Test system of power device

Abstract

The utility model provides a test system for a power device, and the system comprises power equipment which is used for applying high-voltage excitation between a source electrode and a drain electrode of the power device; the semiconductor parameter analyzer is used for applying bias voltage to the grid electrode of the power device; the oscilloscope is combined with the current probe to measure the drain current of the power device; and the upper computer is used for controlling the working time sequence of the power supply equipment and the semiconductor parameter analyzer so as to realize the scanning test of the device parameters. By combining the high-voltage power supply, the oscilloscope and the general semiconductor parameter analyzer, the performance of the power device under different voltage and current conditions can be comprehensively evaluated, the reliability and stability of the device in practical application are ensured, and the test cost is also considered.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor device testing technology, and specifically to a testing system for power devices. Background Technology

[0002] With the continuous development of semiconductor technology, ultra-high voltage (UHV) semiconductor devices have been widely used in power electronics, new energy vehicles, industrial automation, and other fields. However, UHV devices often operate in harsh environments and under complex conditions. Therefore, accurate characterization of UHV device performance has a crucial impact on chip design, and accurate testing is the foundation of device performance characterization. Since these ultra-high voltage devices typically need to withstand high voltage and high current, higher requirements are placed on their testing techniques. Utility Model Content

[0003] To address the aforementioned technical issues, this disclosure provides a power device testing system. By combining a high-voltage power supply, an oscilloscope, and a general-purpose semiconductor parameter analyzer, it can comprehensively evaluate the performance of power devices under different voltage and current conditions (including saturation voltage and saturation current), ensuring the reliability and stability of the devices in practical applications. Simultaneously, it also considers testing costs.

[0004] This disclosure provides a testing system for power devices, including:

[0005] Power supply equipment used to apply high voltage excitation between the source and drain of power devices;

[0006] A semiconductor parameter analyzer is used to apply a bias voltage to the gate of the power device;

[0007] An oscilloscope, combined with a current probe, is used to measure the drain current of the power device; and

[0008] The host computer is used to control the working timing of the power supply equipment and the semiconductor parameter analyzer to realize the scanning test of the device parameters.

[0009] Optionally, the ground terminal of the power supply device is connected to the ground terminal of the semiconductor parameter analyzer.

[0010] Optionally, the upper limit of the voltage of the power supply device is greater than the upper limit of the voltage reached by the semiconductor parameter analyzer when measuring the drain saturation current of the power device.

[0011] Optionally, the power supply device can apply a high voltage excitation of 40V or more, and the oscilloscope combined with the current probe can measure a drain current of 125mA or more.

[0012] Optionally, the host computer is connected to the power supply device and the semiconductor parameter analyzer via a GPIB cable, and automated testing is achieved using LabVIEW software.

[0013] Optionally, the host computer also includes a control interface for setting the initial value, end value and scan step size of the bias voltage to achieve comprehensive testing of the power device.

[0014] Optionally, the models of the power supply equipment and the semiconductor parameter analyzer can be replaced according to the characteristics of the device under test to adapt to the testing needs of different types of power devices.

[0015] Optionally, the power supply device and the semiconductor parameter analyzer are synchronously controlled by the host computer to ensure timing consistency during the test process.

[0016] Optionally, the semiconductor parameter analyzer has a multi-channel input function, enabling it to simultaneously measure the parameters of multiple power devices.

[0017] Optionally, the testing system further includes a data storage device for storing test data, the data storage device being communicatively connected to the host computer.

[0018] One of the above technical solutions has the following unexpected technical effect:

[0019] By applying a voltage to the gate using a semiconductor parameter analyzer, the gate voltage (Vgs) can be precisely controlled, thereby accurately adjusting the conduction state of the device under test (DUT). Testing the gate-source current (Igs) helps understand the leakage characteristics of the device under different gate voltages, ensuring the device's performance stability and reliability when the gate voltage varies. Gate-source current testing is essential in the initial testing and parameter tuning of devices, helping engineers evaluate the device's gate control capability and gate insulation performance.

[0020] By applying a voltage to the drain of the device under test (DUT) using a high-voltage power supply, the high-voltage environment in actual operation can be simulated, ensuring that the test conditions match the actual application conditions. This helps to comprehensively evaluate the device's performance under high voltage, especially its withstand voltage and breakdown voltage. In high-voltage applications, such as power electronics and high-voltage drivers, drain high-voltage testing is a critical step in ensuring device reliability. The use of high-voltage power supplies allows for a wider testing range, covering the entire operating voltage range of the device.

