Rotating and lifting sample table

Abstract

The utility model relates to the technical field of vacuum coating equipment, in particular to a rotating and lifting sample table which comprises a sample table main body for bearing a substrate, a rotating component and a lifting component, the rotating assembly comprises a rotating driving part provided with a first speed reducer and a rotor shaft, the bottom end of the rotor shaft is connected with the sample table main body, and the rotating driving part drives the rotor shaft to rotate through a first synchronous belt so as to drive the sample table main body to rotate; the lifting assembly comprises a lifting driving part and a mounting plate, the rotor shaft is sleeved with a bearing seat, the rotor shaft penetrates through the mounting plate, and the bearing seat is mounted on the mounting plate; a plurality of lead screws are arranged on the side edge of the mounting plate, each lead screw is in threaded connection with a moving block, the inner side of each moving block is connected with the mounting plate, and the lifting driving part drives the lead screws to rotate to enable the moving blocks to move up and down so as to drive the sample table main body to lift. Through cooperation of the rotating assembly and the lifting assembly, stable rotation and lifting of the sample table body are achieved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a rotating and lifting sample stage. Background Technology

[0002] In the vacuum coating process, the substrate is mounted on the sample stage, which allows for the rotation and lifting of the substrate. The precision with which the sample stage controls the substrate directly affects the coating quality. With industrial development, the use of large-size substrates is becoming increasingly common, posing a significant challenge to the sample stage.

[0003] Currently, most general-purpose sample stages have a single-sided lifting structure. When bearing large substrates, the excessive load can easily lead to off-center loading. Off-center loading not only causes instability in the lifting of the sample stage, resulting in substrate tilting, uneven coating thickness, and reduced product quality, but also imposes additional stress on the mechanical structure of the sample stage, shortening the equipment's lifespan.

[0004] Meanwhile, excessive load leads to increased rotational inertia, making it difficult to precisely control the rotation angle of the sample stage. In coating scenarios with high precision requirements, deviations in rotation angle can significantly affect the coating accuracy of the substrate, failing to meet the coating process requirements of high-end products. Utility Model Content

[0005] This invention addresses the shortcomings of existing technologies by developing a rotating and lifting sample stage. Through the cooperation of a rotating component and a lifting component, the main body of the sample stage can be stably rotated and lifted, meeting the needs for sample position adjustment in experiments and tests.

[0006] The technical solution to the technical problem solved by this utility model is as follows:

[0007] This application provides a rotating and lifting sample stage, including a sample stage body for carrying a substrate, as well as a rotating assembly and a lifting assembly;

[0008] The rotating assembly includes a rotating drive component equipped with a first reducer and a rotor shaft. The bottom end of the rotor shaft is connected to the sample stage body. The rotating drive component drives the rotor shaft through a first synchronous belt, thereby causing the sample stage body to rotate. The rotating servo drive component is driven by the first reducer and the first synchronous belt to precisely control the rotation of the rotor shaft, thereby causing the sample stage body to rotate with high precision.

[0009] The lifting assembly includes a lifting drive component and a mounting plate. A bearing seat is sleeved on the outer periphery of the rotor shaft. The rotor shaft passes through the mounting plate. The bearing seat is mounted on the mounting plate. The mounting plate is located below the first synchronous belt.

[0010] The mounting plate has evenly spaced screws on its sides, each threaded with a movable block. The inner side of each movable block is connected to the mounting plate. The lifting drive unit drives the screws to rotate, causing the movable blocks to move up and down, thereby raising and lowering the sample stage body. The multiple screws evenly distribute the weight of the substrate, avoiding uneven loading during unilateral lifting, thus achieving synchronous lifting and ensuring the sample stage body operates smoothly throughout the entire lifting process, preventing substrate tilting and uneven coating.

[0011] As an improvement to the above solution, the rotary drive component includes a first servo motor, which is connected to the active synchronous pulley via a first reducer. A driven synchronous pulley is sleeved on the outer circumference of the rotor shaft, and the driven synchronous pulley and the active synchronous pulley are connected via the first synchronous belt.

[0012] As an improvement to the above solution, the first servo motor, together with the first reducer, is mounted on the mounting plate.

