Spin coating instrument

Abstract

The utility model discloses a spin coater, which comprises a main machine provided with a spin coating pool with an opening at the top; the carrying assemblies are distributed in the spin-coating pool, each carrying assembly comprises a horizontal carrying table, a rotating shaft fixed below the carrying table and extending in the vertical direction, clamping rods movably arranged on the four sides of the rotating shaft and a driving unit connected with the rotating shaft, and the driving units are used for driving the clamping rods to position the battery pieces; the axis of the rotating shaft passes through the center of the battery piece; the rotating assembly drives the rotating shaft to rotate around the axis of the rotating shaft. Compared with the prior art, the spin coater has the advantages that a plurality of carrying assemblies are arranged, the number of carrying tables of a spin coating pool is increased, the number of battery pieces capable of being placed at a time is increased, and the machining efficiency is improved; the battery pieces on the carrying tables are positioned through the driving units, so that the centers of the battery pieces are located on the axis of the rotating shaft; and solution components can be uniformly attached to the top surface of the battery piece after the battery piece rotates, the film forming uniformity is improved, and the quality of the battery piece is further improved.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell processing technology, and in particular to a spin coater. Background Technology

[0002] In the production process of photovoltaic cells (such as perovskite solar cells), a spin coater and a pipette are typically used together to uniformly coat a functional film onto the cell substrate. In practice, the cell is placed on the stage of the spin coater, a measured amount of solution is dropped onto the cell using a pipette, and the spin coater is started. The spin coater rotates the cell, causing the solution to diffuse across the cell and form a thin film.

[0003] Furthermore, existing spin coaters typically have only one stage, allowing processing of only a single solar cell, resulting in low production efficiency. Moreover, to prevent the solar cells from detaching from the stage during operation, adhesives are usually used to fix them to the stage. After use, both the stage and the solar cells must be cleaned, increasing the workload for workers. Some spin coaters also use negative pressure to adhere the solar cells to the stage, but because the solar cells are thin and have low structural strength, the negative pressure intensity needs to be precisely controlled to avoid structural damage. This increases the precision requirements of the negative pressure device, leading to a more complex overall structure and increased costs. Additionally, the spin coater's stage lacks a corresponding positioning device. During operation, there is a deviation between the center position of the solar cell and its own rotation axis. A larger deviation results in uneven distribution of the solution components on the solar cell, affecting the uniformity of the film thickness and ultimately reducing the final product quality.

[0004] Therefore, it is necessary to improve the spin coaters in the existing technology. Utility Model Content

[0005] The purpose of this invention is to overcome the defects in the existing technology and provide a spin coater that improves work efficiency, film forming uniformity, reduces precision requirements, and reduces the burden on workers to lower costs.

[0006] To achieve the above-mentioned technical effects, the technical solution of this utility model is: a spin coater, comprising:

[0007] The host machine is equipped with a top-open spin coating tank;

[0008] The loading assembly is provided in multiple parts and distributed in the spin coating tank, including a horizontal loading stage, a rotating shaft fixed below the loading stage and extending in the vertical direction, clamping rods movably disposed on the four sides of the rotating shaft, and a drive unit connected to the rotating shaft. The drive unit is used to drive the clamping rods to position the battery cell, and in the positioning state, the axis of the rotating shaft passes through the center of the battery cell.

[0009] A rotating component that drives the rotating shaft to rotate about its own axis.

[0010] Preferably, in order to clamp the battery cell for positioning, the clamping rod is rotatably connected to the rotating shaft and the rotation axis is horizontal. The driving unit includes a floating sleeve slidably sleeved outside the rotating shaft and a pull rod with both ends hinged to the floating sleeve and the clamping rod, respectively.

[0011] Preferably, in order to limit the range of motion of the float sleeve and thus limit the range of motion of the clamping rods, and prevent the clamping rods of adjacent load-bearing components from colliding with each other, the clamping rods are hinged to the bottom of the float sleeve by the rotating shaft, and the rotating shaft is also provided with a limiting boss. The limiting boss is used to limit the bottom position of the movement path of the float sleeve, so that the clamping rods of each load-bearing component are spaced apart.

[0012] Preferably, in order to drive each rotating shaft to rotate, the rotating assembly includes a drive motor and a transmission unit. The drive motor is driven to one of the rotating shafts, and the rotating shafts of adjacent load-bearing assemblies are connected by transmission unit.

