Device for semi-automatically cleaning feeding belt and discharging belt of PECVD machine table

By designing a semi-automatic PECVD machine conveyor belt cleaning device, which utilizes the cooperation of slide rail components and cleaning components, automatic belt cleaning is achieved, solving the dust pollution problem, improving production efficiency, and reducing labor costs.

CN224132078UActive Publication Date: 2026-04-17JIANGSU RUNERGY CENTURY PHOTOVOLTAIC TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
JIANGSU RUNERGY CENTURY PHOTOVOLTAIC TECH CO LTD
Filing Date
2025-05-07
Publication Date
2026-04-17

AI Technical Summary

Technical Problem

In existing technologies, dust pollution from the loading and unloading belts of PECVD machines leads to a decrease in the yield of finished solar cells (EL). Furthermore, replacing the belts requires machine shutdown and manual cleaning, resulting in reduced production capacity and increased labor costs.

Method used

Design a semi-automatic device for cleaning the loading and unloading belts of a PECVD machine. Through the cooperation of a slide rail assembly and a cleaning assembly, and by utilizing a telescopic spring rod and magnetic adhesion, the belt can be automatically cleaned, avoiding manual intervention.

Benefits of technology

It enables automatic belt cleaning, improves production efficiency, reduces downtime and labor costs, maintains belt cleanliness, and avoids the generation of batches of abnormal belts.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) automatic feeding and discharging equipment, and particularly relates to a device for semi-automatically cleaning a feeding and discharging belt of a PECVD machine table, which comprises a sliding rail assembly, a storage assembly is connected to the upper end of the sliding rail assembly in a sliding manner, and a cleaning assembly is rotatably connected to the interior of the storage assembly through a rotating shaft. A telescopic spring rod is arranged between the interior of the storage assembly and the middle of the cleaning assembly, the front end of the cleaning assembly abuts against the outer side of the belt, the cleaning assembly is pulled outwards, the cleaning assembly rotates with the storage assembly through a rotating shaft, the front end of the cleaning assembly rotates out of the storage assembly, and the front end of the cleaning assembly abuts against the outer side of the belt under the elastic action of the telescopic spring rod. The inner side of the belt is supported through the transmission shaft, the transmission shaft rotates to drive the belt to rotate, the cleaning assembly cleans the outer surface of the belt, dust adhering to the belt is swept down, the cleanliness of the belt is kept, manual cleaning without shutdown is not needed, the production efficiency is improved, and the labor cost is reduced.
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Description

Technical Field

[0001] This utility model belongs to the technical field of automated loading and unloading equipment for tubular PECVD, and particularly relates to a device for semi-automatic cleaning of the loading and unloading belts of a PECVD machine. Background Technology

[0002] In the current solar cell production process, the conveyor belt is a crucial point of direct contact. The cleanliness of the conveyor belt has a significant impact on the EL yield of the finished cells. Dust contamination can occur during the tubular PECVD production of solar cells. Some of the dust on the cells will remain on the conveyor belt. If the conveyor belt is not cleaned in time, it will contaminate normal cells and cause batch defects. In addition, replacing a new conveyor belt without wiping it will also cause batch defects because the cleanliness of the new conveyor belt is poor. Currently, the production line solves these problems by manually wiping it with a clean cloth. This not only requires a long downtime, which reduces production capacity, but also increases labor costs, all of which lead to losses in company profits. Utility Model Content

[0003] The purpose of this utility model is to provide a semi-automatic device for cleaning the loading and unloading belts of a PECVD machine, so as to solve the problems in the prior art. The specific technical solution is as follows:

[0004] A semi-automatic device for cleaning the loading and unloading belts of a PECVD machine includes a slide rail assembly, a storage assembly slidably connected to the upper end of the slide rail assembly, a cleaning assembly rotatably connected to the storage assembly via a rotating shaft, a telescopic spring rod provided between the storage assembly and the middle of the cleaning assembly, and the front end of the cleaning assembly abutting against the outside of the belt.

[0005] Furthermore, the slide rail assembly includes a slide rail base, and the slide rail base has an inner groove for sliding the storage component within the inner groove.

[0006] Furthermore, control components are provided at both ends of the slide rail base, and the control components are connected to the storage components.

[0007] Furthermore, the storage component includes a storage box with a sliding rod at the bottom. The sliding rod slides in the inner groove of the slide rail. The control component is connected to the storage box. The storage box is rotatably connected to the cleaning component via a rotating shaft. A telescopic spring rod is provided between the storage box and the cleaning component in the middle.

[0008] Furthermore, the storage box is equipped with a magnetic strip, which magnetically attaches to the cleaning components.

[0009] Furthermore, the upper end of the storage box is connected to the top cover via a hinge.