[0021] An oscilloscope combined with a current probe can measure drain current (Ids) in real time with high precision, especially under high-voltage conditions where conventional test instruments may not provide sufficient measurement range or accuracy. This method can capture transient changes and fluctuations in current, providing more detailed test data. During testing, drain current measurement is a crucial indicator for evaluating the operating status and performance of devices under high voltage. The high bandwidth and high resolution of an oscilloscope allow it to detect minute changes in current, which is extremely useful for analyzing the dynamic behavior of devices under high voltage.

[0022] The use of high-voltage power supplies expands the range of test voltages, enabling testing to cover device performance at higher voltages. This is crucial for evaluating device operating characteristics under extreme conditions, especially when the voltage limits of conventional test instruments are insufficient. In some applications, devices may need to operate at voltages exceeding the limits of conventional test instruments. Using high-voltage power supplies ensures the integrity and reliability of testing, preventing the omission of critical performance data due to insufficient test range.

[0023] Connecting the power supply's ground terminal to the semiconductor parameter analyzer's ground terminal ensures that their ground potentials are consistent. In high-voltage and high-current testing, inconsistent ground potentials can lead to measurement errors and even damage to the test equipment. Grounding connections effectively reduce such errors, improving test accuracy and reliability. Grounding connections also reduce noise interference between ground wires, ensuring the purity of the test signal. Furthermore, grounding connections simplify the test system's connections, reducing the number of grounding points that need to be managed. This not only makes the test system more streamlined but also reduces the complexity and potential failure points caused by excessive grounding points.

[0024] In some optional embodiments, connecting the computer to semiconductor parameter analyzers, oscilloscopes, and power supplies via a Universal Graphics Interface Bus (GPIB) enables automation of the testing process. The computer can control the parameter settings, test execution, and data logging of each instrument, significantly reducing the steps and time required for manual operation. Automated testing avoids errors inherent in human operation, ensuring accuracy and consistency. The computer can flexibly control test parameters and procedures through programming, adapting to different types of UHV devices and varying testing requirements. The computer can monitor and adjust test parameters in real time, ensuring precise control of test conditions, thereby improving the accuracy and reliability of test results.

[0025] Furthermore, by setting the voltage at each port and the initial and final values ​​of the scan voltage, as well as the scan step size, voltage changes during the test can be precisely controlled, ensuring thorough testing of UHV devices under different voltage conditions. Setting a reasonable scan range and step size ensures the comprehensiveness and completeness of the test data, covering the performance of UHV devices under different operating voltages. Automated voltage setting and scanning processes reduce test time and complexity, making testing more efficient and convenient. The computer can automatically record test data, perform data processing and analysis, and generate detailed test reports, facilitating subsequent research and optimization.

[0026] It should be noted that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this disclosure. Attached Figure Description

[0027] Figure 1 A schematic diagram of the structure of a test system for power devices according to an embodiment of the present disclosure is shown.

[0028] Figure 2 A schematic flowchart of a test method for a power device according to an embodiment of the present disclosure is shown. Detailed Implementation

[0029] To facilitate understanding of this disclosure, a more complete description will now be given with reference to the accompanying drawings, which illustrate preferred embodiments of the present disclosure. However, this disclosure may be implemented in various forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure.

[0030] In related technologies, UHV devices, due to their unique application environment, are often large in size, which means their idsat (saturation current) is often very large, typically reaching several hundred mA or even higher; furthermore, their characteristics also determine that their saturation voltage is often large. Therefore, this poses significant challenges to testing instruments and methods. Currently, the commonly used semiconductor parameter analyzer Keysight B1500 is equipped with a high-power power supply / measurement unit (hpsmu module), which can measure a maximum current of 500mA when the output voltage is less than 40V. However, for UHV devices, 40V may not even be within the saturation region, and when the output voltage is greater than 40V, the maximum test current is only 125mA, far less than the saturation current of UHV devices. Therefore, while Keysight B1500 can usually accurately and completely test the DC and CV characteristics of most devices, it cannot accurately and completely test UHV devices. On the other hand, testing equipment such as Keysight B1505, typically used for ultra-high voltage testing, is very expensive, and purchasing Keysight B1505 is extremely cost-effective if testing needs are limited. These issues often result in inaccurate and incomplete testing of UHV devices, severely limiting their application in high-precision circuit designs and even affecting chip functionality.

