Hoisting tool for accelerating barrel of ion implanter

Abstract

The utility model discloses a hoisting tool for an accelerating barrel of an ion implanter in the technical field of semiconductor manufacturing equipment, which comprises a base with a horizontal plate body structure, support frames are arranged on the top surface of the base close to the edges of two sides, a connecting piece is arranged at the top of each support frame, and the connecting piece is connected with the accelerating barrel of the ion implanter. A threaded rod and a guide rail are horizontally installed between the two connecting pieces, the two ends of the threaded rod are rotationally connected with the connecting pieces through bearings, a rod body of the threaded rod is in threaded connection with a moving seat, the guide rail slidably penetrates through the moving seat, and a lifting chain is connected to the bottom of the moving seat. And the other end of the lifting chain bypasses a movable pulley below the moving seat, then extends upwards to the position above the moving seat and is connected with the output end of a lifting driving mechanism installed at the top of the moving seat, a translation driving mechanism is installed on the surface of the base, and the output end of the translation driving mechanism is in transmission connection with the threaded rod through a transmission belt. According to the utility model, the labor cost for hoisting the acceleration barrel is reduced, and the efficiency is obviously improved.

Description

Technical Field

[0001] This utility model relates to a hoisting tool for the accelerator barrel of an ion implanter, belonging to the field of semiconductor manufacturing equipment technology. Background Technology

[0002] In chip manufacturing, the ion implanter is one of the core pieces of equipment. Its accelerator tank is large and heavy, requiring multiple people to install and disassemble it. Traditional methods rely on manual operation by 3-4 workers, which presents the following problems: high labor costs, low efficiency due to the need for multiple personnel, significant safety hazards as manual handling can easily lead to slippage, collisions, and other accidents; and poor operational flexibility, as the accelerator tank requires precise positioning and manual adjustments cannot meet the installation needs of multiple directions and heights.

[0003] Current technologies lack specialized hoisting tools designed specifically for the structural characteristics of acceleration tanks, which limits installation efficiency and safety. Therefore, there is an urgent need for a specialized tool that can reduce reliance on manual labor and improve operational safety. Summary of the Invention

[0004] The purpose of this utility model is to overcome the shortcomings of the prior art and provide a hoisting tool for the accelerator tank of an ion implanter, which aims to solve the problems of high labor costs, significant safety hazards and insufficient operational flexibility in the prior art.

[0005] To achieve the above objectives, this utility model employs the following technical solution:

[0006] In a first aspect, this utility model provides a hoisting tool for an ion implanter accelerator tank, comprising a base with a horizontal plate structure. Support frames are installed on the top surface of the base near both side edges. A connector is installed on the top of each support frame. A threaded rod and a guide rail are horizontally installed between two connectors. The two ends of the threaded rod are rotatably connected to the connectors via bearings. A movable seat is threadedly connected to the body of the threaded rod. The guide rail slides through the movable seat. A lifting chain is connected to the bottom of the movable seat. The other end of the lifting chain passes around a movable pulley under the movable seat and extends upward to the top of the movable seat, and is connected to the output end of a lifting drive mechanism installed on the top of the movable seat. A translation drive mechanism is installed on the surface of the base, and the output end of the translation drive mechanism is connected to the threaded rod via a transmission belt.

[0007] Furthermore, the support frame is a triangular structure.

[0008] Furthermore, the surface of the guide rail is chrome-plated.

[0009] Furthermore, the lifting chain is made of high-strength alloy steel with a load-bearing capacity of ≥500kg.

[0010] Furthermore, four rollers are installed at the bottom of the base.

[0011] Furthermore, the rollers include a set of omnidirectional wheels and a set of directional wheels.

[0012] Compared with the prior art, the beneficial effects achieved by this utility model are as follows:

[0013] This invention optimizes manpower by designing a hoisting tool for the accelerator tank of an ion implanter, requiring only one person to operate, thus significantly reducing labor costs and improving safety. The lifting chain provides stable load-bearing capacity, and the use of a movable pulley structure reduces the hoisting stress. It is also flexible in operation, supports lateral and height adjustments, adapts to complex installation scenarios, significantly improves efficiency, and allows lifting and movement to be completed simultaneously, further shortening installation time. Attached Figure Description

[0014] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0015] Figure 1 A schematic diagram of the structure of a hoisting tool for an ion implanter accelerator barrel provided in an embodiment of this utility model;

[0016] In the diagram: 110, base; 120, support frame; 130, connector; 140, threaded rod; 150, guide rail; 160, roller; 210, movable seat; 220, lifting chain; 230, movable pulley; 240, hook; 310, translation drive mechanism; 320, transmission belt; 330, lifting drive mechanism. Detailed Implementation

[0017] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described herein can be combined with each other.

[0018] The following detailed description is exemplary and intended to provide further detailed explanation of the present invention. Unless otherwise specified, all technical terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this invention is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this invention.

