Plastic part surface magnetron sputtering coating device

Abstract

The utility model discloses a magnetron sputtering coating device for the surface of a plastic part, which belongs to the technical field of magnetron sputtering coating and comprises a base, a coating bin is mounted on the base and is vertically cylindrical, a feeding hole is formed in the arc surface of the coating bin, a sealing door is hinged to the feeding hole, and the sealing door is hinged to the bottom of the coating bin. Connecting rings which are arranged up and down are arranged in the coating bin, the two connecting rings and the coating bin are rotationally arranged, a mounting frame is fixedly connected between the two connecting rings, a moving frame is arranged on one side of the mounting frame, the moving frame and the mounting frame are in sliding fit, clamping pieces are symmetrically installed on the moving frame, and a magnetic control target is arranged on the side face of the coating bin. A motor for driving the connecting ring to rotate is mounted at the top of the coating bin, so that the mounting is convenient, and the efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating technology, and more specifically, to a magnetron sputtering coating device for the surface of plastic parts. Background Technology

[0002] Magnetron sputtering is a type of physical vapor deposition. General sputtering methods can be used to prepare various materials such as metals, semiconductors, and insulators. It has advantages such as simple equipment, easy control, large coating area, and strong adhesion. Magnetron sputtering, which was developed in the 1970s, has achieved high speed, low temperature, and low damage. Because high-speed sputtering is performed under low pressure, it is necessary to effectively improve the ionization rate of the gas. Magnetron sputtering increases the plasma density by introducing a magnetic field on the surface of the target cathode and using the magnetic field to confine charged particles, thereby increasing the sputtering rate.

[0003] Chinese patent application CN202421130171.1 discloses a magnetron sputtering coating device for plastic parts, comprising a base, a coating chamber fixedly connected to one side of the upper end of the base, the coating chamber having openings at both ends, a detachable door connected to the upper end of the coating chamber, a sealing ring provided between the coating chamber and the door, a magnetron target fixedly connected to the center of the door, a water-cooling device covering the magnetron target, a support plate fixedly connected to the bottom end of the coating chamber, a baffle detachably connected to the support plate, a first motor disposed inside the base, a turntable fixedly connected to the output end of the first motor, a clearance hole provided in the center of the support plate, the turntable disposed within the clearance hole, a connecting rod fixedly connected to the turntable, a placement platform fixedly connected to the connecting rod, a through hole provided in the center of the placement platform, a fixing rod disposed within the through hole, a clamp slidably connected to the fixing rod, and a control console fixedly connected to the other side of the upper end of the base. This invention has the advantage of being able to coat both sides of a plastic part through a rotatable fixing rod and a clamp for fixing the plastic part.

[0004] The above solution requires clamping the plastic parts, and the entire clamping and installation process can only be carried out inside the coating chamber. The interior space of the coating chamber is small, which greatly limits its practical operation, makes it extremely inconvenient to use, and affects the installation efficiency. In view of the above problems, a solution is proposed below. Utility Model Content

[0005] To address the problems existing in the prior art, the purpose of this utility model is to provide a magnetron sputtering coating device for plastic parts, which can be easily installed and improve efficiency.

[0006] To solve the above problems, the present invention adopts the following technical solution.

[0007] A magnetron sputtering coating apparatus for plastic parts includes a base, on which a coating chamber is mounted. The coating chamber is a vertically arranged cylinder with an inlet on its arc surface. A sealing door is hinged to the inlet. Two connecting rings are arranged vertically inside the coating chamber, rotatably connected to the coating chamber. A mounting frame is fixedly connected between the two connecting rings. A movable frame is provided on one side of the mounting frame, and the movable frame slides with the mounting frame. Clamping components are symmetrically mounted on the movable frame. A magnetron target is provided on the side of the coating chamber. A motor for driving the connecting rings to rotate is mounted on the top of the coating chamber.