[0013] As an improvement to the above solution, the mounting plate is provided with a lead screw on each side, which makes the sample stage body more evenly stressed during the lifting process, effectively avoiding the problem of uneven load caused by unilateral stress, and ensuring the stability of the sample stage body during lifting.

[0014] As an improvement to the above solution, the lifting drive includes a second servo motor, which is sequentially connected to a second reducer and a drive wheel. The bottom end of each lead screw is connected to a driven wheel, and the drive wheel and the driven wheel are connected by a second synchronous belt.

[0015] As an improvement to the above solution, each lead screw has a guide rod parallel to it on both sides, and the moving block has a guide hole adapted to the guide rod, with the guide rod passing through the guide hole. The cooperation between the guide rod and the guide hole provides guidance and limitation for the up and down movement of the moving block, preventing the moving block from deviating or shaking when the lead screw rotates.

[0016] As an improvement to the above solution, the upper and lower ends of the lead screw and guide rod on each side are respectively connected to a fixing block. The lead screw is rotatably connected to the fixing block, and the guide rod is fixedly connected to the fixing block, thereby improving the installation stability of the lead screw and guide rod.

[0017] As an improvement to the above solution, the lifting assembly further includes a mounting base, on which the lifting drive component is mounted. A guide tension wheel is also provided on the bottom surface of the mounting base, and the driving wheel, driven wheel, and guide tension wheel are connected by a second synchronous belt. The mounting base supports the lifting drive component, and the guide tension wheel optimizes the second synchronous belt drive, improving the stability and transmission efficiency of the lifting assembly.

[0018] As an improvement to the above solution, the mounting base is installed on the flange located below it, and both the mounting base and the flange have holes in the middle, through which the rotor shaft passes at intervals.

[0019] As an improvement to the above solution, a rotating and lifting sample stage further includes a vacuum chamber, the flange is connected to the upper wall of the vacuum chamber, and the rotor shaft extends into the vacuum chamber, so that the sample stage body is located in the vacuum chamber.

[0020] Compared with existing technologies, the above solution has the following advantages or beneficial effects:

[0021] 1. The addition of multi-sided lead screws and matching second synchronous belts can evenly bear the weight of the substrate, avoid uneven load during unilateral lifting, and thus achieve synchronous lifting, ensuring that the sample stage body runs smoothly throughout the entire lifting process and preventing uneven coating caused by substrate tilting.

[0022] 2. By using the first reducer and the first synchronous belt in linkage, the difference in rotational inertia between the motor output and the load is effectively reduced, making the rotation control of the sample stage body more precise, greatly improving the substrate accuracy, and meeting the requirements of high-precision coating process.

[0023] In summary, this utility model, by setting up a rotating component and a lifting component, realizes the rotation and lifting functions of the sample stage body on the substrate, which can meet the needs of multi-angle and multi-position adjustment of the substrate in processes such as vacuum coating. Attached Figure Description

[0024] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0025] Figure 1 This is a schematic diagram of the rotating and lifting sample stage in this embodiment. Figure 1 .

[0026] Figure 2 This is a schematic diagram of the rotating and lifting sample stage in this embodiment. Figure 2 .

[0027] Figure 3 This is a partial structural diagram of the rotating and lifting sample stage in this embodiment. Figure 1 .

[0028] Figure 4 This is a partial structural diagram of the rotating and lifting sample stage in this embodiment. Figure 2 .

[0029] Figure 5 This is a partial structural diagram of the rotating and lifting sample stage in this embodiment. Figure 3 .

[0030] In the figure: 1 Sample stage body, 2 First servo motor, 3 First reducer, 4 Active synchronous pulley, 5 Driven synchronous pulley, 6 First synchronous belt, 7 Second servo motor, 8 Rotor shaft, 9 Bearing seat, 10 Mounting plate, 101 Mounting hole, 11 Lead screw, 12 Moving block, 13 Second reducer, 14 Active pulley, 15 Driven pulley, 16 Guide tensioning pulley, 17 Second synchronous belt, 18 Guide rod, 19 Fixing block, 20 Mounting base, 21 Flange. Detailed Implementation

[0031] To clearly illustrate the technical features of this solution, the present invention will be described in detail below through specific embodiments and in conjunction with the accompanying drawings. The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Furthermore, the present invention may repeat reference numerals and / or letters in different examples. This repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. It should be noted that the components illustrated in the drawings are not necessarily drawn to scale. The present invention omits descriptions of well-known components and processing techniques and processes to avoid unnecessarily limiting the present invention. The terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] Example 1

[0033] See Figures 1-5 This embodiment provides a rotating and lifting sample stage, including a sample stage body 1, a rotating component and a lifting component, and the rotation and lifting of the sample stage body 1 are realized through the cooperation of the rotating component and the lifting component.