[0031] To address the aforementioned technical issues, this disclosure provides a power device testing system. By combining a high-voltage power supply, an oscilloscope, and a general-purpose semiconductor parameter analyzer, it can comprehensively evaluate the performance of power devices under different voltage and current conditions (including saturation voltage and saturation current), ensuring the reliability and stability of the devices in practical applications. Simultaneously, it also considers testing costs.

[0032] Figure 1 A schematic diagram of the structure of a test system according to an embodiment of this disclosure is shown.

[0033] like Figure 1 As shown, the test system of this embodiment includes: a power supply device 100, a semiconductor parameter analyzer 200, an oscilloscope 300, and a host computer 400.

[0034] The positive terminal of the power supply device 100 is connected to the drain D of the power device 10, and the negative terminal is connected to the source S of the power device 10. The semiconductor parameter analyzer 200 is connected to the gate G of the power device 10. The ground terminal of the power supply device 100 and the ground terminal of the semiconductor parameter analyzer 200 are connected; for example, the ground terminals of both the power supply device 100 and the semiconductor parameter analyzer 200 are connected to reference ground GND. The power supply device 100 and the semiconductor parameter analyzer 200 are connected to the host computer 400 via a General Purpose Interface Bus (GPIB) 500. The power supply device 100 is used to apply a high-voltage excitation between the source S and drain D of the power device 10. The semiconductor parameter analyzer 200 is used to apply a bias voltage to the gate G of the power device 10. Preferably, the semiconductor parameter analyzer 200 has a multi-channel input function, enabling simultaneous measurement of parameters of multiple power devices. An oscilloscope 300, combined with a current probe, is used to measure the drain current of the power device 10. Preferably, the oscilloscope 300 and the current probe are connected via an adjustable connection device to adapt to the needs of different testing environments. A host computer 400 is used to control the operating timing of the power supply device 100 and the semiconductor parameter analyzer 200 to achieve device parameter scanning testing. The upper voltage limit of the power supply device 100 is greater than the upper voltage limit reached by the semiconductor parameter analyzer 200 when measuring the drain saturation current of the power device 100. Specifically, the high-voltage excitation voltage applied by the power supply device 100 can reach above 40V, and the drain current measurement range can reach above 125mA.

[0035] In some specific embodiments, the power supply device 100 is, for example, a programmable power supply, such as the IT6933A. The semiconductor parameter analyzer 200 is a Keysight B1500. Since the gate voltage and current are relatively small when testing the power device 10, the gate G of the power device 10 can be connected to the four-way port of any SMU module in the Keysight B1500, the drain D of the power device 10 can be connected to the positive terminal of the IT6933A, and the source S can be connected to the negative terminal of the IT6933A. This ensures that the output voltage of the IT6933A is Vds (drain-source voltage). Because this test system uses two instruments, the Keysight B1500 and the IT6933A, to apply the excitation, it is important to ensure a good connection between the grounding terminals of the two instruments to guarantee that the output voltage of the Keysight B1500 is the Vgs (gate-source voltage) applied to the device. Although the power supply device 100 can provide hundreds of volts, it can only apply voltage excitation and cannot measure current. Therefore, it is necessary to combine it with an oscilloscope 300 connected to the drain D connection line of the power device 10 through a current probe to measure the drain D current. However, the embodiments disclosed herein are not limited to this, and those skilled in the art can make other settings for the power supply device 100 and the semiconductor parameter analyzer 200 as needed.

[0036] Furthermore, to make testing more efficient and save testing time, the host computer 400 is connected to the power supply device 100 and the semiconductor parameter analyzer 200 via a GPIB cable 500, and uses LabVIEW software to realize automated testing. The host computer 400 also serves as a control interface for setting the initial and final values ​​of the bias voltage and the scan step size, so as to achieve comprehensive testing of the power devices. The power supply device 100 and the semiconductor parameter analyzer 200 are synchronously controlled by the host computer 400 to ensure timing consistency during the testing process.

