Device for eliminating charged ions in PVD vacuum chamber

Abstract

The utility model discloses a device for eliminating charged ions in a PVD (Physical Vapor Deposition) vacuum chamber, which comprises a conductive wheel assembly, a guide wheel support assembly, a mounting connecting seat, a cavity, a carrier plate and a transmission wheel assembly, and is characterized in that the conductive wheel assembly is fixedly connected with the guide wheel support assembly through the mounting connecting seat; the conductive wheel assembly comprises a conductive seat, a conductive wheel, two swing arms, a torsion spring and a protective sleeve, the conductive seat is fixedly locked on the mounting connecting seat, supporting plates are correspondingly arranged on the two sides of the conductive seat, the bottoms of the swing arms are correspondingly mounted on the inner side walls of the supporting plates through fixing pin shafts, and the torsion spring is arranged in the protective sleeve. The fixed pin shaft is sequentially sleeved with a torsional spring and a protective sleeve on the middle section of the two swing arms, the two ends of the torsional spring are clamped on the supporting plate, conductive wheels are installed on the tops of the swing arms through conductive wheel pin shafts, and the conductive wheels are in rolling contact with the surface of the C-shaped steel on the side face of the carrying plate. Charged ions are led out of the cavity through the conductive wheel assembly, generation of dust is reduced, damage to magnetic fluid is avoided, and the sparking phenomenon is avoided.

Description

Technical Field

[0001] This utility model relates to the field of PVD equipment, and in particular to a device for eliminating charged ions in a PVD vacuum chamber. Background Technology

[0002] In the production of silicon-based heterojunction solar cells, physical vapor deposition (PVD) equipment is generally used to deposit a transparent conductive film (TCO) on amorphous silicon. Inside the PVD vacuum chamber, a carrier plate filled with silicon wafers is transported by drive wheels. During the deposition of conductive films such as metal or ITO, a large number of charged ions are emitted. Because the rubber rings on the drive wheels, which are in direct contact with the carrier plate, are insulating materials, a certain amount of charged ions accumulate on the carrier plate and silicon wafers as they pass through the deposition plasma region. This accumulation of charged ions cannot be discharged, easily leading to abnormal arcing, causing damage and scrapping of the silicon wafers, affecting production processes, and resulting in significant economic losses.

[0003] The existing solution for eliminating arcing within the PVD vacuum chamber involves placing a metal bushing on the drive shaft. During carrier transport, this bushing contacts the metal bushing, and a connected magnetic fluid guides charged ions to the outside of the chamber. Significant drawbacks of this existing technology are: 1) Direct transmission between the bushing and the carrier involves sliding friction, generating significant dust that affects the PVD process and product quality; 2) During the operation of the PVD vacuum coating machine, the method of guiding charged ions to the outside of the chamber via the connected magnetic fluid may allow electrons to escape directly from the gaps at the top of the PVD vacuum coating machine onto the magnetic fluid seal. This can cause a decrease in the magnetism of the magnetic fluid, leading to a decline in the performance of the magnetic fluid seal and ultimately, the loss of its sealing effect. Utility Model Content

[0004] To address the aforementioned problems, this invention provides a charged ion elimination device for PVD vacuum chambers that can eliminate arcing, avoid or reduce dust generation, and does not affect the magnetofluid.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a charged ion elimination device in a PVD vacuum chamber, including a conductive wheel assembly, a guide wheel support assembly, a mounting connection seat, a cavity, a carrier plate, and a transmission wheel assembly. The carrier plate is driven within the cavity by the transmission wheel assembly. The guide wheel support assembly is installed on the left and right sides of the bottom plate inside the cavity. The conductive wheel assembly is connected and fixed to the guide wheel support assembly through the mounting connection seat. The conductive wheel assembly includes a conductive seat, a conductive wheel, a swing arm, a torsion spring, and a protective sleeve. The conductive seat is fixedly locked on the mounting connection seat. Support plates are provided on both sides of the conductive seat. Two swing arms are provided. The bottom of the swing arms is installed on the inner side wall of the support plate through a fixing pin. A torsion spring and a protective sleeve are sequentially sleeved on the middle section of the two swing arms through the fixing pin. The two ends of the torsion spring are engaged with the support plate. The top of the swing arm is installed with a conductive wheel through a conductive wheel pin. The conductive wheel makes rolling contact with the C-shaped steel surface on the side of the carrier plate.

[0006] Furthermore, a bushing is fitted between the conductive wheel and the conductive wheel pin.

[0007] Furthermore, in the initial state, the top height of the conductive wheel assembly is set higher than that of the transmission wheel assembly.

