Transportation device for sheet materials
By using air-blowing suspension technology, the problems of contact damage and stress damage to fragile thin sheets during transportation have been solved, achieving contactless and pollution-free protection for thin sheet transportation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-20
- Publication Date
- 2026-04-14
AI Technical Summary
In the semiconductor industry, fragile thin sheets such as wafers and solar cells are easily damaged during transportation due to contact with suction cups or plates. Furthermore, manual handling cannot control stress, leading to product damage.
The gas is supplied to the positioner inside the housing frame by an air source component through an air blowing method, so that the sheet is suspended between the housing frame and the limiting plate, avoiding contact with the suction cup. The opening and closing of the air passage is controlled by a control component to achieve the suspension and transportation of the sheet.
It effectively protects the surface of the sheet from contamination and avoids breakage caused by uneven stress, thus achieving a safe and contactless transportation process.
Smart Images

Figure CN224124555U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the semiconductor industry, specifically to a transport device for thin sheet materials. Background Technology
[0002] Currently, in the semiconductor industry, there are some highly demanding and fragile thin sheets, such as wafers and solar cells. These play an extremely important role in the industry, and their transportation requires very high standards due to their material properties and manufacturing processes.
[0003] Currently, in the processing workshop, for these fragile thin sheets, operators usually wear clean gloves and use a vacuum suction device to pick up the edges of the sheets to prevent them from slipping during handling, thus allowing for small-scale transfer of the sheets.
[0004] However, when suction cups or suction plates come into close contact with thin sheets, they may damage the product surface and contaminate the product. At the same time, manual handling cannot control the magnitude of stress, making the product prone to damage. Utility Model Content
[0005] Based on this, the purpose of this utility model is to provide a conveying device for thin sheet materials, which aims to solve the problems that when suction cups or suction plates are in close contact with thin sheets, the surface of the product may be damaged, thus contaminating the product. At the same time, manual handling cannot control the stress, making the product easily damaged.
[0006] To achieve the above objectives, this utility model provides the following technical solution: a conveying device for sheet materials, the conveying device for sheet materials comprising a power component, a control component connected to the power component, and a conveying component for conveying sheet materials;
[0007] The power assembly includes an air source and an air passage for connecting the control assembly and the transport assembly;
[0008] The transport assembly includes a housing frame, a limiting plate disposed on the inner wall of the housing frame, and an air inlet connected to the air passage pipe;
[0009] The receiving frame has at least two positioning members on the side away from the limiting plate. The positioning members blow air onto the sheet and control the opening and closing of the air passage through the control component, so that the sheet is suspended between the receiving frame and the limiting plate.
[0010] In summary, the sheet material transport device proposed in this utility model utilizes an air source to supply gas to the positioners within the receiving frame. The blown gas suspends the sheet between the receiving frame and the limiting plate, preventing the sheet from contacting the suction cup or suction plate, isolating it from contamination sources, and avoiding uneven stress that could cause breakage. This achieves the goals of protecting the sheet and facilitating transport. Specifically, the power assembly includes an air source and an air passage connecting the control assembly and the transport assembly. The transport assembly includes a receiving frame, a limiting plate disposed on the inner wall of the receiving frame, and an air inlet connecting the air passage. At least two positioning members are provided on the side of the receiving frame away from the limiting plate. These positioning members blow air onto the sheet, and the control assembly controls the opening and closing of the air passage to suspend the sheet between the receiving frame and the limiting plate.
[0011] According to one aspect of the above technical solution, the receiving frame includes a connecting plate and clamps symmetrically arranged on both sides of the connecting plate, the center of the connecting plate being used to connect the air inlet.
[0012] According to one aspect of the above technical solution, at least two of the positioning elements are symmetrically arranged at the center of the connecting plate.
[0013] According to one aspect of the above technical solution, the clamping plate includes a support plate vertically connected to the connecting plate, and a protective plate disposed at the end of the support plate away from the connecting plate, wherein the protective plate, the limiting plate, and the connecting plate are arranged in parallel.
[0014] According to one aspect of the above technical solution, the support plate, the limiting plate, and the protective plate form a protective space for accommodating the edge of the sheet, and the protective space is provided with a flexible layer inside.