[0008] Preferably, the clamping component includes a clamping rod, an X-shaped connecting rod, a sliding rod, and a pressure plate. The clamping rod is slidably arranged inside the movable frame. The X-shaped connecting rod is arranged between the clamping rod and the movable frame. One of the two legs at one end of the X-shaped connecting rod is rotatably engaged with the movable frame, and the other leg at one end of the X-shaped connecting rod is slidably engaged with the movable frame. One of the two legs at the other end of the X-shaped connecting rod is rotatably engaged with the clamping rod, and the other leg at the other end of the X-shaped connecting rod is slidably engaged with the clamping rod. The movable frame has a sliding groove, and the sliding rod is slidably arranged inside the sliding groove. One end of the sliding rod is fixedly connected to the leg of the X-shaped connecting rod that is slidably engaged with the movable frame. The pressure plate is threaded onto the other end of the sliding rod, and the pressure plate is in contact with the side of the movable frame.

[0009] Preferably, a connecting rod is rotatably provided on the outside of the coating chamber, a connecting block is fixedly connected to the sealing door, a connecting port is provided on the connecting block, the connecting rod and the connecting port are detachably connected, a fastening plate is threaded to one end of the connecting rod, and the fastening plate and the side of the connecting block are in contact with each other.

[0010] Preferably, an annular guide ring is installed inside the coating chamber, and an annular guide groove is formed on the outer arc surface of the connecting ring, with the guide ring rotatably arranged inside the guide groove.

[0011] Preferably, a plurality of limiting rods are slidably arranged on the mounting frame, the limiting rods are fixedly connected to the movable frame, and springs are sleeved on the limiting rods to ensure the stability of the positions of the mounting frame and the movable frame.

[0012] Preferably, an air inlet pipe and an exhaust pipe are respectively installed on the side of the coating chamber, and valves are installed on both the air inlet pipe and the exhaust pipe.

[0013] Preferably, a controller is installed on the base, and the motor and the magnetic target are electrically connected to the controller.

[0014] Compared with existing technologies, the advantages of this utility model are:

[0015] I. This solution places the feed inlet on the side of the coating chamber, and the movable frame for mounting plastic parts directly corresponds to the feed inlet, making it convenient for users to install and load materials. The sliding fit between the movable frame and the mounting frame allows the movable frame to be closer to the feed inlet, further reducing the difficulty of loading materials. At the same time, the motor can drive the connecting ring to rotate, thereby driving the plastic parts to rotate, thus completing the coating of both sides of the plastic without the need for manual removal and flipping, making it simple to use.

[0016] 2. By moving one of the legs at one end of the X-shaped connecting rod, when the two legs at one end of the X-shaped connecting rod come closer to each other, the two ends of the X-shaped connecting rod will move away from each other, thereby driving the clamping rod away from the moving frame. That is, the plastic part can be clamped by the two clamping rods. The position of the X-shaped connecting rod is ensured by the friction between the pressure plate and the moving frame, thereby ensuring the clamping stability of the clamping rod.

[0017] Third, the position of the sealing door can be fixed by the connecting rod, connecting port and fastening plate, thus ensuring the sealing effect of the sealing door on the feed inlet.

[0018] IV. The design of the guide ring and guide groove is used to limit the rotation of the connecting ring, which can prevent the connecting ring from separating from the coating tank, and at the same time ensure the stable rotation of the connecting ring.

[0019] 5. The limit rod is used to stabilize the sliding frame.

[0020] 6. The exhaust pipe is used to evacuate the inside of the coating chamber, and the air inlet pipe is used to replenish the inside of the coating chamber with nitrogen. The opening and closing of the air inlet and exhaust pipes are controlled by valves.

[0021] VII. The controller plays a control role. Attached Figure Description

[0022] Figure 1 This is a front view schematic diagram of the present invention;

[0023] Figure 2 This is a cross-sectional view of the coating chamber of this utility model from top view.

[0024] Figure 3 This is a cross-sectional view of the coating chamber of this utility model from the front view.

[0025] Figure 4 This is an enlarged structural schematic diagram of A in this utility model;

[0026] Figure 5 This is an enlarged structural schematic diagram of B of this utility model;

[0027] Figure 6 This is an enlarged structural schematic diagram of C in this utility model.

