Temperature control device for MPCVD equipment

Abstract

The utility model relates to a temperature control device for MPCVD equipment, which belongs to the technical field of temperature control of the MPCVD equipment and comprises a mounting box arranged outside an MPCVD equipment body, a controller fixedly mounted outside the mounting box and a substrate table fixedly mounted inside the MPCVD equipment body. The top of the mounting box is provided with an accurate ice material distribution mechanism which extends into the mounting box and is used for crushing ice blocks and controlling the ice discharge amount, and the mounting box is internally provided with an ice water dynamic thermal homogenization structure for uniformly stirring an ice water mixture. According to the temperature control device for the MPCVD equipment, a double-shaft motor is started to work through a controller, an output shaft at the left end of the double-shaft motor crushes ice blocks into ice residues through a synchronous wheel and a synchronous belt, a driven wheel and a rotating shaft are driven to rotate through a belt to drive a rotating roller and a material shifting plate to rotate in a discharging box, the material shifting plate evenly shifts the ice residues into a mounting box, it is ensured that the ice residues evenly enter a water tank, and the temperature control effect is good. The refrigeration efficiency is improved, and the advantage of high refrigeration efficiency is achieved.

Description

Technical Field

[0001] This utility model relates to the field of temperature control technology for MPCVD equipment, specifically a temperature control device for MPCVD equipment. Background Technology

[0002] MPCVD equipment is a common vapor deposition equipment, particularly suitable for diamond production. It deposits diamond onto the surface of a substrate on a substrate stage using plasma. To achieve mass production, substrates are placed in an array on the stage. To ensure uniform diamond deposition on each substrate surface, the surface temperature of each substrate must remain as consistent as possible throughout the growth process. However, during diamond film deposition in MPCVD equipment, under ideal conditions, the plasma morphology is axially symmetrical, with the plasma in the central region closer to the substrate. This results in the substrate temperature at the center of the stage being higher than that of the surrounding substrates. Therefore, the temperature of the substrate stage needs to be controlled during MPCVD equipment operation.

[0003] A temperature control device for MPCVD equipment is required during temperature control. A search revealed a patent document with publication number CN220265843U that discloses such a device. The device includes an MPCVD equipment body, with a support leg fixedly installed on the outer side wall of the bottom of the body. A temperature control assembly is located on one side of the equipment body, comprising a cooling water tank, an output pump, a housing, a cooling plate, heat dissipation fins, a guide tube, a support spring, a transmission plate, a fixed electrode, a moving electrode, and a warning light. One end of the guide tube passes through the MPCVD equipment body, and the housing is fixedly installed on the other end of the guide tube. One end of the support spring is fixedly installed on the inner side wall of the bottom of the housing, and one end of the cooling water tank is fixedly installed on one end of the support spring.

[0004] However, the crushing box of the temperature control device for the MPCVD equipment of this utility model relies on gravity-fed ice, which can easily lead to an imbalance in the ice-water ratio, local overcooling causing excessive temperature gradient of the substrate stage, and the ice-water mixing relies on natural diffusion, resulting in large temperature fluctuations of the coolant, which affects the growth quality of the epitaxial layer. Therefore, a temperature control device for MPCVD equipment is proposed to solve the problems mentioned above. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a temperature control device for MPCVD equipment, which has the advantages of high cooling efficiency and precise temperature control. It solves the problems of existing MPCVD equipment temperature control devices that rely on gravity-fed ice in the crushing box, which easily leads to an imbalance in the ice-water ratio, local overcooling causing excessive temperature gradient on the substrate stage, and ice-water mixing relying on natural diffusion, resulting in large temperature fluctuations in the coolant and affecting the growth quality of the epitaxial layer.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a temperature control device for MPCVD equipment, comprising an installation box disposed outside the MPCVD equipment body, a controller fixedly installed outside the installation box, and a substrate stage fixedly installed inside the MPCVD equipment body. The top of the installation box is provided with an ice material precise dispensing mechanism extending into it for crushing ice blocks and controlling the amount of ice. The interior of the installation box is provided with an ice-water dynamic thermal homogenization structure for uniformly stirring the ice-water mixture.

