Multi-layer multi-opening and multi-closing baffle device

Abstract

The utility model relates to the technical field of vacuum coating equipment, in particular to a multi-layer multi-opening and multi-closing baffle device which comprises a vacuum cavity and opening and closing baffle assemblies, each assembly comprises a driving part, a rotating shaft, an upper-layer driving baffle and a lower-layer driven baffle, and the driving parts are located on the outer wall of the vacuum cavity; the rotating shaft extends into the cavity and penetrates through the supporting plate to be connected with one end of the upper-layer driving baffle. One end of the lower-layer driven baffle is rotationally arranged outside the rotating shaft in a sleeving manner through a connecting piece; pins are arranged on the inner and outer sides of the upper-layer driving baffle, and clamping grooves are formed in the corresponding positions of the lower-layer driven baffle. In the opening and closing process, the driving piece drives the upper-layer baffle to rotate, and the lower-layer driven baffle is driven to act through mechanical linkage of the pin and the clamping groove: during opening, the lower-layer driven baffle is stopped on the outer side of the sample clamping part in an overlapping manner; and during closing, a shielding surface is formed by staggering, so that leakage-free shielding is ensured. According to the utility model, the double-layer opening and closing baffle plate linkage design is adopted, so that the occupied transverse space is reduced, the cavity expansion requirement is avoided, compact equipment is adapted, and the manufacturing cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a multi-layer, multi-opening baffle device. Background Technology

[0002] A sample stage device for vacuum coating typically includes a vacuum chamber, a drive unit, a sample clamping section, and a baffle assembly. The vacuum chamber provides the vacuum environment required for coating; the drive unit, located above the chamber, drives the sample clamping section to move up, down, and rotate, enabling multi-angle coating of the substrate; and the baffle, located below the sample clamping section, blocks vapor generated by the evaporation source during the coating process, preventing contamination or excessive deposition.

[0003] In existing technologies, the opening and closing design of baffles mainly adopts the following two schemes:

[0004] Half-type opening and closing baffle: The baffle consists of two symmetrical structures that open and close through linear movement or simple rotation. Although this type of structure is simple, it requires a large lateral space during opening and closing, resulting in the need to reserve an additional expansion area inside the chamber.

[0005] Four-piece opening and closing baffle: The baffle consists of four independent baffles that expand or close in all directions via a linkage mechanism. Compared to the half-and-half design, its space utilization is slightly improved, but it still relies on a larger planar expansion area.

[0006] Obviously, half-plate or four-plate baffles need to unfold horizontally when opening and closing, which requires the interior of the chamber to have a larger planar dimension to meet the baffle movement requirements. When the process requires a smaller chamber volume, this type of design requires expansion and modification of the chamber, which not only wastes the effective volume of the chamber but also increases the overall size of the equipment and manufacturing costs. Utility Model Content

[0007] This invention addresses the shortcomings of existing technologies by developing a multi-layer, multi-opening baffle device. This invention adopts a double-layer opening and closing baffle linkage design, which reduces the lateral space occupation, avoids the need for chamber expansion, is suitable for compact equipment, and reduces manufacturing costs.

[0008] The technical solution to the technical problem solved by this utility model is as follows:

[0009] This application provides a multi-layer, multi-opening baffle device, including multiple sets of opening and closing baffle assemblies evenly distributed in the circumference. Each set of opening and closing baffle assemblies includes a driving component, a rotating shaft, an upper active baffle, and a lower driven baffle. The rotating shaft is drivenly connected to the lower part of the driving component. The bottom end of the rotating shaft is drivenly connected to one end of the upper active baffle. One end of the lower driven baffle is rotatably connected to the bottom of the rotating shaft through a connector. The upper active baffle is located above the lower driven baffle.

[0010] The upper active baffle is provided with pins on its inner and outer sides respectively, and the lower driven baffle is provided with corresponding slots on its inner and outer sides that are adapted to the pins.

