Magnetron sputtering coating equipment for chromium plate material

Abstract

The utility model provides magnetron sputtering coating equipment for a chromium plate material. The magnetron sputtering coating equipment comprises a vacuum box body, the rotary placing rack is fixedly connected to the top end of the interior of the vacuum box body; and the film coating moving mechanism is fixedly connected to the lower end of the rotary placement rack. The position of the lifting magnetron sputtering coating machine body can be changed through the coating moving mechanism for coating, the scrap collecting box body can collect scraps at the bottom end in the vacuum box body, and the pneumatic adsorption base can generate negative pressure suction force through external air pressure equipment, so that a chromium plate workpiece placed above can be pneumatically adsorbed; and the movable shielding assembly can change the shielding position in the pneumatic adsorption base, so that the pneumatic adsorption position can be changed, and an adsorption area can be conveniently adjusted according to needs to pneumatically adsorb the chromium plate workpiece.

Description

Technical Field

[0001] This utility model relates to the field of chromium plate coating technology, and in particular to a magnetron sputtering coating device for chromium plates. Background Technology

[0002] Chromium plate coating refers to the process of depositing a thin chromium film onto the surface of a plate. Specifically, chromium plates are usually made of a flat quartz plate or glass plate, and a thin chromium film is deposited on it. When coating chromium plates, the coating can be carried out using a magnetron sputtering coating equipment.

[0003] Existing Chinese patent CN220812600U, published on April 19, 2024, discloses a magnetron sputtering coating device. Addressing the problem that existing magnetron sputtering devices rely solely on the rotating connection between a movable block and a slider to drive the entire rotating mechanism during circular motion, prolonged use can easily lead to damage at the connection point between the slider and the movable block, causing them to separate or the slider to become immobile, thus preventing the adjustment of the circular motion radius, the following solution is proposed. This device includes a vacuum chamber and a magnetron target. An observation port with transparent glass is located on the front of the vacuum chamber. A hole for picking up and placing workpieces is located on one side of the vacuum chamber, with a doorway. A rotating and moving mechanism, as well as a clamping assembly, are installed within the vacuum chamber. This makes clamping workpieces easier and more convenient, allows for free adjustment of the magnetron target's position, reduces the likelihood of damage to the connection point after prolonged use, and facilitates motor operation.

[0004] However, the aforementioned device uses a clamping assembly to hold the chrome plate material, lacking a rapid positioning structure, which makes it inconvenient to place and clamp the chrome plate material. Utility Model Content

[0005] The technical problem to be solved by this invention is to overcome the defects of the existing technology. This invention proposes a magnetron sputtering coating equipment for chromium plates. The magnetron sputtering coating equipment for chromium plates can effectively and quickly place and fix the chromium plates through a pneumatic adsorption mechanism. Moreover, the pneumatic adsorption makes it easy to handle.

[0006] To solve the above-mentioned technical problems, the technical solution adopted in this utility model is: a magnetron sputtering coating equipment for chromium plate materials, comprising:

[0007] Vacuum chamber;

[0008] A rotary placement frame, which is fixed to the top of the inside of the vacuum chamber;

[0009] A coating moving mechanism, which is fixedly connected to the lower end of the rotating placement frame;

[0010] A lifting magnetron sputtering coating machine body is installed and connected to the lower end of the coating moving mechanism;

[0011] Debris collection box; the debris collection box is fixedly connected to the bottom of the inside of the vacuum chamber;

[0012] A pneumatic adsorption base is fixedly attached to the inside of the debris collection box.

[0013] A movable shielding assembly is fixedly attached to both sides of the interior of the pneumatic adsorption base.

[0014] Preferably, the rotating placement frame includes a suspension panel, with suspension rods fixedly connected to the four corners of the upper end of the suspension panel. The upper ends of the suspension rods are fixedly connected to the top of the inner cavity of the vacuum chamber. A rotary motor is installed in the middle of the upper end of the suspension panel by screws. A casing is fixedly connected to the periphery of the rotary motor on the suspension panel. Hollow panels are installed on the inner sides of both ends of the casing by screws. A second coupling is fixedly connected to the output shaft end of the rotary motor. A rotating cam is fixedly connected to the lower end of the second coupling. A coating moving mechanism is fixedly connected to the lower end of the rotating cam.