[0007] The precise ice dispensing mechanism includes a crushing box fixedly connected to the top of the installation box, a dual-shaft motor fixedly installed outside the crushing box, and a crushing roller rotatably connected inside the crushing box. A feeding box is fixedly connected to the top wall inside the installation box. A rotating shaft is rotatably connected inside the feeding box. A rotating roller is fixedly connected to the outside of the rotating shaft. A feeding plate is fixedly connected to the outside of the rotating roller. A drive structure is provided outside the rotating shaft.

[0008] The ice-water dynamic thermal homogenization structure includes a drive shaft disposed inside the installation box, a stirring rod fixedly connected to the outside of the drive shaft, a gear fixedly installed at the right end of the drive shaft, and a linkage structure disposed outside the gear.

[0009] Furthermore, the drive structure includes a driven wheel fixedly connected to the right end of the rotating shaft and a transmission wheel fixedly mounted on the right output shaft of the dual-axis motor. The transmission wheel and the driven wheel are externally connected by a belt.

[0010] Furthermore, there are four material feeding plates, which are arranged in a ring shape outside the rotating roller. The material feeding plates are rotatably connected to the inside of the feeding box, and the outer diameter of the material feeding plates is adapted to the inner diameter of the feeding box.

[0011] Furthermore, there are two crushing rollers, and a synchronous pulley is fixedly installed at one end of each of the two crushing rollers. A synchronous belt is connected between the two synchronous pulleys for transmission. The left output shaft of the dual-axis motor is fixedly connected to one end of one of the crushing rollers.

[0012] Furthermore, the installation box is equipped with a conveying mechanism that extends into the MPCVD equipment body. The conveying mechanism includes a water tank fixedly connected to the bottom wall of the installation box and a conveying pump fixedly installed outside the installation box. An extraction pipe is fixedly connected between the input end of the conveying pump and the water tank.

[0013] Furthermore, a delivery pipe is fixedly connected between the output end of the delivery pump and the substrate stage, and a water injection pipe extending into the water tank is fixedly connected to the front of the mounting box.

[0014] Furthermore, the linkage structure includes a pulley rotatably mounted outside the driven wheel, a slotted slide rod slidably connected to the outside of the pulley, a gear rod meshing with the gear fixedly connected to the bottom of the slotted slide rod, the gear rod being reciprocated and connected to the outside of the gear through the slotted slide rod, and a limiting seat adapted to the gear rod being fixedly mounted on the inner wall of the mounting box.

[0015] Furthermore, the drive shaft is rotatably connected to the inside of the water tank, and there are several stirring rods, which are distributed at equal intervals on the outside of the drive shaft.

[0016] Compared with the prior art, this utility model provides a temperature control device for MPCVD equipment, which has the following beneficial effects:

[0017] 1. This MPCVD equipment uses a temperature control device. The controller starts the dual-axis motor. The left output shaft drives the two crushing rollers to rotate synchronously through a synchronous pulley and synchronous belt, crushing the ice into ice shavings. The right output shaft of the dual-axis motor drives the transmission wheel to rotate, which in turn drives the driven wheel and rotating shaft to rotate, causing the rotating roller and the feeding plate to rotate in the feeding box. The feeding plate evenly feeds the ice shavings into the installation box, achieving precise control of the ice feeding amount and ensuring that the ice shavings enter the water tank evenly, thus improving the refrigeration efficiency and achieving the advantage of high refrigeration efficiency.

[0018] 2. The temperature control device of this MPCVD equipment uses a driven wheel to drive a pulley and a slotted slide bar to reciprocate when the driven wheel rotates. The rack meshes with the gear, causing the gear to rotate and drive the transmission shaft and stirring rod to rotate accordingly. This stirs the ice-water mixture in the water tank, avoids local overcooling, achieves uniformity and stability of the cooling medium temperature, improves temperature control accuracy, and avoids excessive fluctuations in the cooling medium temperature, thus achieving the advantage of precise temperature control. Attached Figure Description

[0019] Figure 1 This is a three-dimensional view of the structure of this utility model;

[0020] Figure 2 This is a three-dimensional cross-sectional view of the mounting box, substrate stage, ice material precision dispensing mechanism, and conveying mechanism of this utility model.