[0013] Preferably, in order to realize the transmission connection between the rotating shafts of each load-bearing component, the transmission unit includes transmission gears that correspond one-to-one with the rotating shafts and are coaxially connected, and the transmission connection is between two adjacent transmission gears.

[0014] Preferably, in order to ensure the compactness of the device structure and drive the rotation of each shaft, the rectangular array of the load components is distributed in the spin coating tank, the transmission gears corresponding to each row of load components mesh with each other, the transmission gears corresponding to adjacent rows of load components are separated, and the transmission unit also includes column gears distributed along the column distribution direction of the load components and meshing sequentially, the column gears being fixedly connected to the coaxial center line of the shaft corresponding to one of the column load components.

[0015] Preferably, in order to protect the rotating component, a partition is fixed inside the spin coating tank and sealed to its circumferential inner wall, the rotating component is disposed below the partition, and the rotating shaft seal passes through the partition.

[0016] Preferably, in order to control the highest liquid level of the spin coating tank, an overflow port is provided on the side wall of the spin coating tank, the overflow port is located below the platform, and a surrounding ring is fixed on the main unit and fitted onto the spin coating tank. The surrounding ring, the spin coating tank and the main unit together form a receiving pool.

[0017] Preferably, in order to facilitate the discharge of waste liquid, the main unit is also provided with a drain channel, the drain channel is connected to a drain valve, and the drain channel is connected to the spin coating tank and the receiving tank.

[0018] Preferably, to prevent the solution from splashing out of the receiving pool, the top of the surrounding ring is provided with a sealing ring covering the top of the receiving pool.

[0019] In summary, compared with the prior art, the spin coater of this invention increases the number of spin coating tanks by setting up multiple carrier components, thereby expanding the number of battery cells that can be placed at one time and improving processing efficiency. By positioning the battery cells on the carriers through the drive unit, the center of the battery cells is aligned with the axis of rotation, ensuring that the solution components can be uniformly adhered to the top surface of the battery cells after rotation, improving the uniformity of film formation, and thus improving the quality of the battery cells. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 This is a structural schematic diagram from another perspective of the present invention;

[0022] Figure 3 yes Figure 2 An explosion diagram;

[0023] Figure 4 yes Figure 1 Cross-sectional structural diagram;

[0024] Figure 5 yes Figure 4 The front view;

[0025] Figure 6 This is a structural schematic diagram of the cargo-carrying component of this utility model;

[0026] Figure 7 yes Figure 6 The front view;

[0027] Figure 8 yes Figure 6 An explosion diagram;

[0028] Figure 9 This is a schematic diagram of the transmission unit of this utility model;

[0029] Figure 10 yes Figure 9 The front view;

[0030] In the diagram: 1. Main unit; 11. Spin coating tank; 111. Baffle plate; 112. Overflow port; 12. Enclosing ring; 13. Sealing ring; 14. Drainage channel; 15. Drainage valve; 16. Tank cover; 17. Power cord; 18. Plug; 2. Loading assembly; 21. Loading platform; 22. Rotating shaft; 221. Limiting boss; 222. Fixing boss; 223. Chassis; 224. Bottom ring; 225. Bottom cover; 23. Float sleeve; 24. Pull rod; 25. Clamping rod; 3. Rotating assembly; 31. Drive motor; 32. Transmission unit; 321. Transmission gear; 322. Row gear; 4. Battery cell. Detailed Implementation

[0031] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings and examples. The following examples are only used to more clearly illustrate the technical solution of this utility model and should not be construed as limiting the scope of protection of this utility model.

[0032] like Figures 1-10 As shown, a spin coater of this utility model includes:

[0033] Main unit 1, with a top-opening spin coating tank 11 on the main unit 1;

[0034] The carrier assembly 2 is provided with multiple components distributed in the spin coating tank 11, including a horizontal carrier stage 21, a rotating shaft 22 fixed below the carrier stage 21 and extending in the vertical direction, clamping rods 25 movably arranged on the four sides of the rotating shaft 22, and a drive unit connected to the rotating shaft 22. The drive unit is used to drive the clamping rods 25 to position the battery cell 4, and in the positioning state, the axis of the rotating shaft 22 passes through the center of the battery cell 4.

[0035] Rotating component 3 drives rotating shaft 22 to rotate around its own axis.