[0011] When the driving component drives the upper active baffle to rotate inward by a certain angle, its outer pin is inserted into the slot on the outer side of the lower driven baffle and pushes the lower driven baffle to rotate inward together, partially blocking the sample clamping part located above the upper active baffle in a staggered manner, forming a closed state.

[0012] When the driving component drives the upper active baffle to rotate outward by a certain angle, its inner pin is inserted into the slot on the inner side of the lower driven baffle and pushes the lower driven baffle to rotate outward together, stopping on the outside of the sample clamping part in an overlapping manner, forming an open state.

[0013] As an improvement to the above solution, the multi-layer multi-opening baffle device further includes a vacuum chamber, the driving component is located above the vacuum chamber, the rotating shaft extends into the vacuum chamber, the inner wall of the vacuum chamber is provided with a support plate, and the bottom of the rotating shaft passes through the support plate and is fixedly connected to one end of the upper active baffle.

[0014] As an improvement to the above solution, a first bearing is embedded in the through hole of the support plate, and the rotating shaft passes through the first bearing.

[0015] As an improvement to the above solution, the connecting member includes a second bearing sleeved at the bottom of the rotating shaft, and one end of the lower driven baffle is hinged to the outer surface of the second bearing.

[0016] As an improvement to the above solution, the driving component is a rotary cylinder.

[0017] As an improvement to the above solution, the rotary cylinder is connected to the rotating shaft via a vacuum rotary through-plate joint.

[0018] As an improvement to the above solution, the rotary cylinder is connected to the rotating shaft in sequence through a vacuum rotary through-plate joint and a coupling, with the coupling located inside the vacuum chamber.

[0019] As an improvement to the above solution, the number of the opening and closing baffle assemblies is four, which are arranged in a 90-degree rotational offset.

[0020] As an improvement to the above solution, a driving device is also provided above the vacuum chamber, which drives the sample clamping part to move up and down and rotate.

[0021] Compared with existing technologies, the above solution has the following advantages or beneficial effects:

[0022] In the open state, the double-layer opening and closing baffles are placed in an overlapping state to save internal space of the chamber; in the closed state, the double-layer opening and closing baffles are staggered to form a cross-blocking substrate to block vapor.

[0023] This application further achieves synchronous movement of a single-drive double-layer opening and closing baffle through the cooperation of pins and slots, simplifying the control logic and reducing energy consumption.

[0024] In summary, this application adopts a double-layer opening and closing baffle staggered linkage design, which reduces the lateral space occupation, avoids the need for chamber expansion, adapts to compact equipment, and reduces manufacturing costs. Attached Figure Description

[0025] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0026] Figure 1 This is a schematic diagram of the structure of the multi-layer, multi-opening baffle device in this embodiment.

[0027] Figure 2 This is a schematic diagram of the structure of the multi-layer, multi-opening baffle device in the closed state of this embodiment.

[0028] Figure 3 This is a schematic diagram of the multi-layer, multi-opening baffle device in the open state according to this embodiment.

[0029] Figure 4 This is a schematic diagram of the structure of the opening and closing baffle assembly in the closed state according to this embodiment. Figure 1 .

[0030] Figure 5 This is a schematic diagram of the structure of the opening and closing baffle assembly in the closed state according to this embodiment. Figure 2 .

[0031] Figure 6 This is a schematic diagram of the opening and closing baffle assembly in the open state according to this embodiment. Figure 1 .

[0032] Figure 7 This is a schematic diagram of the opening and closing baffle assembly in the open state according to this embodiment. Figure 2 .

