Airflow control device for silicon carbide induction crystal growth

Abstract

The utility model discloses an airflow control device for silicon carbide induction crystal growth, which belongs to the field of airflow control devices and comprises a workbench, an installation plane is arranged on the workbench, and an airflow control box, a sliding rail and a connecting plate are sequentially arranged on the installation plane of the workbench. According to the airflow control device for growth of the silicon carbide induction crystal, the ball head can move in the direction of the air pipe through the arranged flattening component so as to flatten the air pipe, the situation that air supply is insufficient due to the fact that the air pipe is bent and wrinkled can be effectively prevented, and the service life of the air pipe is prolonged. The smoothness of airflow in the air pipe can be improved, a lower pressing piece and a third electric air cylinder can make contact with the air pipe by starting a second electric air cylinder and a third electric air cylinder correspondingly, and the flattening effect on the air pipe can be further improved.

Description

Technical Field

[0001] This utility model belongs to the field of airflow control devices, specifically relating to an airflow control device for silicon carbide induction crystal growth. Background Technology

[0002] Most semiconductor integrated circuit crystals are grown using the physical vapor transport (PVT) method. The basic principle of crystal growth is to place the raw material at the bottom of a graphite crucible and heat the crucible using the skin effect through an induction coil. Once a certain temperature is reached, the raw material decomposes into gas and volatilizes to the seed crystal area at the top of the crucible. After a series of chemical reactions, SiC is generated and crystallizes on the surface of the seed crystal through a certain axial and radial temperature gradient to obtain single-crystal silicon carbide with a certain structure.

[0003] When silicon carbide crystals are grown in a growth furnace, a certain gas pressure is often introduced into the growth furnace and a certain temperature is applied externally to promote the growth of silicon carbide crystals. When supplying gas to the growth furnace, the airflow control box is commonly used. The airflow control box is connected to the air pipe, which is connected to the growth furnace. However, when the air pipe is bent or wrinkled, it will lead to insufficient gas supply, which urgently needs to be improved.

[0004] This invention attempts to mitigate or at least alleviate such problems or defects by providing new or otherwise improved airflow control devices. Utility Model Content

[0005] In view of one or more of the above-mentioned defects or improvement needs of the prior art, the present invention provides an airflow control device for silicon carbide induction crystal growth, which has the advantage of effectively preventing the air pipe from bending and wrinkling, thus preventing insufficient air supply.

[0006] To achieve the above objectives, this utility model provides an airflow control device for silicon carbide inductive crystal growth, which includes a worktable with a mounting plane, and an airflow control box, a slide rail, and a connecting plate are sequentially arranged on the mounting plane of the worktable.

[0007] An air tube is detachably installed at the air outlet of the airflow control box, and the air tube can pass through the workbench.

[0008] The first electric cylinder is detachably mounted on the connecting plate;

[0009] A flattening member is slidably arranged on the slide rail and connected to the output end of the first electric cylinder. The flattening member can be passed through the air pipe and is used to perform continuous flattening operations on the air pipe.

[0010] As a further improvement of this utility model, the flattening component includes

[0011] A base plate is slidably mounted on the slide rail, and a drive motor is detachably mounted on the base plate.

[0012] A support frame is detachably mounted on the base plate. A drive roller is rotatably mounted inside the support frame, and the drive roller is detachably connected to the output end of the drive motor.

[0013] A drive wheel is detachably mounted on the drive roller, and a belt is removably fitted onto the drive wheel;

[0014] A drive shaft is rotatably mounted within the support frame. A driven wheel is detachably mounted on the drive shaft and can be wound around by the belt. A ball head is rotatably mounted on one end of the drive shaft.

[0015] As a further improvement of this utility model, a notch is provided on the support frame, and the air tube can pass through the notch.

[0016] As a further improvement of this utility model, a second electric cylinder can be detachably installed within the notch of the support frame, and a pressure plate can be detachably installed on the output end of the second electric cylinder.

[0017] As a further improvement of this utility model, a guide frame can be detachably installed on the support frame, a third electric cylinder can be detachably arranged on the guide frame, and an upper pressure plate can be detachably arranged on the output end of the third electric cylinder.

