 to rotate through the transmission gear 7, adjusting the angle between the moving frame 8 and the mask. Then, the moving motor 22 is started, driving the moving screw 23 to rotate, thereby adjusting the height of the moving block 4 and the mask. This is then used in conjunction with the belt sander 2 for grinding. Both the drive motor 6 and the moving motor 22 are controlled by a controller. The protractor 26 is only for the convenience of manual angle observation.

[0031] Please see Figures 4-5 As one embodiment of the clamping device: the clamping claw 11 is provided with limiting blocks 16 on both sides, the clamping groove 10 is slidably provided with a limiting groove 17 that cooperates with the limiting blocks 16, the clamping block 9 is provided with a clamping sleeve 18 on one side, the clamping sleeve 18 is provided with a clamping motor 19, the motor shaft of the clamping motor 19 is provided with a clamping screw 20, the clamping screw 20 is threadedly connected to the clamping rod 12, and the clamping claw 11 is provided with a clamping pad 21.

[0032] More specifically, when clamping the photomask using the clamping device, the photomask is inserted between the clamping claws 11, and the clamping motor 19 is started to drive the clamping screw 20 to rotate. The clamping screw 20 is threadedly connected to the clamping rod 12, which in turn drives the clamping rod 12, the clamping slide plate 13, and the clamping slide bar 14 to move. The clamping slide bar 14 moves on the inclined groove 15, and the clamping claws 11 clamp and fix the photomask through the inclined groove 15. The movement direction of the clamping claws 11 is restricted by the cooperation of the limiting block 16 and the limiting groove 17. The clamping pad 21 improves the clamping stability of the photomask by the clamping device.

[0033] In summary, during the use or operation of the overall equipment: When in use, adjust the position of the clamping device according to the size of the mask, rotate the adjusting screw 25 to move the clamping block 9 within the moving slot 24, thereby adjusting the position of one of the clamping devices to clamp and fix the mask. Then, according to the chamfer angle, start the drive motor 6. The drive motor 6 drives the moving shaft 5 to rotate through the transmission gear 7, adjusting the angle between the moving frame 8 and the mask. Then, start the moving motor 22, which drives the moving screw 23 to rotate, thereby adjusting the height of the moving block 4 and the mask. This is then used in conjunction with the belt sander 2 for grinding. Both the drive motor 6 and the moving motor 22 are controlled by a controller. The protractor 26 is only for the convenience of manual angle observation.

[0034] When the photomask is clamped by the clamping device, the photomask is inserted between the clamping claws 11. The clamping motor 19 is started to drive the clamping screw 20 to rotate. The clamping screw 20 is threadedly connected to the clamping rod 12, which in turn drives the clamping rod 12, the clamping slide plate 13 and the clamping slide bar 14 to move. The clamping slide bar 14 moves on the inclined groove 15. The inclined groove 15 drives the clamping claws 11 to clamp and fix the photomask. The movement direction of the clamping claws 11 is restricted by the cooperation of the limiting block 16 and the limiting groove 17. The clamping pad 21 improves the clamping stability of the photomask by the clamping device.

[0035] All other parts of this utility model that are not described in detail belong to the prior art, and therefore will not be described in detail here.

[0036] In all the solutions mentioned above, the connection between two components can be selected according to the actual situation, such as welding, bolt and nut connection, bolt or screw connection, or other known connection methods, which will not be elaborated here. For all the fixed connections mentioned above, welding is preferred. Although the embodiments of this utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of this utility model. The scope of this utility model is defined by the appended claims and their equivalents.

[0037] In all the solutions mentioned above, those involving the operation of electrical components, unless otherwise specified, are controlled by a controller. Since the devices matched with the controllers are common devices, their control principles and circuit connections are existing, well-known, and mature technologies, and their electrical connection relationships and specific circuit structures will not be elaborated here.

[0038] Of all the solutions mentioned above, those involving motors can be combined with reducers if necessary. The connection structure and working principle between the motor and the reducer are existing known technologies, and this utility model will not elaborate on them.

Claims

1. An edge-grinding device for mask production, comprising an operating table (1), characterized in that: The operating table (1) is equipped with a belt sander (2), the operating table (1) is equipped with a support base (3), the support base (3) is equipped with a moving block (4), the moving block (4) is rotatably equipped with a moving shaft (5), the moving block (4) is equipped with a drive motor (6), the drive motor (6) and the moving shaft (5) are equipped with transmission gears (7), the moving shaft (5) is equipped with a moving frame (8), the moving frame (8) is equipped with two sets of clamping devices, the clamping device includes a clamping block (9), the clamping block (9) is equipped with a clamping groove (10), the clamping groove (10) is symmetrically equipped with clamping claws (11), the clamping block (9) is slidably equipped with a clamping rod (12), the clamping rod (12) is equipped with a clamping slide plate (13), the clamping slide plate (13) is equipped with a clamping slide bar (14), and the clamping block (9) is equipped with an inclined groove (15) that cooperates with the clamping slide bar (14).

2. The edge-grinding equipment for photomask production according to claim 1, characterized in that: The clamping claw (11) is provided with limiting blocks (16) on both sides, and the clamping groove (10) is slidably provided with a limiting groove (17) that cooperates with the limiting blocks (16).

3. The edge-grinding equipment for photomask production according to claim 2, characterized in that: The clamping block (9) has a clamping sleeve (18) on one side, and a clamping motor (19) is provided on the clamping sleeve (18). A clamping screw (20) is provided on the motor shaft of the clamping motor (19), and the clamping screw (20) is threadedly connected to the clamping rod (12).

4. The edge-grinding equipment for photomask production according to claim 3, characterized in that: The clamping claw (11) is provided with a clamping pad (21).

5. The edge-grinding equipment for mask production according to claim 1, characterized in that: The support base (3) is provided with a moving motor (22), and the motor shaft of the moving motor (22) is provided with a moving screw (23), which is threadedly connected to the moving block (4).

6. The edge-grinding equipment for photomask production according to claim 1, characterized in that: one set of The clamping device is fixed at one end of the clamping frame, and the movable frame (8) is provided with a movable groove (24). Another set of the clamping devices is slidably disposed on the movable groove (24) through the clamping block (9).

7. The edge-grinding equipment for photomask production according to claim 6, characterized in that: The movable frame (8) is threadedly connected to an adjusting screw (25), one end of which is rotatably connected to the clamping block (9).

8. The edge-grinding equipment for photomask production according to claim 1, characterized in that: The movable block (4) is equipped with a protractor (26).

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