[0015] Preferably, the rotating cam is rotatably mounted on the inner side of the lower end of the suspension panel.

[0016] Preferably, the coating moving mechanism includes front and rear ball screw type linear modules fixed to the lower end of the rotating cam, and left and right ball screw type linear modules are installed at the lower end of the front and rear ball screw type linear modules by screws, and the lower end of the left and right ball screw type linear modules is installed with a lifting magnetron sputtering coating machine body by screws.

[0017] Preferably, the lifting magnetron sputtering coating machine body includes a first electric telescopic cylinder mounted on left and right ball screw linear modules by screws, the telescopic rod end of the first electric telescopic cylinder is fixedly connected to a connecting frame, and the lower inner side of the connecting frame is fixedly connected to a magnetron target.

[0018] Preferably, the debris collection box includes a collection box shell, the inside of which is provided with a collection cavity, and a pneumatic adsorption base is installed on the collection box shell through the collection cavity.

[0019] Preferably, the pneumatic adsorption base includes an adsorption base shell, with connecting end posts fixedly connected to the middle of both ends of the adsorption base shell. The adsorption base shell is fixedly connected to the inner wall of the collection box shell through the connecting end posts. A perforated adsorption plate is fixedly connected to the inner side of the upper end of the adsorption base shell, and movable shielding components are installed on both sides of the interior of the adsorption base shell.

[0020] Preferably, the movable shielding assembly includes a second electric telescopic cylinder fixed inside the housing of the adsorption base. The telescopic rod end of the second electric telescopic cylinder is fixedly connected to a first coupling. The outer end of the first coupling is fixedly connected to a connecting vertical plate. The upper end of the connecting vertical plate is fixedly connected to a shielding panel. The upper end of the shielding panel is attached to the lower outer wall of the perforated adsorption plate.

[0021] Compared with existing technologies, the advantages of this utility model include: the lifting magnetron sputtering coating machine body can change position for coating through the coating moving mechanism; the debris collection box can collect debris at the bottom of the vacuum chamber; the pneumatic adsorption base can generate negative pressure suction through external air pressure equipment, thereby pneumatically adsorbing the chrome plate workpiece placed above, allowing the chrome plate workpiece to be stably coated; and the movable shielding component can change the shielding position inside the pneumatic adsorption base, thereby changing the pneumatic adsorption position. This facilitates adjusting the adsorption area to pneumatically adsorb the chrome plate workpiece as needed. Attached Figure Description

[0022] The disclosure of this utility model is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings, the same reference numerals are used to refer to the same parts. Wherein:

[0023] Figure 1 The schematic diagram shows a three-dimensional structural schematic of a magnetron sputtering coating apparatus for chromium plates according to one embodiment of the present invention;

[0024] Figure 2 The schematic diagram shows a combined structure of a coating moving mechanism and a rotating placement frame of a magnetron sputtering coating apparatus for chromium plates according to one embodiment of the present invention.

[0025] Figure 3 The schematic diagram shows a cross-sectional view of the coating moving mechanism and the rotating placement frame combination of a magnetron sputtering coating apparatus for chrome plate materials according to one embodiment of the present invention.

[0026] Figure 4 The schematic diagram shows a combined structure of a pneumatic adsorption base and a movable shielding component for a magnetron sputtering coating apparatus for chromium plates according to one embodiment of the present invention.

[0027] Figure 5 The diagram illustrates the structure of a movable shielding component in a magnetron sputtering coating apparatus for chromium plates according to one embodiment of the present invention.