[0028] Explanation of the labels in the diagram:

[0029] 1. Base; 2. Coating chamber; 3. Feed inlet; 4. Sealing door; 5. Connecting ring; 6. Mounting frame; 7. Moving frame; 8. Clamping component; 9. Magnetically controlled target; 10. Motor; 11. Clamping rod; 12. X-shaped connecting rod; 13. Slide rod; 14. Pressure plate; 15. Slide groove; 16. Connecting rod; 17. Connecting block; 18. Connecting port; 19. Fastening plate; 20. Guide ring; 21. Guide groove; 22. Limiting rod; 23. Spring; 24. Air inlet pipe; 25. Exhaust pipe; 26. Valve; 27. Controller. Detailed Implementation

[0030] Example 1:

[0031] Please see Figure 1-6 A magnetron sputtering coating apparatus for plastic parts includes a base 1, a controller 27 mounted on the base 1, and a coating chamber 2 mounted on the base 1, located to one side of the controller 27. The coating chamber 2 is a vertically arranged cylinder. An inlet pipe 24 and an exhaust pipe 25 are respectively installed on the side of the coating chamber 2. Valves 26 are installed on both the inlet pipe 24 and the exhaust pipe 25. The valves 26 are electrically controlled and electrically connected to the controller 27. The exhaust pipe 25 is used to evacuate the inside of the coating chamber 2, and the inlet pipe 24 is used to replenish the inside of the coating chamber 2 with nitrogen. The opening and closing of the inlet pipe 24 and the exhaust pipe 25 are controlled by the valves 26. A magnetron target 9 is provided on the side of the coating chamber 2 and is electrically connected to the controller 27. The arc of the coating chamber 2... A feed inlet 3 is provided on the surface, corresponding to the magnetic target 9. A sealing door 4 is hinged at the feed inlet 3. A connecting rod 16 is rotatably provided on the outside of the coating chamber 2. A connecting block 17 is fixedly connected to the sealing door 4. A connecting port 18 is provided on the connecting block 17. The connecting rod 16 and the connecting port 18 are detachably connected. A fastening plate 19 is threaded to one end of the connecting rod 16. The fastening plate 19 and the side of the connecting block 17 are in contact with each other. The connecting rod 16 can be easily rotated into the connecting port 18 through the connecting port 18. By rotating the fastening plate 19, the fastening plate 19 and the connecting block 17 can be made in contact, thereby limiting the position of the connecting block 17, that is, ensuring the sealing effect of the sealing door 4 on the feed inlet 3, and ensuring that there is no leakage when vacuuming or replenishing nitrogen.

[0032] The coating chamber 2 contains two vertically arranged connecting rings 5, which are rotatably arranged with the coating chamber 2. An annular guide ring 20 is installed inside the coating chamber 2. An annular guide groove 21 is formed on the outer arc surface of the connecting rings 5, and the guide ring 20 is rotatably arranged inside the guide groove 21. A motor 10 is installed at the top of the coating chamber 2 to drive the rotation of the connecting rings 5. The motor 10 is electrically connected to a controller 27. The motor 10 can drive the connecting rings 5 ​​to rotate, thereby driving the subsequent moving frame 7 to rotate. The angle of the plastic parts on the moving frame 7 can be adjusted, thus achieving coating on both sides of the plastic parts without manual flipping. A mounting frame 6 is fixedly connected between the two connecting rings 5. One side of the mounting frame 6 is equipped with... A movable frame 7 is provided, which slides with the mounting frame 6. Several limiting rods 22 are slidably arranged on the mounting frame 6. The limiting rods 22 are fixedly connected to the movable frame 7. A stop is provided at the other end of the limiting rod 22. A spring 23 is sleeved on the limiting rod 22 to ensure the stability of the position of the mounting frame 6 and the movable frame 7. The two ends of the spring 23 are in contact with the stop and the mounting frame 6 respectively. The movable frame 7 corresponds to the feed port 3, and the movable frame 7 can slide with the mounting frame 6, allowing the movable frame 7 to move out of the feed port 3 for easy feeding. The limiting rods 22 can ensure the stability of the movement of the movable frame 7. When the movable frame 7 is reset, the elastic force of the spring 23 can prevent the movable frame 7 from moving on its own.