[0034] The rotating assembly includes a rotating drive component and a rotor shaft 8. The rotating drive component includes a first servo motor 2. The first servo motor 2 is sequentially connected to a first reducer 3 and a driving synchronous pulley 4. A driven synchronous pulley 5 is sleeved on the outer periphery of the rotor shaft 8. The bottom end of the rotor shaft 8 is fixedly connected to the sample stage body 1. The driven synchronous pulley 5 and the driving synchronous pulley 4 are connected by a first synchronous belt 6.

[0035] During operation, the first servo motor 2 drives the active synchronous pulley 4, which in turn drives the driven synchronous pulley 5 through the first synchronous belt 6, causing the rotor shaft 8 to rotate, thereby driving the sample stage body 1 to rotate.

[0036] The lifting assembly includes a lifting drive component and a mounting plate 10. The lifting drive component includes a second servo motor 7. A bearing seat 9 is fitted around the outer periphery of the rotor shaft 8. The rotor shaft 8 passes through the mounting hole 101 of the mounting plate 10. The bearing seat 9 is fixedly mounted on the mounting plate 10, meaning that the rotor shaft 8 is rotatably connected to the mounting plate 10 through the bearing seat 9. The mounting plate 10 does not rotate with the rotor shaft 8. The mounting plate 10 is located below the driven synchronous pulley 5.

[0037] The first servo motor 2, together with the first reducer 3, is mounted on the mounting plate 10.

[0038] A screw rod 11 is provided on each of the two sides of the mounting plate 10. A movable block 12 is threaded onto the screw rod 11, and the inner side of the movable block 12 is fixedly connected to the mounting plate 10.

[0039] The second servo motor 7 is sequentially connected to the second reducer 13 and the drive wheel 14. Each lead screw 11 has a driven wheel 15 at its bottom end, and the drive wheel 14 and the driven wheel 15 are connected by the second synchronous belt 17.

[0040] During operation, the second servo motor 7 drives the drive wheel 14, which in turn drives the driven wheel 15 via the second synchronous belt 17. The lead screw 11 rotates, causing the moving block 12 to move up and down along the lead screw 11, thereby driving the sample stage body 1 to rise and fall through the connecting plate and bearing seat 9.

[0041] Each lead screw 11 has a guide rod 18 parallel to it on both sides. The moving block 12 has a guide hole adapted to the guide rod 18, and the guide rod 18 passes through the guide hole. The upper and lower ends of each lead screw 11 and guide rod 18 are connected to a fixing block 19. The lead screw 11 is rotatably connected to the fixing block 19, and the guide rod 18 is fixedly connected to the fixing block 19, thereby improving the installation stability of the lead screw 11 and guide rod 18. When the lead screw 11 rotates, the moving block 12 moves up and down along the lead screw 11 and slides along the guide rod 18 at the same time, providing limiting and guiding functions for the moving block 12. This ensures that the moving block 12 moves up and down linearly along the lead screw 11, further improving the stability and accuracy of the lifting of the sample stage body 1, and avoiding the impact of the moving block 12's shaking on the substrate's positional accuracy.

[0042] The lifting assembly also includes a mounting base 20, which is located below the lead screw 11. A second servo motor 7 with a second reducer 13 is mounted on the mounting base 20. A guide tensioning wheel 16 is also provided on the bottom surface of the mounting base 20. The driving wheel 14, the driven wheel 15 and the guide tensioning wheel 16 are connected by a second synchronous belt 17.

[0043] The mounting base 20 is mounted on the flange 21 located below it. Both the mounting base 20 and the flange 21 have holes in the middle, and the rotor shaft 8 passes through the holes with a gap.