[0015] According to one aspect of the above technical solution, the distance between the limiting plates symmetrically arranged on both sides of the receiving frame is less than the diameter of the sheet, and the diameter of the sheet is less than the distance between the two supporting plates.
[0016] According to one aspect of the above technical solution, the distance between the symmetrically arranged limiting plates is not less than the distance between the symmetrically arranged protective plates.
[0017] According to one aspect of the above technical solution, the control component includes a first control component near the gas source component, a second control component near the receiving frame, and an energy storage component disposed between the first control component and the second control component, wherein the first control component, the second control component, and the energy storage component are connected in sequence through a gas pipeline.
[0018] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the structure of a conveying device for sheet materials in one embodiment of the present invention;
[0020] Figure 2 This is a schematic diagram of the structure of the transport component in one embodiment of the present invention;
[0021] Figure 3 for Figure 2 Enlarged diagram of point A in the middle.
[0022] Component symbol explanation in the attached diagram:
[0023] Power assembly 100, air source component 110, air pipeline 120, control assembly 200, first control component 210, second control component 220, energy storage component 230, transport assembly 300, housing frame 310, connecting plate 311, clamping plate 312, support plate 313, protection plate 314, flexible layer 315, limiting plate 320, air inlet 330, positioning component 340, sheet 400. Detailed Implementation
[0024] To make the objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described in detail below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of this utility model more thorough and complete.
[0025] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," "upper," "lower," and similar expressions used herein are for illustrative purposes only and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
[0026] In this utility model, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items.
[0027] Please see Figures 1-3 The diagram shows a structural schematic of a sheet material transport device provided in one embodiment of the present invention. The sheet material transport device includes a power component 100, a control component 200 connected to the power component 100, and a transport component 300 for transporting the sheet material, wherein:
[0028] To replace the traditional method of operators wearing clean gloves and holding a vacuum suction device to pick up and transport the sheet 400, this embodiment provides a power assembly 100 that supports the sheet 400 by air blowing. The power assembly 100 includes an air source 110 and an air passage 120 for connecting the control assembly 200 and the transport assembly 300. The air passage 120 transmits gas to the transport assembly 300, causing the sheet 400 to suspend within the transport assembly 300, thereby avoiding direct contact with the sheet 400 and effectively preventing contamination.
[0029] To achieve the function of transporting the sheet 400, the transport assembly 300 includes a receiving frame 310, a limiting plate 320 disposed on the inner wall of the receiving frame 310, and an air inlet 330 connected to the air passage 120. The receiving frame 310 is disposed at the tail end of the air passage 120. By connecting the air inlet 330 to the air passage 120, air is blown into the receiving frame 310, thereby suspending the sheet 400 between the receiving frame 310 and the limiting plate 320.
[0030] Furthermore, the receiving frame 310 includes a connecting plate 311 and clamping plates 312 symmetrically arranged on both sides of the connecting plate 311. The center of the connecting plate 311 is used to connect the air inlet 330. At least two positioning members 340 are provided on the side of the receiving frame 310 away from the limiting plate 320, and the at least two positioning members 340 are symmetrically arranged at the center of the connecting plate 311, so that the sheet 400 is subjected to uniform force inside the receiving frame 310, and the sheet 400 is prevented from tilting and breaking under stress.
[0031] Furthermore, the clamping plate 312 includes a support plate 313 vertically connected to the connecting plate 311, and a protective plate 314 disposed at the end of the support plate 313 away from the connecting plate 311. The protective plate 314, the limiting plate 320, and the connecting plate 311 are arranged in parallel. The support plate 313, the limiting plate 320, and the protective plate 314 enclose a protective space for accommodating the edge of the sheet 400, and a flexible layer 315 is provided inside the protective space. When the sheet 400 is suspended in the protective space by air blowing, since the distance between the limiting plates 320 symmetrically arranged on both sides of the receiving frame 310 is less than the diameter of the sheet 400, the diameter of the sheet 400 is less than the distance between the two support plates 313, and the distance between the symmetrically arranged limiting plates 320 is not less than the distance between the symmetrically arranged protective plates 314, the sheet 400 will not move out of the protective space even during transportation, ensuring that it moves within the protective space.