[0018] As a further improvement of this utility model, a flattening gap is formed between the lower pressure plate and the upper pressure plate, through which an air supply pipe passes.

[0019] As a further improvement of this utility model, both the lower pressure plate and the upper pressure plate are arc-shaped, and a rubber pad is detachably installed inside both the lower pressure plate and the upper pressure plate, and the diameter of the rubber pad is adapted to the diameter of the lower pressure plate and the upper pressure plate.

[0020] As a further improvement of this utility model, a slider can be detachably installed at the bottom of the base plate, and the slider can slide on the slide rail.

[0021] In summary, the beneficial effects of the above-described technical solutions conceived by this utility model compared with the prior art include:

[0022] This utility model discloses an airflow control device for silicon carbide induction crystal growth. Through the arrangement of flattening components, the operator first activates a drive motor to rotate the drive wheel. The rotation of the drive wheel then rotates the drive shaft, which in turn rotates the ball head. Activating the first electric cylinder pushes the flattening component to the right, causing the ball head to move along the direction of the air tube, thus flattening the air tube. This effectively prevents insufficient air supply due to bending or wrinkling of the air tube and improves the smoothness of airflow within the air tube. Activating the second and third electric cylinders respectively brings the lower pressure plate and the third electric cylinder into contact with the air tube, further enhancing the flattening effect. When the lower pressure plate and the third electric cylinder are pushed by the first electric cylinder, the flattened length of the air tube is increased. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of the airflow control device for silicon carbide inductive crystal growth according to this utility model;

[0024] Figure 2 This is a schematic diagram of the airflow control device for silicon carbide inductive crystal growth, viewed from another angle.

[0025] Figure 3 This is a top view of the airflow control device for silicon carbide inductive crystal growth according to the present invention;

[0026] Figure 4 This is a schematic diagram of the overall structure of the flattening component of this utility model;

[0027] Figure 5 This is an exploded view of the flattening component of this utility model.

[0028] In all the accompanying drawings, the same reference numerals denote the same technical features, specifically: 1. Workbench; 2. Airflow control box; 3. Air pipe; 4. Slide rail; 41. Connecting plate; 42. First electric cylinder; 5. Flattening component; 51. Base plate; 52. Drive motor; 53. Support frame; 54. Drive roller; 55. Drive wheel; 56. Belt; 57. Drive shaft; 58. Driven wheel; 59. Ball head; 591. Second electric cylinder; 592. Lower pressure plate; 593. Guide frame; 594. Third electric cylinder; 595. Upper pressure plate. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0031] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0032] In the embodiments, by Figure 1-5 Provided is an airflow control device for silicon carbide inductive crystal growth, wherein, Figure 1 This is a schematic diagram of the overall structure of the airflow control device for silicon carbide inductive crystal growth according to this utility model; Figure 2 This is a schematic diagram of the airflow control device for silicon carbide inductive crystal growth, viewed from another angle. Figure 3 This is a top view of the airflow control device for silicon carbide inductive crystal growth according to the present invention; Figure 4 This is a schematic diagram of the overall structure of the flattening component of this utility model;

[0033] Figure 5 This is an exploded view of the flattening component of this utility model, which includes a workbench 1 with a mounting plane. On the mounting plane of the workbench 1, an airflow control box 2, a slide rail 4, and a connecting plate 41 are sequentially arranged; an air pipe 3 is detachably installed at the air outlet of the airflow control box 2 and can pass through the workbench 1; a first electric cylinder 42 is detachably installed on the connecting plate 41; and a flattening component 5 is slidably arranged on the slide rail 4 and connected to the output end of the first electric cylinder 42. The flattening component 5 can be passed through the air pipe 3 and is used to perform continuous flattening operations on the air pipe 3.