[0021] Figure 3 This is a three-dimensional structural view of the ice material precision dispensing mechanism and the ice-water dynamic thermal homogenization structure of this utility model.

[0022] Figure 4 This is a schematic diagram showing the structural connection of the precise ice feeding mechanism and the dynamic thermal homogenization structure of ice and water in this utility model.

[0023] In the diagram: 1. MPCVD equipment body; 2. Mounting box; 3. Controller; 4. Substrate stage; 5. Ice material precision feeding mechanism; 51. Crushing box; 52. Crushing roller; 53. Dual-axis motor; 54. Feed box; 55. Rotating shaft; 56. Rotating roller; 57. Feeding plate; 58. Driven wheel; 59. Transmission wheel; 510. Belt; 6. Conveying mechanism; 61. Water tank; 62. Conveying pump; 63. Conveying pipe; 64. Extraction pipe; 7. Ice-water dynamic thermal homogenization structure; 71. Transmission shaft; 72. Stirring rod; 73. Gear; 74. Tooth rack; 75. Pulley; 76. Grooved slide bar. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figures 1 to 4 A temperature control device for an MPCVD equipment in this embodiment includes an installation box 2 disposed outside the MPCVD equipment body 1, a controller 3 fixedly installed outside the installation box 2, and a substrate stage 4 fixedly installed inside the MPCVD equipment body 1. The top of the installation box 2 is provided with an ice material precise dispensing mechanism 5 extending into it for crushing ice blocks and controlling the amount of ice. The interior of the installation box 2 is provided with an ice-water dynamic thermal homogenization structure 7 for uniformly stirring the ice-water mixture.

[0026] The precise ice dispensing mechanism 5 includes a crushing box 51 fixedly connected to the top of the mounting box 2, a dual-shaft motor 53 fixedly installed outside the crushing box 51, and a crushing roller 52 rotatably connected inside the crushing box 51. A feeding box 54 is fixedly connected to the top wall of the mounting box 2. A rotating shaft 55 is rotatably connected inside the feeding box 54. A rotating roller 56 is fixedly connected to the outside of the rotating shaft 55. A feeding plate 57 is fixedly connected to the outside of the rotating roller 56. A drive structure is provided outside the rotating shaft 55. The dual-shaft motor 53 simultaneously drives the crushing roller 52 and the feeding plate 57, achieving centralized power distribution, reducing equipment space occupation, and lowering energy consumption and costs. The belt 510 transmits power through the internal transmission port of the mounting box 2, resulting in a compact layout and smooth transmission, reducing the risk of mechanical failure.

[0027] Specifically, the drive structure includes a driven wheel 58 fixedly connected to the right end of the rotating shaft 55 and a transmission wheel 59 fixedly mounted on the right output shaft of the dual-axis motor 53. A belt 510 is externally connected to the transmission wheel 59 and the driven wheel 58. There are four feeding plates 57, arranged in a ring around the outside of the rotating roller 56. The feeding plates 57 are rotatably connected to the inside of the feeding box 54, and their outer diameter matches the inner diameter of the feeding box 54. The mounting box 2 has a transmission port adapted to the belt 510. Through the matching design of the feeding plates 57 and the feeding box 54, combined with the stable drive of the dual-axis motor 53, the amount of ice fed can be precisely controlled, avoiding unstable cooling effects due to fluctuations in the amount of ice fed.

[0028] It should be noted that there are two crushing rollers 52, and a synchronous pulley is fixedly installed at one end of each roller. A synchronous belt connects the two pulleys. The left output shaft of the dual-shaft motor 53 is fixedly connected to one end of one of the crushing rollers 52. By setting up two crushing rollers 52 in combination with synchronous pulleys and a synchronous belt drive, ice blocks can be crushed quickly and efficiently, ensuring uniform ice particle size.