[0033] A clamping component 8 is symmetrically mounted on the movable frame 7. The clamping component 8 includes a clamping rod 11, an X-shaped connecting rod 12, a sliding rod 13, and a pressure plate 14. The clamping rod 11 is slidably arranged inside the movable frame 7. The X-shaped connecting rod 12 is arranged between the clamping rod 11 and the movable frame 7. The X-shaped connecting rod 12 includes two rotating rods. The middle parts of the two rotating rods are rotatably engaged through a rotating shaft, so that the two rotating rods form an X shape and can rotate. One of the two support legs at one end of the X-shaped connecting rod 12 is rotatably engaged with the movable frame 7. One of the two legs of the X-shaped connecting rod 12 is slidably engaged with the movable frame 7. One of the two legs of the other end of the X-shaped connecting rod 12 is rotatably engaged with the clamping rod 11. The other of the two legs of the other end of the X-shaped connecting rod 12 is slidably engaged with the clamping rod 11. The movable frame 7 is provided with a sliding groove 15. The sliding rod 13 is slidably arranged inside the sliding groove 15. One end of the sliding rod 13 is fixedly connected to the leg of the X-shaped connecting rod 12 that is slidably engaged with the movable frame 7. The pressure plate 14 is threadedly arranged on the other end of the sliding rod 13. The pressure plate 14 and the side of the movable frame 7 are in contact with each other.

[0034] By moving one of the legs at one end of the X-shaped connecting rod 12, when the two legs at one end of the X-shaped connecting rod 12 come closer to each other, the two ends of the X-shaped connecting rod 12 will move away from each other, thereby driving the clamping rod 11 away from the moving frame 7. That is, the plastic part can be clamped by the two clamping rods 11. The position of the X-shaped connecting rod 12 is ensured by the friction between the pressure plate 14 and the moving frame 7, thereby ensuring the clamping stability of the clamping rod 11.

[0035] Working principle:

[0036] Before use, by rotating the fastening plate 19, the fastening plate 19 and the connecting rod 16 are threaded together. When the fastening plate 19 rotates, it can move relative to the threaded rod, that is, the fastening plate 19 moves away from the connecting plate. Rotating the connecting rod 16 causes the connecting rod 16 to move out of the connection port 18, removing the restriction on the connecting block 17. This makes it easy to rotate the sealing door 4, expose the feed port 3, and pull out the moving frame 7 so that the moving frame 7 is close to the feed port 3 for easy loading. The plastic part is placed between the clamping parts 8 on the two moving frames 7. Moving the slide bar 13 causes one of the legs of the X-shaped connecting rod 12 to move closer to the other leg, thus moving the two ends of the X-shaped connecting rod 12 away from each other. This pushes the clamping rod 11 to clamp the plastic part. Then, by rotating the pressure plate 14, the threaded engagement between the pressure plate 14 and the slide bar 13 causes the pressure plate 14 to move along the axis of the slide bar 13. The pressure plate 14 acts on the side of the moving frame 7, and the friction between the pressure plate 14 and the moving frame 7 fixes the position of the slide bar 13. To ensure the stability of the plastic part clamping, the X-shaped connecting rod 12 is fixed in shape. The moving frame 7 is reset, and the spring 23 ensures the stability of the moving frame 7 and the mounting frame 6. The sealing door 4 is closed, and the connecting rod 16 and the fastening plate 19 are reset to ensure the stability of the sealing door 4. The exhaust pipe 25 is connected to the vacuum generator, and the inlet pipe 24 is connected to the external nitrogen cylinder. The controller 27 controls the valve 26 of the exhaust pipe 25 to open and the valve 26 of the inlet pipe 24 to close. The vacuum generator draws a vacuum inside the coating chamber 2. After vacuuming is completed, the controller 27 controls the two valves 26 to switch states, and the nitrogen cylinder replenishes nitrogen into the coating chamber 2. After completion, the controller 27 controls both valves 26 to be closed. The controller 27 controls the magnetron sputtering target 9 to coat the plastic part. When one side of the plastic part is coated, the controller 27 controls the motor 10 to start. The motor 10 drives the connecting ring 5 to rotate 180 degrees, so that the magnetron sputtering target 9 can also coat the other side of the plastic part without manual adjustment, making it convenient to use.