[0010] Furthermore, the cleaning component includes a cleaning crossbar, which is rotatably connected to the storage box via a pivot. A telescopic spring rod is provided between the cleaning crossbar and the storage box, and the cleaning crossbar is magnetically attached to the magnetic strip.

[0011] Furthermore, the front end of the cleaning crossbar is connected to a circular brush head via a detachable component, with the bristles of the circular brush head resting against the outside of the belt.

[0012] Furthermore, the detachable component includes a first connecting block, which is fixedly connected to a circular brush head and to one end of an elastic rod. The other end of the elastic rod has a right-angle hook on its lower side and an oblique hook on its upper side. The first connecting block and the second connecting block are inserted into each other. The second connecting block is fixedly connected to a cleaning crossbar. The second connecting block has a locking block inside, and the right-angle hook is locked onto the locking block.

[0013] Furthermore, the second connecting block is slidably connected to the push block, and a slider is fixed at the lower end of the push block. The slider slides between the second connecting block and the snap-fit ​​block. The inclined plate on the slider is slidably connected to the inclined hook. The pressing block on the slider is inserted between the elastic rod and the second connecting block.

[0014] The advantages of this utility model are:

[0015] Pulling the cleaning component outward causes it to rotate via a pivot and storage component. The front end of the cleaning component rotates out from the storage component and, under the elastic force of the telescopic spring rod, presses against the outside of the belt. The inside of the belt is supported by a drive shaft, which rotates to drive the belt. The cleaning component cleans the outer surface of the belt, removing dust adhering to it and maintaining its cleanliness. This eliminates the need for manual cleaning by stopping the machine, increasing production efficiency and reducing labor costs. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the storage component structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the slide rail assembly structure of this utility model;

[0019] Figure 4 This is a schematic diagram of the detachable component structure of this utility model. Figure 1 ;

[0020] Figure 5 This is a schematic diagram of the detachable component structure of this utility model. Figure 2 ;

[0021] Figure 6 This is a schematic diagram of the detachable component structure of this utility model. Figure 3;

[0022] Figure 7 This is an exploded view of the detachable component structure of this utility model;

[0023] Explanation of markings in the diagram:

[0024] 1. Belt; 2. Drive shaft; 3. Control assembly; 4. Slide rail base; 5. Storage box; 6. Telescopic spring rod; 7. Rotary shaft; 8. Cleaning crossbar; 9. Detachable assembly; 901. Connecting block one; 902. Elastic rod; 903. Right angle hook; 904. Angled hook; 905. Connecting block two; 906. Snap-fit ​​block; 907. Push block; 908. Sliding plate; 909. Squeezing block; 910. Circular brush head; 10. Magnetic strip; 11. Top cover; 12. Hinge; 13. Slide rail inner groove; 14. Sliding rod; 15. Detailed Implementation

[0025] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] Example 1

[0028] like Figure 1-7 As shown, a semi-automatic device for cleaning the loading and unloading belts of a PECVD machine includes a slide rail assembly, a storage assembly slidably connected to the upper end of the slide rail assembly, a cleaning assembly rotatably connected inside the storage assembly via a rotating shaft 7, a telescopic spring rod 6 provided between the storage assembly and the middle of the cleaning assembly, and the front end of the cleaning assembly abutting against the outside of the belt 1.

[0029] The working principle of the above technical solution is as follows: When it is necessary to clean the belt 1, the cleaning component is pulled outward. The cleaning component rotates with the storage component through the rotating shaft 7. The front end of the cleaning component rotates out from the storage component. Under the elastic force of the telescopic spring rod 6, the front end of the cleaning component abuts against the outside of the belt 1. The inside of the belt 1 is supported by the transmission shaft 2. The transmission shaft 2 rotates, driving the belt 1 to rotate. The cleaning component cleans the outer surface of the belt 1, sweeping away the dust adhering to the belt 1, keeping the belt 1 clean. There is no need to stop the machine for manual cleaning, which increases production efficiency and reduces labor costs.

[0030] When belt 1 does not need to be cleaned, the cleaning component can be stored in the storage component, saving space.

[0031] Example 2

[0032] like Figure 1-7 As shown, the slide rail assembly includes a slide rail base 4, and a slide rail inner groove 14 is provided in the slide rail base 4, and the storage component slides in the slide rail inner groove 14.

[0033] Both ends of the slide rail base 4 are provided with control components 3, and the control components 3 are connected to the storage components.

[0034] The working principle of the above technical solution is as follows: the control component 3 can be a cylinder, which is fixed at both ends of the slide rail base 4. The output end of the cylinder is connected to the storage component. The cylinder controls the storage component to slide in the inner groove 14 of the slide rail, which drives the cleaning component in the storage component to move to a distance and angle that matches the end of the belt 1. Through the above adjustment, it can be adapted to the cleaning of belts 1 of different specifications and belts 1 of different setting heights.