[0028] The diagram shows the following components: 1. Vacuum chamber; 2. Encasing shell; 21. Perforated panel; 3. Suspension panel; 31. Suspension rod; 4. Perforated adsorption plate; 41. First coupling; 42. Second electric telescopic cylinder; 43. Connecting vertical plate; 5. Collection box shell; 51. Connecting end column; 52. Collection cavity; 53. Adsorption base shell; 54. Shielding panel; 6. Front and rear ball screw type linear module; 7. Magnetically controlled target; 71. Connecting frame; 72. First electric telescopic cylinder; 8. Left and right ball screw type linear module; 9. Rotary motor; 91. Second coupling; 92. Rotating cam. Detailed Implementation

[0029] It is readily understood that, based on the technical solution of this utility model, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of this utility model. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative examples of the technical solution of this utility model and should not be considered as the entirety of this utility model or as a limitation or restriction of its technical solution.

[0030] According to one embodiment of this utility model, combined with Figures 1-5 As shown. A magnetron sputtering coating apparatus for chromium plates includes: a vacuum chamber 1, a rotating placement frame, a coating moving mechanism, a lifting magnetron sputtering coating machine body, a debris collection box, a pneumatic adsorption base, and a movable shielding assembly.

[0031] A rotary placement frame is fixed to the top of the interior of the vacuum chamber 1, allowing it to rotate. A coating moving mechanism is fixed to the bottom of the rotary placement frame, enabling it to move below the frame for coating. A lifting magnetron sputtering coating unit is mounted on the bottom of the moving mechanism, allowing it to change position for coating. A debris collection box is fixed to the bottom of the interior of the vacuum chamber 1, allowing it to move within the vacuum chamber 1. The bottom of the internal part collects debris. The pneumatic adsorption base is fixed inside the debris collection box. The pneumatic adsorption base can generate negative pressure suction through external air pressure equipment, so as to pneumatically adsorb the chrome plate workpiece placed above, so that the chrome plate workpiece can be stably coated. The movable shielding component is fixed on both sides inside the pneumatic adsorption base. The movable shielding component can change the shielding position inside the pneumatic adsorption base, so as to change the pneumatic adsorption position. This makes it easy to adjust the adsorption area to pneumatically adsorb the chrome plate workpiece as needed.

[0032] Combination Figures 1-3As shown, the rotating placement frame includes a suspension panel 3. Suspension rods 31 are fixed to the four corners of the upper end of the suspension panel 3. The upper ends of the suspension rods 31 are fixed to the top of the interior of the vacuum chamber 1. The suspension rods 31 can suspend and pull the suspension panel 3 from the top of the interior of the vacuum chamber 1 for placement. A rotary motor 9 is installed in the middle of the upper end of the suspension panel 3 by screws. The rotary motor 9 is easy to install and remove. A protective shell 2 is fixed to the periphery of the rotary motor 9 on the suspension panel 3. The rotary motor 9 provides protection through the protective shell 2. The inner sides of both ends of the protective shell 2 are fitted with perforated... The hollow panel 21 allows personnel to easily disassemble and inspect it. Furthermore, the hollow panel 21 has internal ventilation holes for heat dissipation. A second coupling 91 is fixedly connected to the output shaft of the rotary motor 9. The output shaft of the rotary motor 9 rotates, driving the second coupling 91 to rotate. A rotating cam 92 is fixedly connected to the lower end of the second coupling 91. The second coupling 91 rotates, driving the rotating cam 92 to rotate. A coating moving mechanism is fixedly connected to the lower end of the rotating cam 92. The rotating cam 92 then drives the coating moving mechanism to rotate, allowing for changes in direction and position for use.

[0033] The rotating cam 92 is rotatably mounted on the lower inner side of the suspension panel 3, which allows for positioning and rotation during use.

[0034] The coating moving mechanism includes a front and rear ball screw type linear module 6 fixed to the lower end of the rotating cam 92. The front and rear ball screw type linear module 6 can be suspended on the lower end of the rotating cam 92 and can move back and forth. The lower end of the front and rear ball screw type linear module 6 is equipped with a left and right ball screw type linear module 8 by screws. The front and rear ball screw type linear module 6 can drive the left and right ball screw type linear module 8 to move back and forth. The left and right ball screw type linear module 8 can move left and right. The lower end of the left and right ball screw type linear module 8 is equipped with a lifting magnetron sputtering coating machine body by screws. The left and right ball screw type linear module 8 can drive the lifting magnetron sputtering coating machine body to move left and right, thereby changing the position of the lifting magnetron sputtering coating machine body in all directions for coating.