[0033] In the figure: 1 Vacuum chamber, 2 Rotary cylinder, 2-1 Vacuum rotary through-plate joint, 2-2 Coupling, 3 Rotating shaft, 4 Upper active baffle, 5 Lower driven baffle, 6 Support plate, 7 & 8 Pins, 9 & 10 Slots, 11 Sample clamping part, 12 Drive device. Detailed Implementation

[0034] To clearly illustrate the technical features of this solution, the present invention will be described in detail below through specific embodiments and in conjunction with the accompanying drawings. The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Furthermore, the present invention may repeat reference numerals and / or letters in different examples. This repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. It should be noted that the components illustrated in the drawings are not necessarily drawn to scale. The present invention omits descriptions of well-known components and processing techniques and processes to avoid unnecessarily limiting the present invention. The terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0035] See Figures 1-7 This embodiment provides a multi-layer, multi-opening baffle device, including a vacuum cavity 1 and four sets of opening and closing baffle assemblies evenly distributed in the circumference. The four sets of opening and closing baffle assemblies work together to achieve two states: open and closed.

[0036] Each set of opening and closing baffle assemblies includes a driving component, a rotating shaft 3, an upper active baffle 4, and a lower driven baffle 5. The driving component is a rotary cylinder 2, which is connected to the outer side of the upper wall of the vacuum chamber 1. The rotating shaft 3 is drivenly connected to the lower part of the rotary cylinder 2 and extends into the vacuum chamber 1.

[0037] Four rotary cylinders 2 are connected to a single air circuit equipped with a switching valve to achieve synchronized operation. The output ends of the rotary cylinders 2 are sequentially connected to the rotating shafts 3 via vacuum rotary through-plate joints 2-1 and couplings 2-2, which are located inside the vacuum chamber 1. Torque is transmitted through couplings 2-2 to ensure that the four rotating shafts 3 rotate at the same angle.

[0038] Two support plates 6 are fixedly installed on each of the left and right sides of the inner wall of the vacuum chamber 1, for a total of four support plates 6. Each set of opening and closing baffle assembly corresponds to one support plate 6.

[0039] A first bearing is embedded in the through hole of the support plate 6, and the rotating shaft 3 passes through the first bearing. The bottom of the rotating shaft 3 is fixedly connected to one end of the upper active baffle 4. One end of the lower driven baffle is rotatably connected to the outside of the rotating shaft via a connector; specifically, the connector is a second bearing sleeved on the bottom of the rotating shaft 3, and one end of the lower driven baffle 5 is hinged to the outer ring of the second bearing, that is, the lower driven baffle 5 can rotate relative to the outer ring of the second bearing. The upper active baffle 4 is located above the lower driven baffle 5.

[0040] The upper active baffle 4 has pins 7 and 8 on both its inner and outer sides, with the bottom ends of pins 7 and 8 extending downwards. The lower driven baffle 5 has corresponding slots 9 and 10 on its inner and outer sides, which are adapted to the pins 7 and 8. The upper active baffle 4 and the lower driven baffle 5 cooperate to form a double-layer opening and closing baffle.

[0041] The vacuum chamber 1 is also equipped with a sample clamping part 11 located above the upper active baffle 4.

[0042] See Figure 2 , 4 When the upper active baffle 4 rotates inward, the rotary cylinder 2 drives the rotating shaft 3 to rotate, causing the upper active baffle 4 to rotate at a certain angle. Then, its outer pin 8 slides into the slot 10 on the outer side of the lower driven baffle 5. The upper active baffle 4 continues to rotate inward, pushing the lower driven baffle 5 to rotate inward together through the pin 8. Finally, the upper active baffle 4 and the lower driven baffle 5 are partially offset to completely cover the substrate on the sample clamping part 11. That is, the innermost edge of the upper active baffle 4 is inside the innermost edge of the lower driven baffle 5, and the outermost edge of the lower driven baffle 5 is outside the outermost edge of the upper active baffle 4. At this time, the upper active baffle 4 and the lower driven baffle 5 are in a closed state to cover the substrate.

[0043] See Figure 3 , 6 When the upper active baffle 4 rotates outward, the rotary cylinder 2 drives the rotating shaft 3 to rotate (reverse), causing the upper active baffle 4 to rotate at a certain angle. Then, the inner pin 7 slides into the slot 9 on the inner side of the lower driven baffle 5 as it rotates. The upper active baffle 4 continues to rotate outward, pushing the lower driven baffle 5 to rotate outward together through the pin 7. Finally, the upper active baffle 4 and the lower driven baffle 5 stop on the outside of the sample clamping part 11 in an overlapping manner to reduce the space occupied. At this time, the upper active baffle 4 and the lower driven baffle 5 are in the open state to expose the substrate.