[0035] Example 3

[0036] like Figure 1-7 As shown, the storage component includes a storage box 5, a sliding rod 15 at the bottom of the storage box 5, the sliding rod 15 slides in the inner groove 14 of the slide rail, the control component 3 is connected to the storage box 5, the storage box 5 is rotatably connected to the cleaning component through a rotating shaft 7, and a telescopic spring rod 6 is provided between the middle of the storage box 5 and the cleaning component.

[0037] The working principle of the above technical solution is as follows: Under the elastic force of the telescopic spring rod 6, the front end of the cleaning component can always keep in close contact with the belt 1, thereby increasing the cleaning force of the cleaning component on the belt 1 and ensuring the cleanliness of the belt 1.

[0038] Example 4

[0039] like Figure 1-7 As shown, the storage box 5 is equipped with a magnetic strip 11, which magnetically attaches to the cleaning components.

[0040] The working principle of the above technical solution is as follows: When cleaning the belt 1 is not required, the cleaning component lies flat in the storage box 5, and the magnetic strip 11 is magnetically attached to the cleaning component. The attraction force between the magnetic strip 11 and the cleaning component is greater than the elastic force of the retractable spring rod 6. When cleaning the belt 1 is required, the cleaning component is pulled outward, the magnetic strip 11 separates from the cleaning component, and the cleaning component loses the magnetic force of the magnetic strip 11. Under the elastic force of the retractable spring rod 6, the front end of the cleaning component presses against the belt 1 to clean the belt 1. When it is necessary to store the belt 1, the cleaning component is pressed into the storage box 5, the retractable spring rod 6 is compressed, and the cleaning component is magnetically attached to the magnetic strip 11 in the storage box 5 to complete the storage of the cleaning component. The removal and storage of the cleaning component are convenient and quick.

[0041] Example 5

[0042] like Figure 1-7 As shown, the upper end of the storage box 5 is connected to the top cover 12 via a hinge 13;

[0043] The working principle of the above technical solution is as follows: After the cleaning components are stored in the storage box 5, the top cover 12 is locked onto the storage box 5 by rotation, which has the function of preventing dust.

[0044] Example 6

[0045] like Figure 1-7 As shown, the cleaning assembly includes a cleaning crossbar 8, which is rotatably connected to the storage box 5 via a pivot 7. A telescopic spring rod 6 is provided between the cleaning crossbar 8 and the storage box 5, and the cleaning crossbar 8 is magnetically attached to the magnetic strip 11.

[0046] The front end of the cleaning crossbar 8 is connected to the circular brush head 10 via a detachable component 9, and the bristles of the circular brush head 10 rest against the outside of the belt 1.

[0047] The working principle of the above technical solution is as follows: The cleaning bar 8 is made of magnetic metal. When the belt 1 needs to be cleaned, the cleaning bar 8 is pulled outward, and the cleaning bar 8 is released from the magnetic attraction of the magnetic strip 11. The circular brush head 10 at the front end of the cleaning bar 8 rotates out from the storage box 5. Under the elastic force of the telescopic spring rod 6, the circular brush head 10 presses against the outside of the belt 1. As the belt 1 rotates, the circular brush head 10 cleans the belt 1. The circular brush head 10 can be fixed and separated from the cleaning bar 8 through the detachable component 9, which facilitates the replacement of the circular brush head 10. When the belt 1 does not need to be cleaned, the cleaning bar 8 is pressed into the storage box 5. The telescopic spring rod 6 is compressed, and the cleaning bar 8 contacts and magnetically attracts the magnetic strip 11. The top cover 12 is locked onto the storage box 5 by rotation, which has a dustproof function.

[0048] Example 7

[0049] like Figure 1-7As shown, the detachable component includes a first connecting block 901, which is fixedly connected to the circular brush head 10. The first connecting block 901 is fixedly connected to one end of the elastic rod 902. A right-angle hook 903 is provided on the lower side of the other end of the elastic rod 902, and an oblique hook 904 is provided on the upper side of the other end of the elastic rod 902. The first connecting block 901 is inserted into the second connecting block 905, which is fixedly connected to the cleaning crossbar 8. A snap-fit ​​block 906 is provided inside the second connecting block 905, and the right-angle hook 903 snaps onto the snap-fit ​​block 906.

[0050] The connecting block 905 is slidably connected to the push block 907. The lower end of the push block 907 is fixed with a slider 908. The slider 908 slides between the connecting block 905 and the snap-fit ​​block 906. The inclined plate 909 on the slider 908 is slidably connected to the angled hook 904. The pressing block 910 on the slider 908 is inserted between the elastic rod 902 and the connecting block 905.