[0035] The lifting magnetron sputtering coating machine body includes a first electric telescopic cylinder 72 mounted on the left and right ball screw type linear modules 8 by screws. The first electric telescopic cylinder 72 can be raised and lowered on the lower end of the left and right ball screw type linear modules 8. A connecting frame 71 is fixedly connected to the telescopic rod end of the first electric telescopic cylinder 72. When the first electric telescopic cylinder 72 is extended and retracted, it can change the height position of the connecting frame 71. A magnetron sputtering target 7 is fixedly connected to the inner side of the lower end of the connecting frame 71. The connecting frame 71 can change the height position of the magnetron sputtering target 7, so that the magnetron sputtering target 7 can change its height position for coating.

[0036] Combination Figure 1, Figure 4 and Figure 5 As shown, the debris collection box includes a collection box shell 5, and a collection cavity 52 is provided inside the collection box shell 5. Thus, the collection box shell 5 can collect the debris generated by the coating through the area of ​​the collection cavity 52. ​​A pneumatic adsorption base is installed on the collection box shell 5 through the collection cavity 52, so that the pneumatic adsorption base can be installed and placed accordingly.

[0037] The pneumatic adsorption base includes an adsorption base shell 53, which is connected to an external pneumatic device, allowing negative pressure suction to be generated inside the adsorption base shell 53. Connecting end posts 51 are fixedly connected to the middle of both ends of the adsorption base shell 53, enabling it to be fixedly connected to the outside. The adsorption base shell 53 is fixed to the inner wall of the collection box shell 5 via the connecting end posts 51, allowing it to be suspended. A perforated adsorption plate 4 is fixedly connected to the inner side of the upper end of the adsorption base shell 53. The adsorption base shell 53 can pneumatically adsorb chrome plate workpieces placed above it via the perforated adsorption plate 4, using pneumatic adsorption for easy handling. Movable shielding components are installed on both sides inside the adsorption base shell 53.

[0038] The movable shielding assembly includes a second electric telescopic cylinder 42 fixed inside the adsorption base housing 53. The second electric telescopic cylinder 42 can stably extend and retract inside the adsorption base housing 53. A first coupling 41 is fixed to the telescopic rod end of the second electric telescopic cylinder 42. When the telescopic rod of the second electric telescopic cylinder 42 extends and retracts, it can change the position of the first coupling 41. A connecting vertical plate 43 is fixed to the outer end of the first coupling 41. The first coupling 41 can change the position of the connecting vertical plate 43. A shielding panel 54 is fixed to the upper end of the connecting vertical plate 43. The connecting vertical plate 43 can change the position of the shielding panel 54. The upper end of the shielding panel 54 is attached to the lower outer wall of the hollow adsorption plate 4. The shielding panel 54 can change the adsorption area of ​​the holes inside the hollow adsorption plate 4, making it easy to adjust and change the adsorption as needed.

[0039] In this embodiment, the rotating placement frame can rotate at the top inside the vacuum chamber 1, the coating moving mechanism can move to a position below the rotating placement frame to perform coating, the lifting magnetron sputtering coating machine can change position to perform coating through the coating moving mechanism, the debris collection box can collect debris at the bottom inside the vacuum chamber 1, and the pneumatic adsorption base can generate negative pressure suction through external pneumatic equipment, thereby pneumatically adsorbing the chrome plate workpiece placed above, so that the chrome plate workpiece can be stably coated. The movable shielding component can change the shielding position inside the pneumatic adsorption base, thereby changing the pneumatic adsorption position. This makes it easy to adjust the adsorption area to pneumatically adsorb the chrome plate workpiece as needed. The working principle of the magnetron target 7 and the vacuum chamber 1 is fully disclosed in the prior art and will not be described further.