[0008] As can be seen from the above description of the structure of this utility model, compared with the prior art, this utility model has the following advantages:

[0009] This invention uses a swingable conductive wheel assembly to directly export charged ions from the carrier silicon wafer to the outside of the cavity, reducing dust generation, avoiding damage to the magnetofluid, and ensuring reliable contact and smooth passage of the carrier when passing through. It effectively eliminates charged ions on the carrier silicon wafer in the PVD vacuum chamber and avoids arcing. Attached Figure Description

[0010] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0011] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0012] Figure 2 for Figure 1 A magnified view of a portion of the image;

[0013] Figure 3 This is a schematic diagram of the axial side structure of this utility model;

[0014] Figure 4 This is a schematic diagram of the conductive wheel assembly structure of this utility model;

[0015] Figure 5 This is a cross-sectional view of the conductive wheel assembly of this utility model. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0017] Example

[0018] refer to Figures 1-5 A charged ion elimination device for a PVD vacuum chamber includes a conductive wheel assembly 1, a guide wheel support assembly 2, a mounting connector 3, a cavity 4, a carrier plate 5, and a transmission wheel assembly 6. The carrier plate 5 is driven within the cavity 4 via the transmission wheel assembly 6. The guide wheel support assembly 2 is installed on the left and right sides of the bottom plate inside the cavity. The conductive wheel assembly 1 is connected and fixed to the guide wheel support assembly 2 via the mounting connector 3. The conductive wheel assembly 1 includes a conductive seat 11, a conductive wheel 12, a swing arm 15, a torsion spring 16, and a protective sleeve 17. The conductive seat 11 is fixedly locked to the mounting connector. 3. On the conductive base 11, support plates 18 are provided on both sides. Two swing arms 15 are provided. The bottom of the swing arms 15 is installed on the inner side wall of the support plate 18 through a fixed pin 14. A torsion spring 16 and a protective sleeve 17 are sequentially sleeved on the middle section of the two swing arms 15 through the fixed pin 14. The two ends of the torsion spring 16 are snapped onto the support plate 18. A conductive wheel 12 is installed on the top of the swing arm 15 through a conductive wheel pin 13. A bushing 19 is sleeved between the conductive wheel 12 and the conductive wheel pin 13. The conductive wheel 12 rolls in contact with the surface of the C-shaped steel 51 on the side of the carrier plate.

[0019] During operation, the process of eliminating charged ions is as follows: the carrier plate 5 enters the vacuum chamber, and the C-shaped steel 51 on both sides of the carrier plate is supported on the transmission wheel assembly 6. In the initial state, the top of the conductive wheel 12 is set higher than the transmission wheel assembly 6 to ensure that the surface of the C-shaped steel 51 and the conductive wheel 12 make reliable contact when the carrier plate 5 passes through. Because the conductive wheel assembly 1 is designed as a torsion spring structure, it can make the carrier plate C-shaped steel 51 and the conductive wheel 12 make contact while also being smoothly transmitted. The elimination and discharge path of charged ions is: carrier plate - conductive wheel (conductive wheel assembly) - mounting connection seat - guide wheel support assembly - cavity - grounding.

[0020] The conductive wheel is made of relatively wear-resistant copper. The structure is designed for rolling friction with the conductive wheel pin and is equipped with a torsion spring with appropriate torque. This avoids excessive contact friction with the C-shaped steel carrier plate to prevent or reduce dust generation. It also ensures that each carrier plate can reliably contact and pass smoothly when passing through, eliminating charged ions and preventing arcing.

[0021] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A charged ion elimination device for a PVD vacuum chamber, characterized in that: The assembly includes a conductive wheel assembly (1), a guide wheel support assembly (2), a mounting connector (3), a cavity (4), a carrier plate (5), and a transmission wheel assembly (6). The carrier plate (5) is driven within the cavity (4) via the transmission wheel assembly (6). The guide wheel support assembly (2) is installed on the left and right sides of the bottom plate inside the cavity (4). The conductive wheel assembly (1) is connected and fixed to the guide wheel support assembly (2) via the mounting connector (3). The conductive wheel assembly (1) includes a conductive seat (11), a conductive wheel (12), a swing arm (15), a torsion spring (16), and a protective sleeve (17). The conductive seat (11) The conductive base (11) is fixed on the mounting connector (3). Support plates (18) are provided on both sides of the conductive base (11). There are two swing arms (15). The bottom of the swing arms (15) is installed on the inner side wall of the support plate (18) through the fixing pin (14). The fixing pin (14) is fitted with a torsion spring (16) and a protective sleeve (17) in sequence on the middle section of the two swing arms. The two ends of the torsion spring (16) are snapped on the support plate (18). The top of the swing arm (15) is fitted with a conductive wheel (12) through the conductive wheel pin (13). The conductive wheel (12) is in rolling contact with the surface of the C-shaped steel (51) on the side of the carrier plate.

2. The charged ion elimination device in a PVD vacuum chamber according to claim 1, characterized in that: A bushing (19) is fitted between the conductive wheel (12) and the conductive wheel pin (13).

3. The charged ion elimination device in a PVD vacuum chamber according to claim 1, characterized in that: The initial state of the conductive wheel assembly (1) has the top of the conductive wheel (12) set higher than that of the transmission wheel assembly (6).

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