[0036] In use, the battery cell 4 is placed on the stage 21. The drive unit controls the four clamping rods 25 to move closer to the stage 21, thus positioning the battery cell 4. In this positioned state, the center of the battery cell 4 is located on the axis of the rotating shaft 22. Then, a solution is added to the top surface of the battery cell 4 using a pipette. Activating the device causes the rotating assembly 3 to rotate each rotating shaft 22 around its own axis, which in turn rotates the positioned battery cell 4 on the stage 21 at the top of the rotating shaft 22. Because the center of the battery cell 4 is located on both the axis of the rotating shaft 22 and the rotation axis, the solution composition on the battery cell 4 is ensured to be uniform. Distributed on the top surface of the battery cell 4, the uniformity of the thin film formation on the battery cell 4 is ultimately ensured, thereby improving the quality of the battery cell 4. Moreover, the spin coating tank 11 of this utility model is provided with multiple carrier components 2, which can place multiple battery cells 4 on multiple carrier stages 21. Therefore, multiple battery cells 4 can be processed at one time, thereby greatly improving production efficiency. In addition, the carrier components 2 control the clamping rods 25 through the drive unit to clamp and position the battery cells 4 from four sides. Compared with the method of using a negative pressure pump, there is no need to precisely control the negative pressure level, and damage to the structure of the battery cell 4 is avoided, reducing the precision requirements of the equipment.

[0037] like Figures 1-3 As shown, the front of the main unit 1 is equipped with a display screen and buttons for easy control and observation of its operation. The back of the main unit 1 is connected to a plug 18 via a power cord 17. The plug 18 is used to insert into a power interface to supply power to the main unit 1. A glass cover 16 is fitted and placed on the top of the spin coating tank 11. This cover facilitates observation of the film formation on the battery cells 4 inside the spin coating tank 11 and prevents liquid from splashing out of the spin coating tank 11 during operation, thus reducing the cleaning burden on workers.

[0038] A further improvement is that the clamping rod 25 is rotatably connected to the rotating shaft 22 and the rotation axis is horizontal. The driving unit includes a floating sleeve 23 that is slidably sleeved outside the rotating shaft 22 and a pull rod 24 that is hinged at both ends to the floating sleeve 23 and the clamping rod 25 respectively.

[0039] With the above structure, the movement of the clamping rod 25 can be controlled by adjusting the liquid level in the spin coating tank 11, thereby achieving the positioning of the battery cell 4. Specifically, when water is injected into the spin coating tank 11, as the liquid level rises, the float sleeve 23 rises, pulling the pull rod 24, which in turn causes the clamping rod 25 to rotate closer to the axis of rotation 22, thus positioning the battery cell 4 on the stage 21 above the center of the top of the axis of rotation 22. When the liquid level in the spin coating tank 11 decreases, the float sleeve 23 descends, causing the pull rod 24 to pull the clamping rod 25 away from the axis of rotation 22, rotating it downwards, thus positioning the clamping rod... 25 is moved away from the platform 21 so that the battery cell 4 can be placed on the platform 21 or the processed battery cell 4 can be removed from the platform 21. In addition, compared with using adhesive to fix the battery cell 4 to the platform 21, the loading component 2 of this utility model can use the float sleeve 23 to drive the pull rod 24 so that the clamping rod 25 can position and clamp the battery cell 4 without the use of glue. Therefore, the workers do not need to clean the platform 21 and the back of the battery cell 4 later. This not only saves the cost of adhesive bonding and reduces the processing cost, but also reduces the burden of cleaning work for workers later.

[0040] A further improvement is that the clamping rod 25 is hinged to the bottom of the floating sleeve 23 with the rotating shaft 22. The rotating shaft 22 is also provided with a limiting boss 221. The limiting boss 221 is used to limit the bottom position of the floating sleeve 23's movement path, so that the clamping rods 25 of each load assembly 2 are spaced apart.

[0041] By setting the limiting boss 221, the movement path of the float sleeve 23 can be restricted, so that after the float sleeve 23 slides down along the rotating shaft 22 and contacts the float sleeve 23, the clamping rods 25 between each load component 2 are separated to avoid mutual collision and friction.

[0042] A further improvement is that a partition 111 is fixed inside the spin coating tank 11 and sealed to its circumferential inner wall, the rotating assembly 3 is disposed below the partition 111, and the rotating shaft 22 is sealed through the partition 111.

[0043] like Figure 4 and Figure 5 As shown, the partition 111 is horizontally arranged, and its outer circumferential edge is sealed to the inner circumferential wall of the spin coating tank 11. The rotating component 3 is located below the partition 111 and inside the spin coating tank 11, while the rotating shaft 22 is sealed through the partition 111. In this way, the rotating component 3 can be protected from corrosion and damage by the solution in the spin coating tank 11.