[0051] The working principle of the above technical solution is as follows: Pushing the push block 907 towards the side of the cleaning crossbar 8 causes the slider 908 to move towards the side of the cleaning crossbar 8, causing the squeezing block 910 to move out from between the elastic rod 902 and the connecting block 905. The inclined plate 909 slides with the angled hook 904 and squeezes the angled hook 904 to move outward, causing the front end of the elastic rod 902 to open outward, causing the right angle hook 903 to move outward and separate from the locking block 906. Pulling the circular brush head 10 outward completes the separation between the connecting block 901 and the connecting block 905, and completes the separation between the circular brush head 10 and the cleaning crossbar 8. The disassembly of the circular brush head 10 and the cleaning crossbar 8 is convenient and quick.

[0052] Connecting block 1 901 and connecting block 2 905 are inserted together, and right-angle hook 903 is engaged with locking block 906. Pushing push block 907 forward moves slider 908 forward, causing squeezing block 910 to be inserted between elastic rod 902 and connecting block 2 905, thus completing the installation and fixation between circular brush head 10 and cleaning crossbar 8. The squeezing action of squeezing block 910 prevents elastic rod 902 from bending, further ensuring the firmness of the engagement between right-angle hook 903 and locking block 906, and enhancing the stability of the installation between circular brush head 10 and cleaning crossbar 8.

[0053] It is understood that this utility model has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of this utility model. Furthermore, under the teachings of this utility model, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of this utility model.

Claims

1. A device for semi-automatically cleaning a loading and unloading belt of a PECVD machine, characterized in that, It includes a slide rail assembly, a storage assembly is slidably connected to the upper end of the slide rail assembly, a cleaning assembly is rotatably connected inside the storage assembly via a pivot (7), a telescopic spring rod (6) is provided between the storage assembly and the middle of the cleaning assembly, and the front end of the cleaning assembly abuts against the outside of the belt (1).

2. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 1, wherein, The slide rail assembly includes a slide rail base (4), and the slide rail base (4) has a slide rail inner groove (14) inside, and the storage component slides in the slide rail inner groove (14).

3. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 2, wherein, The slide rail base (4) is equipped with control components (3) at both ends, and the control components (3) are connected to the storage components.

4. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 3, wherein, The storage component includes a storage box (5), a sliding rod (15) at the bottom of the storage box (5), the sliding rod (15) slides in the inner groove (14) of the slide rail, the control component (3) is connected to the storage box (5), the storage box (5) is rotatably connected to the cleaning component through a rotating shaft (7), and a telescopic spring rod (6) is provided between the storage box (5) and the cleaning component in the middle.

5. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 4, wherein, The storage box (5) is equipped with a magnetic strip (11), which magnetically attaches to the cleaning components.

6. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 5, wherein, The upper end of the storage box (5) is connected to the top cover (12) via a hinge (13).

7. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 6, wherein, The cleaning assembly includes a cleaning crossbar (8), which is rotatably connected to the storage box (5) via a pivot (7). A telescopic spring rod (6) is provided between the cleaning crossbar (8) and the storage box (5), and the cleaning crossbar (8) is magnetically attached to the magnetic strip (11).

8. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 7, wherein, The front end of the cleaning crossbar (8) is connected to the circular brush head (10) via a detachable component (9), and the bristles of the circular brush head (10) rest against the outside of the belt (1).

9. The device for semi-automatic cleaning of the loading and unloading belts of a PECVD machine according to claim 8, characterized in that, The detachable component (9) includes a first connecting block (901), which is fixedly connected to the circular brush head (10). The first connecting block (901) is fixedly connected to one end of the elastic rod (902). A right-angle hook (903) is provided on the lower side of the other end of the elastic rod (902), and an oblique hook (904) is provided on the upper side of the other end of the elastic rod (902). The first connecting block (901) is inserted into the second connecting block (905), which is fixedly connected to the cleaning crossbar (8). A snap-fit ​​block (906) is provided inside the second connecting block (905), and the right-angle hook (903) snaps onto the snap-fit ​​block (906).

10. The device for semi-automatically cleaning the loading and unloading belt of a PECVD machine according to claim 9, wherein, The connecting block 2 (905) is slidably connected to the push block (907). The lower end of the push block (907) is fixed with a slider (908). The slider (908) slides between the connecting block 2 (905) and the snap-fit ​​block (906). The inclined plate (909) on the slider (908) is slidably connected to the angled hook (904). The pressing block (910) on the slider (908) is inserted between the elastic rod (902) and the connecting block 2 (905).