[0032] Furthermore, since the supporting force provided by the air blowing is equal to the weight of the sheet 400, the vertical movement of the sheet 400 is minimized. Additionally, a flexible layer 315 is provided within the protective space to protect the sides of the sheet 400 from breakage due to impacts, while also preventing contact with the top and bottom surfaces of the sheet 400 to avoid damage to the product surface. Moreover, the transportable items of this device are not limited to the sheet 400; any material requiring transport can be used. The shape of the protective space formed by the support plate 313, the limiting plate 320, and the protective plate 314 to accommodate the edges of the sheet 400 can be designed and modified according to the material handling conditions. In other embodiments, this can be achieved using non-contact forces such as magnetic repulsion, flexible thrust such as springs to meet process requirements, or a combination of forces.
[0033] It is worth noting that, in order to support the sheet 400 by air blowing force, the control assembly 200 includes a first control member 210 near the air source member 110, a second control member 220 near the receiving frame 310, and an energy storage member 230 disposed between the first control member 210 and the second control member 220. The first control member 210, the second control member 220, and the energy storage member 230 are connected in sequence through the air passage 120.
[0034] The working process of this application is as follows: First, the first control component 210 is opened and the second control component 220 is closed. Air is supplied to the energy storage component 230 through the air source component 110 to realize the energy storage process and shorten the usage cycle. After the energy storage is completed, the second control component 220 is opened to supply air to the positioning component 340, so that the air blowing force and the gravity of the sheet 400 reach a balanced state, keeping it suspended, and then transporting it.
[0035] In summary, the sheet material transport device proposed in this utility model utilizes an air source to supply gas to the positioners within the receiving frame. The blown gas suspends the sheet between the receiving frame and the limiting plate, preventing the sheet from contacting the suction cup or suction plate, isolating it from contamination sources, and avoiding uneven stress that could cause breakage. This achieves the goals of protecting the sheet and facilitating transport. Specifically, the power assembly includes an air source and an air passage connecting the control assembly and the transport assembly. The transport assembly includes a receiving frame, a limiting plate disposed on the inner wall of the receiving frame, and an air inlet connecting the air passage. At least two positioning members are provided on the side of the receiving frame away from the limiting plate. These positioning members blow air onto the sheet, and the control assembly controls the opening and closing of the air passage to suspend the sheet between the receiving frame and the limiting plate.
[0036] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0037] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A conveying device for sheet materials, characterized in that, The sheet material transport device includes a power component, a control component connected to the power component, and a transport component for transporting the sheet material. The power assembly includes an air source and an air passage for connecting the control assembly and the transport assembly; The transport assembly includes a housing frame, a limiting plate disposed on the inner wall of the housing frame, and an air inlet connected to the air passage pipe; The receiving frame has at least two positioning members on the side away from the limiting plate. The positioning members blow air onto the sheet and control the opening and closing of the air passage through the control component, so that the sheet is suspended between the receiving frame and the limiting plate.
2. The conveying device for sheet materials according to claim 1, characterized in that, The housing frame includes a connecting plate and clamps symmetrically arranged on both sides of the connecting plate, with the center of the connecting plate used to connect the air inlet.
3. The conveying device for sheet materials according to claim 2, characterized in that, At least two of the positioning elements are symmetrically arranged at the center of the connecting plate.
4. The conveying device for sheet materials according to claim 3, characterized in that, The clamping plate includes a support plate vertically connected to the connecting plate, and a protective plate disposed at the end of the support plate away from the connecting plate. The protective plate, the limiting plate, and the connecting plate are arranged in parallel.
5. The conveying device for sheet materials according to claim 4, characterized in that, The support plate, the limiting plate, and the protective plate enclose a protective space for accommodating the edge of the sheet, and the protective space has a flexible layer inside.
6. The conveying device for sheet materials according to claim 1, characterized in that, The distance between the limiting plates symmetrically arranged on both sides of the receiving frame is less than the diameter of the sheet, and the diameter of the sheet is less than the distance between the two supporting plates.
7. The conveying device for sheet materials according to claim 6, characterized in that, The distance between the symmetrically arranged limiting plates is not less than the distance between the symmetrically arranged protective plates.
8. The conveying device for sheet materials according to claim 1, characterized in that, The control assembly includes a first control unit near the gas source, a second control unit near the receiving frame, and an energy storage unit disposed between the first control unit and the second control unit. The first control unit, the second control unit, and the energy storage unit are connected in sequence through a gas pipeline.