[0019] Example:

[0020] Please see Figure 1This embodiment provides a hoisting tool for an ion implanter accelerator tank, which consists of three main parts: a frame assembly, a hoisting assembly, and a drive assembly. Specifically:

[0021] The frame assembly consists of a base 110, support frames 120, connectors 130, threaded rods 140, guide rails 150, and rollers 160. The base 110 is a horizontal plate structure. Four rollers 160 are symmetrically installed at the bottom of the base 110 near the four corners, facilitating the base 110 to move forward, backward, left, and right on the plane. Two sets of support frames 120 are installed on the surface of the base 110 near the two side edges. The support frames 120 can also adopt a triangular structure for stronger lateral stability. The two ends of the threaded rod 140 are rotatably connected to the two left and right connectors 130 through bearings. The bottoms of the two connectors 130 are fixed to the tops of the two sets of support frames 120 respectively. The guide rail 150 is located below the threaded rod 140, and the two ends of the guide rail 150 are fixedly connected to the two left and right connectors 130. Both the threaded rod 140 and the guide rail 150 are horizontally set. The surface of the guide rail 150 is chrome-plated to reduce the coefficient of friction and improve the smoothness of the sliding seat 210.

[0022] The lifting assembly consists of a movable base 210, a lifting chain 220, a movable pulley 230, and a hook 240. The movable base 210 has a threaded hole that engages with the threaded rod 140 on its side, and a mounting hole that slides with the guide rail 150. The movable base 210 is installed on the threaded rod 140 through the threaded hole, and the guide rail 150 passes through the mounting hole of the movable base 210. The movable pulley 230 is located below the movable base 210. One end of the lifting chain 220 is fixedly connected to the movable base 210, and the other end extends upward above the movable base 210 after passing around the movable pulley 230. The hook 240 is installed at the bottom of the movable pulley 230. In this embodiment, the lifting chain 220 is made of high-strength alloy steel and has a load-bearing capacity of ≥500kg.

[0023] The drive assembly consists of a translation drive mechanism 310, a transmission belt 320, and a lifting drive mechanism 330. The translation drive mechanism 310 is mounted on the surface of the base 110 and located below the end of the threaded rod 140. The output end of the translation drive mechanism 310 is connected to the end of the threaded rod 140 via the transmission belt 320. The lifting drive mechanism 330 is mounted on the top of the movable seat 210, and its output end is connected to the end of the lifting chain 220 extending above the movable seat 210.

[0024] When using this hoisting tool for the accelerator tank of an ion implanter, the translation drive mechanism 310 is first activated. At this time, the output end of the translation drive mechanism 310 drives the threaded rod 140 to rotate along the rod body via the transmission belt 320. Since the threaded hole at the moving seat 210 meshes with the threaded rod 140, and the moving seat 210 is limited by the guide rail 150 and cannot rotate with the threaded rod 140, the moving seat 210 moves along the rod body of the threaded rod 140 under the force of the threaded meshing. This, in turn, drives the lifting chain 220, the movable pulley 230, and the hook 240 to move accordingly. When the hook 240 moves close to the accelerator tank, the translation drive mechanism is then deactivated. 310. Start the lifting drive mechanism 330. The output end of the lifting drive mechanism 330 releases the lifting chain 220. At this time, the movable pulley 230 and the hook 240 move down to the acceleration barrel and hang the acceleration barrel on the hook 240. Then start the lifting drive mechanism 330 in reverse. At this time, the output end of the lifting drive mechanism 330 retracts the lifting chain 220. The hook 240 drives the acceleration barrel to rise, thereby realizing the lifting and hoisting of the acceleration barrel. When the acceleration barrel rises to the designated height, start the translation drive mechanism 310 to move the acceleration barrel horizontally. After moving to the appropriate position, start the lifting drive mechanism 330 in reverse to safely unload the acceleration barrel, and finally complete the hoisting work.

[0025] As is known from common technical knowledge, this utility model can be implemented through other embodiments that do not depart from its spirit or essential characteristics. Therefore, the disclosed embodiments described above are merely illustrative in all respects and are not the only ones. All modifications within the scope of this utility model or its equivalents are included in this utility model.

[0026] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model should be covered within the protection scope of the claims of this utility model.

Claims

1. A hoisting tool for an acceleration bucket of an ion implanter, characterized in that, The system includes a base (110) with a horizontal plate structure. Support frames (120) are installed on the top surface of the base (110) near both side edges. A connector (130) is installed on the top of each support frame (120). A threaded rod (140) and a guide rail (150) are horizontally installed between two connectors (130). The two ends of the threaded rod (140) are rotatably connected to the connectors (130) via bearings. A movable seat (210) is threadedly connected to the body of the threaded rod (140). The guide rail (150) slides through the movable seat. (210) The bottom of the movable seat (210) is connected to a lifting chain (220). The other end of the lifting chain (220) passes around the movable pulley (230) under the movable seat (210) and extends upward to the top of the movable seat (210), and is connected to the output end of the lifting drive mechanism (330) installed on the top of the movable seat (210). The surface of the base (110) is equipped with a translation drive mechanism (310), and the output end of the translation drive mechanism (310) is connected to the threaded rod (140) through a transmission belt (320).

2. The hoisting tool for an acceleration bucket of an ion implanter according to claim 1, characterized in that The support frame (120) is a triangular structure.

3. The hoist tool for an acceleration bucket of an ion implanter according to claim 1, wherein, The surface of the guide rail (150) is chrome-plated.

4. The hoist tool for an acceleration bucket of an ion implanter of claim 1, wherein, The lifting chain (220) is made of high-strength alloy steel with a load-bearing capacity of ≥500kg.

5. The hoist tool for an acceleration bucket of an ion implanter of claim 1, wherein, The base (110) is equipped with four rollers (160) at its bottom.

6. The hoisting tool for the accelerator tank of an ion implanter according to claim 5, characterized in that, The roller (160) includes a set of omnidirectional wheels and a set of directional wheels.

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