[0034] The overall concept of this utility model is as follows: through the arrangement of the flattening component 5, the operator first turns on the drive motor 52 to drive the drive wheel 55 to rotate. When the drive wheel 55 rotates, it drives the drive shaft 57 to rotate. When the drive shaft 57 rotates, it drives the ball head 59 to rotate. Turning on the first electric cylinder 42 pushes the flattening component 5 to move to the right, so that the ball head 59 moves along the direction of the air pipe 3 to flatten the air pipe 3. This effectively prevents the air pipe 3 from bending and wrinkling, which would lead to insufficient air supply. It also improves the smoothness of airflow in the air pipe 3. By turning on the second electric cylinder 591 and the third electric cylinder 594 respectively, the lower pressing plate 592 and the third electric cylinder 594 can be brought into contact with the air pipe 3, which can further improve the flattening effect of the air pipe 3. When the lower pressing plate 592 and the third electric cylinder 594 are pushed by the first electric cylinder 42, the flattening length of the air pipe 3 can be increased.

[0035] Next, a more specific structure and construction of the flattening component 5 will be given for further explanation. The flattening component 5 includes a base plate 51, which is slidably arranged on the slide rail 4, and a drive motor 52 is detachably arranged on the base plate 51; a support frame 53, which is detachably arranged on the base plate 51, and a drive roller 54 is rotatably arranged in the support frame 53, and the drive roller 54 is detachably connected to the output end of the drive motor 52; a drive wheel 55, which is detachably arranged on the drive roller 54, and a belt 56 is removably sleeved on the drive wheel 55; a drive shaft 57, which is rotatably arranged in the support frame 53, and a driven wheel 58 is detachably arranged on the drive shaft 57, and the driven wheel 58 can be bypassed by the belt 56; a ball head 59 is rotatably arranged on one end of the drive shaft 57.

[0036] Next, the working principle of the flattening component 5 will be further explained. The operator first turns on the drive motor 52 to drive the drive wheel 55 to rotate. When the drive wheel 55 rotates, it drives the drive shaft 57 to rotate. When the drive shaft 57 rotates, it drives the ball head 59 to rotate. Turning on the first electric cylinder 42 pushes the flattening component 5 to move to the right, so that the ball head 59 moves along the direction of the air pipe 3 to flatten the air pipe 3. This can effectively prevent the air pipe 3 from bending and wrinkling, which would result in insufficient air supply. It can also improve the smoothness of airflow in the air pipe 3. By turning on the second electric cylinder 591 and the third electric cylinder 594 respectively, the lower pressing plate 592 and the third electric cylinder 594 can be brought into contact with the air pipe 3, which can further improve the flattening effect of the air pipe 3. When the lower pressing plate 592 and the third electric cylinder 594 are pushed by the first electric cylinder 42, the flattening length of the air pipe 3 can be increased.

[0037] In some embodiments, in order to facilitate the passage of the air pipe 3 through the support frame 53, a notch is provided on the support frame 53, and the notch allows the air pipe 3 to pass through.

[0038] In some embodiments, more specifically, in order to enable the flattening member 5 to flatten the air pipe 3 from below, a second electric cylinder 591 is detachably installed in the notch of the support frame 53, and a pressure plate 592 is detachably installed on the output end of the second electric cylinder 591.

[0039] In some embodiments, in order to facilitate the flattening member 5 to flatten the air pipe 3 from above, a guide frame 593 is detachably installed on the support frame 53, a third electric cylinder 594 is detachably arranged on the guide frame 593, and an upper pressure plate 595 is detachably arranged on the output end of the third electric cylinder 594.

[0040] In some embodiments, more specifically, a flattening gap is formed between the lower pressure plate 592 and the upper pressure plate 595 through which the air supply pipe 3 passes.

[0041] In some embodiments, in order to further reduce the pressure of the lower pressure plate 592 and the upper pressure plate 595 on the air tube 3, both the lower pressure plate 592 and the upper pressure plate 595 are arc-shaped, and a rubber pad is detachably installed inside both the lower pressure plate 592 and the upper pressure plate 595, and the diameter of the rubber pad is adapted to the diameter of the lower pressure plate 592 and the upper pressure plate 595.