[0040] The scope of this utility model is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this utility model, and all such modifications and variations should fall within the protection scope of this utility model.

Claims

1. A magnetron sputtering coating equipment for chromium plate materials, characterized in that, include: Vacuum chamber (1); A rotating placement frame is fixed to the top of the inside of the vacuum chamber (1); A coating moving mechanism, which is fixedly connected to the lower end of the rotating placement frame; A lifting magnetron sputtering coating machine body is installed and connected to the lower end of the coating moving mechanism; Debris collection box; the debris collection box is fixed to the bottom of the inside of the vacuum chamber (1); A pneumatic adsorption base is fixedly attached to the inside of the debris collection box. A movable shielding assembly is fixedly attached to both sides of the interior of the pneumatic adsorption base.

2. The magnetron sputtering coating equipment for chromium plate materials according to claim 1, characterized in that, The rotating placement frame includes a suspension panel (3), with suspension rods (31) fixed at the four corners of the upper end of the suspension panel (3). The upper end of the suspension rods (31) is fixed to the top of the inside of the vacuum chamber (1). A rotary motor (9) is installed in the middle of the upper end of the suspension panel (3) by screws. A casing (2) is fixed to the periphery of the rotary motor (9) on the suspension panel (3). Hollow panels (21) are installed on the inner sides of both ends of the casing (2) by screws. A second coupling (91) is fixed to the output shaft end of the rotary motor (9). A rotating cam (92) is fixed to the lower end of the second coupling (91). A coating moving mechanism is fixed to the lower end of the rotating cam (92).

3. The magnetron sputtering coating equipment for chromium plate materials according to claim 2, characterized in that, The rotating cam (92) is rotatably mounted on the inner side of the lower end of the suspension panel (3).

4. The magnetron sputtering coating equipment for chromium plate materials according to claim 2, characterized in that, The coating moving mechanism includes a front and rear ball screw type linear module (6) fixed to the lower end of the rotating cam (92). The lower end of the front and rear ball screw type linear module (6) is equipped with a left and right ball screw type linear module (8) by screws. The lower end of the left and right ball screw type linear module (8) is equipped with a lifting magnetron sputtering coating machine body by screws.

5. The magnetron sputtering coating equipment for chromium plate materials according to claim 4, characterized in that, The lifting magnetron sputtering coating machine body includes a first electric telescopic cylinder (72) mounted on the left and right ball screw type linear modules (8) by screws. The telescopic rod end of the first electric telescopic cylinder (72) is fixedly connected to a connecting frame (71), and the lower inner side of the connecting frame (71) is fixedly connected to a magnetron target (7).

6. The magnetron sputtering coating equipment for chromium plate materials according to claim 1, characterized in that, The debris collection box includes a collection box shell (5), and a collection cavity (52) is provided inside the collection box shell (5). A pneumatic adsorption base is installed on the collection box shell (5) through the collection cavity (52).

7. The magnetron sputtering coating equipment for chromium plate materials according to claim 6, characterized in that, The pneumatic adsorption base includes an adsorption base shell (53), with connecting end posts (51) fixedly connected to the middle of both ends of the adsorption base shell (53). The adsorption base shell (53) is fixedly connected to the inner wall of the collection box shell (5) through the connecting end posts (51). A perforated adsorption plate (4) is fixedly connected to the inner side of the upper end of the adsorption base shell (53). Movable shielding components are installed on both sides of the interior of the adsorption base shell (53).

8. The magnetron sputtering coating equipment for chromium plate material according to claim 7, characterized in that, The movable shielding assembly includes a second electric telescopic cylinder (42) fixed inside the adsorption base housing (53). The telescopic rod end of the second electric telescopic cylinder (42) is fixedly connected to a first coupling (41). The outer end of the first coupling (41) is fixedly connected to a connecting vertical plate (43). The upper end of the connecting vertical plate (43) is fixedly connected to a shielding panel (54). The upper end of the shielding panel (54) is attached to the lower outer wall of the hollow adsorption plate (4).

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