[0037] Furthermore, the testing system also includes a data storage device for storing test data, which is communicatively connected to the host computer 400.

[0038] Figure 2 A schematic flowchart of a test method for a power device according to an embodiment of the present disclosure is shown.

[0039] In step S01, confirm that all instruments are communicating normally and initialize them.

[0040] In step S02, the initial voltages of each port are acquired and initial energization is applied. In this step, the initial voltage values ​​of each port are pre-set according to the test requirements and device characteristics. These initial voltage values ​​are typically defined in the test plan or test configuration file to ensure test consistency and repeatability. These pre-set initial voltage values ​​are applied to the corresponding ports (e.g., gate G, source S, drain D) of the power device 10 using the power supply device 100 and the semiconductor parameter analyzer 200. Initial energization ensures that the device is in a known and stable state at the start of the test, thus providing a reference for subsequent test steps.

[0041] In step S03, a port voltage is applied. In this step, a corresponding test voltage is applied to the power device 10 according to the test requirements and the characteristics of the device.

[0042] In step S04, the oscilloscope measures the current.

[0043] In step S05, it is determined whether the test is complete. If the result is no, return to step S03; if the result is yes, the test ends. In this step, it is confirmed whether all voltage and current parameters that need to be tested have been applied and measured. For example, whether the stepwise test from 0V to the maximum test voltage has been completed, and whether the corresponding current value has been measured at each voltage point.

[0044] It should be noted that the numerical values ​​in this article are for illustrative purposes only. In other embodiments of this disclosure, other numerical values ​​may be sampled to implement this solution. The specific values ​​should be reasonably set according to the actual situation, and this disclosure does not limit them.

[0045] Finally, it should be noted that the above embodiments are merely examples for clearly illustrating this disclosure and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of this disclosure.

[0046] It should also be understood that the terminology and expressions used herein are for descriptive purposes only, and one or more embodiments described herein should not be limited to these terms and expressions. The use of these terms and expressions does not exclude any illustrative and descriptive equivalent features (or parts thereof), and it should be recognized that various modifications that may exist should also be included within the scope of the claims. Other modifications, variations, and substitutions may also exist. Accordingly, the claims should be considered to cover all such equivalents.

Claims

1. A testing system for power devices, characterized in that, include: Power supply equipment used to apply high voltage excitation between the source and drain of power devices; A semiconductor parameter analyzer is used to apply a bias voltage to the gate of the power device; An oscilloscope, combined with a current probe, is used to measure the drain current of the power device; as well as The host computer is used to control the working timing of the power supply equipment and the semiconductor parameter analyzer to realize the scanning test of the device parameters.

2. The testing system according to claim 1, characterized in that, The grounding terminal of the power supply device is connected to the grounding terminal of the semiconductor parameter analyzer.

3. The testing system according to claim 1, characterized in that, The upper voltage limit of the power supply device is greater than the upper voltage limit reached by the semiconductor parameter analyzer when measuring the drain saturation current of the power device.

4. The testing system according to claim 1, characterized in that, The power supply device can apply a high voltage excitation of 40V or more, and the oscilloscope combined with the current probe can measure a drain current of 125mA or more.

5. The testing system according to any one of claims 1 to 4, characterized in that, The host computer is connected to the power supply device and the semiconductor parameter analyzer via a GPIB cable, and uses LabVIEW software to achieve automated testing.

6. The testing system according to any one of claims 1 to 4, characterized in that, The host computer also includes a control interface for setting the initial value, end value and scan step size of the bias voltage, so as to realize comprehensive testing of the power device.

7. The testing system according to any one of claims 1 to 4, characterized in that, The models of the power supply equipment and the semiconductor parameter analyzer can be replaced according to the characteristics of the device under test to adapt to the testing needs of different types of power devices.

8. The testing system according to any one of claims 1 to 4, characterized in that, The power supply and the semiconductor parameter analyzer are synchronously controlled by the host computer to ensure timing consistency during the testing process.

9. The testing system according to any one of claims 1 to 4, characterized in that, The semiconductor parameter analyzer has a multi-channel input function and can simultaneously measure the parameters of multiple power devices.

10. The testing system according to any one of claims 1 to 4, characterized in that, The testing system also includes a data storage device for storing test data, which is communicatively connected to the host computer.

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