[0044] The specific structure of the cargo carrier component 2 is as follows: Figures 6-8As shown, in the loading assembly 2, the top and bottom ends of the rotating shaft 22 are coaxially fixedly connected to the loading platform 21 and the chassis 223, respectively. A horizontal fixed boss 222 is coaxially connected to the lower part of the rotating shaft 22. A float sleeve 23 is sealed and slides axially along the rotating shaft 22 outside the float sleeve 23. A limiting boss 221 is located between the float sleeve 23 and the fixed boss 222. Pull rods 24 are hinged to all four sides of the float sleeve 23, and clamping rods 25 are hinged to all four sides of the fixed boss 222. The lower parts of the pull rods 24 and clamping rods 25 are hinged together. Both the pull rods 24 and clamping rods 25 are lightweight and elastic plastic rods. This reduces weight and avoids excessive rigidity, which could cause structural damage to the battery cell 4 when the clamping rods 25 come into contact with the four sides of the battery cell 4.

[0045] The top surface of the chassis 223 is provided with a bottom ring 224 that is fixedly connected to the bottom of the spin coating tank 11. A bottom cover 225 is fixedly connected to the top of the bottom ring 224 along the coaxial center line. The rotating shaft 22 passes through the top surface of the bottom cover 225. The bottom ring 224 and the bottom cover 225 enclose each other to form a sealed cavity. The outer surface of the chassis 223 is sealed and fitted to the inner wall of the sealed cavity to ensure that the chassis 223, the rotating shaft 22 and the platform 21 can rotate stably around their own axis as the center line.

[0046] After the loading component 2 adopts the above structure, it can position and clamp square battery cells 4 of different sizes. Compared with the method of adsorbing the battery cells 4 onto the loading stage 21 by using negative pressure, this utility model does not require a negative pressure pump, so there is no need to control the negative pressure accuracy of clamping and positioning the battery cells 4, thereby reducing the accuracy requirements of the device.

[0047] A further improvement is that the rotating component 3 includes a drive motor 31 and a transmission unit 32. The drive motor 31 is driven to one of the rotating shafts 22, and the rotating shafts 22 of adjacent load-bearing components 2 are connected by transmission unit 32.

[0048] In the rotating assembly 3, only one drive motor 31 is provided, which reduces the number of drive sources. The transmission unit 32 can realize the transmission connection between the rotating shafts 22 in adjacent load assemblies 2. In this way, when one rotating shaft 22 rotates, the other rotating shafts 22 will rotate synchronously, thereby driving each load stage 21 and the battery cell 4 on the load stage 21 to rotate. In this way, the solution on the battery cell 4 is evenly distributed on the top surface of the battery cell 4.

[0049] A further improvement is that the transmission unit 32 includes transmission gears 321 that correspond one-to-one with the rotating shaft 22 and are coaxially connected, with adjacent transmission gears 321 being connected for transmission; the carrying components 2 are arranged in a rectangular array within the spin coating tank 11, with the transmission gears 321 corresponding to each row of carrying components 2 meshing with each other, and the transmission gears 321 corresponding to adjacent rows of carrying components 2 being spaced apart; the transmission unit 32 also includes column gears 322 that are distributed along the column distribution direction of the carrying components 2 and mesh sequentially, with the column gears 322 being fixedly connected coaxially to the rotating shaft 22 corresponding to one of the columns of carrying components 2.

[0050] Specifically, in this utility model, the loading component 2 is arranged in three rows and three columns, and a notch is fixed at the center of the bottom of the spin coating tank 11. The notch is adapted to the drive motor 31. The drive motor 31 is fixed in the notch and its output end is fixedly connected to the coaxial center line of the rotating shaft 22 of the loading component 2 at the center position.

[0051] like Figure 9 and Figure 10 As shown, the transmission unit 32 has three rows and three columns of transmission gears 321. The rotating shaft 22 corresponds to each transmission gear 321. The coaxial center line of the rotating shaft 22 passes through the transmission gear 321. The three transmission gears 321 in each row mesh sequentially. The transmission gear 321 in the middle row is lower than the middle position of the transmission gears 321 in the remaining two rows. The transmission gears 321 in the first column of the first row and the transmission gears 321 in the first column of the third row are fixedly connected to the column gears 322 on their bottom surfaces with the coaxial center line. The transmission gears 321 in the first column of the second row are fixedly connected to the column gears 322 on their top surfaces with the coaxial center line. The three column gears 322 mesh sequentially and are located at the same height. In this way, the transmission gears 321 in the first row, the transmission gears 321 in the second row, and the transmission gears 321 in the third row are connected by transmission.