[0029] Please see Figures 1 to 3 In this embodiment, the mounting box 2 is equipped with a conveying mechanism 6 extending into the MPCVD equipment body 1. The conveying mechanism 6 includes a water tank 61 fixedly connected to the bottom wall of the mounting box 2 and a conveying pump 62 fixedly installed outside the mounting box 2. An extraction pipe 64 is fixedly connected between the input end of the conveying pump 62 and the water tank 61. The uniformly crushed ice slag is thoroughly mixed with the liquid in the mounting box 2, which can quickly form a stable ice-water mixture, improving the cooling efficiency of the substrate stage 4. Precise control of the amount of ice added can avoid sudden changes in the temperature of the cooling medium, ensure the uniformity of the temperature field inside the MPCVD equipment body 1, and improve process stability.

[0030] The delivery pump 62 has a delivery pipe 63 fixedly connected to the substrate stage 4 at its output end, and a water injection pipe extending into the water tank 61 is fixedly connected to the front of the mounting box 2.

[0031] Please see Figures 2 to 4 In this embodiment, the ice-water dynamic thermal homogenization structure 7 includes a drive shaft 71 disposed inside the mounting box 2, a stirring rod 72 fixedly connected to the outside of the drive shaft 71, a gear 73 fixedly installed at the right end of the drive shaft 71, and a linkage structure disposed outside the gear 73.

[0032] The linkage structure includes a pulley 75 rotatably mounted outside the driven wheel 58. A slotted slide rod 76 is slidably connected to the outside of the pulley 75. A rack 74 meshing with a gear 73 is fixedly connected to the bottom of the slotted slide rod 76. The rack 74 is reciprocated and connected to the outside of the gear 73 via the slotted slide rod 76. A limiting seat adapted to the rack 74 is fixedly installed on the inner wall of the mounting box 2. When the rotating shaft 55 rotates, it drives the pulley 75 to slide within the slotted slide rod 76, causing the slotted slide rod 76 and the rack 74 to reciprocate. The rack 74 meshes with the gear 73, driving the transmission shaft 71 to rotate alternately in both directions within the water tank 61. The transmission shaft 71 drives the stirring rod 72 to uniformly stir the ice-water mixture, ensuring uniform temperature of the cooling medium.

[0033] Specifically, the drive shaft 71 is rotatably connected to the inside of the water tank 61, and there are several stirring rods 72, which are distributed at equal intervals on the outside of the drive shaft 71.

[0034] The working principle of the above embodiments is as follows:

[0035] In use, ice is placed in the crushing chamber 51, and the dual-shaft motor 53 is started by the controller 3. The left output shaft of the motor drives one crushing roller 52 to rotate. Through the synchronous pulley and synchronous belt, the two crushing rollers 52 rotate synchronously, crushing the ice into ice shavings. The right output shaft of the dual-shaft motor 53 drives the transmission wheel 59 to rotate, which in turn drives the driven wheel 58 and the rotating shaft 55 to rotate through the belt 510. The rotating shaft 55 drives the rotating roller 56 and the feeding plate 57 to rotate in the feeding box 54. The feeding plate 57 evenly feeds the ice shavings into the installation box 2, realizing the control of the amount of ice fed. When the rotating shaft 55 rotates, it drives the pulley 75 to slide in the slotted slide bar 76, causing the slotted slide bar 76 and the rack 74 to swing back and forth. The rack 74 meshes with the gear 73, driving the transmission shaft 71 to rotate alternately in the water tank 61. The transmission shaft 71 drives the stirring rod 72 to evenly stir the ice-water mixture, ensuring that the temperature of the cooling medium is uniform. The controller 3 starts the delivery pump 62, which draws an ice-water mixture from the water tank 61 through the extraction pipe 64. The ice-water mixture is then transported to the substrate stage 4 through the delivery pipe 63 to cool the substrate stage 4. The cooled water returns to the water tank 61, forming a circulating cooling system.

[0036] The installation, connection, or setting methods disclosed in this embodiment are all common mechanical connection methods, and any method that achieves the desired beneficial effect can be implemented. Furthermore, all electrical components in this embodiment are electrically connected to the main controller and power supply. The main controller can be a conventional, known device such as a computer that performs control functions. Those skilled in the art can control the electrical components through simple programming, and the existing disclosed power connection technologies are common knowledge in the field. Therefore, this embodiment will not elaborate further on their specific structural composition and working principles.