[0044] During the opening and closing of the double-layered opening and closing baffles, the rotation angle of the lower driven baffle 5 is smaller than the rotation angle of the upper active baffle 4. The overlapping area of ​​the double-layered opening and closing baffles in the open state is greater than the overlapping area of ​​the double-layered opening and closing baffles in the closed state.

[0045] The vacuum chamber is also equipped with a drive device 12, which drives the sample clamping part 11 to move up and down and rotate.

[0046] Although the specific embodiments of the utility model have been described above in conjunction with the accompanying drawings, this is not intended to limit the scope of protection of the utility model. Based on the technical solution of the utility model, various modifications or variations that can be made by those skilled in the art without creative effort are still within the scope of protection of the utility model.

Claims

1. A multi-layer, multi-opening baffle device, characterized in that: The device includes multiple sets of opening and closing baffle assemblies evenly distributed in the circumference. Each set of opening and closing baffle assemblies includes a driving component, a rotating shaft, an upper active baffle, and a lower driven baffle. The rotating shaft is drivenly connected to the lower part of the driving component. The bottom end of the rotating shaft is drivenly connected to one end of the upper active baffle. One end of the lower driven baffle is rotatably connected to the bottom of the rotating shaft through a connector. The upper active baffle is located above the lower driven baffle. The upper active baffle is provided with pins on its inner and outer sides respectively, and the lower driven baffle is provided with corresponding slots on its inner and outer sides that are adapted to the pins. When the driving component drives the upper active baffle to rotate inward by a certain angle, its outer pin is inserted into the slot on the outer side of the lower driven baffle and pushes the lower driven baffle to rotate inward together, partially blocking the sample clamping part located above the upper active baffle in a staggered manner, forming a closed state. When the driving component drives the upper active baffle to rotate outward by a certain angle, its inner pin is inserted into the slot on the inner side of the lower driven baffle and pushes the lower driven baffle to rotate outward together, stopping on the outside of the sample clamping part in an overlapping manner, forming an open state.

2. The multi-layer, multi-opening baffle device according to claim 1, characterized in that: The multi-layer multi-opening baffle device also includes a vacuum chamber, the driving component is located above the vacuum chamber, the rotating shaft extends into the vacuum chamber, the inner wall of the vacuum chamber is provided with a support plate, and the bottom of the rotating shaft passes through the support plate and is fixedly connected to one end of the upper active baffle.

3. The multi-layer, multi-opening baffle device according to claim 2, characterized in that: The first bearing is embedded in the through hole of the support plate, and the rotating shaft passes through the first bearing.

4. The multi-layer, multi-opening baffle device according to claim 1, characterized in that: The connecting member includes a second bearing sleeved at the bottom of the rotating shaft, and one end of the lower driven baffle is hinged to the outer surface of the second bearing.

5. A multi-layer, multi-opening baffle device according to claim 2, characterized in that: The driving component is a rotary cylinder.

6. The multi-layer, multi-opening baffle device according to claim 5, characterized in that: The rotary cylinder is connected to the rotating shaft via a vacuum rotary through-plate joint.

7. A multi-layer, multi-opening baffle device according to claim 6, characterized in that: The rotary cylinder is connected to the rotating shaft in sequence via a vacuum rotary through-plate joint and a coupling, with the coupling located inside the vacuum chamber.

8. The multi-layer, multi-opening baffle device according to claim 1, characterized in that: The number of opening and closing baffle assemblies is four, which are arranged in a 90-degree rotational offset.

9. A multi-layer, multi-opening baffle device according to claim 2, characterized in that: A drive device is also provided above the vacuum chamber, which drives the sample clamping part to move up and down and rotate.

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