[0052] A further improvement is that an overflow port 112 is provided on the side wall of the spin coating tank 11, the overflow port 112 is located below the platform 21, and a surrounding ring 12 is fixed on the main unit 1 and fitted onto the spin coating tank 11. The surrounding ring 12, the spin coating tank 11, and the main unit 1 enclose each other to form a receiving pool.

[0053] By setting the overflow port 112, the liquid level in the spin coating tank 11 can be limited, preventing the liquid level in the spin coating tank 11 from being too high and contacting the battery cell 4 on the stage 21, thus affecting the quality of the battery cell 4; when the liquid level is too high, too much solution can be discharged through the overflow port 112 into the receiving pool formed by the surrounding ring 12, the spin coating tank 11 and the main unit 1.

[0054] A further improvement is that the main unit 1 is also provided with a drain channel 14, which is connected to a drain valve 15. The drain channel 14 is connected to the spin coating tank 11 and the receiving tank. A sealing ring 13 covering the top of the receiving tank is provided on the top of the surrounding ring 12.

[0055] By setting up a drain channel 14 and a drain valve 15, it is convenient to open the drain valve 15 after the device is used up to drain the excess solution in the spin coating tank 11 and the receiving tank. After the water level drops, the clamping rods 25 in each of the loading components 2 rotate away from the loading platform 21 to remove the battery cells 4 on the loading platform 21. The sealing ring 13 can seal the receiving tank to prevent the solution from splashing out of the receiving tank.

[0056] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A spin coater characterized by, include: The host machine is equipped with a top-open spin coating tank; The loading assembly is provided in multiple parts and distributed in the spin coating tank, including a horizontal loading stage, a rotating shaft fixed below the loading stage and extending in the vertical direction, clamping rods movably disposed on the four sides of the rotating shaft, and a drive unit connected to the rotating shaft. The drive unit is used to drive the clamping rods to position the battery cell, and in the positioning state, the axis of the rotating shaft passes through the center of the battery cell. A rotating component that drives the rotating shaft to rotate about its own axis.

2. The spin coater of claim 1, wherein: The clamping rod is rotatably connected to the rotating shaft and the rotation axis is horizontal. The driving unit includes a float sleeve that is slidably sleeved outside the rotating shaft and a pull rod that is hinged at both ends to the float sleeve and the clamping rod, respectively.

3. The spin coater of claim 2, wherein: The clamping rod is hinged to the bottom of the floating sleeve and the rotating shaft. The rotating shaft is also provided with a limiting boss, which is used to limit the bottom position of the floating sleeve's movement path, so that the clamping rods of each load-bearing component are spaced apart.

4. The spin coater of claim 1, wherein: The rotating assembly includes a drive motor and a transmission unit. The drive motor is driven to one of the rotating shafts, and the rotating shafts of adjacent load assemblies are connected by transmission unit.

5. The spin coater of claim 4, wherein: The transmission unit includes transmission gears that correspond one-to-one with the rotating shaft and are coaxially connected, with adjacent transmission gears being connected in a transmission manner.

6. The spin coater of claim 5, wherein: The rectangular array of the load-bearing components is distributed in the spin coating tank. The transmission gears corresponding to each row of load-bearing components mesh with each other, and the transmission gears corresponding to adjacent rows of load-bearing components are separated. The transmission unit also includes column gears distributed along the column distribution direction of the load-bearing components and meshing sequentially. The column gears are fixedly connected to the coaxial center line of the rotating shaft corresponding to one of the column load-bearing components.

7. The spin coater of claim 4, wherein: The spin coating tank is fixed with a partition plate that is sealed to its circumferential inner wall. The rotating assembly is located below the partition plate, and the rotating shaft seal passes through the partition plate.

8. The spin coater of any one of claims 1-7, wherein: An overflow port is provided on the side wall of the spin coating tank, and the overflow port is located below the platform. A surrounding ring is fixed on the main unit and fitted onto the spin coating tank. The surrounding ring, the spin coating tank, and the main unit together form a receiving pool.

9. The spin coater of claim 8, wherein: The host is also equipped with a drain channel, which is connected to a drain valve and is connected to the spin coating tank and the receiving tank.

10. The spin coater of claim 8, wherein: The top of the surrounding ring is provided with a sealing ring that covers the top of the receiving pool.

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