[0037] It should be noted that the orientations or positional relationships indicated herein are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the purpose of facilitating the description of this application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0038] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A temperature control device for an MPCVD apparatus, characterized by: The device includes a mounting box (2) located outside the MPCVD equipment body (1), a controller (3) fixedly installed outside the mounting box (2), and a substrate stage (4) fixedly installed inside the MPCVD equipment body (1). The top of the mounting box (2) is provided with an ice material precise dispensing mechanism (5) extending into it for crushing ice blocks and controlling the amount of ice. The interior of the mounting box (2) is provided with an ice-water dynamic thermal homogenization structure (7) for uniformly stirring the ice-water mixture. The precise ice dispensing mechanism (5) includes a crushing box (51) fixedly connected to the top of the mounting box (2), a dual-shaft motor (53) fixedly installed outside the crushing box (51), and a crushing roller (52) rotatably connected inside the crushing box (51). A feeding box (54) is fixedly connected to the top wall inside the mounting box (2). A rotating shaft (55) is rotatably connected inside the feeding box (54). A rotating roller (56) is fixedly connected outside the rotating shaft (55). A feeding plate (57) is fixedly connected outside the rotating roller (56). A driving structure is provided outside the rotating shaft (55). The ice-water dynamic thermal homogenization structure (7) includes a drive shaft (71) disposed inside the mounting box (2), a stirring rod (72) is fixedly connected to the outside of the drive shaft (71), a gear (73) is fixedly installed on the right end of the drive shaft (71), and a linkage structure is provided on the outside of the gear (73).

2. The temperature control device for MPCVD equipment according to claim 1, characterized in that: The drive structure includes a driven wheel (58) fixedly connected to the right end of the rotating shaft (55) and a transmission wheel (59) fixedly installed on the right end output shaft of the dual-shaft motor (53). The transmission wheel (59) and the driven wheel (58) are externally connected by a belt (510).

3. The temperature control device for MPCVD equipment according to claim 1, characterized in that: There are four material feeding plates (57), which are arranged in a ring shape outside the rotating roller (56). The material feeding plates (57) are rotatably connected to the inside of the feeding box (54), and the outer diameter of the material feeding plates (57) is adapted to the inner diameter of the feeding box (54).

4. The temperature control device for MPCVD equipment according to claim 1, characterized in that: The number of the crushing rollers (52) is two, and a synchronous pulley is fixedly installed at one end of each of the two crushing rollers (52). A synchronous belt is connected between the two synchronous pulleys. The left output shaft of the dual-shaft motor (53) is fixedly connected to one end of one of the crushing rollers (52).

5. The temperature control device for MPCVD equipment according to claim 1, characterized in that: The installation box (2) is provided with a conveying mechanism (6) extending into the MPCVD equipment body (1). The conveying mechanism (6) includes a water tank (61) fixedly connected to the bottom wall of the installation box (2) and a conveying pump (62) fixedly installed outside the installation box (2). The input end of the conveying pump (62) is fixedly connected to the water tank (61) with an extraction pipe (64).

6. The temperature control device for MPCVD equipment according to claim 5, characterized in that: A delivery pipe (63) is fixedly connected between the output end of the delivery pump (62) and the substrate stage (4), and a water injection pipe extending into the water tank (61) is fixedly connected to the front of the mounting box (2).

7. The temperature control device for MPCVD equipment according to claim 1, characterized in that: The linkage structure includes a pulley (75) rotatably mounted on the outside of the driven wheel (58), a slotted slide rod (76) slidably connected to the outside of the pulley (75), a rack (74) meshing with the gear (73) fixedly connected to the bottom of the slotted slide rod (76), the rack (74) being reciprocated and connected to the outside of the gear (73) through the slotted slide rod (76), and a limiting seat adapted to the rack (74) fixedly mounted on the inner wall of the mounting box (2).

8. The temperature control device for MPCVD equipment according to claim 5, characterized in that: The drive shaft (71) is rotatably connected to the inside of the water tank (61), and there are several stirring rods (72), which are distributed at equal intervals on the outside of the drive shaft (71).

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