[0042] In some embodiments, more specifically in order to enable the base plate 51 to slide more smoothly on the slide rail 4, a slider can be detachably installed at the bottom of the base plate 51, and the slider can slide on the slide rail 4.

[0043] In summary, through the flattening component 5, the operator first turns on the drive motor 52 to drive the drive wheel 55 to rotate. When the drive wheel 55 rotates, it drives the drive shaft 57 to rotate. When the drive shaft 57 rotates, it drives the ball head 59 to rotate. Turning on the first electric cylinder 42 pushes the flattening component 5 to move to the right, allowing the ball head 59 to move along the direction of the air pipe 3 to flatten the air pipe 3. This effectively prevents the air pipe 3 from bending or wrinkling, thus preventing insufficient air supply and improving the smoothness of airflow within the air pipe 3. By turning on the second electric cylinder 591 and the third electric cylinder 594 respectively, the lower pressing plate 592 and the third electric cylinder 594 can be brought into contact with the air pipe 3, further improving the flattening effect on the air pipe 3. When the lower pressing plate 592 and the third electric cylinder 594 are pushed by the first electric cylinder 42, the flattening length of the air pipe 3 can be increased.

[0044] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An airflow control device for silicon carbide inductive crystal growth, characterized in that, It includes A workbench (1) has an installation surface, on which an airflow control box (2), a slide rail (4), and a connecting plate (41) are sequentially arranged. The air pipe (3) is detachably installed at the air outlet of the airflow control box (2) and the air pipe (3) can pass through the workbench (1); The first electric cylinder (42) is detachably mounted on the connecting plate (41); The flattening member (5) is slidably arranged on the slide rail (4) and is connected to the output end of the first electric cylinder (42). The flattening member (5) can be passed through the air pipe (3) and is used to perform continuous flattening operation on the air pipe (3).

2. The airflow control device for silicon carbide inductive crystal growth according to claim 1, characterized in that, The flattening component (5) includes A base plate (51) is slidably mounted on the slide rail (4), and a drive motor (52) is detachably mounted on the base plate (51). The support frame (53) is detachably mounted on the base plate (51). A drive roller (54) is rotatably mounted inside the support frame (53), and the drive roller (54) is detachably connected to the output end of the drive motor (52). A drive wheel (55) is detachably mounted on the drive roller (54), and a belt (56) is removably fitted onto the drive wheel (55). A drive shaft (57) is rotatably mounted inside the support frame (53). A driven wheel (58) is detachably mounted on the drive shaft (57) and can be bypassed by the belt (56). A ball head (59) is rotatably mounted on one end of the drive shaft (57).

3. The airflow control device for silicon carbide inductive crystal growth according to claim 2, characterized in that, A notch is provided on the support frame (53), and the air tube (3) can pass through the notch.

4. The airflow control device for silicon carbide inductive crystal growth according to claim 2, characterized in that, A second electric cylinder (591) is detachably installed in the notch of the support frame (53), and a pressure plate (592) is detachably installed on the output end of the second electric cylinder (591).

5. The airflow control device for silicon carbide inductive crystal growth according to claim 4, characterized in that, A guide frame (593) is detachably mounted on the support frame (53), a third electric cylinder (594) is detachably mounted on the guide frame (593), and an upper pressure plate (595) is detachably mounted on the output end of the third electric cylinder (594).

6. The airflow control device for silicon carbide inductive crystal growth according to claim 5, characterized in that, A flattening gap is formed between the lower pressure plate (592) and the upper pressure plate (595), through which the air supply pipe (3) passes.

7. The airflow control device for silicon carbide inductive crystal growth according to claim 6, characterized in that, Both the lower pressure plate (592) and the upper pressure plate (595) are arc-shaped. A rubber pad is detachably installed inside both the lower pressure plate (592) and the upper pressure plate (595), and the diameter of the rubber pad is compatible with the diameter of the lower pressure plate (592) and the upper pressure plate (595).

8. The airflow control device for silicon carbide inductive crystal growth according to claim 2, characterized in that, A slider is detachably mounted on the bottom of the base plate (51), and the slider is able to slide on the slide rail (4).

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