[0044]

Example 2

[0045] This embodiment is basically the same as Embodiment 1 above, except that:

[0046] The rotating and lifting sample stage also includes a vacuum chamber (not shown in the figure), with a flange 21 connected to the outer side of the upper wall of the vacuum chamber, and a rotor shaft 8 extending into the vacuum chamber, so that the sample stage body 1 is located in the vacuum chamber.

[0047] Although the specific embodiments of the utility model have been described above in conjunction with the accompanying drawings, this is not intended to limit the scope of protection of the utility model. Based on the technical solution of the utility model, various modifications or variations that can be made by those skilled in the art without creative effort are still within the scope of protection of the utility model.

Claims

1. A rotating and lifting sample stage, characterized in that: It includes a sample stage body (1) for carrying the substrate, as well as a rotating assembly and a lifting assembly; The rotating assembly includes a rotating drive with a first reducer (3) and a rotor shaft (8). The bottom end of the rotor shaft (8) is connected to the sample stage body (1). The rotating drive drives the rotor shaft (8) through a first synchronous belt (6), thereby causing the sample stage body (1) to rotate. The lifting assembly includes a lifting drive and a mounting plate (10). The rotor shaft (8) is fitted with a bearing seat (9) on its outer periphery. The rotor shaft (8) passes through the mounting plate (10). The bearing seat (9) is mounted on the mounting plate (10). The mounting plate (10) is located below the first synchronous belt (6). The mounting plate (10) has multiple lead screws (11) evenly arranged on its side. Each lead screw (11) is threaded with a moving block (12). The inner side of the moving block (12) is connected to the mounting plate (10). The lifting drive drives the lead screw (11) to rotate, so that the moving block (12) moves up and down, thereby driving the sample stage body (1) to rise and fall.

2. The rotating and lifting sample stage according to claim 1, characterized in that: The rotary drive includes a first servo motor (2), which is connected to the active synchronous pulley (4) via a first reducer (3). A driven synchronous pulley (5) is sleeved on the outer periphery of the rotor shaft (8), and the driven synchronous pulley (5) and the active synchronous pulley (4) are connected via a first synchronous belt (6).

3. A rotating and lifting sample stage according to claim 2, characterized in that: The first servo motor (2) together with the first reducer (3) is mounted on the mounting plate (10).

4. A rotating and lifting sample stage according to claim 1, characterized in that: The mounting plate (10) is provided with a lead screw (11) on each side.

5. A rotating and lifting sample stage according to claim 1, characterized in that: The lifting drive includes a second servo motor (7), which is sequentially connected to a second reducer (13) and a drive wheel (14). The bottom end of each lead screw (11) is connected to a driven wheel (15), and the drive wheel (14) and the driven wheel (15) are connected by a second synchronous belt (17).

6. A rotating and lifting sample stage according to claim 5, characterized in that: Each lead screw (11) has a guide rod (18) parallel to it on both sides. The moving block (12) has a guide hole adapted to the guide rod (18), and the guide rod (18) passes through the guide hole.

7. A rotating and lifting sample stage according to claim 1, characterized in that: The upper and lower ends of the lead screw (11) and guide rod (18) on each side are respectively connected to a fixing block (19). The lead screw (11) is rotatably connected to the fixing block (19), and the guide rod (18) is fixedly connected to the fixing block (19).

8. A rotating and lifting sample stage according to claim 5, characterized in that: The lifting assembly also includes a mounting base (20), the lifting drive is mounted on the mounting base (20), and the bottom surface of the mounting base (20) is also provided with a guide tension wheel (16), which is connected to the drive wheel (14), the driven wheel (15) and the guide tension wheel (16) by the second synchronous belt (17).

9. A rotating and lifting sample stage according to claim 8, characterized in that: The mounting base (20) is mounted on the flange (21) located below it. Both the mounting base (20) and the flange (21) have holes in their middle parts, and the rotor shaft (8) passes through the holes at intervals.

10. A rotating and lifting sample stage according to claim 9, characterized in that: It also includes a vacuum chamber, with the flange connected to the upper wall of the vacuum chamber, and the rotor shaft extending into the vacuum chamber, such that the sample stage body is located within the vacuum chamber.

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