Claims

1. A device for magnetron sputter coating of a surface of a plastic part, characterized in that: The device includes a base (1), on which a coating chamber (2) is mounted. The coating chamber (2) is a vertically arranged cylinder. A feed inlet (3) is provided on the arc surface of the coating chamber (2). A sealing door (4) is hinged to the feed inlet (3). A connecting ring (5) is arranged vertically inside the coating chamber (2). Two connecting rings (5) are rotatably arranged with the coating chamber (2). A mounting frame (6) is fixedly connected between the two connecting rings (5). A movable frame (7) is provided on one side of the mounting frame (6). The movable frame (7) and the mounting frame (6) are slidably engaged. Clamping parts (8) are symmetrically mounted on the movable frame (7). A magnetic target (9) is provided on the side of the coating chamber (2). A motor (10) for driving the connecting rings (5) to rotate is installed on the top of the coating chamber (2).

2. The device for magnetron sputtering coating on the surface of plastic parts according to claim 1, characterized in that: The clamping member (8) includes a clamping rod (11), an X-shaped connecting rod (12), a sliding rod (13), and a pressure plate (14). The clamping rod (11) is slidably arranged inside the movable frame (7). The X-shaped connecting rod (12) is arranged between the clamping rod (11) and the movable frame (7). One of the two legs at one end of the X-shaped connecting rod (12) is rotatably engaged with the movable frame (7), and the other of the two legs at one end of the X-shaped connecting rod (12) is slidably engaged with the movable frame (7). The two legs at the other end of the X-shaped connecting rod (12) are rotatably engaged with the movable frame (7). One of the feet rotates and engages with the clamping rod (11). The other of the two feet at the other end of the X-shaped connecting rod (12) slides and engages with the clamping rod (11). The movable frame (7) has a sliding groove (15). The sliding rod (13) is slidably arranged inside the sliding groove (15). One end of the sliding rod (13) is fixedly connected to the foot of the X-shaped connecting rod (12) that slides and engages with the movable frame (7). The pressure plate (14) is threaded onto the other end of the sliding rod (13). The pressure plate (14) and the side of the movable frame (7) are in contact with each other.

3. The device according to claim 1, wherein the device is characterized by: The coating chamber (2) is rotatably provided with a connecting rod (16), and a connecting block (17) is fixedly connected to the sealing door (4). The connecting block (17) has a connecting port (18). The connecting rod (16) and the connecting port (18) are detachably connected. One end of the connecting rod (16) is threaded with a fastening plate (19), and the fastening plate (19) and the side of the connecting block (17) are in contact with each other.

4. The device according to claim 1, wherein the device is characterized in that: The coating chamber (2) is equipped with an annular guide ring (20), and the outer arc surface of the connecting ring (5) is provided with an annular guide groove (21). The guide ring (20) is rotatably arranged inside the guide groove (21).

5. The device according to claim 1, wherein the device is characterized by: A plurality of limiting rods (22) are slidably arranged on the mounting frame (6). The limiting rods (22) are fixedly connected to the moving frame (7). A spring (23) is sleeved on the limiting rods (22) to ensure the stability of the positions of the mounting frame (6) and the moving frame (7).

6. The magnetron sputtering coating apparatus for plastic parts according to claim 1, characterized in that: The side of the coating chamber (2) is provided with an air inlet pipe (24) and an exhaust pipe (25), and valves (26) are installed on both the air inlet pipe (24) and the exhaust pipe (25).

7. The device according to claim 1, wherein the device is characterized by: The base (1) is provided with a controller (27), and the motor (10) and the magnetron target (9) are electrically connected with the controller (27).

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